WO2020104666A1 - Procédé et dispositif servant à définir au moins une position et une orientation spatiales et à orienter au moins un objet de mesure - Google Patents

Procédé et dispositif servant à définir au moins une position et une orientation spatiales et à orienter au moins un objet de mesure

Info

Publication number
WO2020104666A1
WO2020104666A1 PCT/EP2019/082258 EP2019082258W WO2020104666A1 WO 2020104666 A1 WO2020104666 A1 WO 2020104666A1 EP 2019082258 W EP2019082258 W EP 2019082258W WO 2020104666 A1 WO2020104666 A1 WO 2020104666A1
Authority
WO
WIPO (PCT)
Prior art keywords
localization
retroreflectors
units
retroreflector
localization units
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2019/082258
Other languages
German (de)
English (en)
Inventor
Nils Haverkamp
Wolfgang Högele
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss Industrielle Messtechnik GmbH
Original Assignee
Carl Zeiss Industrielle Messtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Industrielle Messtechnik GmbH filed Critical Carl Zeiss Industrielle Messtechnik GmbH
Priority to DE112019005843.6T priority Critical patent/DE112019005843A5/de
Publication of WO2020104666A1 publication Critical patent/WO2020104666A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50—Systems of measurement based on relative movement of target
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/66—Tracking systems using electromagnetic waves other than radio waves

Definitions

  • the invention relates to a device for determining at least one spatial position and orientation of at least one measurement object, a coordinate measuring machine and a method for determining at least one spatial position and orientation at least one measurement object.
  • the present invention relates in particular to the field of coordinate measuring technology.
  • a processing or measuring head When building processing and measuring machines, a processing or measuring head usually has to be positioned exactly.
  • defined temporal and spatial courses of a position and alignment of the tool must be regulated relative to a workpiece, which usually involves considerable effort, in particular mechanical engineering. It may be necessary to feed a tool precisely, for example in the micrometer range or below, which usually requires complex measurement and control technology.
  • the costs can increase further, for example if the machine is invariant to as many influences as possible to ensure accurate operation of the machine, in particular constant accuracy, to the old, temperature and / or other environmental influences, machining forces and generally varying ones static and dynamic loads.
  • an attempt is made to predict an expected relative position and relative orientation between workpiece and tool by reading out sensors, such as it results for the machine axis stack sequence of a machine structure used, for example, using calibration data from a machine model.
  • the calibration data can be determined using methods which are designed to determine the errors in the machine kinematics in such a way that a subsequent computational correction is possible using these calibration data.
  • the calibration procedure can also be very complex. In particular, it can be so complex that a complete recording of all errors for cost or process reasons is dispensed with.
  • a suitable measurement strategy can make it possible to unambiguously reconstruct the position of the laser tracers or laser trackers in the room and the different positions of the retroreflector from a sequence of different positions of the retroreflector in the room.
  • Accuracies in the range of micrometers can be achieved on a regular basis, although submicron accuracies can also be possible in a suitable environment.
  • the measuring unit for determining a relative position and relative orientation between the measuring unit and an arrangement of at least three optical elements.
  • the measuring unit comprises a length measuring device which emits measuring beams and at least one beam steering device which is set up to direct the measuring beams onto optical elements of the arrangement.
  • the at least one beam steering device can be controlled in order to direct at least one of the measurement beams sequentially over time to a plurality of optical elements of the arrangement, in order to carry out several length measurement processes sequentially in such a way that, in the multiple length measurement processes, each measurement beam of the at least one measurement beam onto exactly one of the optical elements. In total, six lengths are measured.
  • DE 101 18392 A1 describes a system and a method for determining a position of two objects relative to one another, comprising: a source of coherent radiation, a beam guide for providing a measuring branch for a measuring beam, which has an optical path length dependent on the position of the two objects, a radiation intensity meter for measuring an intensity of an interfering superposition of radiation, which we at least comprises radiation after passing through the measuring branch, and a computer, which responds to a measuring signal of the radiation intensity meter, by optical path lengths of the measuring branch and hence the position of the two objects relative to one another to determine.
  • the measuring branch comprises: at least one emitter which can be fixedly attached to a first of the two objects for emitting the radiation supplied to the measuring branch into a space between the two objects, at least three retroreflectors which can be attached to the second of the two objects in such a way that they are arranged at fixed distances relative to one another and at least one receiver that can be attached to the first of the two objects for receiving radiation reflected by the retroreflectors and for supplying the received radiation to the radiation intensity meter.
  • the emitter emits the radiation in such a solid angle range that the at least three retroreflectors are contained therein.
  • EP 3 165 876 A2 describes an optoelectronic measuring device for determining distance and / or position with a radiation source for generating optical measuring radiation of a first wavelength.
  • the measuring radiation is emitted into the free space.
  • the radiation source is designed in such a way that the first wavelength is in the range between 1210 nm and 1400 nm and the power of the emitted measuring radiation is at least 14 mW on average over time and space.
  • at least one spatial position and orientation should be determined with high accuracy and less complexity.
  • the terms “have”, “have”, “include” or “include” or any grammatical deviations therefrom are used in a non-exclusive manner. Accordingly, these terms can refer both to situations in which, in addition to the feature introduced by these terms, there are no further features or to situations in which one or more other features are present.
  • the expression “A has B”, “A has B”, “A includes B” or “A includes B” both refer to the situation in which, apart from B, there is no further element in A. is (ie a situation in which A consists exclusively of B) as well as the situation in which, in addition to B, one or more further elements are present in A, for example element C, elements C and D or even more Elements.
  • a measuring device for determining at least one spatial position and orientation of at least one measurement object.
  • the measuring device has at least three retroreflectors and at least six localization units or at least three localization units and at least six retroreflectors.
  • Each of the localization units is set up to generate at least one illuminating light beam and to illuminate at least one retroreflector with the illuminating light beam, each of the retroreflectors being illuminated by at least one of the localization units.
  • Each of the localization units is set up to receive at least one reflected light beam from the retroreflector illuminated by it and to generate at least one measurement signal.
  • the measuring device furthermore has an evaluation unit, the evaluation unit being set up to determine the spatial position and orientation of the measurement object from the measurement signals of the localization units.
  • a “measurement object” can be understood to mean any object to be shaped.
  • the measurement object can also be a measurement head of a sensor or a tool with which a component can be scanned.
  • a “measuring device” can be understood to mean a device which is set up to determine the at least one spatial position and orientation of the measurement object.
  • the spatial position and the orientation can be determined in a coordinate system, for example a Cartesian coordinate system or a spherical coordinate system. Other coordinate systems are also conceivable.
  • An origin or zero point of the coordinate system can be in a point of the device.
  • a “spatial position” can be understood to mean a three-dimensional point (X, Y, Z) in the coordinate system, in particular a position of the Target.
  • the spatial position can be defined by the location coordinates X, Y and Z.
  • orientation can be understood to mean a position in space, in particular a rotation, of the measurement object, in particular an angular position.
  • the orientation can be specified by at least three angles, for example Euler angle or inclination angle, roll angle and yaw angle.
  • the spatial position and orientation of the object can also be referred to as six-dimensional information or 6D information.
  • a “retroreflector” can be understood to mean any device which reflects a light beam in the direction from which the light beam has arrived.
  • the retroreflector can be a marker.
  • the retroreflector can be selected from the group consisting of: a cat's eye; a cat's eye with a reflective layer; a marker described in US 2011/0007326 A1, US 2013/0050410 A1 or US 2017/0258531 A1, the content of which is hereby incorporated into this application; a cube prism; a comercube.
  • a “localization unit” can basically be understood to mean any device which is set up to generate at least one localization information item.
  • the location information can be selected from at least one item of information from the group consisting of: a measurement signal depending on the location of the retroreflector illuminated by the location unit; information about a distance of the retroreflector illuminated by the localization unit from the localization unit; information about a distance of the retroreflector illuminated by the localization unit to the localization unit; information about a relative position of the retroreflector illuminated by the localization unit to the localization unit; and information about a change in length.
  • the localization unit can be set up to illuminate at least one retroreflector with at least one illuminating light beam.
  • An “illuminating light beam” can in principle be understood in the context of the present invention to be any light beam which is emitted and / or emitted in order to illuminate the retroreflector.
  • the illuminating light beam can be a light beam generated by one of the localization units for illuminating one of the retroreflectors.
  • the localization units can each have at least one lighting unit.
  • the lighting unit can have a light source, in particular a laser source.
  • light can be understood to mean electromagnetic radiation in at least one spectral range selected from the visible spectral range, the ultraviolet spectral range and the infrared spectral range.
  • the term visible spectral range basically covers a range from 380 nm to 780 nm.
  • the term infrared (IR) spectral range basically covers a range from 780 nm to 1000 pm, the range from 780 nm to 1.4 pm as near infrared (NIR), and the range from 15 pm to 1000 pm is referred to as far infrared (FIR).
  • the term ultraviolet basically encompasses a spectral range from 100 nm to 380 nm.
  • a “light beam” can basically be understood as an amount of light which is emitted and / or emitted in a specific direction.
  • Each of the retroreflectors is illuminated by at least one of the localization units.
  • a retroreflector can be illuminated by a plurality of localization units.
  • the localization units can each be set up to receive at least one reflected light beam from the retroreflector illuminated by the respective localization unit and to generate at least one measurement signal in response to the reflected light beam.
  • a “measurement signal” can in principle be understood to mean any, in particular an electrical, signal, for example a voltage or a current, which was generated in accordance with the reflected, received light beam or using the reflected, received light beam .
  • Each of the localization units can comprise at least one element selected from the group consisting of: a laser tracer; a laser tracker; a LIDAR sensor, preferably an FMCW LIDAR sensor.
  • a laser tracer preferably an FMCW LIDAR sensor.
  • LIDAR sensor preferably an FMCW LIDAR sensor.
  • the use of a plurality of light sources is also conceivable.
  • a “laser tracer” can in principle be understood to mean any measuring device which is set up to determine an interferometric distance, in particular a change in distance, from a retroreflector.
  • the laser tracer can be set up to track a position of the retroreflector at different times.
  • the laser tracer can be set up to follow a retroreflector moving in space by means of a laser beam.
  • the distance change can be measured incrementally.
  • the laser tracer can be an incremental measuring system with a large field of view, in particular a large swivel range of a laser beam direction. For example, at least two successive measurements may be required to measure the change in distance.
  • the laser tracer can cover a wide angular range.
  • the laser beam of the laser tracer can be be angular pivotable.
  • a “laser tracker” can in principle be understood to mean any measuring device which is set up to determine a distance and / or a direction of a retroreflector interferometrically, in particular relative to axes which are defined by an optomechanics of the laser tracker will.
  • a “LID AR sensor” can in principle be understood to mean any device which is based on the LID AR (“light detection and ranging”) measurement principle, also called LAD AR (laser detection and ranging).
  • the LIDAR sensor can be set up to generate and receive a light beam, for example a laser beam, in particular the light beam previously emitted by it and reflected back to it, and from this to determine a distance between the LIDAR sensor and the retroreflector. for example, taking advantage of differences in the return times and wavelengths.
  • the localization unit can preferably have an LMCW LIDAR sensor.
  • LMCW stands for "Lrequency Modulated Continuous Wave".
  • the EMC W-LID AR sensor can be set up to generate the light beam, the frequency of which is continuously tuned using the LMCW method.
  • the frequency of the light beam can be modulated linearly with time.
  • a combination of the LID AR method and the LMCW method is known to the Lachmann, for example from Chip scale Lidar, Benham Behroozpur Baghmisheh, Technical Report No. UCB / EECS.2017-4.
  • the LIDAR unit can be configured as in US 9,559,486 B2, US 8,913,636 B2 or US 2016/123718 A1.
  • LMCW-LIDAR sensors are more robust and cheaper than laser tracers.
  • the LMCW-LIDAR sensors can be insensitive to so-called line-of-sight interruptions, since they are absolute measuring systems.
  • the measuring device has at least three retroreflectors and at least six localization units or at least three localization units and at least six retro reflectors.
  • the measuring device can have at least three retroreflectors and at least six localization units, each of the localization units comprising at least one laser tracker or at least one laser tracker.
  • the measuring device can have three retroreflectors and six localization units.
  • One, in particular a first, of the retroreflectors can be illuminated by a maximum of four of the localization units.
  • the remaining at least two lo calization units can be aligned with the other two retroreflectors and illuminate them.
  • Other orientations of the localization units to the retroreflectors are also conceivable.
  • the localization units and the retroreflectors can be arranged and / or aligned with one another in one of the following configurations: four localization units on a first retroreflector, one localization unit on a second retroreflector and one localization unit to a third retroreflector (four-one-one); three localization units on the first retroreflector, two localization units on the second retroreflector and one localization unit on the third retroreflector (three-two-one); two localization units on the first retroreflector, two localization units on the second retroreflector and two localization units on the third retroreflector (two-two).
  • the measuring device can have the first retroreflector, the second retroreflector and the third retroreflector.
  • the measuring device can have a first localization unit, a second localization unit, a third localization unit, a fourth localization unit, a fifth localization unit and a sixth localization unit.
  • the first, the second, the third and the fourth localization unit can be aligned with the first retroreflector, also referred to as being locked onto the latter, and illuminate it.
  • the fifth localization unit can be aligned with the second retroreflector and illuminate it.
  • the third retrorector can be illuminated by the sixth localization unit. This corresponds to the configuration four-one-one.
  • the ordinal numbers of the retroreflectors and localization units are used as designations to distinguish them. Accordingly, the localization units can be interchangeable or interchangeable.
  • the retroreflectors can also be interchangeable or interchangeable. For example, based on the above example, the second retroreflector can be illuminated by the sixth localization unit and the third retroreflector can be illuminated by the fifth localization unit. Other combinations are possible.
  • the first retroreflector can be illuminated by the first, the second and the third of the localization unit.
  • the second retroreflector can be illuminated by the fourth and fifth localization units.
  • the third retroreflector can be illuminated by the sixth localization unit. This corresponds to the configuration three-two-one.
  • the first retroreflector can be illuminated by the first and the second of the localization unit.
  • the second retroreflector can be illuminated by the third and fourth localization units.
  • the third retroreflector can be illuminated by the fifth and the sixth localization unit. This corresponds to the configuration two-two-two. It is possible to interchange the localization units with each other and the reflector with each other.
  • a relative position, in particular a spatial position and / or a distance, of the retroreflectors to one another and / or a relative position, in particular a spatial position and / or a distance of the localization units to one another can be known.
  • the measuring device can have three retroreflectors and the retroreflectors can be arranged in one plane in the form of a triangle. The lengths of the sides of the triangle can be known.
  • an embodiment of the measuring device with three retroreflectors and six localization units can suffice to generate 3D trajectories of all three retroreflectors, or a 6D, from a sequence of changes in length measured with the localization units. To reconstruct the trajectory of a system of retroreflectors.
  • the measuring device can have at least three retroreflectors and at least seven localization units or at least three localization units and at least seven retro reflectors.
  • One, in particular the first, of the retroreflectors can be illuminated by a maximum of five of the localization units.
  • the remaining at least two localization units can be aligned with and illuminate the other two retroreflectors.
  • Other orientations of the localization units on the retro reflectors are also conceivable.
  • the localization units and the retroreflectors can be arranged and / or aligned with one another in one of the following configurations: five localization units on the first retroreflector, one localization unit on the second retroreflector and one localization unit on the third Retroreflector (five-one-one); four localization units on the first retroreflector, two localization units on the second retroreflector and one localization unit on the third retroreflector (four-two-one); three localization units on the first retroreflector, three localization units on the second retroreflector and one localization unit on the third retroreflector (three-three-one); three localization units on the first retroreflector, two localization units on the second retroreflector and two localization units on the third retroreflector (three-two-two).
  • one of the three retroreflectors can be illuminated by four of the localization units, one of the two further retroreflectors can be illuminated by two further of the localization units and the remaining one of the retroreflectors can be illuminated by the remaining one of the localization units.
  • each of the three retroreflectors can have at least two localization units can be illuminated, for example using the configuration three-two-two outlined above.
  • An embodiment with at least seven localization units can be advantageous since an interruption of a line of sight (line-of-sight interruption) between one of the retroreflectors and one of the localization units irradiating it, in particular an interruption of the illuminating light beam or the reflected light beam , does not lead to a failure of the measuring device.
  • a loss or failure of a localization unit can have no consequences since each retroreflector is followed by at least two localization units. With this configuration, there is also no need to calibrate or calibrate the localization units, so that all localization units can be aligned equally with their measurement position, ie with “their” retroreflector.
  • the measuring device can have the first retroreflector, the second retroreflector and the third retroreflector.
  • the measuring device can have the first localization unit, the second localization unit, the third localization unit, the fourth localization unit, the fifth localization unit, the sixth localization unit and a seventh localization unit.
  • the first retroreflector may be illuminated by the first, second, third, fourth and fifth localization units.
  • the second retroreflector can be illuminated by the sixth localization unit.
  • the third retroreflector can be illuminated by the seventh localization unit. This corresponds to the five-one-one configuration. It is pointed out that the atomic numbers of the retroreflectors and localization units are used as designations and for differentiation.
  • the first retroreflector can be illuminated by the first, second, third and fourth of the localization unit.
  • the second retroreflector can be illuminated by the fifth and the sixth localization unit.
  • the third retroreflector can be illuminated by the seventh localization unit. This corresponds to the configuration four-two-one.
  • the first retroreflector can be illuminated by the first, the second and the third localization unit.
  • the second retroreflector can be illuminated by the fourth, fifth and sixth localization units.
  • the third retroreflector can be illuminated by the seventh localization unit. This corresponds to the configuration three-three-one.
  • the first retroreflector can be illuminated by the first, second and third localization units.
  • the second retroreflector can be illuminated by that of the fourth and fifth localization units.
  • the third retroreflector can be illuminated by the sixth and seventh localization units. This corresponds to the configuration three-two-two. It is possible to interchange the localization units with one another and the retrore reflectors with one another.
  • the measuring device can have at least three localization units and at least six clearly identifiable retroreflectors, each of the localization units comprising at least one LIDAR sensor.
  • the LIDAR sensor can detect more than one retroreflector by expanding the illuminating light beam or scanning, in particular the entire measuring range, for example all retroreflectors.
  • the at least three retroreflectors by the at least three localization units and the at least six localization units be replaced by the at least six retroreflectors.
  • the illumination light beams of the localization units in particular the LID AR sensors, can be expanded, for example by means of a device for beam expansion, in such a way that the localization unit with the expanded illumination light beam outshines more than one retroreflector, for example two or more retroreflectors.
  • the at least six retroreflectors can be simultaneously illuminated with the illuminating light beams of the at least three localization units, even if a number of the localization units falls below a number of the retroreflectors.
  • the localization units can scan the retroreflectors, for example by means of a laser line or laser raster scan.
  • at least one of the localization units can scan a plurality of retroreflectors, for example two or more retroreflectors, in particular alternately illuminate them at short time intervals by changing the alignment of the illuminating light beam.
  • the retroreflectors can act as a "fixed-stem sky" with comparatively close stars, so that with distance-measuring technology, a highly precise measurement of location and position in space is possible.
  • Such an arrangement with a viewing direction to the outside can also be referred to as “inverted navigation”.
  • the measuring device can have a plurality of retroreflectors, for example a retroreflector distribution.
  • a large number of permutation options for inverted navigation, in particular the possibility of using a retroreflector distribution, with which line-of-sight interruptions, for example due to interference contours of the workpiece and / or machine, are inconsequential for determining the 6D information, are conceivable.
  • the retroreflectors can be arranged on the measurement object and the localization units can be arranged in the room and / or the localization units can be arranged on the measurement object and the retroreflectors can be arranged in the room.
  • the retroreflectors can be arranged far apart. Together with the localization units, the retroreflectors can span and / or define a working volume. The retroreflectors can be arranged such that they are widely separated within the working volume.
  • the localization units can each have a holder for arranging, standing up and / or fastening the localization units.
  • the at least three LID AR sensors can be attached to the measurement object and the at least six, in particular seven, retroreflectors can be in the room be arranged.
  • the retroreflectors can also each have at least one holder for arranging, standing up and / or fastening the retroreflectors.
  • the measuring device can have a control unit.
  • a “control unit” can basically be understood to be a device which is set up to control or regulate at least one component or process.
  • the control unit can have at least one data processing device, for example at least one computer or microcontroller.
  • the control unit can in particular be designed as a central control unit for the entire measuring device. Alternatively, however, a decentralized evaluation unit with several individual, cooperating components is also possible.
  • the control unit can furthermore have at least one user interface, for example at least one keyboard and / or at least one display.
  • the control unit can be set up to align the localization units relative to the retroreflectors.
  • the control unit can be set up to control or regulate a movement of the localization units.
  • the measuring device can be set up to determine a speed of a movement of the retro reflectors.
  • the localization units of the measuring device can be designed as FMCW LIDAR sensors.
  • the measuring device can be set up to determine a movement of the measurement object by tracking, also called tracking, the retroreflectors attached to the measurement object.
  • tracking also called tracking
  • the speeds of the retroreflectors, in particular of the retroreflector ensemble can be determined instantaneously with the measuring device in the case of moving retroreflectors using the Doppler shift occurring in the FMCW LIDAR sensors. This can be of great advantage in particular for motion control of a machine.
  • a signal can be sent directly according to the movement of the retroreflector are generated.
  • the FMCW lidar sensors can have the advantage that the movement of an object is directly expressed as a signal.
  • the movement of the retroreflector can result in a Doppler shift of a beat frequency, where the distance of the retroreflector can co-exist in the Doppler shift of the beat frequency.
  • the Doppler shift of the beat frequency can be present at any time. For example, it may be necessary to calculate the Doppler shift of the beat frequency in order to be able to determine the distance of the retroreflector with the desired accuracy when the retroreflector is moving.
  • Information about an instantaneous speed of the retroreflector can be present at any time as a measurement signal in the form of a double shift of the beat frequency and thus the speed of the retroreflector can be determined instantaneously.
  • the speed of the retroreflector can only be calculable from the spatial distance between two measurements that are spaced apart in time.
  • the measuring device also has at least one evaluation unit, which is set up to determine the spatial position and orientation of the measurement object from the measurement signals of the localization units.
  • the evaluation unit can be set up to reconstruct 3D trajectories of all three retroreflectors or a 6D trajectory of a system of retro reflectors.
  • an “evaluation unit” can in principle be understood as a device which is set up to carry out one or more evaluation steps.
  • the evaluation unit can have at least one data processing device, for example at least one computer or microcontroller.
  • the evaluation unit can in particular be designed as a central evaluation unit for the entire measuring device. Alternatively, however, a decentralized evaluation unit with several individual, cooperating components is also possible.
  • the evaluation unit can furthermore have at least one user interface, for example at least one keyboard and / or at least one display.
  • the evaluation unit can be set up to record and process the measurement signals of the localization units.
  • the evaluation unit is set up to determine the spatial position and orientation of the measurement object from the measurement signals of the localization units.
  • the evaluation unit can be set up to carry out at least one multilateration method, in particular a multilateration method described below, for determining the 6D information.
  • a “multilateration method” can basically be understood to mean any method for determining the spatial position of at least one point, the method being based on the use of Distances of the point based on a plurality of further points. The distances can be determined by distance measurements.
  • the spatial positions of at least three points encompassed by the object can be determined.
  • the measuring device can have three retroreflectors and six localization units.
  • the first retroreflector can be illuminated by the first, the second and the third of the localization unit.
  • the second retroreflector can be illuminated by the fourth and fifth localization units.
  • the third retroreflector can be illuminated by the sixth localization unit.
  • the relative position of the first, second and third retroreflector can be known to one another and / or predetermined and / or predetermined.
  • the relative position can be stored in a data memory of the evaluation unit, for example in the form of a lookup table.
  • the three retroreflectors can be arranged in the form of a triangle on the measurement object.
  • the location vector of the first retroreflector is the location vector of the second retroreflector and the location vector of the third retroreflector is the known and / or predetermined and / or predeterminable distances between the retroreflectors with the location vectors and and as well and be d uv , d uw and d TM.
  • the location vector of the first localization unit is the location vector of the second location unit is the location vector of the third location unit is the location vector of the fourth localization unit is the location vector of the fifth localization unit and the location
  • the vector of the sixth localization unit is, for example, the location vectors
  • the localization units are known and / or predetermined and / or predeterminable, for example by a calibration method.
  • the location vectors of the localization units can be stored in a data memory of the evaluation unit, for example in the form of a lookup table.
  • the three of the six localization units with the location vectors— -> and— » can illuminate and close the first retroreflector with location vector
  • the evaluation unit can be set up to determine the distances h, h and h from the measurement signal of the respective localization unit. Furthermore, the two localization units with the location vectors—> and—> den
  • the evaluation unit can be set up from the measurement signal of the respective
  • Localization unit to determine the distances U and h. Furthermore, the localization unit can illuminate the third retroreflector with the location vector with the location vector
  • the evaluation unit can be set up to determine the distance f from the measurement signal of the localization unit.
  • the evaluation unit can be set up to determine the spatial position and orientation of the measurement object according to the following multilateration method.
  • the evaluation unit can be set up to solve the following system of equations to determine the spatial position and orientation of the measurement object.
  • duv 2 (ui - Vl) 2 + (U2 -V2) 2 + (U3 - V3) 2 (4)
  • duw 2 (ui - Wl) 2 + (U2 -W2) 2 + (U3 - W3) 2 (5)
  • dvw 2 (vi - Wl) 2 + (V2 -W2) 2 + (V3 - W3) 2 (6), where ui, U2 and U3 are the vector components of the location vector vi, V2 and V3 are the vector components of the location vector and wi, W2 and W3 are the vector components of the location vector.
  • the location vectors of the localization units can be predetermined, for example, by a calibration method.
  • the measuring device can be set up to determine the position and orientation without known location vectors of the localization units, in particular to dispense with calibration.
  • the calibration step can be omitted.
  • 3 + M equations with 3 M + 3 -3 unknowns can result.
  • 3 + M equations and further 3 -3 unknowns can result.
  • the measuring device can be set up to measure the distances from the localization units to the respective retroreflectors at a plurality of measuring times.
  • the measuring device can be arranged to carry out a measurement of the distances from the localization units to the respective retroreflectors at N measuring times.
  • the measuring device can be set up to measure the distances from the localization units to the respective retroreflectors at N measuring times
  • the evaluation unit can be set up to carry out a calibration, in particular for determining the location vectors of the localization units.
  • the evaluation unit can be set up to determine the spatial positions of the localization units during calibration.
  • the measuring device can have six localization units and three retro reflectors.
  • the control unit can be set up to align the localization units in the calibration to a single retroreflector. To determine the position of one of the localization units relative to the one of the reflectors, the distance ALj of the localization unit to the retroreflector can be set to a total of 6
  • x tr , y tr and z tr can be the vector components of the vector of the localization unit.
  • the measuring device in particular the evaluation unit, can be set up to determine the distances ALji between the respective localization unit and a retroreflector from the measurement signals of the localization units.
  • the evaluation unit can be set up to determine the location vectors of the localization units by solving the equation system (24).
  • equation system 24
  • the measuring device can be set up to determine the distances ALi at j measuring times, the number of measuring times fulfilling the condition j-6> 3 -6 + 3 - j.
  • the evaluation unit can be set up to uniquely solve the system of equations (24) at j> 6 measurement times, for example in the form of one measurement and five repetitions.
  • the measuring device can be set up to correct an optical path length that fluctuates due to the properties of the air column.
  • the localization units of the measuring device can be designed as FMCW LIDAR sensors.
  • the determination of distances between the FMCW-LIDAR sensors and the respective at least one retroreflector illuminated by the FMCW-LIDAR sensor can be carried out repeatedly.
  • the measurement of the distances with the FMCW-LIDAR sensors can be carried out quickly, so that from at least two successive determinations of the distances, changes in the optical path length between the FMCW-LIDAR sensors and the retroreflectors, which are due to fluctuations in the air column properties, in particular temperature effects , can be based, can be determined and correctable.
  • a coordinate measuring machine for measuring at least one workpiece comprises at least one measuring device according to one of the embodiments described above or according to one of the embodiments described below.
  • the coordinate measuring device has at least one measurement object, which is set up to scan the workpiece.
  • the measurement object can have the localization units or the retroreflectors.
  • a “coordinate measuring device” can basically be understood to mean any device that is set up, at least one spatial coordinate of an object, for example an x, y or z coordinate of a Cartesian coordinate system or a spherical coordinate of a spherical coordinate system , capture or determine.
  • “measuring” an object can be understood to mean determining, deriving and / or registering at least one property of the object.
  • the property can be a distance of the object from the measurement object and / or that of a position, a position or a position of the object in space or relative to the measurement object.
  • the property can also be a condition, for example a surface condition.
  • a “workpiece” can basically be understood to mean any object whose measurement is necessary or desired, for example, as part of a work process, in particular for aligning the object.
  • “scanning” of the workpiece can basically be understood to mean that the measurement object interacts with the workpiece. This can be, for example, tactile or optical scanning.
  • the interaction between the measurement object and the workpiece can also have the same status as machining or general modification and / or manipulation, for example a CNC-controlled precision machining or joining and / or assembly step.
  • a method for measuring at least one measurement object with a measurement device according to one of the embodiments described above or according to one of the embodiments described below is proposed.
  • the method comprises the following steps: a) providing the at least one measurement object, the measurement object having the retroreflectors or the localization units;
  • the method can in particular in step b) align each of the localization units or comprise at least one of the localization units such that the retroreflectors are illuminated with the illuminating light beams, each of the localization units illuminating at least one of the retroreflectors, each of the retroreflectors of at least a localization unit is illuminated.
  • the method can also have at least one calibration step, the calibration step comprising the following method steps:
  • step A) a single one of the retroreflectors can be illuminated by all localization units.
  • Method step A) of the calibration step can furthermore include aligning each of the localization units or at least part of the localization units such that one, in particular a single one, of the retroreflectors is illuminated by at least one illumination light beam from all localization units.
  • each of the localization units can receive at least one of the light beams reflected by the retroreflector and generate a measurement signal, in particular from or according to the received, reflected light beam.
  • steps A) and B) can be repeated several times, in particular at least five times, for example exactly five times, so that steps A) and B) are carried out at least six times, for example exactly six times. This can make it possible to uniquely solve at least one system of equations for determining location vectors of the localization units, for example in the course of method step C) of the calibration method.
  • step C) can further comprise determining distances between the one retroreflector and the localization units.
  • the calibration step can precede step b) of the method for measuring at least one measurement object. Accordingly, step b) can follow step C) of the calibration step.
  • step C) of the calibration step.
  • illuminating the retroreflectors with the illuminating light beams in step b) each of the localization units illuminating at least one of the retroreflectors, each of the retroreflectors being illuminated by at least one localization unit, after illuminating the one of the retroreflectors with each of the localization units in step A) require realignment of the localization units.
  • a computer program which, when running on a computer or computer network, executes at least step d) of the method for measuring the measurement object in one of its configurations. Furthermore, the computer program can be set up to execute method step C) of the calibration step when it is running on a computer or computer network. Furthermore, in the context of the present invention, a computer program with program code means is proposed in order to carry out at least step d) of the method according to the invention in one of its embodiments if the program is executed on a computer or computer network. Furthermore, the computer program can be set up with the program code means to carry out method step C) of the calibration step when the program is executed on a computer or computer network. In particular, the program code means can be stored on a computer-readable data carrier.
  • the devices according to the invention in particular the measuring device and the coordinate measuring device, and the method according to the invention have numerous advantages over known devices and methods.
  • Usual methods for determining the spatial position and orientation of a measurement object which can also be referred to as 6D information, require a large number of measurements and / or a large number of retroreflectors and / or localization units.
  • the devices according to the invention and the method according to the invention can be set up to determine the position and the orientation of the measurement object simultaneously and with a significantly smaller number of retroreflectors and / or localization units.
  • the use of LMCW-LIDAR sensors as localization units of the inventive devices and the method can be particularly advantageous.
  • the determination of the spatial position and orientation of the measurement object can be based on a distance measurement.
  • the use of LMCW-LIDAR sensors can interrupt the line of sight between the LMCW- LIDAR sensors and the retroreflectors irradiated by them are almost without consequence and only lead to the loss of the determination of the spatial position and orientation of the measurement object during the interruption. After the interruption has been eliminated, it may in particular be possible that the determination of the spatial position and orientation of the measurement object can be resumed, in particular without additional measures being necessary for this.
  • a highly precise determination of the spatial position and orientation of the measurement object in particular a highly precise determination of the location and position of the measurement object in the Space is possible, for example when using at least three localization units, in particular FMCW-LIDAR sensors, and at least six, in particular seven, reflector reflectors.
  • Embodiment 1 Measuring device for determining at least one spatial position and orientation of at least one measurement object, the measuring device having at least three retroreflectors and at least six localization units or at least three localization units and at least six retroreflectors, each of the localization units being set up to provide at least one illuminating light beam generate and illuminate at least one retroreflector with the illuminating light beam, each of the retroreflectors being illuminated by at least one of the localization units, each of the localization units being set up to receive at least one reflected light beam from the retroreflector illuminated by it and to at least one measurement signal generate, wherein the measuring device further comprises an evaluation unit, the evaluation unit being set up from the measurement signals of the localization units Determine the spatial position and orientation of the measurement object.
  • Embodiment 2 Measuring device according to the preceding embodiment, each of the localization units comprising at least one element selected from the group consisting of: a laser tracer; a laser tracker; a LIDAR sensor, preferably an FMCW LIDAR sensor.
  • Embodiment 3 Measuring device according to the preceding embodiment, wherein the measuring device has at least three retroreflectors and at least six localization units, each of the localization units comprising the at least one laser tracer or at least one laser tracker, or wherein the measuring device has at least three localization units and at least six retroreflectors, wherein each of the localization units comprises the at least one LIDAR sensor.
  • Embodiment 4 Measuring device according to one of the preceding embodiments, the measuring device having exactly three retroreflectors and exactly six localization units, one of the retroreflectors being illuminated by a maximum of four of the localization units.
  • Embodiment 5 Measuring device according to the preceding embodiment, the localization units and the retroreflectors being arranged and / or aligned with one another in one of the following configurations: four localization units on a first retroreflector, one localization unit on a second retroreflector and one localization unit on a third retroreflector (four -one one); three localization units on the first retroreflector, two localization units on the second retroreflector and one localization unit on the third retroreflector (three-two-one); two localization units on the first retroreflector, two localization units on the second retroreflector and two localization units on the third retroreflector (two-two).
  • Embodiment 6 Measuring device according to one of the preceding embodiments, wherein the measuring device has at least three retroreflectors and at least seven localization units or at least three localization units and at least seven retroreflectors.
  • Embodiment 7 Measuring device according to the preceding embodiment, the measuring device having exactly three retroreflectors and exactly seven localization units, one of the retroreflectors being illuminated by a maximum of five of the localization units.
  • Embodiment 8 Measuring device according to the preceding embodiment, wherein the localization units and the retroreflectors are arranged and / or aligned with one another in one of the following configurations: five localization units on the first retroreflector, one localization unit on the second retroreflector and one localization unit on the third retroreflector (five-one-one); four localization units on the first retroreflector, two localization units on the second retroreflector and one localization unit on the third retroreflector (four-two-one); three localization units on the first retroreflector, three localization units on the second retroreflector and one localization unit on the third retroreflector (three-three-one); three localization units on the first retroreflector, two localization units on the second retroreflector and two localization units on the third retroreflector (three-two-two).
  • Embodiment 9 Measuring device according to one of the preceding embodiments, the retroreflectors being attached to the measurement object and the localization devices units are arranged in a space surrounding the measurement object and / or the localization units are attached to the measurement object and the retroreflectors are arranged in the space surrounding the measurement object.
  • Embodiment 10 Measuring device according to one of the preceding embodiments, a relative position of the retroreflectors to one another and / or a relative position of the localization units to one another being known.
  • Embodiment 11 Measuring device according to one of the preceding embodiments, the measuring device further comprising a control unit, the control unit being set up to align the localization units relative to the retroreflectors.
  • Embodiment 12 Measuring device according to one of the preceding embodiments, the measuring device being set up to determine speeds of the retroreflectors.
  • Embodiment 13 Measuring device according to one of the preceding embodiments, the measuring device being set up to correct an optical path length which fluctuates due to fluctuating air column properties.
  • Embodiment 14 Coordinate measuring device for measuring at least one workpiece, the coordinate measuring device comprising at least one measuring device according to one of the preceding claims relating to a measuring device, wherein the coordinate measuring device has at least one measuring object which is set up to scan the workpiece.
  • Embodiment 15 Coordinate measuring device according to the preceding embodiment, the measurement object having the localization units or the retroreflectors.
  • Embodiment 16 Method for measuring at least one measurement object with a measurement device according to one of the preceding claims relating to a measurement device, the method comprising the following steps: a) providing the at least one measurement object, the measurement object having the retroreflectors or the localization units;
  • Embodiment 17 Method according to the preceding embodiment, the method further comprising at least one calibration step, the calibration step comprising the following method steps:
  • Ligur 1 is a schematic representation of a first embodiment of a measuring device according to the invention.
  • Ligur 2 is a schematic representation of a further embodiment of the measuring device.
  • Ligur 3 is a schematic representation of a method according to the invention. Embodiments
  • FIG. 1 shows a schematic illustration of a first embodiment of a measuring device 110 according to the invention for determining at least one spatial position and orientation of at least one measurement object 112.
  • the measuring device 110 can in particular have three retroreflectors 114 and six localization units 116.
  • Each of the localization units 116 is set up to generate at least one illumination light beam 117 and to illuminate at least one retroreflector 114 with the illumination light beam 117, each of the retroreflectors 114 being illuminated by at least one of the localization units 116.
  • Each of the localization units 116 is set up to receive at least one reflected light beam 121 from the retroreflector 114 illuminated by it and to generate at least one measurement signal.
  • the illuminating light beams 117 and the reflected light beams 121 are symbolized in FIGS. 1 and 2 by double arrows.
  • the measuring device 110 also has an evaluation unit 118, the evaluation unit 118 being set up to determine the spatial position and orientation of the measurement object 112 from the measurement signals of the localization units 116.
  • each of the localization units 116 can be connected to the evaluation unit 118, in particular each with a cable 119. However, connections without cables are also conceivable.
  • the localization units 116 can be formed in particular as a laser tracer 120.
  • One of the retroreflectors 114 can be illuminated by a maximum of four of the six localization units 116.
  • the remaining at least two localization units 116 can be aligned with and illuminate the other two retroreflectors 114.
  • Other orientations of the localization units 116 to the retroreflectors 114 are also conceivable.
  • the localization units 116 and the retroreflectors 114 can be arranged and / or aligned with one another in one of the following configurations: four localization units 116 to a first retro reflector 114, one localization unit 116 to a second Retroreflector 114 and a locator 116 to a third retroreflector 114 (four-one-one); three localization units 116 on the first retroreflector 114, two localization units 116 on the second retroreflector 114 and one localization unit 116 on the third retroreflector 114 (three-two-one); two localization units 116 on the first retroreflector 114, two localization units 116 on the second retroreflector 114 and two localization units 116 on the third retroreflector 114 (two-two).
  • one of the three retroreflectors 114 can be illuminated by three of the localization units 116, one of the two further retroreflectors 114 can be illuminated by two further of the localization units 116 and the remaining one of the retroreflectors 114 can be illuminated by the remaining one of the localization unit 116 be illuminated.
  • the configuration three-two-one can be seen in FIG. 1 and is intended to be described again here by way of example for better understanding of the configurations.
  • the three retroreflectors 114 can be referred to as the first retroreflector 136, the second retroreflector 138 and the third retroreflector 140.
  • the six localization units 116 can be referred to as first localization unit 142, second localization unit 144, third localization unit 146, fourth localization unit 148, fifth localization unit 150 and sixth localization unit 152.
  • the first retroreflector 136 can be illuminated by the first localization unit 142, the second localization unit 144 and the third localization unit 146.
  • the second retroreflector 138 can be illuminated by the fourth localization unit 148 and the fifth localization unit 150.
  • the third retroreflector 140 can be illuminated by the sixth localization unit 116. This corresponds to the configuration three-two-one and can be seen in FIG. 1.
  • the ordinal numbers of the retroreflectors 114 and localization units 116 are only intended to illustrate how many of the localization units 116 can be aligned together towards the same retroreflector 114. Accordingly, the localization units 116 may be interchangeable or interchangeable.
  • the retroreflectors 114 can also be interchangeable or interchangeable. For example, based on the above example, the second retroreflector 138 may be illuminated by the sixth localization unit 152 and the third retroreflector 140 may be illuminated by the fifth localization unit 150. Other combinations are possible.
  • the retroreflectors 114 can be arranged on the measurement object 112 and the localization units 116 can be arranged in space, for example in a space surrounding or encompassing the measurement object.
  • a relative position, in particular a spatial position and / or a distance, of the retroreflectors to one another, as indicated by dashed lines in FIGS. 1 and 2 can be known.
  • the measuring device 112 can have a control unit 154, wherein the control unit can be set up to align the localization units 116 relative to the retroreflectors 114.
  • the measurement object 112 can be a tool 122.
  • the retroreflectors 114 can be attached to the tool 122 in this way. It is necessary that a geometric center of the tool and a geometric center of a triangle formed by the three retroreflectors can coincide, as can be seen in FIGS. 1 and 2.
  • FIG. 2 shows a schematic illustration of a further embodiment of the measuring device 110 comprising three retroreflectors 114 and seven localization units, where in one of the retroreflectors 114 a maximum of five of the localization units 116 can be illuminated. The remaining at least two localization units 116 can be aligned with and illuminate the other two retroreflectors 114. Other orientations of the localization units 116 on the retroreflectors 114 are also conceivable.
  • the localization units 116 and the retroreflectors 114 can be arranged and / or aligned with one another in one of the following configurations: five localization units 116 on the first retroreflector 114, one localization unit 116 on the second retroreflector 114 and a location unit 116 on the third retroreflector 114 (five-one-one); four localization units 116 on the first retroreflector 114, two localization units 116 on the second retroreflector 114 and one localization unit 116 on the third retroreflector 114 (four-two-one); three localization units 116 on the first retroreflector 114, three localization units 116 on the second retroreflector 114 and one localization unit 116 on the third retroreflector 114 (three-three-one); three localization units 116 on the first retroreflector 114, two localization units 116 on the second retroreflector 114 and two localization
  • one of the three retroreflectors 114 can be illuminated by three of the localization units 116, one of the two further retroreflectors 114 can be illuminated by two further of the localization units 116 and the remaining one of the retroreflectors 114 can be illuminated by the two remaining ones of the localization units 116 be illuminated.
  • the configuration three-two-two can be seen in FIG. 2 and is to be described here again by way of example for a better understanding of the configurations.
  • the three retroreflectors 114 may be referred to as the first retroreflector 136, the second retroreflector 138, and the third retroreflector 140.
  • the seven location units 116 may be referred to as the first location unit 142, the second location unit 144, the third location unit 146, the fourth location unit 148, the fifth location unit 150, the sixth location unit 152 and the seventh location unit 156.
  • the first retroreflector 136 can be illuminated by the first localization unit 142, the second localization unit 144 and the third localization unit 146.
  • the second retroreflector 138 can be lit by the fourth localization unit 148 and the fifth localization unit 150.
  • the third retroreflector 140 may be illuminated by the sixth localization unit 152 and the seventh localization unit 156.
  • Other combinations and / or exchanges are possible.
  • each of the three retroreflectors 114 can be illuminated by at least two localization units 116, for example using the three-two-two configuration described above and shown in FIG.
  • this can be advantageous since an interruption of a line of sight between only one of the retroreflectors 114 and one of the localization units 116 irradiating it, in particular an interruption of the illuminating light beam 117 and / or the reflected light beam 121, does not lead to a failure of the measuring device.
  • FIG. 3 shows an embodiment of a method for measuring at least one measurement object 112 with a measurement device 110 according to one of the embodiments described above or according to one of the embodiments explained below.
  • the method comprises the following steps: a) providing the at least one measurement object 112, the measurement object 112 having the retroreflectors 114 or the localization units 116;
  • the evaluation unit 118 is set up to determine the spatial position and orientation of the measurement object 112 from the measurement signals of the localization units 116. At least one multilateration method can be used to determine the spatial position and orientation of a three-dimensional object. In particular, the Evaluation unit 118 can be set up to determine the spatial position and orientation of the measurement object 112 according to the multilateration method already described above, in particular using the equations and systems of equations (1) to (14).
  • FIG. 3 shows a schematic representation of the method, reference numeral 128 denoting process step a), reference numeral 130 denoting process step b), reference numeral 132 denoting process step c) and reference numeral 134 denoting process step d).
  • the method steps can be carried out in the order specified, it being possible for one or more of the steps to be carried out at least in part at the same time and for one or more of the steps to be repeated several times. For example, it may be necessary to repeat at least one process step depending on the system design.
  • further steps can also be carried out, for example in order to meet the criteria for the solvability of the systems of equations for a clear determination of the 6D information.
  • the method can include a calibration step, not shown in the figures, the calibration step comprising the following method steps:
  • the evaluation unit 118 can be set up to carry out a calibration, in particular to determine the location vectors of the localization units 116.
  • the evaluation unit 118 can be set up to determine the spatial positions of the localization units 116 during the calibration.
  • the evaluation unit 118 can be set up to carry out a calibration according to the method already described above, in particular on the basis of the equations and systems of equations (15) to (24).
  • the calibration step can precede step b) of the method for measuring at least one measurement object 112.
  • the method can include the calibration step if the measuring device 112 used in the method has three retroreflectors 114 and six localization units 116.
  • the calibration step can be omitted if the measuring device 110 used in the method has three retroreflectors and at least seven, in particular seven, localization units 116.
  • step A) a single one of the retroreflectors 114 can be illuminated by all localization units 116.
  • the method step A) of the calibration step can further comprise aligning each of the localization units 116 or at least a part of the localization units 116 such that one of the retroreflectors 114 is illuminated by at least one illumination light beam 117 from each of the localization units 116.
  • each of the localization units 116 can receive at least one of the light beams 121 reflected by the retroreflector 114 and generate a measurement signal, in particular from or according to the received, reflected light beam 121.
  • steps A) and B) can be carried out several times, in particular, are repeated at least five times, for example five times, so that steps A) and B) are carried out at least six times, for example six times.
  • method step C) can include solving an equation system with the evaluation unit 118, in particular for determining the spatial position for each of the localization units 116 from the measurement signals of the localization units 116.
  • step C) can furthermore determine the distances between the comprise a reflector 114 and the localization units 116.
  • the calibration step can precede step b) of the method for measuring at least one measurement object 112. Accordingly, step b) can follow step C) of the calibration step.
  • illuminating the retroreflectors 114 with the illuminating light beams 117 in step b) after illuminating the one of the retroreflectors 114 with each of the localization units 116 in step A) may require realignment of the localization units 116.

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Abstract

L'invention concerne un dispositif de mesure (110) servant à définir au moins une position et une orientation spatiales d'au moins un objet de mesure (112). Le dispositif de mesure (110) comporte au moins trois rétroréflecteurs (114) et au moins six unités de localisation (116) ou au moins trois unités de localisation (116) et au moins six rétroréflecteurs (114). Chacune des unités de localisation (116) est mise au point pour générer au moins un rayon de lumière d'éclairage (117) et pour éclairer au moins un rétroréflecteur (114) avec le rayon de lumière d'éclairage (117). Chacun des rétroréflecteurs (114) est éclairé par au moins une des unités de localisation (116). Chacune des unités de localisation (116) est mise au point pour recevoir du rétroréflecteur (114) qu'elle éclaire au moins un rayon de lumière réfléchi (121) et pour générer au moins un signal de mesure. Par ailleurs, le dispositif de mesure (110) comporte une unité d'évaluation (118), laquelle unité d'évaluation (118) est mise au point pour définir à partir des signaux de mesure des unités de localisation (116) la position et l'orientation spatiales de l'objet de mesure (112).
PCT/EP2019/082258 2018-11-22 2019-11-22 Procédé et dispositif servant à définir au moins une position et une orientation spatiales et à orienter au moins un objet de mesure Ceased WO2020104666A1 (fr)

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DE102021209427A1 (de) 2021-08-27 2023-03-02 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zur Bestimmung von mindestens einer räumlichen Position und Orientierung mindestens eines Messobjekts

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