WO2018220958A1 - エンコーダ用受光モジュール及びエンコーダ - Google Patents
エンコーダ用受光モジュール及びエンコーダ Download PDFInfo
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- WO2018220958A1 WO2018220958A1 PCT/JP2018/011376 JP2018011376W WO2018220958A1 WO 2018220958 A1 WO2018220958 A1 WO 2018220958A1 JP 2018011376 W JP2018011376 W JP 2018011376W WO 2018220958 A1 WO2018220958 A1 WO 2018220958A1
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- WO
- WIPO (PCT)
- Prior art keywords
- light receiving
- light
- encoder
- wall portion
- receiving element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
- G01D5/34723—Scale reading or illumination devices involving light-guides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3807—Dismountable connectors, i.e. comprising plugs
- G02B6/3897—Connectors fixed to housings, casing, frames or circuit boards
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/40—Optical elements or arrangements
Definitions
- One aspect of the present invention relates to a light receiving module for an encoder and an encoder.
- An encoder including a rotating plate having a light passage pattern, a light source disposed on one side with respect to the rotating plate, and a light receiving element disposed on the other side with respect to the rotating plate is known (for example, a patent) Reference 1).
- the encoder in order to protect the light receiving element from physical contact, it is conceivable to arrange the light receiving element on a support having a bottom wall part and a side wall part. More specifically, it is conceivable to dispose the light receiving element on the bottom wall portion so as to be surrounded by the side wall portion when viewed from one side. However, even if the light receiving element is arranged on the bottom wall portion so that the light receiving surface faces one side, the light receiving surface can be brought close to the light passage pattern only immediately before the side wall portion contacts the rotating plate. Even in the case where the fixed plate having the light passage pattern is provided together with the rotating plate, the light receiving surface can be brought close to the light passing pattern only immediately before the side wall portion contacts the rotating plate or the fixed plate. If the light receiving surface cannot be brought close to the light passing pattern, the detection accuracy of the encoder may decrease due to light diffusion or the like.
- one aspect of the present invention provides a light receiving module for an encoder that can obtain good detection accuracy when applied to an encoder while protecting the light receiving element, and an encoder including such a light receiving module. For the purpose.
- a light receiving module for an encoder includes a bottom wall portion, a support having a side wall portion disposed on the bottom wall portion on one side of the bottom wall portion, a light receiving surface, and a light receiving surface. Is disposed on the bottom wall portion so as to face one side, and when viewed from one side, the light receiving element surrounded by the side wall portion, the input surface composed of one end surfaces of a plurality of optical fibers, and a plurality of A fiber optic plate having an output surface constituted by the other end surface of the optical fiber, and disposed on the light receiving element so that the output surface faces the light receiving surface, and the end surface on one side of the side wall portion has the light receiving surface
- the input surface is located on one side of the end surface.
- one end face of the side wall portion is located on one side with respect to the light receiving face of the light receiving element.
- the fiber optic plate is disposed on the light receiving element such that the output surface faces the light receiving surface.
- the input surface of the fiber optic plate is located on one side of the end surface on one side of the side wall portion.
- the input surface can be brought close to the light passage pattern of the encoder.
- the light receiving module for an encoder includes a wire provided on the bottom wall portion inside the side wall portion, a wire connected to a terminal provided on the light receiving element, and a bottom portion on the inner side of the side wall portion.
- the end surface of a side wall part is located in one side rather than a wire, it can suppress that external force acts on a wire. Furthermore, the input surface can be brought close to the light passage pattern of the encoder without being obstructed by the resin member.
- the fiber optic plate may be fixed to the light receiving element by a resin member. According to this, the structure for fixing the fiber optic plate to the light receiving element can be omitted, and the structure can be simplified.
- the light receiving module for an encoder may further include a light shielding layer having a light passage pattern and disposed between the light receiving surface and the output surface. According to this, the light which passed the light passage pattern which the rotary plate of an encoder has can be appropriately incident on the light receiving surface. Further, since the light passage pattern of the light shielding layer and the light receiving surface are close to each other, the positional accuracy between the light passage pattern of the light shielding layer and the light receiving surface can be improved. In addition, since the light passage pattern and the light receiving surface of the light shielding layer are transferred to the input surface via the output surface, the light passage pattern and the light receiving surface of the light shielding layer are optically close to the light passage pattern of the rotating plate. Can do. As a result, the detection accuracy when applied to the encoder is further improved.
- An encoder includes a rotating plate having a light passage pattern, a light source disposed on one side with respect to the rotating plate, and the encoder light receiving module disposed on the other side with respect to the rotating plate. . According to this encoder, as described above, good detection accuracy can be obtained while protecting the light receiving element.
- a light receiving module for an encoder capable of obtaining good detection accuracy when applied to an encoder while protecting a light receiving element, and an encoder including such a light receiving module. be able to.
- FIG. 1 is a perspective view of an encoder according to an embodiment.
- FIG. 2 is a plan view of the light receiving module shown in FIG.
- FIG. 3 is a cross-sectional view taken along line III-III in FIG.
- FIG. 4 is a cross-sectional view of a light receiving module according to a modification.
- the encoder 1 includes a rotating shaft 2, a rotating plate 3, a fixed plate 4, a light source 5, a light receiving module 6, and a processing unit 7.
- the rotating shaft 2 rotates about the axis A as a center line.
- the encoder 1 is a so-called absolute type rotary encoder, and is a device for detecting the absolute angle of the measurement object connected to the rotating shaft 2.
- the rotating plate 3 is fixed to the rotating shaft 2 and rotates together with the rotating shaft 2.
- the rotating plate 3 is formed in a disc shape, for example, and is attached to the rotating shaft 2 at the center so as to be orthogonal to the axis A.
- the rotating plate 3 has a light passage pattern 3a representing a predetermined pattern such as a gray code.
- the light passage pattern 3 a is configured by a plurality of slits that penetrate the rotating plate 3. These slits may be voids, or a transparent glass portion may be disposed in the slits.
- the fixed plate 4 is fixed at a position facing the rotating plate 3.
- the fixed plate 4 is formed in a rectangular plate shape, for example, and is arranged in parallel with the rotating plate 3.
- the fixed plate 4 has a light passage pattern 4 a formed so as to be positioned on a straight line connecting the light source 5 and the light passage pattern 3 a of the rotating plate 3.
- the light passage pattern 4 a is configured by a plurality of slits that penetrate the fixed plate 4. In the present embodiment, five slits are juxtaposed along the radial direction of the rotating plate 3. These slits may be voids, or a transparent glass portion may be disposed in the slits.
- the light source 5 is a light emitting element such as an LED (Light Emitting Diode).
- the light source 5 is fixed at a position opposite to the rotating plate 3 with respect to the fixed plate 4, and emits light toward the rotating plate 3.
- the light receiving module 6 is fixed to the rotating plate 3 and the fixed plate 4 at a position opposite to the light source 5.
- the light receiving module 6 has a plurality of light receiving surfaces 21a (FIGS. 2 and 3), and detects light incident on each light receiving surface 21a.
- the processing unit 7 is, for example, a signal processing circuit, encodes the light detection result on each light receiving surface 21a, and outputs Gray codes G0, G1, G2, G3, and G4 representing the absolute value of the rotation angle of the rotating shaft 2.
- the light receiving module 6 includes a support 11, a light receiving element 12, a fiber optic plate (hereinafter also referred to as “FOP”) 13, a wire 14, a resin member 15, It has.
- FOP fiber optic plate
- the support 11 is a substantially rectangular parallelepiped box having an opening on one side, a rectangular plate-like bottom wall 16, and a side wall 17 disposed on the bottom wall 16 on one side S of the bottom wall 16. ,have.
- the side wall portion 17 is provided along the outer edge of the bottom wall portion 16 and has a rectangular ring shape when viewed from one side S.
- the support 11 is formed, for example, by laminating a bottom wall portion 16 and a side wall portion 17 both made of glass epoxy resin.
- the bottom wall portion 16 is provided with a plurality of wirings 18 for outputting signals from the light receiving module 6 to the outside.
- the wiring 18 is exposed on the main surface 16a on the one side S in the bottom wall portion 16, the main surface 16b on the opposite side of the main surface 16a, and the side surface 16c continuous with the main surfaces 16a and 16b.
- the light receiving element 12 is a rectangular plate-shaped light receiving chip, and has a plurality of light receiving portions 21.
- the light receiving unit 21 is, for example, a photodiode or a photodiode array, and has a light receiving surface 21 a on the one surface 12 a side of the light receiving element 12.
- the light receiving element 12 is disposed (fixed) on the bottom wall portion 16 so that the light receiving surface 21a faces the one side S.
- the light receiving element 12 is surrounded by the side wall portion 17 when viewed from one side S.
- On one surface 12 a of the light receiving element 12, a plurality of terminals 19 for outputting a signal from the light receiving unit 21 are provided on one surface 12a.
- each light receiving surface 21a is disposed in a central region, and each terminal 19 is disposed outside the region.
- the FOP 13 is an optical device configured by bundling a plurality (many) of optical fibers.
- the FOP 13 includes tens of millions of optical fibers having a diameter of several nanometers to several tens of nanometers.
- the FOP 13 has a rectangular parallelepiped shape, for example, and has an input surface 13a and an output surface 13b facing each other.
- the input surface 13a is configured by one end surfaces of a plurality of optical fibers
- the output surface 13b is configured by the other end surfaces of the plurality of optical fibers.
- the FOP 13 is disposed on the light receiving element 12 so that the output surface 13 b faces the light receiving surface 21 a of the light receiving unit 21. More specifically, the output surface 13b faces a central region of the one surface 12a where the light receiving surface 21a is disposed.
- the FOP 13 light incident on the input surface 13a propagates through the optical fiber and is output from the output surface 13b. More specifically, light incident on a certain position on the input surface 13a is emitted from a position corresponding to the position on the output surface 13b. Therefore, by disposing the FOP 13 on the light receiving element 12, the light incident on the input surface 13a can be reliably guided to the light receiving surface 21a without diffusing.
- the wire 14 is a bonding wire that electrically connects the wiring 18 and the terminal 19 to each other inside the side wall portion 17.
- One end of the wire 14 is coupled to the exposed portion of the wiring 18 on the main surface 16 a side, and the other end is coupled to the terminal 19.
- the intermediate portion of the wire 14 is curved so as to be convex toward the one side S.
- the resin member 15 is disposed on the bottom wall portion 16 inside the side wall portion 17.
- the resin member 15 covers the exposed portion of the wiring 18 on the main surface 16a side, the terminal 19 and the wire 14, and includes the main surface 16a of the bottom wall portion 16, the inner surface 17a of the side wall portion 17, the one surface 12a of the light receiving element 12, and It couple
- the resin member 15 has a rectangular ring shape surrounding the FOP 13 when viewed from one side S.
- the resin member 15 enters (intervenes) between the one surface 12 a of the light receiving element 12 and the output surface 13 b of the FOP 13, and fixes the FOP 13 to the light receiving element 12.
- the resin member 15 is formed, for example, by potting a transparent resin such as a silicone resin. At the time of this potting, the uncured resin material injected onto the main surface 16 a of the bottom wall portion 16 is blocked by the inner surface 17 a of the side wall portion 17.
- An end surface 17b on one side S of the side wall portion 17 is located on one side S with respect to the light receiving surface 21a (one surface 12a) of the light receiving element 12, and the input surface 13a is located on one side S with respect to the end surface 17b.
- the end surface 17 b is located on one side S from the wire 14, and the input surface 13 a is located on one side S from the resin member 15.
- the end surface 17b, the light receiving surface 21a, and the input surface 13a are parallel to each other.
- the light receiving module 6 configured as described above is fixed at a position where the input surface 13a of the FOP 13 faces the light passage pattern 3a of the rotating plate 3 and is close thereto.
- the light passing pattern 3a of the rotating plate 3 and the light passing pattern 4a of the fixed plate 4 overlap on the straight line connecting the light source 5 and the light receiving surface 21a
- the light from the light source 5 is fixed to the rotating plate 3 and the fixed plate 4a.
- the light that has passed through the rotating plate 3 and the fixed plate 4 enters the input surface 13a, is guided by the FOP 13, and enters the light receiving surface 21a. Thereby, light is detected in each light receiving surface 21a.
- the end surface 17 b of the side wall portion 17 is located on the one side S with respect to the light receiving surface 21 a of the light receiving element 12.
- the FOP 13 is disposed on the light receiving element 12 such that the output surface 13b faces the light receiving surface 21a.
- the input surface 13 a of the FOP 13 is located on the one side S with respect to the end surface 17 b of the side wall portion 17.
- the input surface 13a can be brought close to the light passage pattern 3a of the encoder 1.
- the light that has passed through the light passage pattern 3a can be prevented from diffusing and entering the light receiving surface 21a. Therefore, according to the light receiving module 6, good detection accuracy can be obtained when applied to the encoder 1 while protecting the light receiving element 12.
- the light passing through the light passing pattern 3a is prevented from diffusing and entering the light receiving surface 21a.
- a light source 5 that emits light with high parallelism.
- the light receiving module 6 by making the input surface 13a close to the light passage pattern 3a, it is possible to suppress the light that has passed through the light passage pattern 3a from diffusing and entering the light receiving surface 21a. It is not necessary to use the light source 5 that emits light with high parallelism. Therefore, the freedom degree of selection of the light source 5 can be raised.
- the light receiving module 6 further includes a wire connected to the wiring 18 and the terminal 19, and a resin member 15 covering the wiring 18, the terminal 19 and the wire 14.
- the end surface 17 b of the side wall portion 17 is located on the one side S with respect to the wire 14, and the input surface 13 a is located on the one side S with respect to the resin member 15.
- the FOP 13 is fixed to the light receiving element 12 by the resin member 15. Thereby, the structure for fixing FOP13 with respect to the light receiving element 12 can be omitted, and the structure can be simplified.
- 1 side of this invention is not restricted to the said embodiment.
- the materials and shapes of each component are not limited to the materials and shapes described above, and various materials and shapes can be employed.
- the fixed plate 4 may be omitted.
- the light receiving module 6 is arranged so that the input surface 13 a of the FOP 13 faces the light passage pattern 3 a of the rotating plate 3.
- the light receiving module 6 may be configured as in the modified example shown in FIG.
- the light receiving module 6 further includes a light shielding layer 23 disposed between the light receiving surface 21 a of the light receiving element 12 and the output surface 13 b of the FOP 13.
- the light shielding layer 23 is provided on the light receiving surface 21a. More specifically, the light shielding layer 23 is provided in a region facing the output surface 13 b on the one surface 12 a of the light receiving element 12.
- the light shielding layer 23 has a light passage pattern formed at a position corresponding to the light passage pattern 4a of the fixed plate 4, and blocks light from the light source 5 at portions other than the light passage pattern.
- This light passage pattern is formed, for example, by removing a part of the light shielding layer 23 by patterning.
- the light that has passed through the light passage pattern 3a of the rotating plate 3 can be appropriately incident on the light receiving surface 21a.
- the positional accuracy between the light passage pattern of the light shielding layer 23 and the light receiving surface 21a can be improved.
- the light passage pattern of the light shielding layer 23 and the light receiving surface 21a are transferred to the input surface 13a via the output surface 13b, the light passage pattern of the light shielding layer 23 and the light receiving surface 21a pass through the light passage of the rotating plate 3. It can be optically close to the pattern.
- the light shielding layer 23 may be provided on the output surface 13 b of the FOP 13.
- the light shielding layer 23 may be provided on the input surface 13 a of the FOP 13.
- light incident at a certain position on the input surface 13a propagates through the optical fiber and is emitted from a position corresponding to the position on the output surface 13b. Therefore, the light that has passed through the light shielding layer 23 on the input surface 13a enters a certain position on the input surface 13a, is emitted from a position corresponding to the position on the output surface 13b, and enters the light receiving surface 21a of the light receiving element 12. Therefore, substantially the same effect as that obtained when the light shielding layer 23 is formed on the light receiving surface 21a can be obtained.
- the light source 5, the fixed plate 4, the rotating plate 3, and the light receiving module 6 are arranged in this order, but the light source 5, the rotating plate 3, the fixed plate 4, and the light receiving module 6 are arranged in this order. Also good.
- the light receiving module 6 is arranged so that the input surface 13 a of the FOP 13 faces the light passage pattern 4 a of the fixed plate 4. Even in such a modification, similarly to the above-described embodiment, it is possible to suppress the light that has passed through the light passage pattern 4a from diffusing and entering the light receiving surface 21a, while protecting the light receiving element 12. Good detection accuracy can be obtained.
- the wire 14 may be omitted.
- the wiring 18 is provided on the main surface 16 a of the bottom wall portion 16 at a position facing the back surface of the light receiving element 12, the terminal 19 is provided on the back surface side of the light receiving element 12, and the wiring 18 is provided on the back surface side of the light receiving element 12. And the terminal 19 may be connected.
- the resin member 15 may be omitted.
- the FOP 13 may be fixed to the light receiving element 12 with an adhesive or the like instead of the resin member 15.
- the encoder according to one aspect of the present invention may be applied to an incremental encoder.
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Abstract
Description
Claims (5)
- 底壁部、及び、前記底壁部の一方側において前記底壁部上に配置された側壁部を有する支持体と、
受光面を有し、前記受光面が前記一方側を向くように前記底壁部上に配置され、前記一方側から見た場合に前記側壁部によって包囲された受光素子と、
複数の光ファイバの一端面により構成された入力面、及び、前記複数の光ファイバの他端面により構成された出力面を有し、前記出力面が前記受光面と向かい合うように前記受光素子上に配置されたファイバオプティックプレートと、を備え、
前記側壁部における前記一方側の端面は、前記受光面よりも前記一方側に位置しており、前記入力面は、前記端面よりも前記一方側に位置している、エンコーダ用受光モジュール。 - 前記側壁部の内側において、前記底壁部に設けられた配線、及び、前記受光素子に設けられた端子に接続されたワイヤと、
前記側壁部の内側において前記底壁部上に配置され、前記配線、前記端子及び前記ワイヤを覆う樹脂部材と、を更に備え、
前記端面は、前記ワイヤよりも前記一方側に位置しており、前記入力面は、前記樹脂部材よりも前記一方側に位置している、請求項1に記載のエンコーダ用受光モジュール。 - 前記ファイバオプティックプレートは、前記樹脂部材によって前記受光素子に対して固定されている、請求項2に記載のエンコーダ用受光モジュール。
- 光通過パターンを有し、前記受光面と前記出力面との間に配置された遮光層を更に備える、請求項1~3のいずれか一項に記載のエンコーダ用受光モジュール。
- 光通過パターンを有する回転板と、
前記回転板に対して一方側に配置された光源と、
前記回転板に対して他方側に配置された請求項1~4のいずれか一項に記載のエンコーダ用受光モジュールと、を備えるエンコーダ。
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP18810808.8A EP3633323B1 (en) | 2017-05-31 | 2018-03-22 | Light-receiving module for encoder, and encoder |
| EP22176349.3A EP4089372B1 (en) | 2017-05-31 | 2018-03-22 | Light-receiving module for encoder, and encoder |
| US16/617,160 US11307060B2 (en) | 2017-05-31 | 2018-03-22 | Light-receiving module for encoder, and encoder |
| CN201880035336.8A CN110709673B (zh) | 2017-05-31 | 2018-03-22 | 编码器用受光模块及编码器 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-107863 | 2017-05-31 | ||
| JP2017107863A JP6383460B1 (ja) | 2017-05-31 | 2017-05-31 | エンコーダ用受光モジュール及びエンコーダ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2018220958A1 true WO2018220958A1 (ja) | 2018-12-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2018/011376 Ceased WO2018220958A1 (ja) | 2017-05-31 | 2018-03-22 | エンコーダ用受光モジュール及びエンコーダ |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11307060B2 (ja) |
| EP (2) | EP3633323B1 (ja) |
| JP (1) | JP6383460B1 (ja) |
| CN (1) | CN110709673B (ja) |
| TW (1) | TWI740037B (ja) |
| WO (1) | WO2018220958A1 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023181669A1 (ja) * | 2022-03-25 | 2023-09-28 | 浜松ホトニクス株式会社 | エンコーダ用光モジュール、エンコーダ、及びエンコーダ用光モジュールの製造方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7674993B2 (ja) | 2020-11-25 | 2025-05-12 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 光学式位置測定装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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- 2018-03-22 EP EP18810808.8A patent/EP3633323B1/en active Active
- 2018-03-22 US US16/617,160 patent/US11307060B2/en active Active
- 2018-03-22 CN CN201880035336.8A patent/CN110709673B/zh active Active
- 2018-03-22 EP EP22176349.3A patent/EP4089372B1/en active Active
- 2018-05-04 TW TW107115186A patent/TWI740037B/zh active
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| JP2007256692A (ja) * | 2006-03-24 | 2007-10-04 | Sendai Nikon:Kk | 光走査モジュール及びエンコーダ |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2023181669A1 (ja) * | 2022-03-25 | 2023-09-28 | 浜松ホトニクス株式会社 | エンコーダ用光モジュール、エンコーダ、及びエンコーダ用光モジュールの製造方法 |
| JP2023143023A (ja) * | 2022-03-25 | 2023-10-06 | 浜松ホトニクス株式会社 | エンコーダ用光モジュール、エンコーダ、及びエンコーダ用光モジュールの製造方法 |
| GB2632226A (en) * | 2022-03-25 | 2025-01-29 | Hamamatsu Photonics Kk | Optical module for encoder, encoder, and method of manufacturing optical module for encoder |
| JP7801159B2 (ja) | 2022-03-25 | 2026-01-16 | 浜松ホトニクス株式会社 | エンコーダ用光モジュール、エンコーダ、及びエンコーダ用光モジュールの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3633323A1 (en) | 2020-04-08 |
| US20200109969A1 (en) | 2020-04-09 |
| EP3633323A4 (en) | 2021-03-03 |
| JP2018205020A (ja) | 2018-12-27 |
| CN110709673A (zh) | 2020-01-17 |
| CN110709673B (zh) | 2025-08-12 |
| TWI740037B (zh) | 2021-09-21 |
| US11307060B2 (en) | 2022-04-19 |
| EP4089372B1 (en) | 2024-10-09 |
| EP4089372A1 (en) | 2022-11-16 |
| TW201904218A (zh) | 2019-01-16 |
| JP6383460B1 (ja) | 2018-08-29 |
| EP3633323B1 (en) | 2022-06-01 |
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