WO2018000850A1 - 微镜单元及制备方法、微镜阵列和光交叉连接模块 - Google Patents

微镜单元及制备方法、微镜阵列和光交叉连接模块 Download PDF

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Publication number
WO2018000850A1
WO2018000850A1 PCT/CN2017/075614 CN2017075614W WO2018000850A1 WO 2018000850 A1 WO2018000850 A1 WO 2018000850A1 CN 2017075614 W CN2017075614 W CN 2017075614W WO 2018000850 A1 WO2018000850 A1 WO 2018000850A1
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WIPO (PCT)
Prior art keywords
piezoelectric driving
rotating block
piezoelectric
lens
driving arm
Prior art date
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Ceased
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PCT/CN2017/075614
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English (en)
French (fr)
Inventor
姚丹阳
蒋臣迪
张鹏
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Huawei Technologies Co Ltd
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Huawei Technologies Co Ltd
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Filing date
Publication date
Application filed by Huawei Technologies Co Ltd filed Critical Huawei Technologies Co Ltd
Priority to JP2018566940A priority Critical patent/JP2019521381A/ja
Priority to EP17818849.6A priority patent/EP3461787A4/en
Publication of WO2018000850A1 publication Critical patent/WO2018000850A1/zh
Priority to US16/234,991 priority patent/US20190137756A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems ; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3578—Piezoelectric force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches

Definitions

  • the present application relates to the field of communications technologies, and in particular, to a micromirror unit and a method for fabricating the same, a micromirror array, and an optical cross-connect module.
  • the Optical Cross-Connect (OXC) module built by Micro-Electro-Mechanical System (MEMS) micro-mirror array can help the communication system realize the non-electrical conversion of optical transmission and optical switching, and the capacity of information transmission. And the rate can be guaranteed.
  • the optical cross-connect module based on micromirror array has the advantages of low loss, low crosstalk, low polarization sensitivity and high extinction ratio, so it is widely used in backbone networks or medium and large data centers to realize high-speed information under the all-optical network path. Transmission can provide strong support for the future massive information exchange business.
  • an electrostatically driven micromirror array micromirror unit 100 includes a lens 101, an electrostatic driving device 102 and an electrode portion 103; a lens 101 and The electrostatic driving device 102 is placed on different planes A, B.
  • the supporting column of the lens 101 is connected to the rotating block of the electrostatic driving device 102, and the electrostatic driving device 102 is hinged to the frame 104 so that the electrostatic driving device 102 is in the electrode portion.
  • the electrostatic attraction of 103 can be performed, and the electrode portion 103 is placed on the third plane C, and the holder 105 of the frame 104 is bonded to the electrode portion 103 provided with the electrode 1031. Therefore, the existing micromirror unit 100 is used.
  • the electrostatic driving device 102 has a three-layer structure, and two bonding connections are required in the manufacturing process, resulting in a complicated structure and manufacturing difficulty of the micromirror unit 100.
  • the embodiment of the present application provides a micromirror unit and a preparation method thereof, a micromirror array and an optical cross connection module, the micromirror array includes a plurality of micromirror units distributed in an array, and the optical cross connection module includes a micro mirror array, the micro mirror
  • the unit structure is simple, easy to manufacture, fast switching speed and high lens duty ratio.
  • an embodiment of the present application provides a micromirror unit including a lens and a driving device, wherein the lens is provided with a supporting column on a side of the driving device; the driving device includes a supporting frame and the supporting column a fixedly connected rotating block, a plurality of piezoelectric driving arms disposed at a periphery of the rotating block; one end of each of the piezoelectric driving arms is fixed to the support frame, and the other end passes through the elastic block The pieces are connected, and the piezoelectric driving arm includes an upper electrode, a lower electrode, and a piezoelectric material interposed between the upper electrode and the lower electrode.
  • the support frame is a support frame prepared from a silicon material
  • the support column is a support column prepared from a silicon material; and/or,
  • the elastic member is an elastic member made of a silicon material; and/or,
  • the rotating block is a rotating block made of a silicon material.
  • the support frame, the support column, the elastic member and the rotating block prepared from the silicon material are used to make the micromirror unit have a good heat dissipation effect. Long service life and good reliability.
  • the elastic member is at least one spring.
  • the plurality of piezoelectric driving arms in the driving device are evenly distributed around the circumferential direction of the rotating block.
  • the plurality of piezoelectric driving arms of the driving device are evenly distributed around the circumferential direction of the rotating block, and one end of the piezoelectric driving arm is connected to the rotating block through the elastic member, the plurality of piezoelectric driving arms of the driving device are formed by rotating blocks.
  • the radial radial shape of the center can improve the accuracy and stability of the driving device by uniformly distributing a plurality of piezoelectric driving arms.
  • the driving device includes a first piezoelectric driving arm extending in a direction passing through a center of the rotating block, and a second piezoelectric driving An arm, a third piezoelectric driving arm and a fourth piezoelectric driving arm, wherein a direction in which the first piezoelectric driving arm extends is parallel to an extending direction of the second piezoelectric driving arm, the third piezoelectric driving The extending direction of the arm is parallel to the extending direction of the fourth piezoelectric driving arm, and the extending direction of the third piezoelectric driving arm is perpendicular to the extending direction of the first piezoelectric driving arm.
  • the driving device includes a fifth piezoelectric driving arm extending in a direction passing through a center of the rotating block, and a sixth piezoelectric driving An arm and a seventh piezoelectric driving arm, wherein an angle between an extending direction of the fifth piezoelectric driving arm and an extending direction of the sixth piezoelectric driving arm is 120°, the fifth piezoelectric driving An angle between the extending direction of the arm and the extending direction of the seventh piezoelectric driving arm is 120°, between the extending direction of the sixth piezoelectric driving arm and the extending direction of the seventh piezoelectric driving arm The angle is 120°.
  • the lens is a circular lens, or the lens is a square lens.
  • an embodiment of the present application provides a micromirror array, which includes any one of the above seven possible implementations, and the plurality of micromirror units are arranged in an array.
  • an embodiment of the present application provides an optical cross-connect module, which includes the micro-mirror array in a possible implementation manner of the foregoing second aspect.
  • micromirror array is arrayed by the above micromirror unit, since the lens of the micromirror unit has a high duty ratio, more micromirror units can be integrated per unit area, thereby improving the integration degree of the micromirror array.
  • the volume occupied by the micromirror array can be reduced without changing the number of micromirror units.
  • the embodiment of the present application provides a method for preparing a micromirror unit according to any one of the seven possible implementation manners of the foregoing first aspect, including:
  • the lens structure comprises a lens and a support post on one side of the lens
  • the drive structure comprises a substrate and a plurality of piezoelectric drive arms formed on a side of the substrate facing the lens
  • the substrate includes a bottom plate, a first silicon dioxide layer, and a single crystal silicon layer, the single crystal silicon layer being used to form a rotating block and an elastic member
  • An electric driving arm is disposed at a periphery of the rotating block, and one end of each of the piezoelectric driving arms and the rotating block are connected by an elastic member, and the piezoelectric driving arm includes an upper electrode, a lower electrode, and a clip a piezoelectric material disposed between the upper electrode and the lower electrode;
  • the method comprises:
  • the method includes:
  • a portion of the first silicon dioxide layer opposite to the elastic member, the rotating block, and at least a portion of each of the piezoelectric driving arms is removed.
  • the step of forming the lens structure includes:
  • the single crystal silicon layer of the substrate is etched to form a support pillar.
  • the supporting column and the rotating block are fixed in the key, the key Combined low temperature bonding.
  • the bonding quality and the bonding strength between the support post and the rotating block can be improved.
  • the micromirror unit provided by the first aspect, the micromirror array provided by the second aspect, the optical cross-connect module provided by the third aspect, and the micromirror unit provided by the fourth aspect, the micromirror The unit comprises a lens and a driving device, and the driving device drives the lens to rotate through the piezoelectric driving arm, and the lens of the micro mirror unit is fixedly connected to the rotating block of the driving device through the supporting column, and the driving device does not need to separately set the electrodes on another plane, and at the same time, Since the support column of the lens and the rotating block of the driving device are in different planes, the lens and the driving device can be separated, and the two do not affect each other, thereby improving the lens duty ratio (the ratio of the lens area to the entire micromirror unit area), and the lens is occupied.
  • the driving device drives the lens to rotate through the piezoelectric driving arm
  • the lens of the micro mirror unit is fixedly connected to the rotating block of the driving device through the supporting column, and the driving device does not need
  • the ratio can reach 80% or more; compared with the electrostatic driving in the prior art, the driving force of the piezoelectric driving device is 2 to 3 orders of magnitude larger than that of the electrostatic driving, and therefore, the driving is driven by the piezoelectric driving arm.
  • the switching speed is fast when the lens is switched from one deflection angle to another; at the same time, only the lens and the driving device are required to rotatably support column and connected to fixed block, fixedly connected with a single, simple micromirror unit structure, easy to manufacture.
  • the micromirror unit has a simple structure, is easy to manufacture, has a fast switching speed, and has a high duty ratio of the lens. .
  • 1a-1b are schematic structural views of a micromirror unit in the prior art
  • FIG. 2 is a schematic structural diagram of a micromirror unit according to an embodiment of the present application.
  • FIG. 3 is a schematic structural view of a lens of the micromirror unit of FIG. 2;
  • Figure 4 is a partially enlarged schematic view showing the driving device of the micromirror unit of Figure 2;
  • FIG. 5 is a schematic structural diagram of another micromirror unit according to an embodiment of the present disclosure.
  • FIG. 6 is a schematic structural diagram of another micromirror unit according to an embodiment of the present disclosure.
  • FIGS. 7a-7e are schematic structural diagrams of a driving device according to an embodiment of the present application.
  • FIG. 8 is a schematic structural diagram of a micro mirror array according to an embodiment of the present application.
  • FIG. 8b is a schematic structural diagram of another micromirror array according to an embodiment of the present disclosure.
  • FIG. 9 is a process flow diagram of a method for preparing a micromirror unit according to an embodiment of the present application.
  • Figure 10 is a process flow diagram of forming a driving device in the manufacturing method of Figure 9;
  • Figure 11 is a process flow diagram of forming a lens structure in the preparation method of Figure 9;
  • FIG. 13a-13b are structural changes of the lens structure corresponding to the process flow diagram of Fig. 11;
  • Figure 14 is a structural change diagram corresponding to the second step of Figure 9;
  • the embodiment of the present application provides a micromirror unit and a preparation method thereof, a micromirror array and an optical cross connection module, the micromirror array includes a plurality of micromirror units distributed in an array, and the optical cross connection module includes a micro mirror array, the micro mirror
  • the unit structure is simple, easy to manufacture, fast switching speed and high lens duty ratio.
  • FIG. 4 is a partial enlarged view of the portion D of FIG. 2, and the micromirror unit 200 according to an embodiment of the present invention includes a lens 210 and a driving device 220, as shown in FIG.
  • the structure of the lens 210 is disposed on a side of the driving device 220.
  • the driving device 220 includes a supporting frame 221, a rotating block 222 fixedly connected to the supporting column 211, and a plurality of piezoelectric electrodes disposed at the periphery of the rotating block 222.
  • the driving arm 223, as shown in the structures of FIGS. 3 and 4, includes four piezoelectric driving arms, and the driving device 220 shown in FIGS.
  • each One end of the piezoelectric driving arm 223 is fixed to the support frame 221, and the other end is connected to the rotating block 222 via an elastic member 224, and the piezoelectric driving arm 223 includes an upper electrode, a lower electrode, and an upper electrode and a lower electrode.
  • the piezoelectric material as shown in the structure of FIG. 4, the piezoelectric driving arm 2231 includes an upper electrode 22311, a lower electrode 22312, and a piezoelectric material 22313 sandwiched between the upper electrode 22311 and the lower electrode 22312.
  • the piezoelectric driving arm 2233 An upper electrode 22331, a lower electrode 22332, and A piezoelectric material 22333 interposed between the upper electrode 22331 and the lower electrode 22332.
  • the micromirror unit 200 applies a voltage to the upper electrode and the lower electrode of the piezoelectric driving arm 223, and the piezoelectric material is driven by the voltages of the upper electrode and the lower electrode, and the piezoelectric driving arm 223 passes through the elastic member.
  • 224 drives the rotating block 222 to operate.
  • a forward voltage is applied to the upper electrode 22311 and the lower electrode 22312 of the piezoelectric driving arm 2231.
  • the piezoelectric driving arm 2231 passes through the elastic member under the driving of the piezoelectric material 22313.
  • the rotating block 224 drives the rotating block side to move upward while simultaneously applying a reverse voltage on the upper and lower electrodes of the piezoelectric driving arm 2232, and the piezoelectric driving arm 2232 drives the rotating block through the elastic member 224 under the driving of its own piezoelectric material. One side moves downward.
  • the rotating block 222 can be rotated along an axis perpendicular to the extending direction of the piezoelectric driving arm 2231.
  • the rotating block 222 can be rotated along an axis perpendicular to the extending direction of the piezoelectric driving arm 2233, and the rotation of the lens 210 can be realized by the fixed connection of the rotating block 222 and the supporting column 211. Adjusting the deflection angle of the lens 210; different voltages of the plurality of piezoelectric driving arms 223 can achieve different actions of the rotating block 222. Since the supporting column 211 of the lens 210 is fixedly connected to the rotating block 222, the rotating block 222 drives the lens 210 to operate. Completing the driving of the lens 210 by the piezoelectric driving arm 223 to adjust the lens The deflection angle of 210.
  • the driving device 220 of the micromirror unit 200 drives the lens 210 through the piezoelectric driving arm 223; the lens 210 of the micromirror unit 200 is fixedly connected to the rotating block 222 of the driving device 220 through the supporting column 211, and the driving device 220 does not need to be in another plane.
  • the electrodes are separately disposed. Therefore, the lens 210 and the driving device 220 need only be disposed on two planes.
  • the lens 210 and the driving device 220 can Separation, the two do not affect each other, can increase the lens duty ratio (the ratio of the area of the lens 210 to the area of the entire micromirror unit 200), the lens duty ratio can reach 80% or more; since the driving device 220 uses the piezoelectric driving arm 223 The lens 210 is driven.
  • the driving force of the piezoelectric mirror 200 by the piezoelectric driving is 2 to 3 orders of magnitude larger than that of the electrostatic driving. Therefore, the piezoelectric driving arm 223 is driven.
  • the micromirror unit 200 has a simple structure, is easy to manufacture, has a fast switching speed, and has a high lens duty ratio.
  • micromirror unit 200 In a specific implementation manner, in the micromirror unit 200,
  • the support frame 221 may be a support frame 221 made of silicon material; and/or,
  • the support post 211 may be a support post 211 made of silicon material; and/or,
  • the elastic member 224 may be an elastic member 224 made of a silicon material; and/or,
  • the rotating block 222 can be a rotating block 222 of silicon material.
  • the support frame 221, the support post 211, the elastic member 224, and the rotating block 222 prepared from the silicon material are used, and the micromirror unit 200 is used. It has the characteristics of good heat dissipation, long service life and good reliability.
  • the elastic member 224 may be at least one spring.
  • the elastic member 224 is made of a silicon material, the elastic member 224 is at least one silicon spring.
  • the elastic member 224 is two springs, each of which is pressed.
  • One end of the electric drive arm 223 is connected to the rotating block 222 by two springs 224.
  • the plurality of piezoelectric driving arms 223 included in the driving device 220 are evenly distributed around the circumferential direction of the rotating block 222.
  • the plurality of piezoelectric driving arms 223 of the driving device 220 are evenly distributed around the circumferential direction of the rotating block 222, and one end of the piezoelectric driving arm 223 is connected to the rotating block 222 through the elastic member 224, the plurality of piezoelectric electrodes of the driving device 220 are
  • the driving arm 223 is formed in a radial radial shape centered on the rotating block 222, and the operation accuracy and stability of the driving device 220 can be improved by the plurality of piezoelectric driving arms 223 uniformly distributed.
  • the driving device 220 includes a first piezoelectric driving arm 2231 extending through the center of the rotating block 222, a second piezoelectric driving arm 2232, a third piezoelectric driving arm 2233, and a The fourth piezoelectric driving arm 2234, wherein the extending direction of the first piezoelectric driving arm 2231 is parallel to the extending direction of the second piezoelectric driving arm 2232, the extending direction of the third piezoelectric driving arm 2233 and the fourth piezoelectric driving arm 2234 The extending directions are parallel, and the extending direction of the third piezoelectric driving arm 2233 is perpendicular to the extending direction of the first piezoelectric driving arm 2231.
  • the driving device 220 includes four piezoelectric driving arms 223 uniformly distributed around the circumferential direction of the rotating block 222.
  • One end of the four piezoelectric driving arms 223 is connected to the rotating block 222 through the elastic member 224, and is controlled to the first piezoelectric
  • the rotating block 222 can be controlled to be oriented toward the third piezoelectric driving arm 2233 or the fourth centering on the axis perpendicular to the extending direction of the third piezoelectric
  • the piezoelectric driving arm 2234 rotates while controlling the voltage applied to the upper electrode and the lower electrode of the four piezoelectric driving arms 223, the rotation of the rotating block 222 in other directions can also be controlled, thereby driving the lens 210 to rotate to adjust the lens 210. Deflection angle.
  • the shape of the piezoelectric driving arm 223 is not limited to the shape mentioned in the above-described driving device 220, and the piezoelectric driving arm 223 in FIG. 2 is rectangular, and in order to increase the natural frequency of the overall structure of the driving device 220, the above manner can be adopted.
  • the shape of a medium piezoelectric driving arm 223 is changed from a rectangular shape to a tapered shape.
  • the piezoelectric driving arm 223 in FIG. 7a can be regarded as a tapered piezoelectric driving arm having a taper angle of 0°, and the piezoelectric driving arm 220 in FIG. 7b.
  • the cone angle is 10°
  • the taper angle of the piezoelectric driving arm 220 in Fig. 7c is 20°
  • the taper angle of the piezoelectric driving arm 220 in Fig. 7d is 30°
  • the taper angle of the piezoelectric driving arm 220 in Fig. 7e is 40°. .
  • the driving device 220 includes a fifth piezoelectric driving arm 2235, a sixth piezoelectric driving arm 2236 and a seventh piezoelectric driving arm 2237 extending in the center of the rotating block 222, wherein
  • the angle between the extending direction of the fifth piezoelectric driving arm 2235 and the extending direction of the sixth piezoelectric driving arm 2236 is 120°, and the extending direction of the fifth piezoelectric driving arm 2235 and the seventh piezoelectric driving arm 2237
  • the angle between the extending directions is 120°
  • the angle between the extending direction of the sixth piezoelectric driving arm 2236 and the extending direction of the seventh piezoelectric driving arm 2237 is 120°.
  • the driving device 220 includes three piezoelectric driving arms 223 uniformly distributed around the circumferential direction of the rotating block 222, and the angle between the extending directions of each adjacent two piezoelectric driving arms 223 is 120°, three One end of the piezoelectric driving arm 223 is connected to the rotating block 222 through the elastic member 224.
  • the rotating block 222 can be controlled to be centered on three axes.
  • the wire is rotated, and the three axes are axes perpendicular to the extending directions of the three piezoelectric driving arms 223, respectively, thereby driving the lens 210 to rotate to adjust the deflection angle of the lens 210.
  • the lens 210 in the micromirror unit 200 may be a circular lens 210 or a square lens 210.
  • the shape of the lens 210 is not limited to a circle and a square, and may be according to actual needs. A lens 210 of another shape is selected.
  • the present application further provides a micromirror array 2, which includes a plurality of micromirror units 200 provided by the above embodiments, and a plurality of micromirror units. 200 is distributed in an array, as shown in FIG. 8a and FIG. 8b, respectively, having 25 micromirror units 200 arranged in an array, and the micromirror array 2 can also include any number of array-distributed micromirror units 200 according to actual use.
  • micromirror array 2 When the micromirror array 2 is arrayed by the micromirror unit 200, since the lens duty ratio of the micromirror unit 200 is high, more micromirror units 200 can be integrated per unit area, thereby improving the micromirror array 2 The degree of integration can reduce the volume occupied by the micromirror array 2 without changing the number of micromirror units 200.
  • the present application also provides an optical cross-connect module including the micromirror array 2 provided in the above embodiment.
  • the optical cross-connect module adopts the micromirror array 2 described above, in the case where the lens duty ratio of the micromirror unit 200 is high, not only more micromirror units 200 can be integrated per unit area, but also micromirrors are facilitated.
  • Array 2 assembles a multi-port optical cross-connect module.
  • the present application further provides a method for preparing a micromirror unit 200 according to any of the foregoing embodiments, which specifically includes:
  • Step S21 forming a lens structure and a driving structure, wherein the lens structure comprises a lens 210 and a support post 211 on a side of the lens 210; the driving structure comprises a substrate and a plurality of piezoelectric driving arms formed on a side of the substrate facing the lens 210
  • the substrate includes a bottom plate 301, a first silicon dioxide layer 302, and a single crystal silicon layer 303.
  • the single crystal silicon layer 303 is used to form the rotating block 222 and the elastic member 224.
  • the plurality of piezoelectric driving arms 223 are disposed on the rotating block 222.
  • each of the piezoelectric driving arms 223 is connected to the rotating block 222 via an elastic member 224, and the piezoelectric driving arm 223 includes an upper electrode, a lower electrode, and a pressure sandwiched between the upper electrode and the lower electrode.
  • the electrical material, the corresponding structural schematic diagram in the specific formation process can be referred to the structure shown in Figures 12a-12d, 13a and 13b;
  • Step S22 bonding the support column 211 and the rotating block 222 to each other;
  • Step S23 etching the bottom plate of the driving structure to form a support frame 221, and removing the first silicon dioxide layer 302 from the elastic member 224, the rotating block 222, and at least a portion of each of the piezoelectric driving arms 223 to form a portion.
  • the driving device 220 forms a support frame 221 by etching the bottom plate, and removes a portion of the bottom plate opposite to the elastic member 224, the rotating block 222, and each of the piezoelectric driving arms 223 to form a portion.
  • Drive device 220 forms a support frame 221 by etching the bottom plate, and removes a portion of the bottom plate opposite to the elastic member 224, the rotating block 222, and each of the piezoelectric driving arms 223 to form a portion.
  • step S21 of forming the driving device 220 in step S21 of forming the driving device 220:
  • the method includes:
  • a second silicon dioxide layer 304, a lower electrode 305, a piezoelectric material layer 306 and an upper electrode 307 are sequentially deposited on a side of the single crystal silicon layer 303 of the substrate facing away from the bottom plate 301, and sequentially formed as shown in the structure of FIG. 12a.
  • Step S212 etching the upper electrode 305, the piezoelectric material layer 306, the lower electrode 307 and the second silicon dioxide layer 304 to form a plurality of piezoelectric driving arms 223, as shown in the structure of FIG. 12b and FIG. 12c;
  • step S213 the single crystal silicon layer 303 is etched to form the elastic member 224 and the rotating block 222. As shown in the structure of FIG. 12d, one end of the piezoelectric driving arm 223 is connected through the elastic member 224 by etching the single crystal silicon layer 303. The block 222 is rotated.
  • the method includes:
  • Step S214 removing the first silicon dioxide layer 302 from the elastic member 224, the rotating block 222, and at least a portion of each of the piezoelectric driving arms 223 to form a driving device 220, as shown in the structure of FIG. 15a and FIG. 15b. .
  • the steps of forming a lens structure include:
  • step S22 the support post 211 is fixedly coupled to the rotating block 222, and is bonded to a low temperature bonding, such as the bonded fixed support post 211 and the rotating block 222 shown in the structure of FIG.
  • the bonding quality and the bonding strength between the support post 211 and the rotating block 222 can be improved.
  • Multiple means two or more.
  • embodiments of the present application can be provided as a method, system, or computer program product.
  • the present application can take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment in combination of software and hardware.
  • the application can employ a meter implemented on one or more computer usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) having computer usable program code embodied therein.
  • the form of the computer program product includes but not limited to disk storage, CD-ROM, optical storage, etc.
  • the computer program instructions can also be stored in a computer readable memory that can direct a computer or other programmable data processing device to operate in a particular manner, such that the instructions stored in the computer readable memory produce an article of manufacture comprising the instruction device.
  • the apparatus implements the functions specified in one or more blocks of a flow or a flow and/or block diagram of the flowchart.
  • These computer program instructions can also be loaded onto a computer or other programmable data processing device such that a series of operational steps are performed on a computer or other programmable device to produce computer-implemented processing for execution on a computer or other programmable device.
  • the instructions provide steps for implementing the functions specified in one or more of the flow or in a block or blocks of a flow diagram.

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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Abstract

一种微镜单元（200），包括镜片（210）和驱动装置（220），所述镜片（210）朝向所述驱动装置（220）的一侧设有支撑柱（211），所述驱动装置（220）包括支撑框（221）、与所述支撑柱（211）固定连接的转动块（222）、设置于所述转动块（222）的周边的多个压电驱动臂（223）；每一个所述压电驱动臂（223）的一端固定于所述支撑框（221），另一端与所述转动块（222）之间通过弹性件（224）连接，且所述压电驱动臂（223）包括上电极、下电极、以及夹设在所述上电极和下电极之间的压电材料。还公开了一种微镜阵列（2），其包括呈阵列分布的多个微镜单元（200）；一种光交叉连接模块，其包括微镜阵列（2）。

Description

微镜单元及制备方法、微镜阵列和光交叉连接模块
本申请要求在2016年06月28日提交中国专利局、申请号为201610495464.3、发明名称为“微镜单元及制备方法、微镜阵列和光交叉连接模块”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及涉及通信技术领域，特别涉及一种微镜单元及制备方法、微镜阵列和光交叉连接模块。
背景技术
现代通信技术，尤其是近几年发展起来的高速移动互联网、云计算和大数据技术，给人们在日常生活中随时随地接入互联网进行购物、观看高清视频和查询数据等需求提供了便利性和畅快感。这些新的互联网体验必然会带来海量通信数据处理需求，而现有的通信设备面对如此巨大的信息传输和交换业务时，阻塞和延时现象时有发生，无形中削弱了用户的体验感受。
利用微机电系统(Micro-Electro-Mechanical System，MEMS)微镜阵列搭建的光交叉连接(Optical Cross-Connect，OXC)模块可以帮助通信系统实现光传输和光交换的无电转换，使信息传输的容量和速率可以得到保障。而基于微镜阵列的光交叉连接模块具备低损耗、低串扰、低偏振敏感性和高消光比等优点，因此广泛应用于骨干网或中大型数据中心，从而实现全光网路径下的高速信息传输，能够对未来海量信息交换业务进行强有力的支撑。
现有技术中，如图1a以及图1b结构所示的一种静电驱动的微镜阵列的微镜单元100，该微镜单元100包括镜片101、静电驱动装置102和电极部分103；镜片101和静电驱动装置102分置于不同的平面A、B上，镜片101的支撑柱与静电驱动装置102的转动块键合连接，静电驱动装置102铰接于框架104，以使静电驱动装置102在电极部分103的静电吸引作用下能够进行动作，而电极部分103放置于第三个平面C上，框架104的支架105与设置有电极1031的电极部分103键合连接，因此，现有微镜单元100采用静电驱动装置102且具有三层结构，在制造过程中需要进行两次键合连接，导致微镜单元100结构复杂和制造困难。
发明内容
本申请实施例提供了一种微镜单元及制备方法、微镜阵列和光交叉连接模块，该微镜阵列包括呈阵列分布的多个微镜单元，光交叉连接模块包括微镜阵列，该微镜单元结构简单、便于制造、切换速度快且镜片占空比高。
第一方面，本申请实施例提供一种微镜单元，包括镜片和驱动装置，所述镜片朝向所述驱动装置的一侧设有支撑柱；所述驱动装置包括支撑框、与所述支撑柱固定连接的转动块、设置于所述转动块的周边的多个压电驱动臂；每一个所述压电驱动臂的一端固定于所述支撑框，另一端与所述转动块之间通过弹性件连接，且所述压电驱动臂包括上电极、下电极、以及夹设在所述上电极和下电极之间的压电材料。
结合上述第一方面，在第一种可能的实现方式中，所述支撑框为硅材料制备的支撑框；和/或，
所述支撑柱为硅材料制备的支撑柱；和/或，
所述弹性件为硅材料制备的弹性件；和/或，
所述转动块为硅材料制备的转动块。
由于硅材料具有化学性质稳定、热传导效果好、可靠性好以及使用寿命长的特点，因此，采用由硅材料制备的支撑框、支撑柱、弹性件以及转动块，使微镜单元具有散热效果好、使用寿命长和可靠性好的特点。
结合上述第一方面，在第二种可能的实现方式中，所述弹性件为至少一个弹簧。
结合上述第一方面，在第三种可能的实现方式中，所述驱动装置中具有的多个压电驱动臂绕所述转动块的周向均匀分布。
由于驱动装置的多个压电驱动臂绕转动块的周向均匀分布，且压电驱动臂的一端通过弹性件与转动块连接，因此，驱动装置的多个压电驱动臂形成以转动块为圆心的径向辐射状，通过均匀分布的多个压电驱动臂能够提高驱动装置的动作准确性及稳定性。
结合上述第一方面的第三种可能的实现方式，在第四种可能的实现方式中，所述驱动装置包括延伸方向经过所述转动块中心的第一压电驱动臂、第二压电驱动臂、第三压电驱动臂和第四压电驱动臂，其中，所述第一压电驱动臂的延伸方向与所述第二压电驱动臂的延伸方向平行，所述第三压电驱动臂的延伸方向与所述第四压电驱动臂的延伸方向平行，且所述第三压电驱动臂的延伸方向与所述第一压电驱动臂的延伸方向垂直。
结合上述第一方面的第三种可能的实现方式，在第五种可能的实现方式中，所述驱动装置包括延伸方向经过所述转动块中心的第五压电驱动臂、第六压电驱动臂和第七压电驱动臂，其中，所述第五压电驱动臂的延伸方向与所述第六压电驱动臂的延伸方向之间所呈角度为120°，所述第五压电驱动臂的延伸方向与所述第七压电驱动臂的延伸方向之间所呈角度为120°，所述第六压电驱动臂的延伸方向与所述第七压电驱动臂的延伸方向之间所呈角度为120°。
结合上述第一方面、第一种可能的实现方式、第二种可能的实现方式、第三种可能的实现方式、第四种可能的实现方式、第五种可能的实现方式，在第六种可能的实现方式中，所述镜片为圆形镜片，或者，所述镜片为方形镜片。
第二方面，本申请实施例提供一种微镜阵列，该微镜阵列包括多个上述七种可能的实现方式中的任意一种微镜单元，多个所述微镜单元呈阵列分布。
第三方面，本申请实施例提供一种光交叉连接模块，该光交叉连接模块包括上述第二方面的一种可能的实现方式中的微镜阵列。
微镜阵列采用上述微镜单元进行阵列分布时，由于上述微镜单元的镜片占空比高，因此，在单位面积上能够集成更多的微镜单元，进而提高微镜阵列的集成度，在微镜单元数量不变的情况下能够减小微镜阵列所占的体积。
第四方面，本申请实施例提供一种上述第一方面的七种可能的实现方式中的任意一种微镜单元的制备方法，包括：
形成镜片结构和驱动结构，其中，所述镜片结构包括镜片和位于所述镜片一侧的支撑柱；所述驱动结构包括衬底和形成于衬底朝向镜片一侧的多个压电驱动臂；所述衬底包括底板、第一二氧化硅层和单晶硅层，所述单晶硅层用于形成转动块和弹性件；多个所述压 电驱动臂设置于所述转动块的周边，每一个所述压电驱动臂的一端与所述转动块之间通过弹性件连接，且所述压电驱动臂包括上电极、下电极、以及夹设在所述上电极和下电极之间的压电材料；
将所述支撑柱与转动块键合固定；
对所述驱动结构的底板进行刻蚀形成支撑框，且将所述第一二氧化硅层与所述弹性件、转动块以及每一个所述压电驱动臂的至少一部分相对的部位去除以形成所述驱动装置。
结合上述第四方面，在第一种可能的实现方式中，形成所述驱动装置的步骤中：
在所述将所述支撑柱与转动块键合固定之前，包括：
在衬底的单晶硅层背离所述底板的一侧依次沉积第二二氧化硅层、下电极、压电材料层和上电极；
刻蚀上电极、压电材料层、下电极和第二二氧化硅层，以形成多个压电驱动臂；
刻蚀单晶硅层，以形成弹性件和转动块；
在所述将所述支撑柱与转动块键合固定之后，包括：
将所述第一二氧化硅层与所述弹性件、转动块以及每一个所述压电驱动臂的至少一部分相对的部位去除。
结合上述第四方面，在第二种可能的实现方式中，形成所述镜片结构的步骤，包括：
刻蚀衬底的单晶硅层，以形成支撑柱。
结合上述第四方面、第一种可能的实现方式、第二种可能的实现方式，在第三种可能的实现方式中，所述将所述支撑柱与转动块键合固定中，所述键合为低温键合。
由于支撑柱与转动块之间通过低温键合，因此，能够提高支撑柱与转动块之间的键合质量和键合强度。
本申请实施例中，根据第一方面提供的微镜单元、第二方面提供的微镜阵列、第三方面提供的光交叉连接模块以及第四方面提供的微镜单元的制备方法，该微镜单元包括镜片和驱动装置，驱动装置通过压电驱动臂驱动镜片转动，微镜单元的镜片通过支撑柱与驱动装置的转动块固定连接，驱动装置不需要在另外的平面上单独设置电极，同时，由于镜片的支撑柱与驱动装置的转动块处于不同平面，镜片与驱动装置能够分离、两者互不影响，能够提高镜片占空比(镜片面积占整个微镜单元面积的比例)，镜片占空比可达到80％以上；与现有技术中的静电驱动相比，该微镜单元采用压电驱动的驱动力比静电驱动的驱动力大2～3个数量级，因此，采用压电驱动臂驱动镜片从一个偏转角度切换到另一个偏转角度时切换速度快；同时，由于镜片与驱动装置之间仅需要将支撑柱与转动块固定连接即可，只需一次固定连接，微镜单元结构简单、便于制造。
因此，该微镜单元结构简单、便于制造、切换速度快且镜片占空比高。。
附图说明
图1a-1b为现有技术中一种微镜单元的结构示意图；
图2为本申请实施例提供的一种微镜单元的结构示意图；
图3为图2中微镜单元的镜片的结构示意图；
图4为图2中微镜单元的驱动装置的局部放大示意图；
图5为本申请实施例提供的另一种微镜单元的结构示意图；
图6为本申请实施例提供的另一种微镜单元的结构示意图；
图7a-7e为本申请实施例提供的一种的驱动装置的结构示意图；
图8a为本申请实施例提供的一种微镜阵列的结构示意图；
图8b为本申请实施例提供的另一种微镜阵列的结构示意图；
图9为本申请实施例提供的一种微镜单元的制备方法的工艺流程图；
图10为图9的制备方法中形成驱动装置的工艺流程图；
图11为图9的制备方法中形成镜片结构的工艺流程图；
图12a-12d为与图10中的工艺流程图对应的驱动结构的结构变化图；
图13a-13b为与图11中的工艺流程图对应的镜片结构的结构变化图；
图14为与图9中第二步骤对应的结构变化图；
图15a-15b为与图9中第三步骤对应的结构变化图。
具体实施方式
下面将结合附图对本申请实施例作进一步地详细描述。
本申请实施例提供了一种微镜单元及制备方法、微镜阵列和光交叉连接模块，该微镜阵列包括呈阵列分布的多个微镜单元，光交叉连接模块包括微镜阵列，该微镜单元结构简单、便于制造、切换速度快且镜片占空比高。
请参考图2、图3以及图4，其中，图4为图2中D部分的局部放大图，本申请一种实施例提供的微镜单元200，包括镜片210和驱动装置220，如图3结构所示，镜片210朝向驱动装置220的一侧设有支撑柱211；驱动装置220包括支撑框221、与支撑柱211固定连接的转动块222、设置于转动块222的周边的多个压电驱动臂223，如图3以及图4中结构所示的驱动装置220包括四个压电驱动臂，如图5以及图6中结构所示的驱动装置220包括三个压电驱动臂；每一个压电驱动臂223的一端固定于支撑框221，另一端与转动块222之间通过弹性件224连接，且压电驱动臂223包括上电极、下电极、以及夹设在上电极和下电极之间的压电材料，如图4结构所示，压电驱动臂2231包括上电极22311、下电极22312以及夹设在上电极22311和下电极22312之间的压电材料22313，压电驱动臂2233包括上电极22331、下电极22332、以及夹设在上电极22331和下电极22332之间的压电材料22333。
在具体工作过程中，上述微镜单元200向压电驱动臂223的上电极和下电极施加电压，压电材料在上电极和下电极的电压的驱动下动作，压电驱动臂223通过弹性件224带动转动块222动作，如图4结构所示，在压电驱动臂2231的上电极22311和下电极22312上施加正向电压，压电驱动臂2231在压电材料22313的带动下通过弹性件224驱动转动块一侧向上运动，而同时在压电驱动臂2232的上电极和下电极上施加反向电压，压电驱动臂2232在自身的压电材料的带动下通过弹性件224驱动转动块一侧向下运动，此时，通过在压电驱动臂2231和压电驱动臂2232上施加不同的电压，即可实现转动块222沿与压电驱动臂2231的延伸方向相交且垂直的轴线转动，同理，可实现转动块222沿与压电驱动臂2233的延伸方向相交且垂直的轴线转动，进而通过转动块222和支撑柱211的固定连接实现镜片210的转动，以调节镜片210的偏转角度；多个压电驱动臂223的不同电压能够实现转动块222的不同动作，由于镜片210的支撑柱211与转动块222固定连接，进而转动块222带动镜片210动作，从而完成压电驱动臂223对镜片210的驱动以调节镜片 210的偏转角度。
上述微镜单元200的驱动装置220通过压电驱动臂223驱动镜片210；微镜单元200的镜片210通过支撑柱211与驱动装置220的转动块222固定连接，驱动装置220不需要在另外的平面上单独设置电极，因此，镜片210和驱动装置220只需设置在两个平面上，同时，由于镜片210的支撑柱211与驱动装置220的转动块222处于不同平面，镜片210与驱动装置220能够分离、两者互不影响，能够提高镜片占空比(镜片210面积占整个微镜单元200面积的比例)，镜片占空比可达到80％以上；由于驱动装置220采用压电驱动臂223对镜片210进行驱动，与现有技术中的静电驱动相比，该微镜单元200采用压电驱动的驱动力比静电驱动的驱动力大2～3个数量级，因此，采用压电驱动臂223驱动镜片210从一个偏转角度切换到另一个偏转角度时切换速度快；同时，由于镜片210与驱动装置220之间仅需要将支撑柱211与转动块222固定连接即可，因此，只需一次固定连接，微镜单元结构简单、便于制造。
因此，该微镜单元200结构简单、便于制造、切换速度快且镜片占空比高。
一种具体的实施方式中，上述微镜单元200中，
支撑框221可以为硅材料制备的支撑框221；和/或，
支撑柱211可以为硅材料制备的支撑柱211；和/或，
弹性件224可以为硅材料制备的弹性件224；和/或，
转动块222可以为硅材料制备的转动块222。
由于硅材料具有化学性质稳定、热传导效果好、可靠性好以及使用寿命长的特点，因此，采用由硅材料制备的支撑框221、支撑柱211、弹性件224以及转动块222，微镜单元200具有散热效果好、使用寿命长和可靠性好的特点。
具体地，弹性件224可以为至少一个弹簧，当弹性件224由硅材料制成时，弹性件224为至少一个硅弹簧，如图4结构所示，弹性件224为两个弹簧，每一个压电驱动臂223的一端通过两个弹簧224连接转动块222。
更进一步地，如图2、图5以及图6结构所示，驱动装置220中具有的多个压电驱动臂223绕转动块222的周向均匀分布。
由于驱动装置220的多个压电驱动臂223绕转动块222的周向均匀分布，且压电驱动臂223的一端通过弹性件224与转动块222连接，因此，驱动装置220的多个压电驱动臂223形成以转动块222为圆心的径向辐射状，通过均匀分布的多个压电驱动臂223能够提高驱动装置220的动作准确性及稳定性。
在上述各种微镜单元200的基础上，根据驱动装置220的压电驱动臂223的数量可以具有以下两种实施方式：
方式一，如图2以及图4结构所示，驱动装置220包括延伸方向经过转动块222中心的第一压电驱动臂2231、第二压电驱动臂2232、第三压电驱动臂2233和第四压电驱动臂2234，其中，第一压电驱动臂2231的延伸方向与第二压电驱动臂2232的延伸方向平行，第三压电驱动臂2233的延伸方向与第四压电驱动臂2234的延伸方向平行，且第三压电驱动臂2233的延伸方向与第一压电驱动臂2231的延伸方向垂直。
上述驱动装置220包括绕转动块222的周向均匀分布的四个压电驱动臂223，四个压电驱动臂223的一端均通过弹性件224与转动块222连接，通过控制向第一压电驱动臂2231、第二压电驱动臂2232的上电极及下电极施加的电压时，能够控制转动块222以与 第一压电驱动臂2231的延伸方向垂直的轴线为中心线朝向第一压电驱动臂2231或第二压电驱动臂2232转动，同理，通过控制向第三压电驱动臂2233、第四压电驱动臂2234的上电极及下电极施加的电压时，能够控制转动块222以与第三压电驱动臂2233的延伸方向垂直的轴线为中心线朝向第三压电驱动臂2233或第四压电驱动臂2234转动，同时控制向四个压电驱动臂223的上电极和下电极施加的电压时，还能控制转动块222朝其它方向的转动，进而带动镜片210进行旋转以调节镜片210的偏转角度。
压电驱动臂223的形状也不局限于上述驱动装置220中提到的形状，如图2中的压电驱动臂223为矩形，而为了提高驱动装置220整体结构的固有频率，可将上述方式一中压电驱动臂223的形状从矩形变为锥形，图7a中的压电驱动臂223可看做锥角为0°的锥形压电驱动臂，图7b中压电驱动臂220的锥角为10°，图7c中压电驱动臂220的锥角为20°，图7d中压电驱动臂220的锥角为30°，图7e中压电驱动臂220的锥角为40°。
方式二，如图5以及图6结构所示，驱动装置220包括延伸方向经过转动块222中心的第五压电驱动臂2235、第六压电驱动臂2236和第七压电驱动臂2237，其中，第五压电驱动臂2235的延伸方向与第六压电驱动臂2236的延伸方向之间所呈角度为120°，第五压电驱动臂2235的延伸方向与第七压电驱动臂2237的延伸方向之间所呈角度为120°，第六压电驱动臂2236的延伸方向与第七压电驱动臂2237的延伸方向之间所呈角度为120°。
上述驱动装置220包括绕转动块222的周向均匀分布的三个压电驱动臂223，并且每相邻的两个压电驱动臂223的延伸方向之间所呈角度均为120°，三个压电驱动臂223的一端均通过弹性件224与转动块222连接，通过控制向三个压电驱动臂223的上电极及下电极施加的电压时，能够控制转动块222分别以三条轴线为中心线进行转动，三条轴线为分别垂直于三个压电驱动臂223的延伸方向的轴线，进而带动镜片210进行旋转以调节镜片210的偏转角度。
如图2、图5以及图6结构所示，上述微镜单元200中的镜片210可以为圆形镜片210或方形镜片210，镜片210的形状并不限于圆形和方形，还可以根据实际需要选择其它形状的镜片210。
同时，如图8a以及图8b结构所示，本申请还提供了一种微镜阵列2，该微镜阵列2包括多个上述实施例提供的任意一种微镜单元200，多个微镜单元200呈阵列分布，如图8a以及图8b中分别具有阵列分布的25个微镜单元200，微镜阵列2还可以根据实际使用情况包括任意数量的阵列分布的微镜单元200。
微镜阵列2采用上述微镜单元200进行阵列分布时，由于上述微镜单元200的镜片占空比高，因此，在单位面积上能够集成更多的微镜单元200，进而提高微镜阵列2的集成度，在微镜单元200数量不变的情况下能够减小微镜阵列2所占的体积。
本申请还提供了一种光交叉连接模块，该光交叉连接模块包括上述实施例提供的微镜阵列2。
当光交叉连接模块采用上述微镜阵列2时，在微镜单元200的镜片占空比高的情况下，不仅在单位面积上能够集成更多的微镜单元200，同时还有利于通过微镜阵列2组装多端口的光交叉连接模块。
另外，如图9所示，本申请还提供了一种上述实施例提供的任意一种微镜单元200的制备方法，具体包括：
步骤S21，形成镜片结构和驱动结构，其中，镜片结构包括镜片210和位于镜片210一侧的支撑柱211；驱动结构包括衬底和形成于衬底朝向镜片210一侧的多个压电驱动臂223；衬底包括底板301、第一二氧化硅层302和单晶硅层303，单晶硅层303用于形成转动块222和弹性件224；多个压电驱动臂223设置于转动块222的周边，每一个压电驱动臂223的一端与转动块222之间通过弹性件224连接，且压电驱动臂223包括上电极、下电极、以及夹设在上电极和下电极之间的压电材料，具体形成过程中所对应的结构示意图可参考图12a-12d、图13a以及图13b中结构所示；
步骤S22，将支撑柱211与转动块222键合固定；
步骤S23，对驱动结构的底板进行刻蚀形成支撑框221，且将第一二氧化硅层302与弹性件224、转动块222以及每一个压电驱动臂223的至少一部分相对的部位去除以形成驱动装置220，如图15a以及图15b结构所示，通过对底板进行刻蚀形成支撑框221，并将底板与弹性件224、转动块222以及每一个压电驱动臂223相对的部位去除以形成驱动装置220。
一种具体的实施方式中，如图10所示，形成驱动装置220的步骤S21中：
在将支撑柱211与转动块222键合固定之前，包括：
步骤S211，在衬底的单晶硅层303背离底板301的一侧依次沉积第二二氧化硅层304、下电极305、压电材料层306和上电极307，如图12a结构所示依次形成在单晶硅层303上的第二二氧化硅层304、下电极305、压电材料层306和上电极307；
步骤S212，刻蚀上电极305、压电材料层306、下电极307和第二二氧化硅层304，以形成多个压电驱动臂223，如图12b以及图12c结构所示；
步骤S213，刻蚀单晶硅层303，以形成弹性件224和转动块222，如图12d结构所示，通过刻蚀单晶硅层303，使压电驱动臂223的一端通过弹性件224连接转动块222。
在将支撑柱211与转动块222键合固定之后，包括：
步骤S214，将第一二氧化硅层302与弹性件224、转动块222以及每一个压电驱动臂223的至少一部分相对的部位去除，以形成驱动装置220，如图15a以及图15b结构所示。
具体地，如图11所示，形成镜片结构的步骤，包括：
步骤S218，刻蚀衬底的单晶硅层403，以形成支撑柱211，如图13b结构所示，衬底结构如图13a结构所示，衬底包括底板401、第一二氧化硅层402和单晶硅层403；
更进一步地，步骤S22，将支撑柱211与转动块222键合固定中，键合为低温键合，如图14结构所示的键合固定的支撑柱211与转动块222。
由于支撑柱211与转动块222之间通过低温键合，因此，能够提高支撑柱211与转动块222之间的键合质量和键合强度。
以下，对本申请中的部分用语进行解释说明，以便与本领域技术人员理解。
多个，是指两个或两个以上。
另外，需要理解的是，在本申请的描述中，“第一”、“第二”等词汇，仅用于区分描述的目的，而不能理解为指示或暗示相对重要性，也不能理解为指示或暗示顺序。
本领域内的技术人员应明白，本申请的实施例可提供为方法、系统、或计算机程序产品。因此，本申请可采用完全硬件实施例、完全软件实施例、或结合软件和硬件方面的实施例的形式。而且，本申请可采用在一个或多个其中包含有计算机可用程序代码的计算机可用存储介质(包括但不限于磁盘存储器、CD-ROM、光学存储器等)上实施的计 算机程序产品的形式。
本申请是参照根据本申请实施例的方法、设备(系统)、和计算机程序产品的流程图和/或方框图来描述的。应理解可由计算机程序指令实现流程图和/或方框图中的每一流程和/或方框、以及流程图和/或方框图中的流程和/或方框的结合。可提供这些计算机程序指令到通用计算机、专用计算机、嵌入式处理机或其他可编程数据处理设备的处理器以产生一个机器，使得通过计算机或其他可编程数据处理设备的处理器执行的指令产生用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的装置。
这些计算机程序指令也可存储在能引导计算机或其他可编程数据处理设备以特定方式工作的计算机可读存储器中，使得存储在该计算机可读存储器中的指令产生包括指令装置的制造品，该指令装置实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能。
这些计算机程序指令也可装载到计算机或其他可编程数据处理设备上，使得在计算机或其他可编程设备上执行一系列操作步骤以产生计算机实现的处理，从而在计算机或其他可编程设备上执行的指令提供用于实现在流程图一个流程或多个流程和/或方框图一个方框或多个方框中指定的功能的步骤。
显然，本领域的技术人员可以对本申请实施例进行各种改动和变型而不脱离本申请实施例的精神和范围。这样，倘若本申请实施例的这些修改和变型属于本申请权利要求及其等同技术的范围之内，则本申请也意图包含这些改动和变型在内。

Claims (13)

  1. 一种微镜单元，包括镜片和驱动装置，其特征在于，所述镜片朝向所述驱动装置的一侧设有支撑柱；所述驱动装置包括支撑框、与所述支撑柱固定连接的转动块、设置于所述转动块的周边的多个压电驱动臂；每一个所述压电驱动臂的一端固定于所述支撑框，另一端与所述转动块之间通过弹性件连接，且所述压电驱动臂包括上电极、下电极、以及夹设在所述上电极和下电极之间的压电材料。
  2. 根据权利要求1所述的微镜单元，其特征在于，所述支撑框为硅材料制备的支撑框；和/或，
    所述支撑柱为硅材料制备的支撑柱；和/或，
    所述弹性件为硅材料制备的弹性件；和/或，
    所述转动块为硅材料制备的转动块。
  3. 根据权利要求1所述的微镜单元，其特征在于，所述弹性件为至少一个弹簧。
  4. 根据权利要求1所述的微镜单元，其特征在于，所述驱动装置中具有的多个压电驱动臂绕所述转动块的周向均匀分布。
  5. 根据权利要求4所述的微镜单元，其特征在于，所述驱动装置包括延伸方向经过所述转动块中心的第一压电驱动臂、第二压电驱动臂、第三压电驱动臂和第四压电驱动臂，其中，所述第一压电驱动臂的延伸方向与所述第二压电驱动臂的延伸方向平行，所述第三压电驱动臂的延伸方向与所述第四压电驱动臂的延伸方向平行，且所述第三压电驱动臂的延伸方向与所述第一压电驱动臂的延伸方向垂直。
  6. 根据权利要求4所述的微镜单元，其特征在于，所述驱动装置包括延伸方向经过所述转动块中心的第五压电驱动臂、第六压电驱动臂和第七压电驱动臂，其中，所述第五压电驱动臂的延伸方向与所述第六压电驱动臂的延伸方向之间所呈角度为120°，所述第五压电驱动臂的延伸方向与所述第七压电驱动臂的延伸方向之间所呈角度为120°，所述第六压电驱动臂的延伸方向与所述第七压电驱动臂的延伸方向之间所呈角度为120°。
  7. 根据权利要求1-6任一项所述的微镜单元，其特征在于，所述镜片为圆形镜片，或者，所述镜片为方形镜片。
  8. 一种微镜阵列，其特征在于，包括多个如权利要求1-7任一项所述的微镜单元，多个所述微镜单元呈阵列分布。
  9. 一种光交叉连接模块，其特征在于，包括如权利要求8所述的微镜阵列。
  10. 一种如权利要求1-7任一项所述的微镜单元的制备方法，其特征在于，包括：
    形成镜片结构和驱动结构，其中，所述镜片结构包括镜片和位于所述镜片一侧的支撑柱；所述驱动结构包括衬底和形成于衬底朝向镜片一侧的多个压电驱动臂；所述衬底包括底板、第一二氧化硅层和单晶硅层，所述单晶硅层用于形成转动块和弹性件；多个所述压电驱动臂设置于所述转动块的周边，每一个所述压电驱动臂的一端与所述转动块之间通过弹性件连接，且所述压电驱动臂包括上电极、下电极、以及夹设在所述上电极和下电极之间的压电材料；
    将所述支撑柱与转动块键合固定；
    对所述驱动结构的底板进行刻蚀形成支撑框，且将所述第一二氧化硅层与所述弹性件、转动块以及每一个所述压电驱动臂的至少一部分相对的部位去除以形成所述驱动装 置。
  11. 根据权利要求10所述的制备方法，其特征在于，形成所述驱动装置的步骤中：
    在所述将所述支撑柱与转动块键合固定之前，包括：
    在衬底的单晶硅层背离所述底板的一侧依次沉积第二二氧化硅层、下电极、压电材料层和上电极；
    刻蚀上电极、压电材料层、下电极和第二二氧化硅层，以形成多个压电驱动臂；
    刻蚀单晶硅层，以形成弹性件和转动块；
    在所述将所述支撑柱与转动块键合固定之后，包括：
    将所述第一二氧化硅层与所述弹性件、转动块以及每一个所述压电驱动臂的至少一部分相对的部位去除。
  12. 根据权利要求10所述的制备方法，其特征在于，形成所述镜片结构的步骤，包括：
    刻蚀衬底的单晶硅层，以形成支撑柱。
  13. 根据权利要求10-12任一项所述的制备方法，其特征在于，所述将所述支撑柱与转动块键合固定中，所述键合为低温键合。
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