WO2020024860A1 - 微流控基板、微流控结构及其驱动方法 - Google Patents

微流控基板、微流控结构及其驱动方法 Download PDF

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Publication number
WO2020024860A1
WO2020024860A1 PCT/CN2019/097548 CN2019097548W WO2020024860A1 WO 2020024860 A1 WO2020024860 A1 WO 2020024860A1 CN 2019097548 W CN2019097548 W CN 2019097548W WO 2020024860 A1 WO2020024860 A1 WO 2020024860A1
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WIPO (PCT)
Prior art keywords
driving
substrate
auxiliary electrode
electrode
microfluidic
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Ceased
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PCT/CN2019/097548
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English (en)
French (fr)
Inventor
刘英明
董学
王海生
陈小川
丁小梁
王雷
李昌峰
顾品超
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BOE Technology Group Co Ltd
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BOE Technology Group Co Ltd
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Priority to US16/633,016 priority Critical patent/US11331666B2/en
Priority to EP19843941.6A priority patent/EP3831480A4/en
Publication of WO2020024860A1 publication Critical patent/WO2020024860A1/zh
Anticipated expiration legal-status Critical
Priority to US17/726,119 priority patent/US12017219B2/en
Priority to US18/664,880 priority patent/US12251699B2/en
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
    • B01L3/502792—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics for moving individual droplets on a plate, e.g. by locally altering surface tension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0645—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0819—Microarrays; Biochips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/16—Surface properties and coatings
    • B01L2300/161—Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
    • B01L2300/165—Specific details about hydrophobic, oleophobic surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic

Definitions

  • the disclosure belongs to the technical field of microfluidics in micro-total analysis, and particularly relates to a microfluidic substrate, a microfluidic structure, and a driving method thereof.
  • Micro-total analysis is a technology that maximizes the transfer of the functions of an analysis laboratory to a portable analysis device through the miniaturization and integration of chemical analysis equipment.
  • Microfluidics is an important method for micro-total analysis. It is a technology that precisely controls the movement of tiny droplets according to the required trajectory. By controlling the movement and separation of droplets, the expected miniature chemical reactions and biological detection can be performed. Wait for micro-total analysis.
  • the present disclosure provides a microfluidic substrate including a substrate and a plurality of driving electrodes disposed on the substrate and used to drive droplet movement, the plurality of driving electrodes being disposed on the same layer and adjacent to the driving electrodes. There is a gap between them; wherein the microfluidic substrate further includes:
  • At least one auxiliary electrode which is disposed on the substrate and is used to drive the movement of the droplet, and the orthographic projection of the auxiliary electrode on the substrate and the orthographic projection on the substrate are at least partially Overlap, and the auxiliary electrode and the driving electrode are disposed in different layers.
  • the orthographic projection of the auxiliary electrode on the substrate covers at least the orthographic projection of the interval on the substrate.
  • the orthographic projection of the auxiliary electrode on the substrate coincides with the orthographic projection of the interval on the substrate.
  • the plurality of driving electrodes are arranged in an array, with row intervals between driving electrodes of adjacent rows and column intervals between driving electrodes of adjacent columns;
  • the auxiliary electrode includes:
  • a strip-shaped first auxiliary electrode provided at least partially in the row interval
  • a strip-shaped second auxiliary electrode provided at least partially in the column interval, and the second auxiliary electrode and the first auxiliary electrode are insulated from each other.
  • the second auxiliary electrode and the first auxiliary electrode are disposed on different layers and have an overlap, and at least an insulating layer is provided between the second auxiliary electrode and the first auxiliary electrode at the overlap.
  • a strip-shaped first auxiliary electrode is provided in each of the row intervals
  • a strip-shaped second auxiliary electrode is provided in each of the column intervals.
  • the microfluidic substrate further includes a plurality of first gate lines extending in a row direction, a plurality of driving lines extending in a column direction, a plurality of driving transistors, the plurality of driving transistors, and a plurality of driving transistors.
  • the plurality of driving electrodes are arranged in an array and correspond one-to-one. There is a row interval between the driving electrodes of adjacent rows and a column interval between the driving electrodes of adjacent columns.
  • each driving electrode is connected to the first pole of its corresponding driving transistor, the gate of each driving transistor corresponding to each row of driving electrodes is connected to a first gate line, and the second electrode of each driving transistor corresponding to each column of driving electrodes is connected.
  • One drive line is connected to the first pole of its corresponding driving transistor, the gate of each driving transistor corresponding to each row of driving electrodes is connected to a first gate line, and the second electrode of each driving transistor corresponding to each column of driving electrodes.
  • the auxiliary electrode includes:
  • a strip-shaped first auxiliary electrode provided at least partially in the row interval
  • a strip-shaped second auxiliary electrode disposed at least partially in the column interval, the second auxiliary electrode and the first auxiliary electrode being insulated from each other;
  • the first gate line is disposed in a row interval, and the first auxiliary electrode is located on a side of the first gate line away from the substrate;
  • the driving line is disposed in a column interval, and the second auxiliary electrode is located on a side of the driving line away from the substrate.
  • the auxiliary electrodes are block-shaped, and each auxiliary electrode is located at a space between two adjacent driving electrodes and is electrically connected to one adjacent driving electrode.
  • the orthographic projection of the auxiliary electrode on the substrate and the orthographic projection of the driving electrode connected to the auxiliary electrode at least partially overlap, and the auxiliary electrode passes through the auxiliary electrode and Via holes of the insulating layer between the connected driving electrodes are electrically connected to the driving electrodes.
  • the auxiliary electrode is disposed on a side of the driving electrode remote from the substrate.
  • the auxiliary electrode is composed of a metal material.
  • the microfluidic substrate further includes: a plurality of photosensitive devices disposed on a substrate.
  • the orthographic projection of the photosensitive device on the substrate is covered by the orthographic projection of the driving electrode on the substrate;
  • the driving electrode is disposed on a side of the photosensitive device remote from the substrate, and is made of a transparent conductive material.
  • the microfluidic substrate further includes a plurality of second gate lines extending in a row direction, a plurality of detection lines extending in a column direction, and a plurality of detection transistors corresponding one-to-one to the photosensitive device;
  • a plurality of photosensitive devices are arranged in an array, wherein each photosensitive device is connected to the first pole of its corresponding detection transistor, the gate of each detection transistor corresponding to each row of photosensitive devices is connected to a second gate line, and each column of photosensitive devices corresponds to A second line of each of the detection transistors is connected to a detection line.
  • the present disclosure provides a microfluidic structure including:
  • a microfluidic substrate according to an embodiment of the present disclosure is a microfluidic substrate according to an embodiment of the present disclosure
  • a cassette substrate opposite to the microfluidic substrate, one side of the microfluidic substrate having a driving electrode facing the cassette substrate, and one side of the cassette facing substrate facing the microfluidic substrate is provided with a drive.
  • the electrode is a common electrode, and a space for accommodating liquid droplets is formed between the microfluidic substrate and the counter-cell substrate.
  • a liquid-repellent layer is provided on the side of the microfluidic substrate closest to the box substrate;
  • a liquid-repellent layer is provided on the side of the pair of box substrate closest to the microfluidic substrate.
  • the microfluidic substrate is a microfluidic substrate with a photosensitive device, and the pair of substrates further includes:
  • An optical waveguide layer for transmitting light and directing the light toward the microfluidic substrate.
  • the present disclosure provides a driving method of a microfluidic structure, which includes:
  • a common voltage is applied to a common electrode, a driving voltage is applied to a driving electrode at a first position, and a driving voltage is applied to an auxiliary electrode at a second position to form a driving electric field to drive droplet movement; wherein the first position represents the droplet
  • the position where the driving electrode to be moved is located in the moving direction of, and the second position indicates the position where the auxiliary electrode is to be moved in the moving direction of the droplet.
  • a driving voltage applied to the auxiliary electrode is equal to a driving voltage applied to at least one driving electrode adjacent to the auxiliary electrode.
  • FIG. 1 is a schematic diagram of the droplet movement driven by a microfluidic structure
  • FIG. 2 is a schematic diagram of a partial structure of a microfluidic substrate according to an embodiment of the present disclosure
  • FIG. 3 is a schematic cross-sectional structure view taken along AA 'in FIG. 1;
  • FIG. 4 is a cross-sectional structure diagram along BB 'in FIG. 1;
  • FIG. 5 is a schematic cross-sectional structure view along CC ′ in FIG. 1;
  • FIG. 6 is a schematic partial structure diagram of another microfluidic substrate according to an embodiment of the present disclosure.
  • FIG. 7 is a schematic diagram of a microfluidic structure driving liquid droplet movement according to an embodiment of the present disclosure
  • FIG. 8 is another schematic diagram of a microfluidic structure driving liquid droplet movement according to an embodiment of the present disclosure
  • FIG. 9 is another schematic diagram of a microfluidic structure driving liquid droplet movement according to an embodiment of the present disclosure.
  • FIG. 10 is a schematic partial cross-sectional structure diagram of a microfluidic structure according to an embodiment of the present disclosure
  • FIG. 11 is a schematic diagram of determining a droplet position by a microfluidic substrate according to an embodiment of the present disclosure
  • FIG. 12 is a flowchart of a process for preparing a microfluidic substrate according to an embodiment of the present disclosure
  • FIG. 13 is a positional relationship diagram between a space and a driving electrode in a microfluidic substrate according to an embodiment of the present disclosure.
  • FIG. 14 is a schematic diagram showing a connection relationship between a driving transistor, a driving electrode, a first gate, and a driving line, and a connection relationship between a detection transistor, a photosensitive device, a second gate, and a detection line.
  • the two structures "set up in the same layer” means that they are formed by the same material layer through processes such as photolithography, so they are in the same layer in a stacked relationship, but they do not represent the relationship between them and the substrate.
  • the equal distance does not mean that they are exactly the same as other layer structures between the substrate.
  • the two structures are “disposed in different layers” means that the two structures are not disposed in the same layer, but are disposed in different layers, but it does not mean that the distance between them and the substrate is necessarily different.
  • the A structure provided on the B structure “away from the substrate” means that the A structure and the B structure are provided on the same side of the substrate, but in different layers, and the layer where the A structure is located is more than the layer where the B structure is located Away from the base; therefore, if both A and B structures exist at the same location, the A structure must be farther from the base than the B structure, but it does not mean that the distance between the A structure and the base at any position is greater than the B structure and The distance between the substrates.
  • row, column only indicates two intersecting (especially orthogonal) relative directions, and has nothing to do with the shape, placement manner, etc. of the substrate product.
  • the existing microfluidic structure includes two opposite substrates.
  • One of the substrates is provided with an array of driving electrodes 51, and the other substrate is provided with a common electrode 52.
  • the two substrates are on opposite sides of each other.
  • Each is provided with a liquid-repellent layer 99 (that is, a layer having liquid-repellent properties to the liquid droplets), and the liquid droplet 9 is located between the two liquid-repellent layers 99.
  • a predetermined common voltage is applied to the common electrode 52, by applying different driving voltages to the driving electrodes 51 at different positions of the droplet 9, a specific driving electric field can be generated in the droplet 9 and its surroundings, and the droplet 9 can be caused to generate a specific The deformation and movement, so as to control the droplet 9.
  • This embodiment provides a microfluidic substrate, including a substrate.
  • the substrate is provided with a plurality of driving electrodes for driving the movement of droplets.
  • Each driving electrode is disposed on the same layer with a gap between adjacent driving electrodes.
  • At least one auxiliary electrode provided on the substrate for driving the movement of the droplet, the auxiliary electrode is at least partially disposed in the space, and is disposed in a different layer from the driving electrode.
  • the auxiliary electrode and the driving electrode are provided in different layers, which can be expressed as the auxiliary electrode and the driving electrode are spaced apart from each other by an insulating layer in a thickness direction.
  • interval means a gap between adjacent driving electrodes 51 and the entire space of the gap vertically upward and vertically downward (gray area in FIG. 13). That is, a portion between adjacent driving electrodes and surrounded by the adjacent driving electrodes is a gap, and the gap and an extension thereof in a direction perpendicular to the substrate are spaced.
  • an auxiliary electrode that can be used to drive droplet movement is provided at the interval between the driving electrodes.
  • the auxiliary electrode and the driving electrode are in different layers, so they can overlap with the driving electrode, so that it can drive A driving electric field is also formed at the interval between the electrodes, eliminating or reducing positions where a driving electric field cannot be formed, and achieving smoother control of the droplets.
  • this embodiment provides a microfluidic substrate, which includes:
  • each driving electrode 51 is disposed on the same layer and there is a gap 59 between adjacent driving electrodes 51;
  • At least one auxiliary electrode 6 provided on the substrate 8 to drive the liquid droplets 9 to move.
  • the auxiliary electrode 6 is at least partially disposed in the interval 59 and is disposed in a different layer from the driving electrode 51.
  • the base 8 refers to a substrate for carrying other structures, and may be a plate shape.
  • the plurality of driving electrodes 51 are arranged in the same layer and arranged side by side in an array (for example, a rectangular array) for applying a driving voltage to drive the droplet 9 to move.
  • an array for example, a rectangular array
  • the driving electrodes 51 are arranged in the same layer, They cannot be in contact with each other, but a certain gap must be provided to ensure that different driving electrodes 51 are insulated from each other.
  • an auxiliary electrode 6 is further provided in the interval 59 of the driving electrode 51.
  • the auxiliary electrode 6 is provided on the side of the substrate 8 having the driving electrode 51.
  • the auxiliary electrode 6 can also be loaded with a dynamic voltage to drive the droplets 9, thereby eliminating or reducing the position where the driving electric field cannot be formed, and realizing 9 smoother controls.
  • the orthographic projection of the auxiliary electrode 6 on the substrate 8 covers at least the orthographic projection of the interval 59 on the substrate 8.
  • the orthographic projection of the auxiliary electrode 6 on the substrate 8 coincides with the orthographic projection of the interval 59 on the substrate 8.
  • the auxiliary electrode 6 and the driving electrode 51 are provided in different layers, even if they overlap with the orthographic projection of the driving electrode 51 on the substrate 8, the different driving electrodes 51 will not be conductive with each other.
  • the auxiliary electrode 6 (that is, the first auxiliary electrode 61 and the second auxiliary electrode 62 described later) may cover the interval 59 (that is, the row interval 591 and the column interval described later). 592) (interval 59 may be exceeded, for example, see FIG. 6) to completely eliminate locations where a driving electric field cannot be generated.
  • the orthographic projection of the auxiliary electrode 6 on the substrate 8 may completely overlap the interval 59 where the auxiliary electrode 6 is located.
  • the auxiliary electrode 6 is disposed on the driving electrode 51 side away from the substrate 8.
  • the auxiliary electrode 6 and the driving electrode 51 when the auxiliary electrode 6 and the driving electrode 51 are provided on the same side of the substrate 8, the auxiliary electrode 6 can be farther away from the substrate 8 than the driving electrode 51.
  • the process for preparing the related structure of the driving electrode 51 does not need to be changed.
  • the process is relatively easy to implement.
  • the auxiliary electrode 6 may be composed of a metal material.
  • the driving electrodes 51 are arranged in an array, the driving electrodes 51 of adjacent rows have a row interval 591, and the driving electrodes 51 of adjacent columns have a column interval 592.
  • the auxiliary electrode 6 includes a strip-shaped first auxiliary electrode 61 provided at least partially in the row interval 591 and a strip-shaped second auxiliary electrode 62 provided at least partially in the column interval 592,
  • the second auxiliary electrode 62 and the first auxiliary electrode 61 are insulated from each other.
  • the driving electrodes 51 are arranged in a plurality of rows and columns in a matrix form, so a plurality of “row intervals 591” extending in the row direction and a plurality of “column intervals 592” extending in the column direction can be formed therein. Therefore, the auxiliary electrode 6 may also include a first auxiliary electrode 61 distributed along the row interval 591 and a second auxiliary electrode 62 distributed along the column interval 592. In this case, the first auxiliary electrode 61 and the second auxiliary electrode 62 remain insulated to avoid signal interference between the two.
  • a strip-shaped first auxiliary electrode 61 is provided in each row interval 591; a strip-shaped second auxiliary electrode 62 is provided in each column interval 592.
  • the first auxiliary electrode 61 may be provided in all the row intervals 591, and each row interval 591 has only one first auxiliary electrode 61, and the first auxiliary electrode 61 occupies the row interval 591; similarly, There is also only one second auxiliary electrode 62 in each column interval 592. That is, the auxiliary electrode 6 completely occupies the space of the interval 59 when viewed in a plan view. In this way, the auxiliary electrodes 6 can be filled in all the spaces 59, thereby completely eliminating positions where a driving electric field cannot be generated, thereby improving driving accuracy. Since only one auxiliary electrode 6 is provided in each interval 59, the total number of the auxiliary electrodes 6 is not too large, which is convenient for control. For example, a signal can be directly provided to one auxiliary electrode 6 through each port of the driving chip (IC).
  • IC driving chip
  • the second auxiliary electrode 62 and the first auxiliary electrode 61 are provided in different layers and have an overlap, and an insulating layer is provided at least between the second auxiliary electrode 62 and the first auxiliary electrode 61.
  • the first auxiliary electrode 61 and the second auxiliary electrode 62 respectively occupy the row interval 591 and the column interval 592, they will inevitably overlap (as shown in FIG. 2, the overlap occurs at the intersection of the row interval 591 and the column interval 592 ),
  • the first auxiliary electrode 61 and the second auxiliary electrode 62 can be located in different layers, and as shown in FIG. 5, the two can be covered by an insulating layer (such as a fourth passivation layer 808) at the overlap. ) Separated.
  • the microfluidic substrate further includes a plurality of first gate lines 31 extending in a row direction, a plurality of driving lines 41 extending in a column direction, and a plurality of driving transistors D1.
  • each of the driving electrodes 51 and each of the driving transistors D1 are disposed between an adjacent first gate line 31 and an adjacent driving line 41.
  • the driving transistor D1 is used to control a driving voltage applied to the driving electrode 51 to drive the liquid droplets 9 on the driving electrode to move.
  • the driving electrode 51 corresponds to a driving transistor D1 that controls the driving electrode 51.
  • the driving electrodes 51 are arranged in an array, the driving electrodes 51 of adjacent rows have a row interval 591, and the driving electrodes 51 of adjacent columns have a column interval 592.
  • FIG. 14 shows details of a part in FIG. 2, each driving electrode 51 is connected to a first pole of its corresponding driving transistor D1, and each row of driving electrodes 51 corresponds
  • the gate of each driving transistor D1 is connected to a first gate line 31, and the second electrode of each driving transistor D1 corresponding to each column of driving electrodes 51 is connected to a driving line 41.
  • the number of the driving electrodes 51 since the number of the driving electrodes 51 is large, it can be controlled by a transistor array, that is, turn-on signals are provided to the first gate lines 31 so that the driving transistors D1 of each row are turned on in turn.
  • the driving transistor D1 of a certain row When the driving transistor D1 of a certain row is turned on, the driving voltage can be supplied to each driving electrode 51 of the row through each driving line 41. In this way, a large number of driving electrodes 51 are controlled with fewer leads.
  • the auxiliary electrode 6 includes a first auxiliary electrode 61 and a second auxiliary electrode 62.
  • the first grid line 31 is provided in the row interval 591, and the row space 591 where the first grid line 31 is provided is also provided.
  • the first auxiliary electrode 61 is located on a side of the first gate line 31 away from the substrate 8 (see FIG. 3).
  • the driving line 41 is provided in the column interval 592, and the second auxiliary electrode 62 is also provided at the column interval 592 where the driving line 41 is provided, and the second auxiliary electrode 62 is located on the driving line 41 side away from the substrate 8 (see FIG. 4).
  • the first gate line 31, the driving line 41, and the first auxiliary electrode 61 and the second auxiliary electrode 62 may be disposed on the same side of the substrate, as shown in FIG. 2, FIG. 3, and FIG.
  • a gate line 31 and a driving line 41 may also be located in the row interval 591 and a column interval 592, respectively.
  • the corresponding first auxiliary electrode 61 and the second auxiliary electrode 62 are located in the first gate line 31 and the driving line 41, respectively.
  • the effect of the signals in the first gate line 31 and the driving line 41 on the droplet 9 is shielded.
  • the auxiliary electrodes 6 are block-shaped, and each auxiliary electrode 6 is located at an interval 59 between two adjacent driving electrodes 51 and is electrically connected to one adjacent driving electrode 51. .
  • the auxiliary electrodes 6 may not be strip-shaped, but may be “small”, and each auxiliary electrode 6 is only located between two adjacent driving electrodes 51.
  • the auxiliary electrode 6 is also electrically connected to one of the driving electrodes 51 adjacent to the auxiliary electrode 6 (for example, it is electrically connected through a via hole passing through an insulating layer between the auxiliary electrode 6 and the one driving electrode 51.
  • the black dots in FIG. 6 indicate Hole), so that the signal of the auxiliary electrode 6 is also the same as the signal of the driving electrode 51. This is equivalent to “expanding” the driving electrode 51 to the position of the original interval 59, so that the position where the driving electric field cannot be formed can also be reduced.
  • each driving electrode 51 there are spaces 59 on each side. All of these spaces 59 can be provided with block-shaped auxiliary electrodes 6, or only some of the spaces 59 have auxiliary electrodes 6, or none of them can be provided.
  • the auxiliary electrode 6; and each driving electrode 51 may be connected to only one auxiliary electrode 6 adjacent to it, or may be connected to a plurality of auxiliary electrodes 6, or may not be connected to any auxiliary electrode 6.
  • each driving electrode 51 is connected to the auxiliary electrode 6 in the interval 59 on the same side.
  • each driving electrode 51 can be connected to the auxiliary electrodes on its right and upper sides The electrode 6 is connected.
  • the microfluidic substrate further includes: a plurality of photosensitive devices D3 provided on the substrate 8.
  • the position of the droplet 9 needs to be determined before it can be driven.
  • the concentration and composition of the droplet 9 need to be tested, and these tests can be set.
  • the photosensitive device D3 (which can be provided on the substrate 8 side with the driving electrode 51) is implemented, so the photosensitive device D3 can also be provided on the substrate 8.
  • light can be directed to the base 8 of the microfluidic substrate through an optical waveguide layer 55 or the like provided on the box substrate.
  • the parameters such as the intensity of the light passing through the droplet 9 and the intensity of the light not passing through the droplet 9 are different, so as shown in FIG. 11, by analyzing the light detected by each photosensitive device D3, it is possible to determine which photosensitive device D3 There is liquid droplet 9 in the inspection, that is, positioning of liquid droplet 9 is realized.
  • the concentration and composition of the droplet 9 are different, the parameters such as the intensity of the same light after passing through will also become different. Therefore, by analyzing the light detected by the photosensitive device D3, the droplet 9 can also be realized. Detection of concentration, composition, etc.
  • the photosensitive device D3 may be in the form of a photodiode or the like, which is not described in detail here.
  • the photosensitive device D3 may be one-to-one corresponding to the driving electrodes 51 as shown in FIG. 2; or, as shown in FIG. 10, the number of the photosensitive devices D3 and the driving electrodes 51 may be different.
  • the orthographic projection of the photosensitive device D3 on the substrate 8 is covered by the orthographic projection of the driving electrode 51 on the substrate 8;
  • the driving electrode 51 is disposed on a side of the photosensitive device D3 away from the substrate 8 and is made of a transparent conductive material.
  • the photosensitive device D3 only needs to receive light without generating an electric field, so it can be placed under the driving electrode 51 (the driving electrode 51 is transparent at this time) as shown in Figs.
  • the microfluidic substrate further includes a plurality of second gate lines 32 extending in a row direction, a plurality of detection lines 42 extending in a column direction, and a plurality of detection transistors D2 corresponding to the light sensing device D3 one-to-one. .
  • a plurality of photosensitive devices D3 are arranged in an array, wherein each photosensitive device D3 is connected to the first pole of its corresponding detection transistor D2, and the gates of each detection transistor D2 corresponding to each row of photosensitive devices D3 are connected.
  • One second gate line 32 is connected to one detection line 42 at the second pole of each detection transistor D2 corresponding to each column of photosensitive devices D3.
  • the photosensitive device D3 can also be controlled by a transistor array (the second gate line 32 and the detection line 42 may be located in the interval 59 or may not be located in the interval 59): when a second When the gate line 32 provides a turn-on signal, the detection transistor D2 of the corresponding row is turned on, so that the light intensity signals sensed by the photosensitive devices D3 of the row can be respectively output through the corresponding detection lines 42.
  • the second gate line 32 and the first gate line 31 may be disposed in the same layer.
  • the gate may be disposed on the same layer as the second gate line 32 and the first gate line 31, the source and drain of the detection transistor D2 and the driving transistor D1 may be disposed on the same layer, and the driving line 41 and the detection line 42 may be disposed on the same layer.
  • the microfluidic substrate may further have other required structures, such as an insulating layer for separating different conductive structures, a planarization layer (resin layer) for eliminating step differences, and is located at the top.
  • a planarization layer resin layer
  • the method for preparing the microfluidic substrate may include:
  • a first gate line 31, a second gate line 32, and gates of the detection transistor D2 and the driving transistor D1 are formed on the substrate 8.
  • the gate insulating layer 801 covers the first gate line 31, the second gate line 32, and the gates of the detection transistor D2 and the driving transistor D1, and the first gate line 31, the second gate line 32, and the detection transistor D2 and the driving transistor D1
  • the gates are separated from each other by a gate insulating layer 801.
  • An active region of the detection transistor D2 and the driving transistor D1 is formed on the gate insulating layer 801.
  • the source and drain of the detection transistor D2 and the driving transistor D1 are formed on the gate insulating layer 801, and the driving line 41 and the detecting line 42 are formed.
  • a first passivation layer (PVX) 802 is formed.
  • the first passivation layer 802 covers the source and drain of the detection transistor D2 and the driving transistor D1, and the driving line 41 and the detecting line 42 and insulates them from each other.
  • An anode of a photodiode is formed on the first electrode of the detection transistor D2, and a first connection structure CT1 (for connecting the driving electrode 51 to the driving transistor D1) is formed on the first electrode of the driving transistor D1 (
  • the anode and the first connection structure CT1 are, for example, portions defined by thick solid lines in FIG. 2), and these structures may be made of a metallic material.
  • a semiconductor layer of a photodiode is formed on the anode.
  • the photodiode may be a PIN type photodiode.
  • a cap layer (Cap) of a photodiode is formed on the semiconductor layer, and the cap layer may be formed of a transparent conductive material such as indium tin oxide (ITO).
  • ITO indium tin oxide
  • a cover layer 803 is formed to cover the photodiode and the first passivation layer.
  • a first resin layer 804 is formed to cover the cover layer 803.
  • a second passivation layer 805 is formed to cover the first resin layer 804.
  • the formation of the second passivation layer 805 may include processes such as etching and deposition, which are not described in detail here.
  • S12 forming a cathode of the photodiode and a lead wire for supplying power thereto, and simultaneously forming a second connection structure CT2 for connecting the auxiliary driving electrode 51 and the driving transistor D1.
  • the formation of the second connection structure CT2 may include processes such as deposition.
  • a barrier layer 806 is formed on a portion of the second passivation layer 805 that is not covered by the second connection structure CT2.
  • a third passivation layer 807 is formed.
  • the third passivation layer 807 covers the driving electrodes 51 and insulates the driving electrodes 51 from each other.
  • a first auxiliary electrode 61 is formed on the third passivation layer 807.
  • a fourth passivation layer 808 is formed on the third passivation layer 807 and the first auxiliary electrode 61. At this time, it is the above-mentioned insulating layer for separating the first auxiliary electrode 61 from the second auxiliary electrode 62.
  • a second auxiliary electrode 62 is formed on the fourth passivation layer 808 (see FIG. 4).
  • a second resin layer 809 is formed to cover the second auxiliary electrode 62.
  • a lyophobic layer 99 is formed on the second resin layer 809.
  • each of the transistors can also be a top-gate structure.
  • the first auxiliary electrode 61 and the second auxiliary electrode 62 The positions can be interchanged, etc., which will not be described in detail here.
  • a lead (for example, a lead 621 connected to the second auxiliary electrode 62) connected to the auxiliary electrode 6 may be formed.
  • this embodiment provides a microfluidic structure, which includes:
  • a microfluidic substrate according to an embodiment of the present disclosure is a microfluidic substrate according to an embodiment of the present disclosure
  • the opposite side of the microfluidic substrate is a box substrate.
  • the side of the microfluidic substrate with the driving electrode 51 faces the opposite substrate, and the common electrode opposite to each driving electrode 51 is provided on the side of the substrate facing the microfluidic substrate. 52.
  • a space for containing the droplets 9 is formed between the microfluidic substrate and the opposite substrate.
  • the above microfluidic substrate and the box substrate can be arranged oppositely to form a microfluidic structure.
  • a common electrode 52 is provided in the box substrate, so that a required driving electric field can be formed between the two substrates to drive.
  • the droplet 9 located between the two substrates moves.
  • a liquid-repellent layer 99 is provided on the side of the microfluidic substrate closest to the box substrate; a liquid-repellent layer 99 is provided on the side of the box substrate closest to the microfluidic substrate.
  • the opposite sides of the above two substrates are provided with a liquid-repellent layer 99 (that is, a layer having liquid-repellency to the droplets 9) so that the droplets 9 in contact with them can form a predetermined contact angle, which is convenient for the droplets. motion.
  • the liquid-repellent layer 99 may be made of Teflon or the like.
  • the box substrate when the microfluidic substrate is a microfluidic substrate having a photosensitive device D3, the box substrate further includes an optical waveguide layer 55 for transmitting light and directing the light toward the microfluidic substrate.
  • a corresponding optical waveguide layer 55 can be provided in the box substrate for conducting the incident light from the side The light is directed toward the microfluidic substrate.
  • the optical waveguide layer may not be provided, but the microfluidic substrate may be illuminated by a light source located on the side of the transparent pair box substrate far from the microfluidic substrate.
  • this embodiment provides a method for driving a microfluidic structure, which includes:
  • a common voltage is applied to the common electrode 52, a driving voltage is applied to the driving electrode 51 at the first position, and a driving voltage is applied to the auxiliary electrode 6 at the second position to form a driving electric field to drive the droplet 9 to move; wherein the first position and the second position
  • the positions indicate the positions where the drive electrodes 51 are located in the moving direction of the droplets 9 and the positions where the auxiliary electrodes are located, respectively.
  • a driving voltage may be applied to the auxiliary electrode 6 to assist in driving the droplet 9.
  • the lead wire connected to the auxiliary electrode 6 at the second position (as shown in FIG. 2, the second auxiliary electrode 62 may be connected).
  • the lead 621) applies the same driving voltage to the auxiliary electrode 6 as the driving electrode 51 at the first position.
  • the auxiliary electrode 6 has a block shape as shown in FIG. 6, since the auxiliary electrode 6 is electrically connected to the driving electrode 51 through a via hole, the same driving voltage as the driving electrode 51 may be applied to the auxiliary electrode 6.
  • a high voltage may be applied to the second auxiliary electrode 62 and the driving electrode 51 (marked with a dashed box in the figure) on the right side thereof; and in FIG. 8
  • a high voltage can be applied to the first auxiliary electrode 61 and the driving electrode 51 (marked with a dashed box in the figure) below it; and when the droplet 9 in FIG. 9 needs to be When moving to the lower left, a high voltage can be applied to the first auxiliary electrode 61 on the lower side, the second auxiliary electrode 62 on the left, and the driving electrode 51 (marked with a dashed box in the figure) on the lower left.
  • each auxiliary electrode 6 can be directly connected to a driving chip (IC), so that they can be directly driven by the driving chip. Voltage.
  • the voltage of the auxiliary electrode 6 is provided through the driving electrode 51 connected to it.
  • the driving voltage applied to the auxiliary electrode 6 is equal to the driving voltage applied to at least one driving electrode 51 adjacent to the auxiliary electrode 6.
  • the auxiliary electrode 6 can be considered as an extension of the driving electrode 51, so its driving voltage should be equal to the driving voltage of the driving electrode 51 that is also being driven.
  • the driving voltage in the auxiliary electrode 6 may be different from the driving voltage in the driving electrode 51 (for example, the driving voltage is continuously switched), and the specific driving voltage may be obtained according to the driving requirements for the droplet 9 , which will not be described in detail here.

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Abstract

一种微流控基板，包括基底（8）；多个驱动电极（51），其设置在基底（8）上并且用于驱动液滴（9）移动，多个驱动电极（51）同层设置且相邻驱动电极（51）间具有间隔（59）；其中，该微流控基板还包括：至少一个辅助电极（6），辅助电极（6）设置在基底（8）上，并且用于驱动液滴（9）移动，该辅助电极（6）在基底（8）上的正投影与间隔（59）至少部分重叠，且辅助电极（6）与驱动电极（51）设于不同层中。

Description

微流控基板、微流控结构及其驱动方法 技术领域
本公开属于微全分析中的微流控技术领域，具体涉及一种微流控基板、微流控结构及其驱动方法。
背景技术
“微全分析”是通过化学分析设备的微型化与集成化，最大限度的把分析实验室的功能转移到便携的分析设备中的技术。而“微流控”是微全分析的重要手段，其是精确控制微小液滴按所需轨迹移动的技术，通过控制液滴的移动、分离，可进行预期的微型的化学反应、生物侦测等，实现微全分析。
发明内容
一方面，本公开提供一种微流控基板，包括基底，多个驱动电极，其设置在所述基底上并且用于驱动液滴移动，所述多个驱动电极同层设置且相邻驱动电极间具有间隔；其中，所述微流控基板还包括：
至少一个辅助电极，所述辅助电极设置在所述基底上，并且用于驱动液滴移动，所述辅助电极在所述基底上的正投影与所述间隔在所述基底上的正投影至少部分重叠，且所述辅助电极与所述驱动电极设于不同层中。
根据本公开的实施例，所述辅助电极在基底上的正投影至少覆盖所述的间隔在基底上的正投影。
根据本公开的实施例，所述辅助电极在基底上的正投影与所述间隔在基底上的正投影重合。
根据本公开的实施例，所述多个驱动电极按阵列方式布置， 相邻行的驱动电极之间具有行间隔，相邻列的驱动电极之间具有列间隔；
所述辅助电极包括：
至少部分设于所述行间隔中的、条状的第一辅助电极；
至少部分设于所述列间隔中的、条状的第二辅助电极，所述第二辅助电极与第一辅助电极相互绝缘。
根据本公开的实施例，所述第二辅助电极与第一辅助电极设于不同层且具有交叠，至少在交叠处第二辅助电极与第一辅助电极间设有绝缘层。
根据本公开的实施例，每个所述行间隔中均设有一个条状的第一辅助电极；
每个所述列间隔中均设有一个条状的第二辅助电极。
根据本公开的实施例，所述微流控基板还包括沿行方向延伸的多条第一栅线、沿列方向延伸的多条驱动线、多个驱动晶体管，所述多个驱动晶体管和所述多个驱动电极均按阵列的方式布置并且一一对应，相邻行的驱动电极之间具有行间隔，相邻列的驱动电极之间具有列间隔；
其中，每个驱动电极与其对应的驱动晶体管的第一极连接，每行驱动电极对应的各驱动晶体管的栅极连接一条第一栅线，每列驱动电极对应的各驱动晶体管的第二极连接一条驱动线。
根据本公开的实施例，所述辅助电极包括：
至少部分设于所述行间隔中的、条状的第一辅助电极；
至少部分设于所述列间隔中的、条状的第二辅助电极，所述第二辅助电极与第一辅助电极相互绝缘；其中，
所述第一栅线设于行间隔中，且所述第一辅助电极位于第一栅线远离基底一侧；
所述驱动线设于列间隔中，且所述第二辅助电极位于驱动线远离基底一侧。
根据本公开的实施例，所述辅助电极为块状，每个辅助电极位于两个相邻的驱动电极间的间隔处，并和一个与其相邻的驱动 电极电连接。
根据本公开的实施例，所述辅助电极在所述基底上的正投影与其所连接的驱动电极在所述基底上的正投影至少部分地重叠，所述辅助电极通过穿过所述辅助电极和所连接的驱动电极之间的绝缘层的过孔和所述驱动电极电连接。
根据本公开的实施例，所述辅助电极设置在驱动电极远离基底一侧。
根据本公开的实施例，所述辅助电极由金属材料构成。
根据本公开的实施例，所述微流控基板还包括：设于基底上的多个感光器件。
根据本公开的实施例，所述感光器件在基底上的正投影被驱动电极在基底上的正投影覆盖；
所述驱动电极设于感光器件远离基底一侧，且由透明导电材料构成。
根据本公开的实施例，所述微流控基板还包括沿行方向延伸的多条第二栅线、沿列方向延伸的多条检测线、与感光器件一一对应的多个检测晶体管；
多个感光器件以阵列方式布置，其中，每个感光器件与其对应的检测晶体管的第一极连接，每行感光器件对应的各检测晶体管的栅极连接一条第二栅线，每列感光器件对应的各检测晶体管的第二极连接一条检测线。
另一方面，本公开提供一种微流控结构，其包括：
根据本公开的实施例的微流控基板；
与所述微流控基板的相对设置的对盒基板，所述微流控基板具有驱动电极的一侧朝向对盒基板，所述对盒基板朝向微流控基板的一侧设有与各驱动电极相对的公共电极，所述微流控基板与对盒基板间形成用于容纳液滴的空间。
根据本公开的实施例，所述微流控基板最靠近对盒基板一侧设有疏液层；
所述对盒基板最靠近微流控基板一侧设有疏液层。
根据本公开的实施例，所述微流控基板为具有感光器件的微流控基板，所述对盒基板还包括：
光波导层，其用于传导光并使光射向所述微流控基板。
另一方面，本公开提供一种微流控结构的驱动方法，其包括：
向公共电极施加公共电压，向第一位置的驱动电极施加驱动电压，向第二位置的辅助电极施加驱动电压，以形成驱动电场驱动液滴移动；其中，所述第一位置表示所述液滴的移动方向上待移动到的驱动电极所在的位置，所述第二位置表示所述液滴的移动方向上待移动到的辅助电极所在的位置。
根据本公开的实施例，施加给所述辅助电极的驱动电压等于施加给与该辅助电极相邻的至少一个驱动电极的驱动电压。
附图说明
图1为微流控结构驱动液滴移动的原理图；
图2为本公开的实施例的一种微流控基板的局部结构示意图；
图3为图1中沿AA’的剖面结构示意图；
图4为图1中沿BB’的剖面结构示意图；
图5为图1中沿CC’的剖面结构示意图；
图6为本公开的实施例的另一种微流控基板的局部结构示意图
图7为本公开的实施例的一种微流控结构驱动液滴移动的示意图；
图8为本公开的实施例的一种微流控结构驱动液滴移动的另一示意图；
图9为本公开的实施例的一种微流控结构驱动液滴移动的另一示意图；
图10为本公开的实施例的一种微流控结构的局部剖面结构示意图；
图11为本公开的实施例的一种微流控基板确定液滴位置的 原理图；
图12为本公开的实施例的一种微流控基板的制备工艺流程图；
图13为本公开的实施例的一种微流控基板中间隔和驱动电极的位置关系图；以及
图14是示出驱动晶体管、驱动电极、第一栅极、驱动线的连接关系以及检测晶体管、感光器件、第二栅极、检测线的连接关系的示意图。
具体实施方式
为使本领域技术人员更好地理解本公开的技术方案，下面结合附图和具体实施方式对本公开作进一步详细描述。
在本公开中，两结构“同层设置”是指二者是由同一个材料层经光刻等工艺形成的，故它们在层叠关系上处于相同层中，但并不代表它们与基底间的距离相等，也不代表它们与基底间的其它层结构完全相同。
在本公开中，两结构“设于不同层中”是指两结构不是同层设置的，而是设于不同层中，但并不代表它们与基底间的距离必然不同。
在本公开中，A结构设于B结构“远离基底一侧”是指，A结构与B结构设于基底的同一侧，但设于不同层中，且A结构所在层比B结构所在层更远离基底；从而若在同一位置同时存在A结构与B结构，则A结构必然比B结构离基底更远，但并不代表任意位置的A结构与基底间的距离均大于任意位置的B结构与基底间的距离。
在本公开中，“行、列”仅表示两个相交(尤其是正交)的相对方向，而与基板产品的形状、放置方式等无关。
如图1所示，现有的微流控结构包括两个对置的基板，其中一个基板上设有驱动电极51的阵列，另一基板上设有公共电极52，两基板彼此相对的两侧均设置有疏液层99(即对液滴具有疏液 性的层)，液滴9位于两个疏液层99间。当公共电极52上加载预定的公共电压时，通过给处于液滴9不同位置的驱动电极51加不同的驱动电压，可在液滴9及其周边产生特定的驱动电场，使液滴9发生特定的变形并移动，从而实现对液滴9的控制。
显然，为避免不同驱动电极51相互导通，故相邻驱动电极51间必然具有间隔59，而间隔59处不能形成电场。因此，间隔59过大会使得在驱动液滴9移动的过程中无法使液滴9连续移动，间隔过小容易引起相邻的驱动电极51电连接，使制造出的微流控结构失效。
本实施例提供一种微流控基板，包括基底，基底上设有多个用于驱动液滴移动的驱动电极，各驱动电极同层设置且相邻驱动电极间具有间隔；微流控基板还包括：
设于基底上的至少一个用于驱动液滴移动的辅助电极，辅助电极至少部分设于间隔中，且与驱动电极设于不同层中。
根据本公开的实施例，辅助电极与驱动电极设于不同层中，可以表示为辅助电极和驱动电极在厚度方向上通过绝缘层彼此间隔开。
在本公开的实施例中，如图13所示，“间隔”表示相邻驱动电极51之间的间隙以及该间隙的竖直向上和竖直向下的全部空间(图13中灰色区域)。也就是说，相邻驱动电极之间的并且由相邻驱动电极所围绕的部分为间隙，所述间隙及其沿垂直于基底方向的延伸部为间隔。
本实施例的微流控基板中，在驱动电极的间隔处设有能用于驱动液滴移动的辅助电极，辅助电极与驱动电极不同层，故可与驱动电极有重叠，从而其能使驱动电极的间隔处也形成驱动电场，消除或减少无法形成驱动电场的位置，实现对液滴更流畅的控制。
如图2至图13所示，本实施例提供一种微流控基板，其包括：
基底8；
设于基底8上的用于驱动液滴9移动的多个驱动电极51，各驱动电极51同层设置且相邻驱动电极51间具有间隔59；
设于基底8上的驱动液滴9移动的至少一个辅助电极6，辅助电极6至少部分设于间隔59中，且与驱动电极51设于不同层中。
其中，基底8是指用于承载其它结构的衬底，其可为板状。而多个驱动电极51是同层设置的，并排成阵列(例如，矩形阵列)，用于加载驱动电压以驱动液滴9移动；显然，由于各驱动电极51同层设置，故它们之间不能相互接触，而必然要设有一定的间隙，以保证不同驱动电极51相互绝缘。
本实施例的微流控基板中，在驱动电极51的间隔59中还设有辅助电极6。在实施例中，辅助电极6设于基底8具有驱动电极51一侧，该辅助电极6也能被加载动电压以驱动液滴9，从而消除或减少无法形成驱动电场的位置，实现对液滴9更流畅的控制。
根据本公开的实施例，辅助电极6在基底8上的正投影至少覆盖其所在的间隔59在基底8上的正投影。
根据本公开的实施例，辅助电极6在基底8上的正投影与其所在的间隔59在基底8上的正投影重合。
由于辅助电极6与驱动电极51是设于不同层中的，故其即使与驱动电极51在基板8上的正投影有交叠也不会导致不同驱动电极51相互导通。如图2、图3所示，辅助电极6(即，稍后描述的第一辅助电极61和第二辅助电极62)可以覆盖其所在间隔59(即，稍后描述的行间隔591和列间隔592)(可超出间隔59，例如，参照图6)，以彻底消除无法产生驱动电场的位置。根据本公开的实施例，为了防止辅助电极6对驱动电极51本身的电场产生影响，辅助电极6在基底8上的正投影可以与其所在的间隔59完全重叠。
根据本公开的实施例，辅助电极6设置在驱动电极51远离基底8一侧。
如图3、图4所示，当辅助电极6与驱动电极51设于基底8同一侧时，辅助电极6可以比驱动电极51更远离基底8，这样制备驱动电极51相关结构的工艺不需要变化，而只要在制备好驱动 电极51后继续增加制备辅助电极6的步骤即可，工艺上比较容易实现。
根据本公开的实施例，辅助电极6可以由金属材料构成。
根据本公开的实施例，各驱动电极51排成阵列，相邻行的驱动电极51之间具有行间隔591，相邻列的驱动电极51之间具有列间隔592。
根据本公开的实施例，辅助电极6包括：至少部分设于行间隔591中的、条状的第一辅助电极61以及至少部分设于列间隔592中的、条状的第二辅助电极62，第二辅助电极62与第一辅助电极61相互绝缘。
如图2所示，通常驱动电极51是按照矩阵形式排列为多行多列，故其中可形成多个沿行方向延伸的“行间隔591”，以及多个沿列方向延伸的“列间隔592”，故辅助电极6也可包括沿行间隔591分布的第一辅助电极61和沿列间隔592分布的第二辅助电极62。在这种情况下第一辅助电极61和第二辅助电极62保持绝缘，以避免二者间的信号干扰。
根据本公开的实施例，每个行间隔591中均设有一个条状的第一辅助电极61；每个列间隔592中均设有一个条状的第二辅助电极62。
也就是说，所有行间隔591中可均设有第一辅助电极61，且每个行间隔591只有一个第一辅助电极61，且该第一辅助电极61占满该行间隔591；类似的，每个列间隔592中也是只有一个占满该列间隔592的第二辅助电极62。也就是说，在平面图中观察时，辅助电极6完全占据间隔59的空间。这样，可使所有间隔59中都充满辅助电极6，从而彻底消除不能产生驱动电场的位置，从而改善驱动精度。由于每个间隔59中仅设置一个辅助电极6，这样辅助电极6的总数也不是太多，便于控制，如可通过驱动芯片(IC)的每个端口直接为一个辅助电极6提供信号。
根据本公开的实施例，第二辅助电极62与第一辅助电极61设于不同层且具有交叠，至少在交叠处第二辅助电极62与第一辅 助电极61间设有绝缘层。
当第一辅助电极61和第二辅助电极62各自占满行间隔591和列间隔592时，二者必然会产生交叠(如图2所示在行间隔591与列间隔592的交叉处交叠)，为使其结构简单，可使第一辅助电极61和第二辅助电极62位于不同层，且如图5所示，二者在交叠处可被绝缘层(如第四钝化层808)隔开。
根据本公开的实施例，微流控基板还包括沿行方向延伸的多条第一栅线31、沿列方向延伸的多条驱动线41以及多个驱动晶体管D1。在实施例中，驱动电极51中的每一个以及驱动晶体管D1的每一个设置在相邻的第一栅线31以及相邻的驱动线41之间。驱动晶体管D1用于控制驱动电极51上施加的驱动电压，以驱动驱动电极上的液滴9移动。在实施例中，驱动电极51与控制该驱动电极51的驱动晶体管D1对应。
根据本公开的实施例，各驱动电极51排成阵列，相邻行的驱动电极51之间具有行间隔591，相邻列的驱动电极51之间具有列间隔592。
根据本公开的实施例，参照图14和图2，图14示出了图2中的一部分的细节，每个驱动电极51与其对应的驱动晶体管D1的第一极连接，每行驱动电极51对应的各驱动晶体管D1的栅极连接一条第一栅线31，每列驱动电极51对应的各驱动晶体管D1的第二极连接一条驱动线41。
如图2所示，由于驱动电极51的数量很多，故其可采用晶体管阵列的方式进行控制，即轮流向各第一栅线31提供导通信号，以使各行的驱动晶体管D1轮流开启，当某行驱动晶体管D1开启时，即可通过各驱动线41向该行的各驱动电极51提供驱动电压。这样，就用较少的引线实现了对大量驱动电极51的控制。
根据本公开的实施例，辅助电极6包括第一辅助电极61和第二辅助电极62，第一栅线31设于行间隔591中，设有第一栅线31的行间隔591处也设有第一辅助电极61，且第一辅助电极61位于第一栅线31远离基底8一侧(参见图3)。驱动线41设于列 间隔592中，设有驱动线41的列间隔592处也设有第二辅助电极62，且第二辅助电极62位于驱动线41远离基底8一侧(参见图4)。
根据本公开的实施例，第一栅线31、驱动线41、且第一辅助电极61、第二辅助电极62可以设于基底的同一侧，如图2、图3、图4所示，第一栅线31和驱动线41可以也分别位于行间隔591和列间隔592中，而此时，相应的第一辅助电极61和第二辅助电极62则分别位于第一栅线31和驱动线41上方，以屏蔽第一栅线31和驱动线41中的信号对液滴9的影响。
根据本公开的实施例，参照图6，辅助电极6为块状，每个辅助电极6位于两个相邻的驱动电极51间的间隔59处，并和一个与其相邻的驱动电极51电连接。
也就是说，如图6所示，辅助电极6也可以不是条状的，而是“小块”状的，且每个辅助电极6仅位于两个相邻的驱动电极51之间，同时，该辅助电极6还和其中一个与其相邻的驱动电极51电连接(如通过穿过该辅助电极6和该一个驱动电极51之间的绝缘层的过孔电连接，图6中黑点表示过孔)，从而辅助电极6的信号也与该驱动电极51的信号相同。这样，相当于将驱动电极51“扩展到”了原本间隔59的位置，故也可减少无法形成驱动电场的位置。
当然，对一个驱动电极51而言，其各个侧面均设置有间隔59，这些间隔59中可全部设有块状的辅助电极6，也可仅有部分间隔59有辅助电极6，也可均没有辅助电极6；且每个驱动电极51可仅和一个与其相邻的辅助电极6连接，也可与多个辅助电极6连接，或也可不与任何辅助电极6连接。
当然，从规则的角度来看，每个驱动电极51都与相同侧的间隔59中的辅助电极6连接，例如，如图6所示每个驱动电极51可均与其右侧和上侧的辅助电极6连接。
根据本公开的实施例，微流控基板还包括：设于基底8上的多个感光器件D3。
在微流控技术中，很多情况下需要先确定液滴9的位置才能 对其进行驱动，另外，有些情况下也需要对液滴9的浓度、成分等进行测试，而这些测试均可通过设置感光器件D3(其可以设于基底8具有驱动电极51一侧)的方式实现，故基底8上也可设置感光器件D3。
根据本公开的实施例，如图10所示(为简便，图中部分结构未示出)，可通过设于对盒基板的光波导层55等让光射向微流控基板的基底8，显然，其中穿过液滴9的光和没有穿过液滴9的光的强度等参数不同，故如图11所示，通过分析各感光器件D3检测到的光，即可确定哪些感光器件D3检处有液滴9，即实现对液滴9的定位。
类似的，当液滴9浓度、成分等不同时，同样的光穿过其后强度等参数也会变得不同，故通过对感光器件D3检测到的光进行分析，也可实现对液滴9的浓度、成分等的检测。
在实施例中，如图3所示，感光器件D3可为光敏二极管等形式，在此不再详细描述。
感光器件D3可如图2所示，与驱动电极51是一一对应的；或者，也可如图10所示，感光器件D3与驱动电极51的数量不同。
根据本公开的实施例，感光器件D3在基底8上的正投影被驱动电极51在基底8上的正投影覆盖；
驱动电极51设于感光器件D3远离基底8一侧，且由透明导电材料构成。
感光器件D3只要能接收到光即可，而不用产生电场，故其可如图2、图3所示，设于驱动电极51下方(此时驱动电极51是透明的)，从而不会减小驱动电极51面积，并避免影响驱动电极51产生的电场。
根据本公开的实施例，微流控基板还包括沿行方向延伸的多条第二栅线32、沿列方向延伸的多条检测线42、与感光器件D3一一对应的多个检测晶体管D2。
参照图2和图14，多个感光器件D3排成阵列，其中，每个感光器件D3与其对应的检测晶体管D2的第一极连接，每行感光 器件D3对应的各检测晶体管D2的栅极连接一条第二栅线32，每列感光器件D3对应的各检测晶体管D2的第二极连接一条检测线42。
也就是说，如图2所示，感光器件D3也可采用晶体管阵列进行控制(其中的第二栅线32和检测线42可位于间隔59中，也可不位于间隔59中)：当一条第二栅线32提供导通信号时，相应行的检测晶体管D2导通，从而该行的各感光器件D3感受到的光强信号可通过相应的检测线42分别输出。
根据本公开的实施例，为简化工艺，许多结构可同层设置，如参照图3至图5，第二栅线32与第一栅线31可以同层设置，检测晶体管D2和驱动晶体管D1的栅极可以与第二栅线32与第一栅线31同层设置，检测晶体管D2和驱动晶体管D1的源极、漏极可以同层设置，驱动线41和检测线42可以同层设置。
根据本公开的实施例，微流控基板中，还可具有其它的所需结构，如用于隔开不同导电结构的绝缘层，用于消除段差的平坦化层(树脂层)，位于最上方的疏液层99等。
根据本公开的实施例，如图2和图12所示，该微流控基板的制备方法可包括：
S01、在基底8上形成第一栅线31、第二栅线32，以及检测晶体管D2和驱动晶体管D1的栅极。
S02、形成检测晶体管D2和驱动晶体管D1的栅绝缘层801。栅绝缘层801覆盖第一栅线31、第二栅线32，以及检测晶体管D2和驱动晶体管D1的栅极，并且第一栅线31、第二栅线32，以及检测晶体管D2和驱动晶体管D1的栅极通过栅绝缘层801彼此间隔开。
S03、在栅极绝缘层801上形成检测晶体管D2和驱动晶体管D1的有源区。
S04、在栅极绝缘层801上形成检测晶体管D2和驱动晶体管D1的源漏极，以及驱动线41、检测线42。
S05、形成第一钝化层(PVX)802，第一钝化层802覆盖检测 晶体管D2和驱动晶体管D1的源漏极，以及驱动线41、检测线42并将它们彼此绝缘。
S06、对第一钝化层802进行蚀刻处理，以暴露出检测晶体管D2的第一电极(其可以是源极或漏极)和驱动晶体管D1的第一电极(其可以是源极或漏极)。在检测晶体管D2的第一电极上形成光敏二极管(感光器件D3的示例)的阳极以及在驱动晶体管D1的第一电极上形成用于辅助驱动电极51与驱动晶体管D1连接的第一连接结构CT1(阳极和第一连接结构CT1例如由图2中的粗实线限定的部分)，这些结构可由金属材料构成。
S07、在阳极上形成光敏二极管的半导体层。光敏二极管可以为PIN型光敏二极管。
S08、在半导体层上形成光敏二极管的帽层(Cap)，其可由氧化铟锡(ITO)等透明导电材料构成。
S09、形成覆盖层(Cover)803，以覆盖光敏二极管和第一钝化层。
S10、形成第一树脂层804，以覆盖覆盖层803。
S11、形成第二钝化层805，以覆盖第一树脂层804。第二钝化层805的形成可以包括蚀刻、沉积等处理，在此不再详细赘述。
S12、形成光敏二极管的阴极，以及为其供电的引线，同时形成用于辅助驱动电极51与驱动晶体管D1连接的第二连接结构CT2。第二连接结构CT2的形成可以包括沉积等处理。
S13、在第二钝化层805的未被第二连接结构CT2覆盖的部分上形成阻挡层(Barrier)806。
S14、在阻挡层806上和第二连接结构CT2上形成彼此间隔开的驱动电极51。
S15、形成第三钝化层807，第三钝化层807覆盖驱动电极51并将驱动电极51彼此绝缘。
S16、在第三钝化层807上形成第一辅助电极61。
S17、在第三钝化层807和第一辅助电极61上形成第四钝化层808，此时其即为以上用于将第一辅助电极61与第二辅助电极 62隔开的绝缘层。
S18、在第四钝化层808上形成第二辅助电极62(参照图4)。
S19、形成第二树脂层809，以覆盖第二辅助电极62。
S20、在第二树脂层809上形成疏液层99。
当然，本实施例的微流控基板的结构和制备方法还可进行许多变化，例如其中的各晶体管也可为顶栅结构，再如其中第一辅助电极61和第二辅助电极62所在层的位置可以互换等，在此不再详细描述。另外，还可以形成连接辅助电极6的引线(例如，连接第二辅助电极62的引线621)
如图2至图13所示，本实施例提供一种微流控结构，其包括：
根据本公开的实施例的微流控基板；
与微流控基板的相对设置的对盒基板，微流控基板具有驱动电极51的一侧朝向对盒基板，对盒基板朝向微流控基板一侧设有与各驱动电极51相对的公共电极52，微流控基板与对盒基板间形成用于容纳液滴9的空间。
也就是说，可将以上微流控基板与对盒基板相对设置，组成微流控结构，其中，对盒基板中设有公共电极52，从而两基板间可形成所需的驱动电场，以驱动位于两基板间的液滴9移动。
根据本公开的实施例，微流控基板最靠近对盒基板一侧设有疏液层99；对盒基板最靠近微流控基板一侧设有疏液层99。
也就是说，以上两基板的相对侧均设置有疏液层99(即对液滴9具有疏液性的层)，以使与它们接触的液滴9能形成预定的接触角，方便液滴运动。在实施例中，该疏液层99可为特氟龙等材料。
根据本公开的实施例，微流控基板为具有感光器件D3的微流控基板时，对盒基板还包括：光波导层55，其用于传导光并使光射向微流控基板。
如图10所示(为简便，图中部分结构未示出)，当微流控基板具有感光器件D3时，则对盒基板中可设置相应的光波导层55，用于传导从侧面入射的光，并使其射向微流控基板。
根据本公开的实施例，也可以,不设置光波导层，而是通过位 于透明的对盒基板远离微流控基板一侧的光源向微流控基板发光。
如图2至图13所示，本实施例提供一种微流控结构的驱动方法，其包括：
向公共电极52施加公共电压，向第一位置的驱动电极51施加驱动电压，向第二位置的辅助电极6施加驱动电压，以形成驱动电场驱动液滴9移动；其中，第一位置和第二位置分别表示液滴9的移动方向上的驱动电极51所在的位置和辅助电极所在的位置。
也就是说，当使用以上微流控结构驱动液滴9时，需要在液滴9预计要达到的位置形成电场，而由于设有辅助电极6，故除向位于液滴预计到达的位置的驱动电极51施加驱动电压外，若存在其至少一部分位于液滴预计到达的位置的辅助电极6，则也可向该辅助电极6施加驱动电压，以辅助对液滴9进行驱动。
根据本公开的实施例，在辅助电极6具有图2所示的长条状的情况下，可以通过连接第二位置处的辅助电极6的引线(如图2所示，连接第二辅助电极62的引线621)向辅助电极6施加与第一位置处的驱动电极51相同的驱动电压。在辅助电极6具有如图6所示的块状的情况下，由于辅助电极6通过过孔电连接至驱动电极51，因此，辅助电极6上可施加有与驱动电极51相同的驱动电压。
例如，当图7中的液滴9需要向右移动时，则可向其右侧的第二辅助电极62和驱动电极51(图中用虚线框标出)施加高电压；而当图8中的液滴9需要向下移动时，则可向其下侧的第一辅助电极61和驱动电极51(图中用虚线框标出)施加高电压；而当图9中的液滴9需要向左下移动时，则可向其下侧的第一辅助电极61、左侧的第二辅助电极62、左下的驱动电极51(图中用虚线框标出)施加高电压。
其中，当采用以上第一辅助电极61和第二辅助电极62时，如图2所示，各辅助电极6的端部可直接连接驱动芯片(IC)，从而 可通过驱动芯片直接为它们提供驱动电压。
而当采用以上块状的辅助电极6时，则辅助电极6的电压通过与其相连的驱动电极51提供。
根据本公开的实施例，施加给辅助电极6的驱动电压等于施加给与该辅助电极6相邻的至少一个驱动电极51的驱动电压。
在本公开的实施例中，辅助电极6可被认为是驱动电极51的扩展，故其驱动电压应等于某个也正在进行驱动的驱动电极51的驱动电压。
根据本公开的实施例，辅助电极6中的驱动电压可以与驱动电极51中的驱动电压不同(比如其中的驱动电压是不断切换的)，其具体驱动电压可根据对液滴9驱动要求得出，在此不再详细描述。
可以理解的是，以上实施方式仅仅是为了说明本公开的原理而采用的示例性实施方式，然而本公开并不局限于此。对于本领域内的普通技术人员而言，在不脱离本公开的精神和实质的情况下，可以做出各种变型和改进，这些变型和改进也视为本公开的保护范围。

Claims (20)

  1. 一种微流控基板，包括：
    基底；
    多个驱动电极，其设置在所述基底上并且用于驱动液滴移动，所述多个驱动电极同层设置且相邻驱动电极间具有间隔；其中，所述微流控基板还包括：
    至少一个辅助电极，所述辅助电极设置在所述基底上，并且用于驱动液滴移动，所述辅助电极在所述基底上的正投影与所述间隔在所述基底上的正投影至少部分重叠，且所述辅助电极与所述驱动电极设于不同层中。
  2. 根据权利要求1所述的微流控基板，其中，
    所述辅助电极在所述基底上的正投影至少覆盖所述间隔在所述基底上的正投影。
  3. 根据权利要求2所述的微流控基板，其中，
    所述辅助电极在所述基底上的正投影与所述间隔在所述基底上的正投影重合。
  4. 根据权利要求1所述的微流控基板，其中，
    所述多个驱动电极按阵列方式布置，相邻行的驱动电极之间具有行间隔，相邻列的驱动电极之间具有列间隔；
    所述辅助电极包括：
    至少部分设于所述行间隔中的、条状的第一辅助电极；
    至少部分设于所述列间隔中的、条状的第二辅助电极，所述第二辅助电极与第一辅助电极相互绝缘。
  5. 根据权利要求4所述的微流控基板，其中，
    所述第二辅助电极与所述第一辅助电极设于不同层且具有交 叠，至少在所述交叠处所述第二辅助电极与所述第一辅助电极间设有绝缘层。
  6. 根据权利要求4所述的微流控基板，其中，
    每个所述行间隔中均设有一个条状的第一辅助电极；
    每个所述列间隔中均设有一个条状的第二辅助电极。
  7. 根据权利要求1所述的微流控基板，还包括沿行方向延伸的多条第一栅线、沿列方向延伸的多条驱动线、多个驱动晶体管，所述多个驱动晶体管和所述多个驱动电极均按阵列的方式布置并且一一对应，相邻行的驱动电极之间具有行间隔，相邻列的驱动电极之间具有列间隔；
    其中，每个驱动电极与其对应的驱动晶体管的第一极连接，每行驱动电极对应的各驱动晶体管的栅极连接一条第一栅线，每列驱动电极对应的各驱动晶体管的第二极连接一条驱动线。
  8. 根据权利要求7所述的微流控基板，其中，所述辅助电极包括：
    至少部分设于所述行间隔中的、条状的第一辅助电极；
    至少部分设于所述列间隔中的、条状的第二辅助电极，所述第二辅助电极与第一辅助电极相互绝缘；其中，
    所述第一栅线设于所述行间隔中，且所述第一辅助电极位于所述第一栅线远离基底一侧；
    所述驱动线设于所述列间隔中，且所述第二辅助电极位于所述驱动线远离基底一侧。
  9. 根据权利要求1所述的微流控基板，其中，
    所述辅助电极为块状，每个辅助电极位于两个相邻的驱动电极间的间隔处，并和一个与其相邻的驱动电极电连接。
  10. 根据权利要求9所述的微流控基板，其中，
    所述辅助电极在所述基底上的正投影与其所连接的驱动电极在所述基底上的正投影至少部分地重叠，所述辅助电极通过穿过所述辅助电极和所连接的驱动电极之间的绝缘层的过孔和所述驱动电极电连接。
  11. 根据权利要求1所述的微流控基板，其中，
    所述辅助电极设置在所述驱动电极远离基底一侧。
  12. 根据权利要求1所述的微流控基板，其中，
    所述辅助电极由金属材料构成。
  13. 根据权利要求1所述的微流控基板，还包括：
    设于基底上的多个感光器件。
  14. 根据权利要求13所述的微流控基板，其中，
    所述感光器件在基底上的正投影被驱动电极在基底上的正投影覆盖；
    所述驱动电极设于所述感光器件远离基底一侧，且由透明导电材料构成。
  15. 根据权利要求13所述的微流控基板，还包括沿行方向延伸的多条第二栅线、沿列方向延伸的多条检测线、与感光器件一一对应的多个检测晶体管；
    多个感光器件以阵列方式布置，其中，每个感光器件与其对应的检测晶体管的第一极连接，每行感光器件对应的各检测晶体管的栅极连接一条第二栅线，每列感光器件对应的各检测晶体管的第二极连接一条检测线。
  16. 一种微流控结构，包括：
    权利要求1至15任意一项所述的微流控基板；
    与所述微流控基板的相对设置的对盒基板，所述微流控基板具有驱动电极的一侧朝向对盒基板，所述对盒基板朝向微流控基板的一侧设有与各驱动电极相对的公共电极，所述微流控基板与对盒基板间形成用于容纳液滴的空间。
  17. 根据权利要求16所述的微流控结构，其中，
    所述微流控基板靠近对盒基板一侧设有疏液层；
    所述对盒基板靠近微流控基板一侧设有疏液层。
  18. 根据权利要求16所述的微流控结构，其中，所述微流控基板为权利要求13至15中任意一项所述的微流控基板，所述对盒基板还包括：
    光波导层，其用于传导光并使光射向所述微流控基板。
  19. 一种微流控结构的驱动方法，用于权利要求16至18中任意一项所述的微流控结构，所述微流控结构的驱动方法包括：
    向公共电极施加公共电压，向第一位置的驱动电极施加驱动电压，向第二位置的辅助电极施加所述驱动电压，以形成驱动电场驱动液滴移动；其中，所述第一位置表示所述液滴的移动方向上待移动到的驱动电极所在的位置，所述第二位置表示所述液滴的移动方向上待移动到的辅助电极所在的位置。
  20. 根据权利要求19所述的微流控结构的驱动方法，其中，
    施加给所述辅助电极的驱动电压等于施加给与该辅助电极相邻的至少一个驱动电极的驱动电压。
PCT/CN2019/097548 2018-08-01 2019-07-24 微流控基板、微流控结构及其驱动方法 Ceased WO2020024860A1 (zh)

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