WO2018059377A1 - 一种工件台移入移出装置 - Google Patents

一种工件台移入移出装置 Download PDF

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Publication number
WO2018059377A1
WO2018059377A1 PCT/CN2017/103335 CN2017103335W WO2018059377A1 WO 2018059377 A1 WO2018059377 A1 WO 2018059377A1 CN 2017103335 W CN2017103335 W CN 2017103335W WO 2018059377 A1 WO2018059377 A1 WO 2018059377A1
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WO
WIPO (PCT)
Prior art keywords
workpiece table
leaf spring
moving
unit
bottom frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2017/103335
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English (en)
French (fr)
Inventor
丛国栋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to JP2019515898A priority Critical patent/JP6825089B2/ja
Priority to EP17854827.7A priority patent/EP3521928A4/en
Priority to KR1020197012496A priority patent/KR102291332B1/ko
Priority to US16/338,660 priority patent/US10754263B2/en
Publication of WO2018059377A1 publication Critical patent/WO2018059377A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70975—Assembly, maintenance, transport or storage of apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes

Definitions

  • the invention relates to the technical field of a lithography machine, and in particular to a workpiece table moving in and out device.
  • the workpiece table of various types of lithography machine runs for a period of time or encounters a fault
  • the workpiece table needs to be moved out of the lithography machine for maintenance and repair. After the repair is completed, the workpiece table needs to be moved in again, in order to save maintenance and repair time, and to ensure the movement in and out.
  • the work of moving in and out is automated.
  • crank slider mechanisms Some of the existing moving in and out mechanisms are usually crank slider mechanisms. Due to space constraints, the hinges of the crank slider mechanism are not coplanar, which causes the hinge to be easily jammed due to excessive torque and is now
  • the moving in and out mechanism is generally used in a single use, which tends to exert excessive pressure on the ground, causing the workpiece table to tip over, so that the moving in and out fails.
  • the present invention provides a workpiece table moving in and out device to solve the problems in the prior art.
  • a workpiece table moving in and out device comprising a bottom frame for supporting a workpiece table, an air spring disposed on a lower surface of the bottom frame, for moving on the workpiece table
  • An air bearing unit for supporting the air buoyancy of the workpiece table and a movement in and out unit provided on the bottom frame, the moving in and out unit comprising:
  • a roller unit for driving the workpiece table to move
  • a leaf spring having one end connected to the bottom frame and the other end connected to the roller unit;
  • a leaf spring deformation driving unit is coupled to the leaf spring for contacting the roller unit to the ground by driving the leaf spring to deform when the workpiece stage is moved.
  • the roller unit includes a connecting frame connected to one end of the leaf spring, and is disposed on the a drive roller on the connecting frame and a motor connected to the drive roller.
  • the workpiece stage moving in and out device further includes a connecting block fixed on the bottom frame, one end of the leaf spring is connected to the bottom frame through the connecting block; the leaf spring is connected to the bottom plate A hooking block is arranged between the blocks, the bottom of the hanging block is fixed on the leaf spring, and the top end is provided with a hook, and the hook is hung on the connecting block.
  • the connecting block is provided with a groove corresponding to the hook, and the hook is hung in the groove.
  • the leaf spring is a two-segment structure comprising two segments, and the two segments are connected by a flexible hinge.
  • the position of the leaf spring deformation driving unit corresponds to the position of the roller unit.
  • the leaf spring deformation driving unit includes a cylinder block fixed on the leaf spring, a retractable cylinder piston rod disposed in the cylinder cylinder, and a gas pipe communicating with the interior of the cylinder block .
  • a pressure regulator is disposed on the air pipe.
  • a top of the cylinder rod is connected with a force applying roller.
  • the leaf spring deformation driving unit further includes a bracket fixed to the bottom frame, and the bracket is used to support the force applying roller.
  • the moving in and out unit is provided with two groups, which are located on the same horizontal line, and are symmetrically distributed on the bottom of the bottom frame along the workpiece table moving in and out direction.
  • the moving in and out unit is disposed on a side of the bottom frame along the workpiece table in the moving in and out direction.
  • the moving in and out unit is provided with four groups, which are symmetrically distributed on the bottom corners of the bottom frame along the moving and moving direction of the workpiece table.
  • the workpiece table is moved into and out of the device, and comprises a bottom frame for supporting the workpiece table, An air spring disposed on a lower surface of the bottom frame, an air cushion unit for supporting an air float of the workpiece table when the workpiece table moves, and a moving in and out unit provided on the bottom frame, the shifting in and out unit comprising: a roller unit, For driving the workpiece table to move; a connecting block fixed on the bottom frame; a leaf spring, one end of which is connected to the connecting block, the other end is connected to the roller unit; the leaf spring deformation driving unit, and the board A spring connection that causes the roller unit to contact the ground by driving the leaf spring when moving the workpiece stage.
  • the leaf spring is deformed by providing a leaf spring deformation driving unit in the moving in and removing unit, and when the workpiece table is moved in and out, the roller unit is brought into contact with the ground to drive the workpiece table to move, and when the movement ends, the roller unit is separated from the ground. Avoid affecting the work of the workpiece table without the phenomenon of excessive torque and jam.
  • FIG. 1 is a schematic structural view of a workpiece table moving in and out device according to Embodiment 1 of the present invention
  • Figure 2 is a front elevational view showing the connection of the connecting block and the leaf spring in the first embodiment of the present invention
  • Figure 3 is a side view showing the connection of the connecting block and the leaf spring in the first embodiment of the present invention
  • FIG. 4 is a schematic view showing a specific structure of a flexible hinge in Embodiment 1 of the present invention.
  • Figure 5 is a schematic view showing the distribution of two groups of moving in and out units in Embodiment 1 of the present invention.
  • Figure 6 is a schematic view of the workpiece stage moving in and out of the apparatus in the first embodiment of the present invention when the air spring is contracted;
  • Figure 7 is a schematic view of the workpiece table moving in and out of the apparatus in the first embodiment of the present invention when the air cushion unit is floated;
  • Figure 8 is a schematic view showing the distribution of the moving in and out unit in the second embodiment of the present invention.
  • FIG. 9 is a schematic diagram showing the distribution of a moving in and out unit in Embodiment 3 of the present invention.
  • Fig. 10 is a view showing the structure of a workpiece stage moving in and out device in the fourth embodiment of the present invention.
  • the figure shows: 1, bottom frame; 200, moving in and out unit; 2, air spring; 3, air cushion unit; 4, roller unit; 41, connecting frame; 42, driving roller; 5, connecting block; ;61, Flexible hinge; 7, hook block; 71, hook; 8, leaf spring deformation drive unit; 81, cylinder block; 82, cylinder piston rod; 83, force roller; 84, shrink air pipe; 85, jack up the gas pipe; 86, pressure regulator; 87, intake pipe; 88, bracket; 9, ground.
  • the present invention provides a workpiece table moving in and out device, comprising a bottom frame 1 for supporting a workpiece table, an air spring 2 disposed on a lower surface of the bottom frame 1, and a support when the workpiece table moves.
  • the roller unit 4 is configured to drive the workpiece table to move.
  • the roller unit 4 is disposed under the bottom frame 1 to drive the workpiece table to be removed for maintenance, and when the workpiece table is repaired, the workpiece table is moved into the lithography machine. In the whole machine frame.
  • the connecting block 5 is fixed to the bottom frame 1 for mounting the leaf spring 6.
  • a leaf spring 6 is connected to the connecting block 5 at one end. As shown in FIG. 2-3, a hooking block 7 is disposed between the leaf spring 6 and the connecting block 5, and the bottom of the hanging block 7 is fixed. On the leaf spring 6, a top end is provided with a hook 71, and the hook 71 is hung on the connecting block 5.
  • the connecting block 5 is provided with a groove adapted to the hook 71, and the hook 71 is hung in the groove and fixed between the two. The other end of the leaf spring 6 is connected to the roller unit 4.
  • a leaf spring deformation driving unit 8 is connected to the leaf spring 6 and moves the workpiece table to deform the driving of the leaf spring 6 so that the roller unit 4 is in contact with the ground. Specifically, when the workpiece table is moved in and out, The roller unit 4 is in contact with the ground 9 to drive the workpiece table to move. When the movement is finished, the roller unit 4 is separated from the ground 9 to avoid affecting the work of the workpiece table, and the workpiece table is not moved during the movement. There is a phenomenon that the torque is too large and it is stuck. Referring to FIG.
  • the roller unit 4 includes a connecting frame 41 connected to one end of the leaf spring 6 , a driving roller 42 disposed on the connecting frame 41 , and a motor connected to the driving roller 42 (not shown)
  • the connecting frame 41 is disposed at an end of the leaf spring 6 away from the connecting block 5, and fixes the driving roller 42 on the leaf spring 6.
  • the motor is used to drive the driving roller 42 when it contacts the ground 9 and generates sufficient friction.
  • the roller 42 rotates to drive the workpiece table into and out.
  • the leaf spring 6 is a two-section structure, and the two sections of the leaf spring 6 are connected by a flexible hinge 61.
  • a specific structure of the flexible hinge 61 can be used in the leaf spring. 6 flexible rotation during the bending process, and provides resilience for the reset of the leaf spring 6, and also through the upper hook structure, to prevent the leaf spring 6 from bending too much, resulting in yield failure, of course, the flexible hinge 61 can also be supported by the bearing and the shaft Instead of the hinge form, as long as this function can be achieved.
  • the position of the leaf spring deformation driving unit 8 corresponds to the position of the roller unit 4.
  • the leaf spring deformation driving unit 8 includes a cylinder block 81 fixed to the leaf spring 6 , a retractable cylinder piston rod 82 disposed in the cylinder block 81 , and a cylinder piston rod 82 disposed on the cylinder rod 82 .
  • the top urging roller 83 and the air pipe communicating with the inside of the cylinder block 81 include a contracting air pipe 84 and a jacking air pipe 85.
  • the urging roller 83 is in contact with the bottom frame 1 for applying a force of the cylinder block 81 to the bottom frame 1 such that the reaction force of the leaf spring 6 applied to the leaf spring deformation driving unit 8 at the bottom frame 1
  • the lower deformation is bent, and the urging roller 83 can also reduce the frictional force when the cylinder piston rod 82 comes into contact with the bottom frame 1 and the vibration when the cylinder rod 82 is expanded and contracted by the rotation of the urging roller 83.
  • the intake air in the air pipe 85 is jacked up, the cylinder piston rod 82 is elongated upward, and the force applying roller 83 is lifted up, and the bottom frame 1 is biased to bend the leaf spring 6 downward under the reaction force to drive the roller 42 and the ground.
  • the air pipe is further provided with a pressure regulator 86.
  • the pressure regulator 86 is further connected with an air inlet pipe 87.
  • the actuator 86 adjusts the pressure generated by the drive roller 42 to the ground 9 such that the drive roller 42 generates sufficient pressure on the ground 9 to generate sufficient static friction to drive the workpiece table to move; and the pressure regulator 86 also prevents the drive roller 42 from being paired.
  • the leaf spring deformation driving unit 8 further includes a bracket 88 fixed to the bottom frame 1 for supporting the force applying roller 83.
  • the bracket is passed through the bracket. 88, the force applying roller 83 is lifted up, and the bottom frame 1 is biased to increase the working area of the force, and the stability is good.
  • the action point or the force center of the flexible hinge 61, the force applying roller 83 and the driving roller 42 are substantially on the same straight line, thereby ensuring the balance of force and further avoiding The phenomenon of death.
  • the moving in and out unit 200 is provided with two groups, which are located on the same horizontal line, and are symmetrically distributed on the bottom of the bottom frame 1 along the workpiece table moving in and out direction.
  • the two groups of moving in and out units 200 are symmetrically distributed along the X-axis direction, which can effectively distribute the pressure required to the ground, improve the support stability of the workpiece table and the stability when moving in and out of the X positive and negative directions.
  • the air spring 2, the air cushion unit 3, and the roller unit 4 are used to support the bottom frame 1 at different timings by using the workpiece table moving in and out device as described above to realize the movement of the workpiece table into and out of the workpiece table.
  • the method specifically includes the following steps:
  • the reaction force of the bottom frame 1 causes the leaf spring 6 to bend downward, so that the driving roller 42 in the roller unit 4 comes into contact with the ground 9 and generates static friction force (in the process, the air cushion unit 3 continues to support the bottom frame 1
  • the roller unit 42 also plays a part of the support for the bottom frame 1).
  • the pressure generated by the driving roller 42 against the ground 9 is adjusted by the pressure regulator 86, so that the driving roller 42 generates sufficient pressure on the ground 9, and then generates sufficient static friction to drive the workpiece table to move; At the same time, the pressure regulator 86 also prevents the pressure generated by the drive roller 42 from being applied to the floor 9 to cause the workpiece table to tip over.
  • the roller unit 4 drives the workpiece table to move in.
  • the pressure regulator 86 also adjusts the pressure generated by the driving roller 42 on the ground 9 to drive The roller 42 exerts sufficient pressure on the ground 9 to generate sufficient static friction to drive the workpiece table to move.
  • the pressure regulator 86 also prevents the pressure generated by the drive roller 42 from being applied to the ground 9 to cause the workpiece table to tip over.
  • the moving in and out unit 200 is disposed on the two side edges of the bottom frame 1 along the workpiece table in the moving in and out direction.
  • the force applying roller 83 is in contact with the entire frame of the lithography machine.
  • the moving in and out unit 200 is provided with two groups, and each of the moving in and out units 200 corresponds to one side of the bottom frame 1 along the X axis, so that the layout completely avoids the pressure exerted on the ground 9 by the driving roller 42.
  • the large workpiece table is overturned and the stability is improved.
  • the number of the shift-in/out units 200 is not limited to two groups as long as it corresponds to the two side edges of the bottom frame 1.
  • the moving in and out unit 200 is provided with four groups, which are symmetrically distributed on the bottom corners of the bottom frame 1 along the moving and moving direction of the workpiece table. In this way, the workpiece table is moved more smoothly and safely, and the pressure applied to the ground 9 by each of the driving rollers 42 is further reduced, thereby further avoiding the overturning of the workpiece table and ensuring the safety of moving the workpiece table into and out of the workpiece.
  • the bottom of the force applying roller 83 is not provided with a bracket 88, that is, the bracket 88 is removed, and the air tube 85 is continuously raised during the whole process.
  • the force applying roller 83 always applies pressure to the bottom frame 1, and the leaf spring 6 always has a downward bending tendency, so that the cylinder block 81 can be replaced with a single-acting cylinder, and the intake air passage is reduced to one way, simplifying The structure of the device.
  • the workpiece table moving in and out device comprises a bottom frame 1 for supporting the workpiece table, an air spring 2 disposed on the lower surface of the bottom frame 1, and a support workpiece table when the workpiece table moves.
  • the leaf spring 6 is deformed by providing the leaf spring deformation driving unit 8 in the moving in and out unit 200, and is working.
  • the roller unit 4 is brought into contact with the ground 9 to drive the workpiece table to move.
  • the roller unit is separated from the ground 9 to avoid affecting the work of the workpiece table, and the torque is too large to be stuck.
  • the phenomenon improves the stability of the workpiece table during moving in and out.

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  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract

一种工件台移入移出装置，包括用于支撑工件台的底部框架（1）、设于底部框架（1）的下表面的空气弹簧（2）、工件台移动时产生支撑工件台的气浮的气垫单元（3）以及设于底部框架（1）上的移入移出单元（200），移入移出单元（200）包括：滚轮单元（4），用于带动工件台移动；板簧（6），其一端连接连接块（5），另一端连接滚轮单元（4）；板簧变形驱动单元（8），与板簧（6）连接，用于在移动工件台时通过驱动板簧（6）变形使得滚轮单元（4）与地面接触。通过设置板簧变形驱动单元（8），使板簧（6）发生形变，在工件台移入移出时，使滚轮单元（4）与地面接触，带动工件台移动，且不会出现转矩过大而卡死的现象，提高了工件台移入移出过程中的稳定性。

Description

一种工件台移入移出装置 技术领域
本发明涉及光刻机技术领域，尤其涉及一种工件台移入移出装置。
背景技术
各类光刻机工件台在运行一段时间或遇故障时，需将工件台移出至光刻机外进行维护维修，维修完毕需再将工件台移入，为节省维护维修的时间，以及保证移入移出时设备的安全性，要求实现移入移出工作自动化进行。
现有的一些移入移出机构，通常为曲柄滑块机构，由于空间限制，曲柄滑块机构各铰链并不共面，这就造成了铰链处由于转矩过大，容易卡死的现象，而且现有移入移出机构一般为单个使用，易对地面施加过大压力，造成工件台倾覆，以致移入移出失败。
发明内容
本发明提供了一种工件台移入移出装置，以解决现有技术中存在的问题。
为了解决上述技术问题，本发明的技术方案是：一种工件台移入移出装置，包括用于支撑工件台的底部框架、设于所述底部框架的下表面的空气弹簧、用于在工件台移动时产生支撑工件台的气浮力的气垫单元以及设于所述底部框架上的移入移出单元，所述移入移出单元包括：
滚轮单元，用于带动所述工件台移动；
板簧，其一端连接所述底部框架，另一端连接所述滚轮单元；
板簧变形驱动单元，与所述板簧连接，用于在移动所述工件台时通过驱动所述板簧变形使得所述滚轮单元与地面接触。
进一步的，所述滚轮单元包括连接至所述板簧一端的连接架、设于所述 连接架上的驱动滚轮和与所述驱动滚轮连接的电机。
进一步的，所述工件台移入移出装置还包括固设于所述底部框架上的连接块，所述板簧的一端通过所述连接块连接至所述底部框架；所述板簧与所述连接块之间设有挂接块，所述挂接块的底部固定在所述板簧上，顶端设有挂钩，所述挂钩挂设于所述连接块上。
进一步的，所述连接块上设有与所述挂钩相适配的凹槽，所述挂钩挂设于所述凹槽中。
进一步的，所述板簧为二分段式结构，包括两段，所述两段之间通过柔性铰链连接。
进一步的，所述板簧变形驱动单元的位置与所述滚轮单元的位置对应。
进一步的，所述板簧变形驱动单元包括固设于所述板簧上的气缸缸体、设于所述气缸缸体内且可伸缩的气缸活塞杆以及与所述气缸缸体内部连通的气管。
进一步的，所述气管上设有压力调节器。
进一步的，所述气缸活塞杆顶端连接有一施力滚轮。
进一步的，所述板簧变形驱动单元还包括固定于所述底部框架上的托架，所述托架用于支撑所述施力滚轮。
进一步的，所述移入移出单元设有两组，位于同一水平线上，且沿所述工件台移入移出方向对称分布于所述底部框架底部。
进一步的，所述移入移出单元沿所述工件台移入移出方向设于所述底部框架的侧边上。
进一步的，所述移入移出单元设有四组，分别沿所述工件台移入移出方向对称分布在所述底部框架的底面四角上。
本发明提供的工件台移入移出装置，包括用于支撑工件台的底部框架、 设于所述底部框架的下表面的空气弹簧、工件台移动时产生支撑工件台的气浮的气垫单元以及设于所述底部框架上的移入移出单元，所述移入移出单元包括：滚轮单元，用于带动所述工件台移动；连接块，固设于所述底部框架上；板簧，其中一端连接所述连接块，另一端连接所述滚轮单元；板簧变形驱动单元，与所述板簧连接，移动所述工件台时通过驱动所述板簧变形使得所述滚轮单元与地面接触。通过在移入移出单元中设置板簧变形驱动单元，使板簧发生形变，在工件台移入移出时，使滚轮单元与地面接触，带动工件台移动，当移动结束后，使滚轮单元与地面分离，避免影响工件台工作且不会出现转矩过大而卡死的现象。
附图说明
图1是本发明实施例1中工件台移入移出装置的结构示意图；
图2是本发明实施例1中连接块与板簧的连接主视图；
图3是本发明实施例1中连接块与板簧的连接侧视图；
图4是本发明实施例1中柔性铰链一具体结构示意图；
图5是本发明实施例1中两组移入移出单元的分布示意图；
图6是本发明实施例1中工件台移入移出装置的在空气弹簧收缩时的示意图；
图7是本发明实施例1中工件台移入移出装置的在气垫单元浮起时的示意图；
图8是本发明实施例2中移入移出单元的分布示意图；
图9是本发明实施例3中移入移出单元的分布示意图；
图10是本发明实施例4中工件台移入移出装置的结构示意图。
图中所示：1、底部框架；200、移入移出单元；2、空气弹簧；3、气垫单元；4、滚轮单元；41、连接架；42、驱动滚轮；5、连接块；6、板簧；61、 柔性铰链；7、挂接块；71、挂钩；8、板簧变形驱动单元；81、气缸缸体；82、气缸活塞杆；83、施力滚轮；84、收缩气管；85、顶起气管；86、压力调节器；87、进气管；88、托架；9、地面。
具体实施方式
下面结合附图对本发明作详细描述。
实施例1
如图1所示，本发明提供了一种工件台移入移出装置，包括用于支撑工件台的底部框架1、设于所述底部框架1的下表面的空气弹簧2、工件台移动时产生支撑工件台的气浮的气垫单元3以及设于所述底部框架1上的移入移出单元200，所述移入移出单元200包括：
滚轮单元4，用于带动所述工件台移动，本实施例中滚轮单元4设于所述底部框架1下方，带动工件台移出进行维修，以及当工件台维修结束后带动工件台移入光刻机整机框架中。
连接块5，固设于所述底部框架1上，用于安装板簧6。
板簧6，其中一端连接所述连接块5，如图2-3所示，所述板簧6与所述连接块5之间设有挂接块7，所述挂接块7的底部固定在所述板簧6上，顶端设有挂钩71，所述挂钩71挂设于所述连接块5上。所述连接块5上设有与所述挂钩71相适配的凹槽，所述挂钩71挂设于所述凹槽中，并对两者之间进行固定。板簧6的另一端连接所述滚轮单元4。
板簧变形驱动单元8，与所述板簧6连接且移动所述工件台时通过驱动所述板簧6变形使得所述滚轮单元4与地面接触，具体的，在工件台移入移出时，使滚轮单元4与地面9接触，带动工件台移动，当移动结束后，使滚轮单元4与地面9分离，避免影响工件台工作，在工件台移入移出过程中不会 出现转矩过大而卡死的现象。请继续参照图1，所述滚轮单元4包括连接至所述板簧6一端的连接架41、设于所连接架41上的驱动滚轮42和与所述驱动滚轮42连接的电机(图中未示出)，连接架41设于板簧6远离连接块5的一端，将驱动滚轮42固定在板簧6上，电机用于在驱动滚轮42与地面9接触并产生足够的摩擦力时带动驱动滚轮42旋转从而带动工件台移入移出。
优选的，所述板簧6为二分段式结构，板簧6的两段之间通过柔性铰链61连接，如图4所示为柔性铰链61的一种具体结构，此结构可在板簧6下弯过程中实现柔性转动，并为板簧6的复位提供回弹力，还可通过上部的钩状结构，防止板簧6弯曲过大，造成屈服破坏，当然柔性铰链61还可由轴承、转轴等铰链形式代替，只要能实现该功能即可。
请继续参照图1，所述板簧变形驱动单元8的位置与所述滚轮单元4的位置对应。所述板簧变形驱动单元8包括固设于所述板簧6上的气缸缸体81、设于所述气缸缸体81内且可伸缩的气缸活塞杆82、设于所述气缸活塞杆82顶端的施力滚轮83、与所述气缸缸体81内部连通的气管，包括收缩气管84和顶起气管85。所述施力滚轮83与所述底部框架1接触，用于将气缸缸体81的作用力施加在底部框架1上，使得板簧6在底部框架1向板簧变形驱动单元8施加的反作用力下变形弯曲，同时该施力滚轮83还能降低气缸活塞杆82与底部框架1接触时的摩擦力以及通过施力滚轮83转动释放气缸活塞杆82伸缩时的振动。顶起气管85中进气时，气缸活塞杆82向上伸长，将施力滚轮83向上顶起，对底部框架1施力，使板簧6在反作用力下向下弯曲，驱动滚轮42与地面9接触对地面9产生压力，进而产生静摩擦力，当收缩气管84中进气时，气缸活塞杆82收缩，施力滚轮83不对底部框架1施力，板簧6复位，驱动滚轮42离开地面9。所述气管上还设有压力调节器86，所述压力调节器86上还连有进气管87，在驱动滚轮42与地面9接触时，压力调节 器86针对驱动滚轮42对地面9产生的压力进行调节，使得驱动滚轮42对地面9产生足够压力，继而产生足够的静摩擦力以带动工件台移动；同时压力调节器86也可防止驱动滚轮42对地面9产生的压力过大而造成工件台倾覆。所述板簧变形驱动单元8还包括固定于所述底部框架1上的托架88，所述托架88用于支撑所述施力滚轮83，当气缸活塞杆82顶起时，通过托架88将施力滚轮83托起，对底部框架1施力，增大了力的作用面积，稳定性好。本实施例中，沿重力方向向下看，柔性铰链61、施力滚轮83和驱动滚轮42的作用点或者说受力中心，基本处于同一条直线上，由此可以保证受力均衡，进一步避免卡死的现象。
如图5所示，所述移入移出单元200设有两组，位于同一水平线上，且沿所述工件台移入移出方向对称分布于所述底部框架1底部。图中两组移入移出单元200沿X轴方向对称分布，可有效分摊所需对地面施加的压力，提高工件台的支撑稳定性和沿X正负方向移入移出时的平稳性。
采用本实施例提供的如上所述的工件台移入移出装置实现工件台移入移出的过程中，所述空气弹簧2、气垫单元3以及滚轮单元4用于在不同的时刻支撑底部框架1。所述方法具体包括以下步骤：
S1：空气弹簧2收缩，气垫单元3开启气浮(此时由气垫单元3支撑底部框架1)，板簧变形驱动单元8对底部框架1施力，使板簧6向下弯曲，滚轮单元4与地面9接触；具体的，如图6所示，所述板簧变形驱动单元8中的顶起气管85进气，气缸活塞杆82向上顶起，使施力滚轮83对底部框架1施力，同时底部框架1的反作用力使板簧6向下弯曲，使滚轮单元4中的驱动滚轮42与地面9接触，并产生静摩擦力(在此过程中气垫单元3持续对底部框架1进行支撑，当滚轮单元42与地面接触后，滚轮单元42也对底部框架1起到一部分的支撑作用)。
S2：随着板簧6进一步向下弯曲，气垫单元3浮起(此时继续由气垫单元3作为主支撑元件、滚轮单元4作为辅支撑元件，共同支撑底部框架1)，滚轮单元4带动所述工件台移出，即电机带动驱动滚轮42滚动，从而带动工件台移出，如图7所示。在工件台移出过程中还包括，通过压力调节器86针对驱动滚轮42对地面9产生的压力进行调节，使得驱动滚轮42对地面9产生足够压力，继而产生足够的静摩擦力以带动工件台移动；同时压力调节器86也可防止驱动滚轮42对地面9产生的压力过大而造成工件台倾覆。
S3：当工件台维修完毕后，滚轮单元4带动所述工件台移入；同样的，在工件台移入过程中，压力调节器86也要针对驱动滚轮42对地面9产生的压力进行调节，使得驱动滚轮42对地面9产生足够压力，继而产生足够的静摩擦力以带动工件台移动；同时压力调节器86也可防止驱动滚轮42对地面9产生的压力过大而造成工件台倾覆。
S4：工件台移动结束后，空气弹簧2膨胀，板簧变形驱动单元8不对底部框架1施力，板簧6复位(此时由空气弹簧2支撑底部框架1)，底部框架1上的工件台正常工作。具体的，所述板簧变形驱动单元8中的收缩气管84进气，气缸活塞杆82收缩，不对底部框架1施力，即工件台正常工作时，移入移出单元200收起，处于不工作状态。
实施例2
如图8所示，与实施例1不同的是，本实施例中，所述移入移出单元200沿所述工件台移入移出方向设于所述底部框架1的两条侧边上。所述施力滚轮83与光刻机整机框架接触。本实施例中，移入移出单元200设有两组，每组移入移出单元200与底部框架1沿X轴的一条侧边对应，这样布局完全避免了因驱动滚轮42施加在地面9上的压力过大造成的工件台倾覆，提高了稳 定性。移入移出单元200的数量不限于2组，只要与底部框架1的两条侧边对应即可。
实施例3
如图9所示，与实施例1不同的是，本实施例中，所述移入移出单元200设有四组，分别沿工件台移入移出方向对称分布在所述底部框架1的底面四角上，这样工件台移入移出时更加平稳安全，且进一步减小了每个驱动滚轮42施加在地面9上的压力，进一步避免了工件台的倾覆，保证了工件台移入移出过中的安全性。
实施例4
如图10所示，与实施例1不同的是，本实施例中，所述施力滚轮83的底部不设有托架88，即将托架88去除，在整个过程中，顶起气管85持续保持进气，使施力滚轮83始终对底部框架1施加压力，板簧6始终有向下弯曲的趋势，这样气缸缸体81可以换为单作用气缸，进气气路减少为1路，简化了装置的结构。
综上所述，本发明提供的工件台移入移出装置，包括用于支撑工件台的底部框架1、设于所述底部框架1的下表面的空气弹簧2、工件台移动时产生支撑工件台的气浮的气垫单元3以及设于所述底部框架1上的移入移出单元200，所述移入移出单元200包括：滚轮单元4，用于带动所述工件台移动；连接块5，固设于所述底部框架1上；板簧6，其中一端连接所述连接块5，另一端连接所述滚轮单元4；板簧变形驱动单元8，与所述板簧6连接，移动所述工件台时通过驱动所述板簧6变形使得所述滚轮单元4与地面接触。通过在移入移出单元200中设置板簧变形驱动单元8，使板簧6发生形变，在工 件台移入移出时，使滚轮单元4与地面9接触，带动工件台移动，当移动结束后，使滚轮单元与地面9分离，避免影响工件台工作，且不会出现转矩过大而卡死的现象，提高了工件台移入移出过程中的稳定性。
虽然说明书中对本发明的实施方式进行了说明，但这些实施方式只是作为提示，不应限定本发明的保护范围。在不脱离本发明宗旨的范围内进行各种省略、置换和变更均应包含在本发明的保护范围内。

Claims (13)

  1. 一种工件台移入移出装置，其特征在于，包括用于支撑工件台的底部框架、设于所述底部框架的下表面的空气弹簧、用于在工件台移动时产生支撑工件台的气浮力的气垫单元以及设于所述底部框架上的移入移出单元，所述移入移出单元包括：
    滚轮单元，用于带动所述工件台移动；
    板簧，其一端连接所述底部框架，另一端连接所述滚轮单元；
    板簧变形驱动单元，与所述板簧连接，用于在移动所述工件台时通过驱动所述板簧变形使得所述滚轮单元与地面接触。
  2. 根据权利要求1所述的工件台移入移出装置，其特征在于，所述滚轮单元包括连接至所述板簧一端的连接架、设于所述连接架上的驱动滚轮和与所述驱动滚轮连接的电机。
  3. 根据权利要求1所述的工件台移入移出装置，其特征在于，还包括固设于所述底部框架上的连接块，所述板簧的一端通过所述连接块连接至所述底部框架；所述板簧与所述连接块之间设有挂接块，所述挂接块的底部固定在所述板簧上，顶端设有挂钩，所述挂钩挂设于所述连接块上。
  4. 根据权利要求3所述的工件台移入移出装置，其特征在于，所述连接块上设有与所述挂钩相适配的凹槽，所述挂钩挂设于所述凹槽中。
  5. 根据权利要求1所述的工件台移入移出装置，其特征在于，所述板簧为二分段式结构，包括两段，所述两段之间通过柔性铰链连接。
  6. 根据权利要求1所述的工件台移入移出装置，其特征在于，所述板簧变形驱动单元的位置与所述滚轮单元的位置对应。
  7. 根据权利要求1所述的工件台移入移出装置，其特征在于，所述板簧 变形驱动单元包括固设于所述板簧上的气缸缸体、设于所述气缸缸体内且可伸缩的气缸活塞杆以及与所述气缸缸体内部连通的气管。
  8. 根据权利要求7所述的工件台移入移出装置，其特征在于，所述气管上设有压力调节器。
  9. 根据权利要求7所述的工件台移入移出装置，其特征在于，所述气缸活塞杆顶端连接有一施力滚轮。
  10. 根据权利要求9所述的工件台移入移出装置，其特征在于，所述板簧变形驱动单元还包括固定于所述底部框架上的托架，所述托架用于支撑所述施力滚轮。
  11. 根据权利要求1所述的工件台移入移出装置，其特征在于，所述移入移出单元设有两组，位于同一水平线上，且沿所述工件台移入移出方向对称分布于所述底部框架底部。
  12. 根据权利要求1所述的工件台移入移出装置，其特征在于，所述移入移出单元沿所述工件台移入移出方向设于所述底部框架的侧边上。
  13. 根据权利要求1所述的工件台移入移出装置，其特征在于，所述移入移出单元设有四组，分别沿所述工件台移入移出方向对称分布在所述底部框架的底面四角上。
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