WO2018090892A1 - 一种压电传感装置及应用 - Google Patents

一种压电传感装置及应用 Download PDF

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Publication number
WO2018090892A1
WO2018090892A1 PCT/CN2017/110800 CN2017110800W WO2018090892A1 WO 2018090892 A1 WO2018090892 A1 WO 2018090892A1 CN 2017110800 W CN2017110800 W CN 2017110800W WO 2018090892 A1 WO2018090892 A1 WO 2018090892A1
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Prior art keywords
piezoelectric
electrode
region
regions
sensing device
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PCT/CN2017/110800
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English (en)
French (fr)
Inventor
杜朝亮
郭洪峰
赵庆雨
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Guizhou Taifang Legan Technology Co Ltd
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Guizhou Taifang Legan Technology Co Ltd
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Priority to EP17872003.3A priority Critical patent/EP3534418B1/en
Priority to JP2019527415A priority patent/JP6896857B2/ja
Publication of WO2018090892A1 publication Critical patent/WO2018090892A1/zh
Priority to US16/413,657 priority patent/US11301077B2/en
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
    • H03K17/96—Touch switches
    • H03K17/964—Piezoelectric touch switches
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Definitions

  • the invention relates to a device for converting mechanical energy and electrical energy by using a piezoelectric effect, in particular to a piezoelectric sensing device.
  • Piezoelectric sensors are a common sensor for measuring vibration or velocity, which is based on the piezoelectric effect of some dielectrics, where the positive piezoelectric effect means that when an external force is applied to its surface, the dielectric surface will The charge is generated to achieve measurement of non-electricity;
  • the inverse piezoelectric effect refers to the phenomenon of mechanical deformation caused by applying an alternating electric field to the dielectric, also known as electrostrictive effect, and the transmitter manufactured by the inverse piezoelectric effect can be used for electroacoustic And ultrasound engineering.
  • Piezoelectric sensors are widely used in engineering, biomedical, petroleum exploration, sonic logging, electroacoustics and other technical fields.
  • piezoelectric sensors are designed into a sensor module for practical installation and signal fidelity acquisition.
  • Piezoelectric sensor modules are typically designed to include leads, pre-processing circuitry, mounting methods, and multiple piezoelectric sensor connections.
  • a single sensor signal sometimes fails to achieve the strength of the actual application or the output signal is not conducive to acquisition and identification.
  • multiple piezoelectric sensors are used in combination, because their phases are different, the peaks and troughs of the signals during acquisition will be canceled or superimposed to some extent to produce signals with different characteristics.
  • the traditional combination method is to connect the sensors in series. When connecting, the positive electrode of one sensor is connected with the negative electrode of another sensor.
  • the combined method described in the patent CN200480038012.8 can effectively increase the low frequency signal while weakening the high frequency signal.
  • high-frequency signals provide higher positioning accuracy due to higher resolution.
  • the combined method described in the patent CN200480038012.8 weakens the high frequency signal and is therefore not conducive to precise positioning.
  • the invention proposes a combination mode which can effectively increase the high frequency signal, weaken the low frequency signal, and make the output waveform signal more favorable for improving the positioning accuracy.
  • the effects of the present invention have been experimentally verified.
  • the invention provides a piezoelectric sensing device which can effectively increase the high frequency signal and weaken the low frequency signal.
  • the specific technical solutions are as follows:
  • a piezoelectric sensing device comprising: a plurality of piezoelectric regions, each piezoelectric region comprising a positive electrode surface and a negative electrode surface, wherein the plurality of regions sequentially adopt adjacent piezoelectric regions from the first to the last
  • the surface of the same pole is electrically connected to the surface of the same pole, that is, the surface of the positive electrode is electrically connected to the surface of the positive electrode, or the surface of the negative electrode is electrically connected to the surface of the negative electrode.
  • the piezoelectric region refers to an independent unit having a piezoelectric effect, such as a piezoelectric ceramic, a piezoelectric crystal, or a piezoelectric film.
  • first extraction electrode and the second extraction electrode are respectively coupled to the non-connecting ends of the first piezoelectric region and the last piezoelectric region and the adjacent piezoelectric regions. If the positive electrode surface of the first piezoelectric region is electrically connected to the positive electrode surface of the adjacent piezoelectric region, the first extraction electrode is coupled to the negative electrode surface of the first piezoelectric region, if the negative electrode surface of the first piezoelectric region is adjacent to Electrically connecting the negative electrode surface of the piezoelectric region, the first extraction electrode is coupled to the positive electrode surface of the first piezoelectric region; if the positive electrode surface of the last piezoelectric region is electrically connected to the positive electrode surface of the adjacent piezoelectric region, The second extraction electrode is coupled to the negative electrode surface of the last piezoelectric region. If the negative electrode surface of the last piezoelectric region is electrically connected to the negative electrode surface of the adjacent piezoelectric region, the second extraction electrode is coupled to the positive electrode of the last piezoelectric region. surface.
  • connection electrode is used to connect a plurality of discrete piezoelectric regions
  • the connection electrode includes a rigid or flexible, for example,
  • the printed electrodes are flexibly connected to the discrete plurality of piezoelectric regions, for example by a flexible electrical conductor.
  • the plurality of piezoelectric regions are in a single piezoelectric structure.
  • the plurality of piezoelectric regions are respectively in different piezoelectric structures.
  • the plurality of piezoelectric regions are arranged in a line-wise arrangement.
  • the plurality of piezoelectric regions are arranged in a line link form.
  • the plurality of piezoelectric regions are arranged in a two-dimensional array.
  • the plurality of piezoelectric regions are arranged in a layered manner, or the plurality of piezoelectric regions are arranged in a three-dimensional array.
  • a filled insulating material is included between the plurality of piezoelectric regions.
  • the distance between the plurality of piezoelectric regions is adjustable.
  • the shape of the piezoelectric body of the plurality of piezoelectric regions is not limited to a square shape, and may be a circular shape or other shapes.
  • the invention proposes a combination mode which can effectively increase the high frequency signal, weaken the low frequency signal, and make the output waveform signal more favorable for improving the positioning accuracy.
  • Embodiment 1 is a first structural schematic view of Embodiment 1 of the present invention.
  • Embodiment 1 of the present invention is a schematic view showing a second structure of Embodiment 1 of the present invention.
  • FIG. 3 is a schematic diagram of a third connection according to Embodiment 1 of the present invention.
  • FIG. 5 is a schematic diagram of a first connection according to Embodiment 2 of the present invention.
  • Figure 6 (a) is a schematic view 1 of a second connection of Embodiment 2 of the present invention.
  • Figure 6 (b) is a schematic view 2 of a second connection of Embodiment 2 of the present invention.
  • FIG. 7 is a schematic diagram of a third connection according to Embodiment 2 of the present invention.
  • FIG. 8 is a schematic diagram of a fourth connection according to Embodiment 2 of the present invention.
  • Embodiment 9 is a fifth connection diagram of Embodiment 2 of the present invention.
  • Embodiment 10 is a sixth connection diagram of Embodiment 2 of the present invention.
  • Figure 11 is a schematic structural view of Embodiment 3 of the present invention.
  • Figure 12 is a comparison diagram of experimental effects of the present invention and prior art
  • Figure 13 is a schematic structural view of Embodiment 4 of the present invention.
  • FIG. 15 is a flowchart of a second method according to Embodiment 5 of the present invention.
  • 1001-first extraction electrode 1002-second extraction electrode; 1003-piezoelectric material;
  • 3005-second extraction electrode 3006-connection line; 3007-first piezoelectric region; 3008-second piezoelectric region;
  • 6002-second extraction electrode 6003-first piezoelectric region; 6004-electrode; 6005-second piezoelectric region; 6006-insulating connecting piece;
  • 7001-first extraction electrode 7002-electrode; 7003-first piezoelectric region; 7004-electrode;
  • 8001-first extraction electrode 8002-electrode; 8003-second extraction electrode; 8004-first piezoelectric region;
  • 9006 first piezoelectric region; 9007 - second piezoelectric region; 9008 - third piezoelectric region; 9009 - fourth piezoelectric region.
  • 10001-first extraction electrode 10002-electrode; 10003-electrode; 10004-electrode; 10005-electrode;
  • the invention increases the high frequency signal and weakens the low frequency signal.
  • v is the velocity of mechanical wave propagation in the object to be measured
  • d is the equivalent distance of the two piezoelectric regions shown in the figure, generally referring to the distance between the centers of the two piezoelectric regions.
  • v in the above equation is not a fixed value, but a function of f.
  • the high frequency is The definition of the low frequency differs depending on the location of the different materials and the two piezoelectric regions, so the high and low frequencies here are relative to the material and the location of the piezoelectric region.
  • the invention can obtain the beneficial effects of increasing the high frequency signal and weakening the low frequency signal on the premise of determining the position of the material and the piezoelectric region.
  • the amplitude of the output wave signal S For a 0-order antisymmetric wave in a thin plate structure, as the frequency f increases, the wavelength ⁇ will decrease.
  • the equivalent distance d of the two sensors is constant, and the phase difference is
  • 2* ⁇ *d/ ⁇ . Therefore, when
  • FIG. 12 it is a comparison diagram of the experimental results of the present invention and the prior art.
  • two piezoelectric ceramic sensors are respectively connected in series by the method in the prior art and connected in the method of the present invention on a glass medium.
  • the same vibration waveform is collected.
  • the waveform of the present invention is significantly higher in the initial high frequency stage than the amplitude in the comparative invention, and the amplitude is not significant after the waveform frequency is lowered.
  • the difference It is explained that the connection mode described in the present invention can function to amplify a high frequency signal. In a specific application, if the frequency to be measured is greater than the boundary frequency of the present invention, the method of the present invention can effectively improve the effective signal.
  • FIG. 1 it is a first structural diagram of Embodiment 1, which includes a first extraction electrode 1001, a second extraction electrode 1002, a first piezoelectric region 1005, a second piezoelectric region 1006, and an electrode 1004.
  • the first piezoelectric region 1005 and the second piezoelectric region 1006 are in the same piezoelectric material 1003, and the piezoelectric material 1003 is a material having a piezoelectric effect, including an inorganic piezoelectric material and an organic piezoelectric material, and an inorganic piezoelectric material.
  • piezoelectric crystals such as crystal (quartz crystal), lithium gallate, lithium niobate, titanium niobate and lithium transistor lithium niobate, lithium niobate, etc.
  • piezoelectric ceramics such as barium titanate BT, zirconium Lead titanate PZT, modified lead zirconate titanate, lead metasilicate, lead bismuth citrate lithium PBLN, modified lead titanate PT, etc.
  • organic piezoelectric materials also known as piezoelectric polymers, such as polyvinylidene fluoride (PVDF) (Thin film) and other organic piezoelectric (thin film) materials typified by it, piezoelectric ceramics are used in this embodiment.
  • PVDF polyvinylidene fluoride
  • the first piezoelectric region 1005 and the second piezoelectric region 1006 are in the same piezoelectric material 1003, that is, the two piezoelectric regions are in the same piezoelectric structure, and both piezoelectric regions have a negative surface on the upper surface.
  • the surface and the lower surface are positive electrode surfaces, and the electrode 1004 is coupled to the surface of the positive electrode to realize electrical connection between the two piezoelectric regions, respectively
  • the negative electrode surface of the two piezoelectric regions is coupled to the electrode to form a first extraction electrode 1001 and a second extraction electrode 1002 for electrically connecting the piezoelectric sensing device to the external circuit.
  • the electrode is a metal plating film.
  • the piezoelectric sensing device When the piezoelectric sensing device is operated, a plurality of opposite polarity charges are accumulated on the two surfaces of the piezoelectric region due to the piezoelectric effect, wherein the positively charged electrode is the positive electrode surface.
  • the electrode accumulating negative charge is the surface of the negative electrode
  • the electrode coupled to the surface of the positive electrode is a positive electrode
  • the electrode coupled to the surface of the negative electrode is a negative electrode
  • the electrode is made of a material having good conductivity, such as aluminum or metal materials such as gold or silver, or AgNi-
  • a layered electrode composed of a three-layer structure such as Sn, Ag-Ni-Au, or Cu-Ni-Sn (BME) ensures that the output current is not significantly reduced due to electrode impedance in the case of generating a small potential difference.
  • the electrode 1004 is a positive electrode
  • the first extraction electrode 1001 and the second extraction electrode 1002 are negative electrodes
  • the polarization directions of the first piezoelectric region 1005 and the second piezoelectric region 1006 are from the surface of the positive electrode to the surface of the negative electrode.
  • the electrode 1004 is electrically connected to the positive electrode surface of the first piezoelectric region and the positive electrode surface of the second piezoelectric region
  • the first extraction electrode 1001 and the second extraction electrode 1002 are respectively connected to the lead wires, or are connected to the external circuit through the conductive traces, including
  • the extraction electrode is connected to an external circuit using a material suitable for electrical connection such as a solder material, a conductive paste or a conductive adhesive.
  • the electrode 1004 is mechanically connected to the vibrating object to be measured, such as welding or bonding with an adhesive.
  • the vibrating object to be measured such as welding or bonding with an adhesive.
  • only a few points or lines on the electrode can be connected to the vibrating object.
  • vibration occurs, the surface of the electrode 1004 is pressed, and the pressure is transmitted to the piezoelectric material 1003.
  • a potential difference is generated between the two negative electrodes, that is, the extraction electrode 1001 and the extraction electrode 1002, and the lead wire or A small current output is generated on the conductive track under the potential difference, and the small current is the electrical signal to be tested.
  • FIG. 2 it is a second schematic structural view of Embodiment 1, which includes a first extraction electrode 2001, a second extraction electrode 2002, a first piezoelectric region 2005, a second piezoelectric region 2006, and an electrode 2004.
  • the first piezoelectric region 2005 and the second piezoelectric region 2006 are in the same piezoelectric material 2003, that is, the two piezoelectric regions are in the same piezoelectric structure, and both piezoelectric regions have upper surface as negative surface and lower surface.
  • the surface is a positive electrode surface with a polarization direction from the surface of the negative electrode to the surface of the positive electrode.
  • the electrodes are coupled to the positive electrode surface and the negative electrode surface of the two piezoelectric regions, respectively, wherein the electrode 2004 is a positive electrode, the first extraction electrode 2001 and the second extraction electrode 2002 are negative electrodes, and the electrode 2004 is connected to the positive electrode surface of the first piezoelectric region. And the positive electrode surface of the second piezoelectric region, the first extraction electrode 1001 and the second extraction electrode 1002 are used to electrically connect the piezoelectric sensing device to the external circuit.
  • the first extraction electrode 2001 and the second extraction electrode 2002 are respectively connected to the lead line or connected to an external circuit through a conductive trace, and the electrode 2004 is mechanically connected to the vibrating object to be measured.
  • FIG. 3 it is a third structural diagram of Embodiment 1, which includes a first extraction electrode 3004, a second extraction electrode 3005, a first piezoelectric region 3007, a second piezoelectric region 3008, an electrode 3001, and an electrode. 3002 and connecting line 3006.
  • the first piezoelectric region 3007 and the second piezoelectric region 2008 are in the same piezoelectric material 3003, that is, the two piezoelectric regions are in In the same piezoelectric structure, both piezoelectric regions have a positive surface on the upper surface and a negative surface on the lower surface, and the polarization direction is from the surface of the positive electrode to the surface of the negative electrode.
  • Electrodes are coupled to the positive electrode surface and the negative electrode surface of the two piezoelectric regions, the electrode 3001 and the electrode 3002 are positive electrodes, the first extraction electrode 3004 and the second extraction electrode 3005 are negative electrodes, and the connection line 3006 is connected to the two positive electrodes, that is, The electrode 3001 and the electrode 3002 electrically connect the positive electrode surfaces of the two piezoelectric regions, and the first extraction electrode 3004 and the second extraction electrode 3005 are used to electrically connect the piezoelectric sensing device to the external circuit. In use, the first extraction electrode 3004 and the second extraction electrode 3005 are respectively connected to the lead line or connected to the external circuit through the conductive trace.
  • the electrode 3001 or the electrode 3002 can be mechanically connected with the vibrating object to be measured, but Increasing the contact area of the piezoelectric sensing device with the vibrating object to be measured, and improving the detection accuracy.
  • the electrode 3001 and the electrode 3002 are simultaneously mechanically connected to the vibrating object to be measured, and in the following embodiment, the structure is increased.
  • the contact area of the piezoelectric sensing device with the vibrating object to be measured is connected in this manner.
  • FIG. 4 it is a fourth structural diagram of Embodiment 1, which includes a first extraction electrode 4001, an electrode 4002, a second extraction electrode 4003, an electrode 4004, a first piezoelectric region 4007, and a second piezoelectric region. 4008, a third piezoelectric region 4009, a fourth piezoelectric region 4010, and an electrode 4006.
  • the first piezoelectric region 4007, the second piezoelectric region 4008, the third piezoelectric region 4009, and the fourth piezoelectric region 4010 are in the same piezoelectric material 4005, that is, the four piezoelectric regions are in the same piezoelectric structure.
  • the four piezoelectric regions have a positive surface on the upper surface and a negative electrode surface on the lower surface, and the polarization directions of the four piezoelectric regions are from the positive electrode surface to the negative electrode surface.
  • the electrodes are coupled to the positive electrode surface and the negative electrode surface of the four piezoelectric regions, respectively, the first extraction electrode 4001, the electrode 4002 and the second extraction electrode 4003 are positive electrodes, the electrode 4004 and the electrode 4006 are negative electrodes, and the electrode 4004 is connected to the first piezoelectric electrode.
  • the electrode 4002 is connected to the positive electrode surface of the second piezoelectric region and the positive electrode surface of the third piezoelectric region
  • the electrode 4006 is connected to the negative electrode surface and the fourth pressure of the third piezoelectric region
  • the negative electrode surface of the electric region, the first extraction electrode 4001 and the second extraction electrode 4003 are used to electrically connect the piezoelectric sensing device to the external circuit.
  • the first extraction electrode 4001 and the second extraction electrode 4003 are respectively connected to the lead wires or connected to the external circuit through the conductive traces, and the electrodes 4004 and the electrodes 4006 are mechanically connected to the vibrating object to be measured.
  • Embodiment 1 As shown in FIG. 5 to FIG. 8 , which are four different structures of Embodiment 2 of the present invention, the difference between this embodiment and Embodiment 1 is that in Embodiment 1, the positive electrode surface and the negative electrode surface of the same piezoelectric region are placed at a large amount. Electrode, a piezoelectric sensing device having a plurality of piezoelectric regions in a piezoelectric structure. In this embodiment, electrodes are placed on the positive electrode surface and the negative electrode surface of different piezoelectric regions, and each piezoelectric region is formed. Piezoelectric sensing devices in different piezoelectric structures.
  • different piezoelectric regions may be connected by an insulating material or may be connected without any material, and the insulating material has a certain strength, such as plastic, insulating ceramics, acrylic, and the like.
  • the insulating material acts to strengthen the structural strength, so that the piezoelectric sensing device is more durable and less prone to damage during installation and use.
  • multiple piezoelectric regions The distance between the two piezoelectric regions is not fixed, and the distance between the piezoelectric regions is not fixed, and may be adjusted according to specific application conditions, for example, according to the shape or thickness of the measuring object; if the piezoelectric regions include filled insulating materials, the filling is performed.
  • the length of the insulating material in the direction in which the piezoelectric regions are arranged is not fixed, and may be adjusted according to a specific application, for example, according to the shape or thickness of the measuring object. The details are as follows.
  • FIG. 5 it is a schematic diagram of a first structure of Embodiment 2.
  • the structure includes a first extraction electrode 5004, a second extraction electrode 5005, a first piezoelectric region 5003, an electrode 5001, an electrode 5002, and a second piezoelectric region. 5006 and cable 5007.
  • the first piezoelectric region 5003 and the second piezoelectric region 5006 are respectively in two different piezoelectric materials, that is, the two piezoelectric regions are respectively in two different piezoelectric structures.
  • the two piezoelectric regions have a positive surface on the upper surface and a negative electrode surface on the lower surface, and the polarization directions are from the surface of the positive electrode to the surface of the negative electrode.
  • the electrodes are coupled to the positive electrode surface and the negative electrode surface of the first piezoelectric region 5003 and the second piezoelectric region 5006, respectively, and the electrodes 5001 and 5002 are positive electrodes, and the first extraction electrode 5004 and the second extraction electrode 5005 are negative electrodes.
  • the electrode 5001, the first piezoelectric region 5003 and the first extraction electrode 5004 constitute a first piezoelectric structure
  • the electrode 5002, the second piezoelectric region 5006 and the second extraction electrode 5005 constitute a second piezoelectric structure, and the two piezoelectric structures
  • the polarization directions are all directed from the positive electrode to the negative electrode
  • the connection line 5007 connects the two positive electrodes of the first piezoelectric structure and the second piezoelectric structure, namely the electrode 5001 and the electrode 5002, the first extraction electrode 5004 and the second extraction
  • the electrode 5005 is for electrically connecting the piezoelectric sensing device to an external circuit.
  • the first extraction electrode 5004 and the second extraction electrode 5005 are respectively connected to the lead wires or connected to the external circuit through the conductive traces, and the electrodes 5001 and 5002 are mechanically connected to the vibrating object to be measured.
  • FIG. 6 which is a second structural diagram of Embodiment 2
  • FIG. 6 includes two structures (a) and (b).
  • the structure in FIG. 6(a) includes a first extraction electrode 6001, a second extraction electrode 6002, a first piezoelectric region 6003, an electrode 6004, and a second piezoelectric region 6005.
  • the first piezoelectric region 6003 and the second piezoelectric region 6005 are respectively in two different piezoelectric materials, that is, the two piezoelectric regions are respectively in two different piezoelectric structures.
  • the two piezoelectric regions have a lower surface as a positive electrode surface and an upper surface as a negative electrode surface, and the polarization directions are from the positive electrode surface to the negative electrode surface.
  • the electrodes are coupled to the positive electrode surface and the negative electrode surface of the first piezoelectric region 6003 and the second piezoelectric region 6005, respectively, and the electrode 6004 is a positive electrode, and the first extraction electrode 6001 and the second extraction electrode 6002 are negative electrodes.
  • the electrode 6004, the first piezoelectric region 6003 and the first extraction electrode 6001 constitute a first piezoelectric structure, and the electrode 6004, the second piezoelectric region 6005 and the second extraction electrode 6002 constitute a second piezoelectric structure, and the two piezoelectric structures
  • the polarization directions are all directed from the positive electrode to the negative electrode, the electrode 6004 is connected to the positive electrode of the first piezoelectric structure and the positive electrode of the second piezoelectric structure, and the first extraction electrode 6001 and the second extraction electrode 6002 are used for piezoelectric
  • the sensing device is electrically connected to the external circuit.
  • the first extraction electrode 6001 and the second extraction electrode 6002 are respectively connected to the lead line or connected to an external circuit through a conductive trace, and the electrode 6004 is adhered to the vibrating object to be measured.
  • the structure in FIG. 6(b) further includes an insulating connecting piece 6006 which serves to strengthen the structural strength as compared with the structure in FIG. 6(a).
  • the piezoelectric sensing device is more durable and less prone to damage during installation and use.
  • FIG. 7 it is a third structural diagram of Embodiment 2, which includes a first extraction electrode 7001, an electrode 7002, a second extraction electrode 7007, a first piezoelectric region 7003, an electrode 7004, and a second piezoelectric region. 7005 and a third piezoelectric region 7006.
  • the first piezoelectric region 7003, the second piezoelectric region 7005, and the third piezoelectric region 7007 are respectively in three different piezoelectric materials, that is, the three piezoelectric regions are respectively in three different piezoelectric structures.
  • the three piezoelectric regions have a positive surface on the upper surface and a negative electrode surface on the lower surface, and the polarization directions are from the surface of the positive electrode to the surface of the negative electrode.
  • Electrodes are coupled to the positive electrode surface and the negative electrode surface of the first piezoelectric region 7003, the second piezoelectric region 7005, and the third piezoelectric region 7007, respectively.
  • the first extraction electrode 7001 and the electrode 7002 are positive electrodes, and the electrodes 7004 and 7007 are negative.
  • the polarization direction of the first piezoelectric region 7003, the second piezoelectric region 7005 and the third piezoelectric region 7006 is directed from the positive electrode to the negative electrode, and the first extraction electrode 7001, the first piezoelectric region 7003 and the electrode 7004 are formed.
  • the first piezoelectric structure, the electrode 7002, the second piezoelectric region 7005 and the electrode 7004 constitute a second piezoelectric structure
  • the electrode 7002, the third piezoelectric region 7006 and the second extraction electrode 7007 constitute a third piezoelectric structure
  • three The polarization directions of the piezoelectric structures are all directed from the positive electrode to the negative electrode
  • the electrode 7004 is connected to the negative electrode of the first piezoelectric structure and the negative electrode of the second piezoelectric structure
  • the electrode 7002 is connected to the positive electrode of the second piezoelectric structure and
  • the positive electrode of the tri-piezo structure, the first extraction electrode 7001 and the second extraction electrode 7007 are used to electrically connect the piezoelectric sensing device to the external circuit.
  • the first extraction electrode 7001 and the second extraction electrode 7007 are respectively connected to the lead wires or connected to the external circuit through the conductive traces.
  • the electrode 7002 and the electrode 7004 cannot be mechanically connected to the vibrating object to be measured at the same time, resulting in use. This is inconvenient, and therefore, the structure is improved to obtain the fourth structure of the second embodiment.
  • FIG. 8 it is a fourth structural diagram of Embodiment 2, which includes a first extraction electrode 8001, an electrode 8002, a second extraction electrode 8003, a first piezoelectric region 8004, an electrode 8005, and a second piezoelectric region. 8006, a third piezoelectric region 8007, an electrode 8008, and a fourth piezoelectric region 8009.
  • the first piezoelectric region 8004, the second piezoelectric region 8006, the third piezoelectric region 8007, and the fourth piezoelectric region 8009 are respectively in four different piezoelectric materials, that is, four piezoelectric regions are respectively in four Different piezoelectric structures.
  • the four piezoelectric regions have a positive surface on the upper surface and a negative electrode surface on the lower surface, and the polarization directions are from the surface of the positive electrode to the surface of the negative electrode.
  • the electrode 8003 is a positive electrode
  • the electrode 8005 and the electrode 8008 are negative electrodes
  • the polarization directions of the first piezoelectric region 8004, the second piezoelectric region 8006, the third piezoelectric region 8007, and the fourth piezoelectric region 8009 are from the positive electrode.
  • the first extraction electrode 8001, the first piezoelectric region 8004 and the electrode 8005 constitute a first piezoelectric structure
  • the electrode 8002, the second piezoelectric region 8006 and the electrode 8005 constitute a second piezoelectric structure
  • the electrode 8002 the third The piezoelectric region 8007 and the electrode 8008 constitute a third piezoelectric structure
  • the second extraction electrode 8003, the fourth piezoelectric region 8009 and the electrode 8008 constitute a fourth piezoelectric structure, and four piezoelectric junctions
  • the polarization directions of the structures are all directed from the positive electrode to the negative electrode
  • the electrode 8005 is connected to the negative electrode of the first piezoelectric structure and the negative electrode of the second piezoelectric structure
  • the electrode 8002 is connected to the positive electrode and the third electrode of the second piezoelectric structure.
  • the positive electrode of the electrical structure, the electrode 8008 is connected to the third piezoelectric structure and the fourth piezoelectric structure, and the first extraction electrode 8001 and the second extraction electrode 8003 are used for electrically connecting the piezoelectric sensing device to the external circuit.
  • the first extraction electrode 8001 and the second extraction electrode 8003 are respectively connected to the lead line or connected to the external circuit through the conductive trace, and since the two lead electrodes are located on the same horizontal surface, the electrode 8005 and the electrode can be used in use.
  • the 8008 is mechanically connected to the vibrating object to be measured.
  • a fifth structural diagram of Embodiment 2 includes a first extraction electrode 9001, an electrode 9002, an electrode 9003, an electrode 9004, a second extraction electrode 9005, a first piezoelectric region 9006, and a second piezoelectric layer.
  • the first piezoelectric region 9006, the second piezoelectric region 9007, the third piezoelectric region 9008, and the fourth piezoelectric region 8009 are respectively in four different piezoelectric materials, that is, four piezoelectric regions are respectively located in four Different piezoelectric structures.
  • the four piezoelectric regions have a positive surface on the upper surface and a negative electrode surface on the lower surface, and the polarization directions are from the surface of the positive electrode to the surface of the negative electrode.
  • the electrode 9005 is a positive electrode
  • the electrode 9002 and the electrode 9004 are negative electrodes
  • the polarization directions of the first piezoelectric region 9006, the second piezoelectric region 9007, the third piezoelectric region 9008, and the fourth piezoelectric region 9009 are from the positive electrode.
  • the first extraction electrode 9001, the first piezoelectric region 9006 and the electrode 9002 constitute a first piezoelectric structure
  • the electrode 9002 the second piezoelectric region 9007 and the electrode 9003 constitute a second piezoelectric structure
  • the electrode 9003, the third The piezoelectric region 9008 and the electrode 9004 constitute a third piezoelectric structure
  • the second extraction electrode 9005, the fourth piezoelectric region 9009 and the electrode 9004 constitute a fourth piezoelectric structure, and the polarization directions of the four piezoelectric structures are all positive
  • the electrode is directed to the negative electrode
  • the electrode 9002 is connected to the negative electrode of the first piezoelectric structure and the negative electrode of the second piezoelectric structure
  • the electrode 9003 is connected to the positive electrode of the second piezoelectric structure and the positive electrode of the third piezoelectric structure
  • the electrode 9004 is connected Third piezoelectric structure and fourth piezoelectric structure, first lead
  • the output electrode 9001 and the second extraction electrode 9005 are
  • FIG. 10 it is a sixth structural diagram of the second embodiment, including a first extraction electrode 10001 , an electrode 10002 , an electrode 10003 , an electrode 10004 , an electrode 10005 , an electrode 10006 , an electrode 10007 , an electrode 10008 , and a second extraction electrode 10009 .
  • the eighth piezoelectric region 10017 is respectively in eight different piezoelectric materials, that is, the eight piezoelectric regions are respectively in eight different piezoelectric structures.
  • the eight piezoelectric regions are all positive on the upper surface.
  • the surface and the lower surface are the surface of the negative electrode, and the polarization directions are all directed from the surface of the positive electrode to the surface of the negative electrode.
  • the positive electrode surface and the negative electrode surface of the eighth piezoelectric region 10017 are coupled to the electrode, the electrode 10002, the electrode 10004, the electrode 10006, and the electrode 10008 are positive electrodes; the electrode 10001, the electrode 10003, the electrode 10005, the electrode 10007, and the electrode 10009 are negative electrodes.
  • the first extraction electrode 10001, the first piezoelectric region 10010 and the electrode 10002 constitute a first piezoelectric structure
  • the electrode 10002 the second piezoelectric region 10011 and the electrode 10003 constitute a second piezoelectric structure
  • the electrode 10004 constitutes a third piezoelectric structure
  • the electrode 10004, the fourth piezoelectric region 10013 and the electrode 10003 constitute a fourth piezoelectric structure
  • the electrode 10005, the fifth piezoelectric region 10014 and the electrode 10006 constitute a fifth piezoelectric structure
  • the electrode 10006 The sixth piezoelectric region 10015 and the electrode 10007 constitute a sixth piezoelectric structure
  • the second extraction electrode 10009, the seventh piezoelectric region 10016 and the electrode 10008 constitute a seventh piezoelectric structure
  • the electrode 10008, the eighth piezoelectric region 10017 and the electrode 10007 constitutes an eighth piezoelectric structure
  • the polarization directions of the eight piezoelectric structures are all
  • the electrode 10002 connects the positive electrode of the first piezoelectric structure and the positive electrode of the second piezoelectric structure
  • the electrode 10004 connects the positive electrode of the third piezoelectric structure and the positive electrode of the fourth piezoelectric structure
  • the electrode 10003 is connected to the second piezoelectric structure a negative electrode and a negative electrode of a fourth piezoelectric structure
  • the electrode 10005 is connected to the negative electrode of the third piezoelectric structure and the negative electrode of the fifth piezoelectric structure
  • the electrode 10006 is connected to the positive electrode and the sixth piezoelectric of the fifth piezoelectric structure a positive electrode of the structure
  • the electrode 10007 is a negative electrode of the fifth piezoelectric structure and a negative electrode of the eighth piezoelectric structure
  • the electrode 10008 is connected to the positive electrode of the seventh piezoelectric structure and the positive electrode of the eighth piezoelectric structure
  • the first lead is taken out
  • the electrode 10001 and the second extraction electrode 10009 are used to electrically connect the piez
  • the first extraction electrode 10001 and the second extraction electrode 10009 are respectively connected to the lead line or connected to an external circuit through a conductive trace, and the electrode 10003 and the electrode 1007 are mechanically connected to the vibrating object to be measured.
  • the piezoelectric structures are connected in a layered manner to form a three-dimensional array form arrangement.
  • a three-dimensional array form distribution that is, a two-dimensional matrix arrangement of 2 ⁇ 2 ⁇ 2 is provided, except as shown in this embodiment.
  • the three-dimensional matrix arrangement manner can also adopt various three-dimensional matrix arrangement forms such as 2X2X3, 3X3X3, 3X3X4, and 5X5X5.
  • FIG. 11 which is a schematic structural view of Embodiment 3, the present embodiment is different from the foregoing embodiment in that a circular piezoelectric body is used, including a first extraction electrode 11001, a second extraction electrode 11002, and a piezoelectric The body 11003 and the connection electrode 11005.
  • the first extraction electrode 11001 and the second extraction electrode 11002 are coupled to the negative end of the corresponding piezoelectric body, and the connection electrode 11004 is coupled to the positive terminal of the piezoelectric body.
  • the circular piezoelectric body 11003 is used, which is easier to mount than the square piezoelectric body, and can be applied to a specific mounting occasion.
  • FIG. 13 is a schematic structural diagram of a touch detecting device according to the present invention, including a touch detecting device, a piezoelectric sensing device, a signal detecting device, and a signal analyzing device.
  • the piezoelectric sensing device is configured to convert a touch action of the touch receiving device into a piezoelectric signal
  • the signal detecting device is configured to detect a piezoelectric signal output by the piezoelectric sensing device
  • the signal processing device For analyzing the detected piezoelectric signal to obtain touch position information, in this embodiment, the touch receiving device is an LED screen, and the piezoelectric sensing device is at least two, and if the piezoelectric sensing device is two, Then distributed at two end positions of a diagonal line of the touch receiving device.
  • the piezoelectric sensing devices are three, they are respectively distributed in three angular positions of the four angular positions of the touch receiving device, or respectively distributed in Touching the boundary position of the receiving device. If there are four piezoelectric sensing devices, they are respectively distributed at the four angular positions of the touch receiving device or respectively distributed at the boundary position of the touch receiving device. If the piezoelectric sensing device is four or more, then Four of them are distributed at the four angular positions of the touch receiving device, and the remaining piezoelectric sensing devices are distributed at the boundary position.
  • the piezoelectric sensing device of the first embodiment or the second embodiment may be arranged in a two-dimensional matrix manner according to the area of the touch receiving device, such as 3 ⁇ 3, 5 ⁇ 5 or The matrix of 7X7 is distributed at the boundary, the corner end and the middle position of the touch receiving device. If the piezoelectric sensing device is a 3 ⁇ 3 matrix distribution, among the nine piezoelectric sensing devices, four are distributed at the corner end and four are distributed on the touch. The middle position of the four sides of the receiving device is distributed at the center of the touch receiving device.
  • the present invention further provides a method for touch detection, which specifically includes the following steps:
  • the touch receiving device receives the touch action
  • the touch receiving device can be any device suitable for detecting vibration, such as a glass plate, a plastic plate, a metal plate, etc., and can also be a display screen, such as a projection display screen, a liquid crystal display screen, an LED display screen.
  • the touch receiving device is an LED display screen
  • the touch action includes a pressure-sensitive touch on the touch receiving device, including a touch touch, a sliding touch, and the like;
  • the piezoelectric sensing device detects a change in pressure caused by a touch action.
  • the piezoelectric sensing device is the piezoelectric sensing device described in Embodiment 1 or Embodiment 2, and the number is four, which are respectively distributed at the four corners of the LED display screen, and the user clicks on the touch receiving device. That is, the LED display screen, the four piezoelectric sensing devices respectively detect the change in pressure on the touch receiving device.
  • the piezoelectric sensing device converts the detected pressure change into an electrical signal by a piezoelectric effect.
  • Piezoelectric sensing devices convert pressure changes into charge changes due to the piezoelectric effect, thereby converting them into electrical signals and outputting the electrical signals through the two extraction electrodes.
  • a second touch detection method can be obtained.
  • the method further includes the following steps on the basis of the first touch detection method:
  • the signal detecting device receives the piezoelectric signal and preprocesses the signal.
  • the pre-processing includes Necessary processing such as denoising processing or signal amplification for the accuracy and reliability of signal detection;
  • the signal processing device analyzes the detected piezoelectric signal to obtain a touch position and/or a touch trajectory of the touch action. That is, the electrical signals detected by the four piezoelectric sensing devices are processed to obtain a touch position. If the touch is a continuous touch, such as a sliding touch, the change of the touch position can be comparatively analyzed to obtain a touch track.
  • the plurality of piezoelectric sensing devices may be arranged in a two-dimensional matrix manner according to the area of the touch receiving device, such as The matrix of 3X3, 5X5 or 7X7 is distributed at the boundary, the corner end and the middle position of the touch receiving device.
  • the piezoelectric sensing device is a 3 ⁇ 3 matrix distribution, four of the nine piezoelectric sensing devices are distributed at the corner end, four One is distributed in the middle of the four sides of the touch receiving device, one is distributed at the center of the touch receiving device, and the electrical position detected by the piezoelectric sensing device arranged in the matrix is detected, and the touch position is analyzed, if the touch is a continuous touch, such as The sliding touch can compare and analyze the change of the touch position to obtain the touch track, and improve the detection accuracy by increasing the number of piezoelectric sensing devices.

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Abstract

一种压电传感装置，包括多个压电区，每个压电区包括正极表面和负极表面，其中，多个区从第一个到最后一个依次采用相邻压电区同极表面与同极表面电连接的方式连接，即正极表面与正极表面电连接，或负极表面与负极表面电连接。压电传感装置可以有效地增大高频信号、消弱低频信号，使输出的波形信号更有利于提高定位精度。

Description

一种压电传感装置及应用 技术领域
本发明涉及一种利用压电效应进行机械能与电能相互转换的装置，具体为一种压电传感装置。
背景技术
压电传感器是一种常见的用于测量振动或力度的传感器，其以某些电介质的压电效应为基础，其中，正压电效应是指当有外力施加到其表面时，该电介质表面会产生电荷，从而实现对于非电量的测量；逆压电效应是指对电介质施加交变电场引起机械变形的现象，又称电致伸缩效应，用逆压电效应制造的变送器可用于电声和超声工程。
压电传感器的应用非常广泛，在工程力学、生物医学、石油勘探、声波测井、电声学等技术领域均有应用。
一般地，压电传感器在实际应用中，都会设计成一种传感器模块，以方便安装和信号的保真采集。压电传感器模块在设计上，通常会包括引线、预处理电路、安装方式和多个压电传感器连接方式。
在压电传感器的设计上，单个传感器信号有时不能达到实际应用的强度或者输出的信号不利于采集和识别。多个压电传感器在组合应用时，因为它们的相位不同，采集时信号的波峰和波谷会进行一定程度的相消或叠加从而产生不同特性的信号，目前传统的组合方法是将传感器进行串联连接，连接时将一个传感器的正电极与另一传感器的负电极相连接，如专利CN200480038012.8所述的组合方法，它能有效地增大低频信号，同时消弱高频信号。但对于利用机械波(或弹性波)进行定位的应用而言，高频信号由于具有更高的分辨率，因此能提供更高的定位精度。而专利CN200480038012.8所述的组合方法消弱了高频信号，因此不利于进行精确定位。本发明提出了一种组合方式可以有效地增大高频信号、消弱低频信号，使输出的波形信号更有利于提高定位精度。本发明的效果已经实验验证。
发明内容
本发明提出了一种可以有效地增大高频信号、消弱低频信号的压电传感装置，具体技术方案如下：
一种压电传感装置，其特征在于，包括多个压电区，每个压电区包括正极表面和负极表面，其中，多个区从第一个到最后一个依次采用相邻压电区同极表面与同极表面电连接的方式连接，即正极表面与正极表面电连接，或负极表面与负极表面电连接。所述压电区指独立的具有压电效应的单元，例如压电陶瓷、压电晶体或压电薄膜等。
进一步，还包括第一引出电极和第二引出电极，分别耦合于第一压电区和最后一个压电区的与相邻压电区的非连接端。若第一压电区的正极表面与相邻压电区的正极表面电连接，则将第一引出电极耦合于第一压电区的负极表面，若第一压电区的负极表面与相邻压电区的负极表面电连接，则将第一引出电极耦合于第一压电区的正极表面；若最后一个压电区的正极表面与相邻压电区的正极表面电连接，则将第二引出电极耦合于最后一个压电区的负极表面，若最后一个压电区的负极表面与相邻压电区的负极表面电连接，则将第二引出电极耦合于最后一个压电区的正极表面。
进一步地，还包括除第一引出电极和第二引出电极外的连接电极，所述连接电极用于连接分立的多个压电区，所述连接电极包括刚性的或者柔性的，刚性的比如为印刷电极、柔性的例如通过柔性导电体连接所述分立的多个压电区。
进一步，所述多个压电区处在单一压电结构中。
进一步，所述多个压电区分别处在不同的压电结构中。
进一步，所述多个压电区以并齐排列的方式排列分布。
进一步，所述多个压电区以直线链接形式排列分布。
进一步，所述多个压电区以二维阵列形式排列分布。
进一步，所述多个压电区以分层形式排列分布，或者所述多个压电区以三维阵列形式排列分布。
进一步，所述多个压电区之间包括填充的绝缘材料。
进一步，所述多个压电区之间的距离可调。
进一步，所述多个压电区的压电体形状不局限于方形，也可以是圆形或者其它形状。
本发明提出了一种组合方式可以有效地增大高频信号、消弱低频信号，使输出的波形信号更有利于提高定位精度。
附图说明
图1为本发明实施例1的第一种结构示意图；
图2为本发明实施例1的第二种结构示意图；
图3为本发明实施例1的第三种连接示意图；
图4为本发明实施例1的第四种连接示意图；
图5为本发明实施例2的第一种连接示意图；
图6(a)为本发明实施例2的第二种连接的示意图1；
图6(b)为本发明实施例2的第二种连接的示意图2；
图7为本发明实施例2的第三种连接示意图；
图8为本发明实施例2的第四种连接示意图；
图9为本发明实施例2的第五种连接示意图；
图10为本发明实施例2的第六种连接示意图；
图11为本发明实施例3的结构示意图；
图12为本发明与现有技术实验效果对比图；
图13为本发明实施例4的结构示意图；
图14为本发明实施例5的第一种方法流程图；
图15为本发明实施例5的第二种方法流程图。
附图标记说明：
1001-第一引出电极；1002-第二引出电极；1003-压电材料；
1004-电极；1005-第一压电区；1006-第二压电区；
2001-第一引出电极；2002-第二引出电极；2003-压电材料；
2004-电极；2005-第一压电区；2006-第二压电区；
3001-电极；3002-电极；3003-压电材料；3004-第一引出电极；
3005-第二引出电极；3006-连接线；3007-第一压电区；3008-第二压电区；
4001-第一引出电极；4002-电极；4003-第二引出电极；
4004-电极；4005-压电材料；4006-电极；
4007-第一压电区；4008-第二压电区；4009-第三压电区；4010-第四压电区；
5001-电极；5002-电极；5003-第一压电区；5004-第一引出电极；
5005-第二引出电极；5006-第二压电区；5007-连接线；6001-第一引出电极；
6002-第二引出电极；6003-第一压电区；6004-电极；6005-第二压电区；6006-绝缘连接片；
7001-第一引出电极；7002-电极；7003-第一压电区；7004-电极；
7005-第二压电区；7006-第三压电区；7007-第二引出电极；
8001-第一引出电极；8002-电极；8003-第二引出电极；8004-第一压电区；
8005-电极；8006-第二压电区；8007-第三压电区；8008-电极；8009-第四压电区。
9001-第一引出电极；9002-电极；9003-电极；9004-电极；9005-第二引出电极；
9006-第一压电区；9007-第二压电区；9008-第三压电区；9009-第四压电区。
10001-第一引出电极；10002-电极；10003-电极；10004-电极；10005-电极；
10006-电极；10007-电极；10008-电极；10009-第二引出电极；
10010-第一压电区；10011-第二压电区；10012-第三压电区；10013-第四压电区；
10014-第五压电区；10015-第六压电区；10016-第七压电区；10017-第八压电区。
11001-第一引出电极；11002-第二引出电极；11003-压电材料；11004-连接电极；
具体实施方式
下面结合附图及实施例，对本发明的技术方案做详细描述。应当理解，附图中所示各零部件是示意性而非限制性的，各特征未按比例画出。
对于本发明内容，以两个性能相同的传感装置组合为例说明其原理：
本发明增大高频信号，消弱低频信号，所述高频与低频信号是相对于具体的使用条件而言，因f(频率)＝v(波速)/λ(波长)，本发明所针对的高频与低频的分界点定义为：
f＝v/(6*d)       (1)
其中，v为待测量物体中机械波传播的速度，d即为图中所示的两个压电区的等效距离，一般指两个压电区中心间距离。需要注意的是对于薄板结构中的波而言，上式中的v不是固定的值，而是f的函数。频率大于上式中f＝v/(6*d)的即为高频信号，频率低于f＝v/(6*d)的为低频信号，由式(1)可以看出，高频与低频的界定根据不同材料和两个压电区的位置而有所区别，所以此处的高频与低频是相对材料和压电区位置而言。本发明是在材料和压电区位置确定前提下，可以获得增大高频信号和消弱低频信号的有益效果的。
本发明原理如下：
设结构中的波信号为S0＝A0*sin(a*t+θ0)  (2)
第一传感装置输出的波信号为S1＝A1*sin(a*t+θ1)           (3)
第二传感装置输出的波信号为S2＝A1*sin(a*t+θ2)            (4)
本发明组合输出的波信号为
Figure PCTCN2017110800-appb-000001
上式中，
Figure PCTCN2017110800-appb-000002
即为输出波信号S的幅值。对于薄板结构中的0阶反对称波而言，当频率f增大时，波长λ将减小。两个传感器的等效距离d不变，相位差为|θ1-θ2|＝2*π*d/λ。所以当|θ1-θ2|＜π时，也即d/λ＜1/2时，f增大，S幅值增大。因此本发明组合可对高频信号起放大作用，最大可至原信号的2倍，可对低频信号起减弱作用，最小可接近于0。同时，可以看出，通过调整d的大小，可以调整信号的放大倍数。
而现有技术中，组合输出的信号
Figure PCTCN2017110800-appb-000003
其正与本发明相反，当f增大时，s幅值减小。
如图12所示，为本发明与现有技术实验效果对比图，本实验中，使用2片压电陶瓷传感器分别以现有技术中的方法串联和本发明中的方法连接，在玻璃介质上，同时对同一个振动波形进行采集，本发明的波形在最开始的高频阶段，幅值要明显高于对比发明中的幅值，在后边波形频率降低后，二者在幅值上没有显著的差异。说明本发明所述的连接方式可以起到放大高频信号的作用。在具体应用上，如果待测量频率大于本发明所述分界频率的情况下，应用本发明所述方法可以有效提高有效信号。
实施例1
如图1所示，为实施例1的第一种结构示意图，该结构包括第一引出电极1001、第二引出电极1002、第一压电区1005、第二压电区1006和电极1004。其中，第一压电区1005和第二压电区1006处于同一压电材料1003中，压电材料1003为具有压电效应的材料，包括无机压电材料和有机压电材料，无机压电材料中，包括压电晶体，如水晶(石英晶体)、镓酸锂、锗酸锂、锗酸钛以及铁晶体管铌酸锂、钽酸锂等，还包括压电陶瓷，如钛酸钡BT、锆钛酸铅PZT、改性锆钛酸铅、偏铌酸铅、铌酸铅钡锂PBLN、改性钛酸铅PT等，有机压电材料又称压电聚合物，如聚偏氟乙烯(PVDF)(薄膜)及以它为代表的其他有机压电(薄膜)材料，本实施例中采用压电陶瓷。本实施例中，第一压电区1005和第二压电区1006处于同一压电材料1003中，即两个压电区处于同一压电结构中，两个压电区均为上表面为负极表面、下表面为正极表面，在正极表面耦合电极1004，实现两个压电区的电连接，分别在 两个压电区的负极表面耦合电极，形成第一引出电极1001和第二引出电极1002，用于将压电传感装置与外接电路电连接。本发明中，电极为金属镀膜，压电传感装置工作时，由于压电效应使压电区的两个表面上分别积累数量相等极性相反的电荷，其中，积累正电荷的电极为正极表面，积累负电荷的电极为负极表面，与正极表面耦合的电极为正电极，与负极表面耦合的电极为负电极，电极采用导电性良好材料，如铝或者金、银等金属材料，或AgNi-Sn、Ag-Ni-Au、Cu-Ni-Sn(BME)等由三层结构构成的分层电极，保证在产生较小电势差情况下，不会因为电极阻抗导致输出电流显著减小。图1中，电极1004为正电极，第一引出电极1001和第二引出电极1002为负电极，第一压电区1005和第二压电区1006的极化方向为从正极表面指向负极表面，电极1004电连接第一压电区的正极表面和第二压电区的正极表面，第一引出电极1001和第二引出电极1002分别连接引出线，或通过导电轨迹，与外部电路相连接，包括采用焊接材料、导电膏或导电粘合剂等适用于电连接的材料将引出电极与外部电路相连接。
使用时，电极1004与要测量的振动物体机械连接，如焊接或使用粘结剂粘接等，机械连接时，可只将电极上数个点或线与振动物体连接，本实施例中，为了增大压电传感装置与要测量的振动物体的接触面积，提高检测准确性，将整个电极表面与要测量的振动物体采用粘结剂粘接。当有振动产生时，电极1004表面受压，该压力会传导至压电材料1003上，根据压电效应，会在两个负电极，即引出电极1001和引出电极1002上产生电势差，引出线或导电轨迹上会在该电势差作用下，产生小电流输出，该小电流即为待测电信号。
如图2所示，为实施例1的第二种结构示意图，该结构包括第一引出电极2001、第二引出电极2002、第一压电区2005、第二压电区2006和电极2004。其中，第一压电区2005和第二压电区2006处于同一压电材料2003中，即两个压电区处于同一压电结构中，两个压电区均为上表面为负极表面、下表面为正极表面，极化方向为从负极表面指向正极表面。分别在两个压电区的正极表面和负极表面耦合电极，其中，电极2004为正电极，第一引出电极2001和第二引出电极2002为负电极，电极2004连接第一压电区的正极表面和第二压电区的正极表面，第一引出电极1001和第二引出电极1002用于将压电传感装置与外接电路电连接。使用时，第一引出电极2001和第二引出电极2002分别连接引出线或通过导电轨迹与外部电路相连接，电极2004与要测量的振动物体机械连接。
如图3所示，为实施例1的第三种结构示意图，该结构包括第一引出电极3004、第二引出电极3005、第一压电区3007、第二压电区3008、电极3001、电极3002和连接线3006。其中，第一压电区3007和第二压电区2008处于同一压电材料3003中，即两个压电区处于 同一压电结构中，两个压电区均为上表面为正极表面、下表面为负极表面，极化方向为从正极表面指向负极表面。分别在两个压电区的正极表面和负极表面耦合电极，电极3001和电极3002为正电极，第一引出电极3004和第二引出电极3005为负电极，连接线3006连接两个正电极，即电极3001和电极3002，实现将两个压电区的正极表面电连接，第一引出电极3004和第二引出电极3005用于将压电传感装置与外接电路电连接。使用时，第一引出电极3004和第二引出电极3005分别连接引出线或通过导电轨迹与外部电路相连接，使用时，可只将电极3001或电极3002与要测量的振动物体机械连接，但为了增加压电传感装置与要测量的振动物体的接触面积，提高检测精度，本实施例中，将电极3001和电极3002同时与要测量的振动物体机械连接，以下实施例结构中，为增大压电传感装置与要测量的振动物体的接触面积，均采用该种方式连接。
如图4所示，为实施例1的第四种结构示意图，该结构包括第一引出电极4001、电极4002、第二引出电极4003、电极4004、第一压电区4007、第二压电区4008、第三压电区4009、第四压电区4010和电极4006。其中，第一压电区4007、第二压电区4008、第三压电区4009、第四压电区4010处于同一压电材料4005中，即四个压电区处于同一压电结构中，四个压电区均为上表面为正极表面、下表面为负极表面，四个压电区的极化方向为从正极表面指向负极表面。分别在四个压电区的正极表面和负极表面耦合电极，第一引出电极4001、电极4002和第二引出电极4003为正电极，电极4004和电极4006为负电极，电极4004连接第一压电区的负极表面和第二压电区的负极表面，电极4002连接第二压电区的正极表面和第三压电区的正极表面，电极4006连接第三压电区的负极表面和第四压电区的负极表面，第一引出电极4001和第二引出电极4003用于将压电传感装置与外接电路电连接。使用时，第一引出电极4001和第二引出电极4003分别连接引出线或通过导电轨迹与外部电路相连接，电极4004和电极4006与要测量的振动物体机械连接。
实施例2
如图5～图8所示，为本发明实施例2的四种不同结构，本实施例与实施例1的区别在于，实施例1中是在同一压电区的正极表面和负极表面放置多个电极，形成的一个压电结构中具有多个压电区的压电传感装置，本实施例中是在不同的压电区的正极表面和负极表面放置电极，形成每个压电区分别在不同的压电结构中的压电传感装置。其中，不同的压电区之间可以用绝缘材料相连接，也可以不采用任何材料连接，所述的绝缘材料要有一定的强度，比如塑料、绝缘陶瓷、亚克力等。所述的绝缘材料起到加强结构强度的作用，使所述压电传感装置在安装和使用过程中，更加坚固耐用，不易损坏。此外，多个压电区之 间的距离可调，多个压电区之间的距离不固定，可根据具体应用情况而调整，例如根据测量物体形状或厚度而调整；若压电区之间包括填充的绝缘材料，则填充的绝缘材料在压电区排列方向上长度不固定，可根据具体应用情况而调整，例如根据测量物体形状或厚度而调整。具体如下所示。
如图5所示，为实施例2的第一种结构示意图，该结构包括第一引出电极5004、第二引出电极5005、第一压电区5003、电极5001、电极5002、第二压电区5006和连接线5007。其中，第一压电区5003和第二压电区5006分别处于两个不同的压电材料中，即两个压电区分别处于两个不同的压电结构中。两个压电区均为上表面为正极表面，下表面为负极表面，极化方向均为从正极表面指向负极表面。分别在第一压电区5003和第二压电区5006的正极表面和负极表面耦合电极，电极5001和电极5002为正电极，第一引出电极5004和第二引出电极5005为负电极。电极5001、第一压电区5003和第一引出电极5004构成第一压电结构，电极5002、第二压电区5006和第二引出电极5005构成第二压电结构，且两个压电结构的极化方向均为从正电极指向负电极，连接线5007连接第一压电结构和第二压电结构的两个正电极，即电极5001和电极5002，第一引出电极5004和第二引出电极5005用于将压电传感装置与外接电路电连接。使用时，第一引出电极5004和第二引出电极5005分别连接引出线或通过导电轨迹与外部电路相连接，电极5001和电极5002与要测量的振动物体机械连接。
如图6所示，为实施例2的第二种结构示意图，图6中包括(a)和(b)两种结构。图6(a)中结构包括第一引出电极6001、第二引出电极6002、第一压电区6003、电极6004和第二压电区6005。其中，第一压电区6003和第二压电区6005分别处于两个不同的压电材料中，即两个压电区分别处于两个不同的压电结构中。两个压电区均为下表面为正极表面，上表面为负极表面，极化方向均为从正极表面指向负极表面。分别在第一压电区6003和第二压电区6005的正极表面和负极表面耦合电极，电极6004为正电极，第一引出电极6001和第二引出电极6002为负电极。电极6004、第一压电区6003和第一引出电极6001构成第一压电结构，电极6004、第二压电区6005和第二引出电极6002构成第二压电结构，且两个压电结构的极化方向均为从正电极指向负电极，电极6004连接第一压电结构的正电极和第二压电结构的正电极，第一引出电极6001和第二引出电极6002用于将压电传感装置与外接电路电连接。使用时，第一引出电极6001和第二引出电极6002分别连接引出线或通过导电轨迹与外部电路相连接，电极6004与要测量的振动物体粘连。图6(b)中结构，与图6(a)中结构相比，还包括绝缘连接片6006，该绝缘连接片起到加强结构强度的作用， 使所述压电传感装置在安装和使用过程中，更加坚固耐用，不易损坏。
如图7所示，为实施例2的第三种结构示意图，该结构包括第一引出电极7001、电极7002、第二引出电极7007、第一压电区7003、电极7004、第二压电区7005和第三压电区7006。其中，第一压电区7003、第二压电区7005和第三压电区7007分别处于三个不同的压电材料中，即三个压电区分别处于三个不同的压电结构中。三个压电区均为上表面为正极表面，下表面为负极表面，极化方向均为从正极表面指向负极表面。分别在第一压电区7003、第二压电区7005和第三压电区7007的正极表面和负极表面耦合电极，第一引出电极7001、电极7002为正电极，电极7004和电极7007为负电极，第一压电区7003、第二压电区7005和第三压电区7006的极化方向为从正电极指向负电极，第一引出电极7001、第一压电区7003与电极7004构成第一压电结构，电极7002、第二压电区7005和电极7004构成第二压电结构，电极7002、第三压电区7006和第二引出电极7007构成第三压电结构，且三个压电结构的极化方向均为从正电极指向负电极，电极7004连接第一压电结构的负电极和第二压电结构的负电极，电极7002连接第二压电结构的正电极和第三压电结构的正电极，第一引出电极7001和第二引出电极7007用于将压电传感装置与外接电路电连接。使用时，第一引出电极7001和第二引出电极7007分别连接引出线或通过导电轨迹与外部电路相连接。然而，本结构中，由于第一引出电极7001与第二引出电极7007不在同一平面内，因此，在使用时，不能同时将电极7002与电极7004机械连接于要测量的振动物体上，对使用造成了不便，因此，对本结构进行改进，得到实施例2的第四种结构。
如图8所示，为实施例2的第四种结构示意图，该结构包括第一引出电极8001、电极8002、第二引出电极8003、第一压电区8004、电极8005、第二压电区8006、第三压电区8007、电极8008和第四压电区8009。其中，第一压电区8004、第二压电区8006、第三压电区8007和第四压电区8009分别处于四个不同的压电材料中，即四个压电区分别处于四个不同的压电结构中。四个压电区均为上表面为正极表面，下表面为负极表面，极化方向均为从正极表面指向负极表面。分别在第一压电区8004、第二压电区8006、第三压电区8007和第四压电区80099的正极表面和负极表面耦合电极，第一引出电极8001、电极8002和第二引出电极8003为正电极，电极8005和电极8008为负电极，第一压电区8004、第二压电区8006、第三压电区8007和第四压电区8009的极化方向为从正电极指向负电极，第一引出电极8001、第一压电区8004与电极8005构成第一压电结构，电极8002、第二压电区8006和电极8005构成第二压电结构，电极8002、第三压电区8007和电极8008构成第三压电结构，第二引出电极8003、第四压电区8009和电极8008构成第四压电结构，且四个压电结 构的极化方向均为从正电极指向负电极，电极8005连接第一压电结构的负电极和第二压电结构的负电极，电极8002连接第二压电结构的正电极和第三压电结构的正电极，电极8008连接第三压电结构和第四压电结构，第一引出电极，8001和第二引出电极8003用于将压电传感装置与外接电路电连接。使用时，第一引出电极8001和第二引出电极8003分别连接引出线或通过导电轨迹与外部电路相连接，且由于两个引出电极位于同一水平面上，因此，使用时，可将电极8005和电极8008与所要测量的振动物体机械连接使用。
如图9所示，为实施例2的第五种结构示意图，包括第一引出电极9001、电极9002、电极9003、电极9004、第二引出电极9005、第一压电区9006、第二压电区9007、第三压电区9008、第四压电区9009。其中，第一压电区9006、第二压电区9007、第三压电区9008和第四压电区8009分别处于四个不同的压电材料中，即四个压电区分别位于四个不同的压电结构中。四个压电区均为上表面为正极表面，下表面为负极表面，极化方向均为从正极表面指向负极表面。分别在第一压电区9006、第二压电区9007、第三压电区9008、第四压电区9009的正极表面和负极表面耦合电极，第一引出电极9001、电极9003和第二引出电极9005为正电极，电极9002和电极9004为负电极，第一压电区9006、第二压电区9007、第三压电区9008和第四压电区9009的极化方向为从正电极指向负电极，第一引出电极9001、第一压电区9006与电极9002构成第一压电结构，电极9002、第二压电区9007和电极9003构成第二压电结构，电极9003、第三压电区9008和电极9004构成第三压电结构，第二引出电极9005、第四压电区9009和电极9004构成第四压电结构，且四个压电结构的极化方向均为从正电极指向负电极，电极9002连接第一压电结构的负电极和第二压电结构的负电极，电极9003连接第二压电结构的正电极和第三压电结构的正电极，电极9004连接第三压电结构和第四压电结构，第一引出电极9001和第二引出电极9005用于将压电传感装置与外接电路电连接。使用时，第一引出电极9001和第二引出电极9005分别连接引出线或通过导电轨迹与外部电路相连接，电极9002和电极9004与要测量的振动物体机械连接。
如图10所示，为实施例2的第六种结构示意图，包括第一引出电极10001、电极10002、电极10003、电极10004、电极10005、电极10006、电极10007、电极10008、第二引出电极10009、第一压电区10010、第二压电区10011、第三压电区10012、第四压电区10013、第五压电区10014、第六压电区10015、第七压电区10016和第八压电区10017。其中，第一压电区10010、第二压电区10011、第三压电区10012、第四压电区10013、第五压电区10014、第六压电区10015、第七压电区10016和第八压电区10017分别处于八个不同的压电材料中，即八个压电区分别处于八个不同的压电结构中。八个压电区均为上表面为正极 表面，下表面为负极表面，极化方向均为从正极表面指向负极表面。分别在第一压电区10010、第二压电区10011、第三压电区10012、第四压电区10013、第五压电区10014、第六压电区10015、第七压电区10016和第八压电区10017的正极表面和负极表面耦合电极，电极10002、电极10004、电极10006、电极10008为正电极；电极10001、电极10003、电极10005、电极10007和电极10009为负电极。第一引出电极10001、第一压电区10010和电极10002构成第一压电结构，电极10002、第二压电区10011和电极10003构成第二压电结构，电极10005、第三压电区10012和电极10004构成第三压电结构，电极10004、第四压电区10013和电极10003构成第四压电结构，电极10005、第五压电区10014和电极10006构成第五压电结构，电极10006、第六压电区10015和电极10007构成第六压电结构，第二引出电极10009、第七压电区10016和电极10008构成第七压电结构，电极10008、第八压电区10017和电极10007构成第八压电结构，且八个压电结构的极化方向均为从正电极指向负电极。电极10002连接第一压电结构的正电极和第二压电结构的正电极，电极10004连接第三压电结构的正电极和第四压电结构的正电极，电极10003连接第二压电结构的负电极和第四压电结构的负电极，电极10005连接第三压电结构的负电极和第五压电结构的负电极，电极10006连接第五压电结构的正电极和第六压电结构的正电极，电极10007电极第五压电结构的负电极和第八压电结构的负电极，电极10008连接第七压电结构的正电极和第八压电结构的正电极，第一引出电极10001和第二引出电极10009用于将压电传感装置与外接电路电连接。。使用时，第一引出电极10001和第二引出电极10009分别连接引出线或通过导电轨迹与外部电路相连接，电极10003和电极10007与要测量的振动物体机械连接。本结构中，压电结构采用分层方式连接，形成三维阵列形式排列分布，本实施例中只给出三维阵列形式分布的一种结构，即2X2X2的三维矩阵排列，除了本实施例中所示的三维矩阵排列方式，还可以采用如2X2X3、3X3X3、3X3X4、5X5X5等多种三维矩阵排列形式。
实施例3
如图11所示，为实施例3的结构示意图，本实施例与前述实施例不同之处在于，采用了圆形的压电体，包括第一引出电极11001、第二引出电极11002、压电体11003、连接电极11005.图中第一引出电极11001与第二引出电极11002与其对应的压电体的负极端耦合，连接电极11004与所述压电体的正极端耦合。该实施例中，采用了圆形压电体11003，相对于方形压电体更易于安装，可以适用于特定的安装场合。
实施例4
如图13所示，为本发明一种触摸检测装置结构示意图，包括触摸检测装置、压电传感装置、信号检测装置和信号分析装置。其中，用于接收触摸动作，压电传感装置用于将对触摸接收装置的触摸动作转化为压电信号，信号检测装置，用于检测压电传感装置输出的压电信号，信号处理装置，用于对检测到的压电信号进行分析，得到触摸位置信息，本实施例中，触摸接收装置为LED屏幕，压电传感装置至少为两个，若压电传感装置为两个，则分布于触摸接收装置一条对角线的两个端点位置，若压电传感装置为三个，则分别分布在触摸接收装置的四个角位置中的其中三个角位置，或者分别分布于触摸接收装置边界位置，若压电传感装置有四个，则分别分布于触摸接收装置的四个角位置或者分别分布在触摸接收装置边界位置，若压电传感装置为四个以上，则其中四个分布于触摸接收装置的四个角位置，其余压电传感装置分布于边界位置。，也可根据触摸接收装置的面积，将多个压电传感装置，即实施例1或实施例2中所述压电传感装置，排列为二维矩阵方式，如排列为3X3、5X5或7X7的矩阵，分布于触摸接收装置边界、角端和中间位置，若压电传感装置为3X3矩阵分布，则九个压电传感装置中，四个分布于角端，四个分布于触摸接收装置四条边的中间位置，一个分布于触摸接收装置中心点。
实施例5
如图14所示，本发明还提供一种触摸检测的方法，具体包括以下步骤：
触摸接收装置接收触摸动作，触摸接收装置可以为任何适合用于检测振动的装置，如玻璃板、塑料板、金属板等，也可为显示屏幕，如投影显示屏幕、液晶显示屏幕、LED显示屏幕、LCD显示屏幕或CRT显示屏幕等，本实施例中，触摸接收装置为LED显示屏幕，触摸动作包括对触摸接收装置的可产生压力的触摸，包括点击触摸、滑动触摸等；
压电传感装置检测到由触摸动作所产生的压力变化。本实施例中，压电传感装置为实施例1或实施例2中所述压电传感装置，且数量为四个，分别分布于LED显示屏幕的四个角，使用者点击触摸接收装置，即LED显示屏幕，则四个压电传感装置分别检测到触摸接收装置上压力的变化。
压电传感装置通过压电效应，将检测到的压力变化转化为电信号。压电传感装置由于压电效应，将压力变化转化为电荷变化，从而将其转化为电信号，并通过两个引出电极输出该电信号。
如图15所示，在上述触摸检测方法的基础上，做进一步改进，可以得到第二种触摸检测方法，本方法在第一种触摸检测方法的基础上，还包括以下步骤：
信号检测装置接收该压电信号，并对该信号进行预处理。其中，预处理包括为了保证 信号检测的准确性和可靠性而进行的必要的处理，如去噪处理或信号放大等；
信号处理装置对检测到的压电信号进行分析，得到触摸动作的触摸位置和/或触摸轨迹。即对四个压电传感装置分别检测到的电信号进行处理，得到触摸位置，若触摸为连续触摸，如滑动触摸，可对触摸位置的变化进行对比分析，得到触摸轨迹。
本实施例中，也可根据触摸接收装置的面积，将多个压电传感装置，即实施例1或实施例2中所述压电传感装置，排列为二维矩阵方式，如排列为3X3、5X5或7X7的矩阵，分布于触摸接收装置边界、角端和中间位置，若压电传感装置为3X3矩阵分布，则九个压电传感装置中，四个分布于角端，四个分布于触摸接收装置四条边的中间位置，一个分布于触摸接收装置中心点，通过检测矩阵式排列的压电传感装置检测到的电信号，分析得到触摸位置，若触摸为连续触摸，如滑动触摸，可对触摸位置的变化进行对比分析，得到触摸轨迹，通过增加压电传感装置的数量，提高检测精确度。
应当理解，以上借助优选实施例对本发明的技术方案进行的说明是示意性的而非限制性的。本领域的普通技术人员在上述实施例的基础上可以对各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，都应涵盖在本发明的保护范围之内。因此，本发明的保护范围应该以权利要求的保护范围为准。

Claims (10)

  1. 一种压电传感装置，其特征在于，包括多个压电区，每个压电区包括压电体、正极表面和负极表面，其中，多个所述压电区从第一个到最后一个依次采用相邻压电区同极表面与同极表面电连接的方式连接，即正极表面与正极表面电连接，或负极表面与负极表面电连接；所述的压电体是指具有压电效应的材料体。
  2. 根据权利要求1所述的压电传感装置，其特征在于，还包括第一引出电极和第二引出电极，分别耦合于第一压电区和最后一个压电区的与相邻压电区的非连接端。
  3. 根据权利要求1所述的压电传感装置，其特征在于，还包括除第一引出电极和第二引出电极外的连接电极，所述连接电极包括刚性连接或者柔性连接。
  4. 根据权利要求1所述的压电传感装置，其特征在于，所述多个压电区使用同一压电体的不同部分。
  5. 根据权利要求1所述的压电传感装置，其特征在于，所述多个压电区使用不同的、相互独立的压电体。
  6. 根据权利要求1所述的压电传感装置，其特征在于，所述多个压电区以并齐排列的方式排列分布，或者，所述多个压电区以直线链接形式排列分布，
    或者，所述多个压电区以二维阵列形式排列分布，
    或者，所述多个压电区以分层形式排列分布，或者，所述多个压电区以三维阵列形式排列分布。
  7. 根据权利要求1所述的压电传感装置，其特征在于，所述多个压电区的压电体之间包括填充的绝缘材料。
  8. 根据权利要求1所述的压电传感装置，其特征在于，所述多个压电区的压电体之间的距离可调。
  9. 根据权利要求1所述的压电传感装置，其特征在于，所述多个压电区的压电体形状不限定于方形，也可以是圆形或者其它形状。
  10. 一种触摸接收装置，包括权利要求1-9任一项所述的压电传感装置。
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US20190267995A1 (en) 2019-08-29
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