WO2024130652A1 - 显示基板及其制备方法、显示装置 - Google Patents
显示基板及其制备方法、显示装置 Download PDFInfo
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- WO2024130652A1 WO2024130652A1 PCT/CN2022/141082 CN2022141082W WO2024130652A1 WO 2024130652 A1 WO2024130652 A1 WO 2024130652A1 CN 2022141082 W CN2022141082 W CN 2022141082W WO 2024130652 A1 WO2024130652 A1 WO 2024130652A1
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/441—Interconnections, e.g. scanning lines
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/04—Structural and physical details of display devices
- G09G2300/0421—Structural details of the set of electrodes
- G09G2300/0426—Layout of electrodes and connections
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/04—Structural and physical details of display devices
- G09G2300/0439—Pixel structures
- G09G2300/0452—Details of colour pixel setup, e.g. pixel composed of a red, a blue and two green components
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/0809—Several active elements per pixel in active matrix panels
- G09G2300/0819—Several active elements per pixel in active matrix panels used for counteracting undesired variations, e.g. feedback or autozeroing
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/0809—Several active elements per pixel in active matrix panels
- G09G2300/0842—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/0809—Several active elements per pixel in active matrix panels
- G09G2300/0842—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor
- G09G2300/0852—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor being a dynamic memory with more than one capacitor
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G09G2300/0809—Several active elements per pixel in active matrix panels
- G09G2300/0842—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor
- G09G2300/0861—Several active elements per pixel in active matrix panels forming a memory circuit, e.g. a dynamic memory with one capacitor with additional control of the display period without amending the charge stored in a pixel memory, e.g. by means of additional select electrodes
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2320/00—Control of display operating conditions
- G09G2320/02—Improving the quality of display appearance
- G09G2320/0247—Flicker reduction other than flicker reduction circuits used for single beam cathode-ray tubes
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/2007—Display of intermediate tones
- G09G3/2074—Display of intermediate tones using sub-pixels
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
- G09G3/3225—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix
- G09G3/3233—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED] using an active matrix with pixel circuitry controlling the current through the light-emitting element
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/481—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs integrated with passive devices, e.g. auxiliary capacitors
Definitions
- This article relates to but is not limited to the field of display technology, and in particular to a display substrate and a preparation method thereof, and a display device.
- LED Semiconductor light emitting diode
- LCD Liquid Crystal Display
- OLED Organic Light Emitting Diode
- LCD Liquid Crystal Display
- OLED Organic Light Emitting Diode
- Micro LED display/Mini LED display can achieve large-size displays through splicing, which can break through size limitations. Because LED has the advantages of self-luminescence, wide viewing angle, fast response, simple structure, small size, light weight, energy saving, high efficiency, long life, clear light, etc., it is easier to achieve high resolution (Pixels Per Inch, PPI), and it is considered to be the most competitive next-generation display technology.
- an embodiment of the present disclosure provides a display substrate, including a driving circuit layer arranged on a substrate, the driving circuit layer including multiple circuit units, the multiple circuit units including at least a first circuit unit, a second circuit unit and a third circuit unit, the first circuit unit including a first pixel driving circuit, the first pixel driving circuit including at least a first driving transistor, the second circuit unit including a second pixel driving circuit, the second pixel driving circuit including at least a second driving transistor, the third circuit unit including a third pixel driving circuit, the third pixel driving circuit including at least a third driving transistor; a channel width of the first driving transistor is greater than a channel width of the second driving transistor or the third driving transistor, and a channel length of the first driving transistor is the same as a channel length of the second driving transistor or the third driving transistor.
- a ratio of a channel width of the first driving transistor to a channel width of the second driving transistor or the third driving transistor is 2 to 6.
- a channel width of the second driving transistor is substantially the same as a channel width of the third driving transistor, and a channel length of the second driving transistor is substantially the same as a channel length of the third driving transistor.
- the first pixel driving circuit further includes a first storage capacitor
- the second pixel driving circuit further includes a second storage capacitor
- the third pixel driving circuit further includes a third storage capacitor; the capacitance value of the first storage capacitor is greater than or equal to the capacitance value of the second storage capacitor or the third storage capacitor.
- an area of an orthographic projection of the first storage capacitor on the substrate is larger than an area of an orthographic projection of the second storage capacitor or the third storage capacitor on the substrate.
- a first length of the orthographic projection of the first storage capacitor on the substrate is the same as the first length of the orthographic projection of the second storage capacitor or the third storage capacitor on the substrate, a second length of the orthographic projection of the first storage capacitor on the substrate is greater than or equal to the second length of the orthographic projection of the second storage capacitor or the third storage capacitor on the substrate, the first length is a dimension in a first direction, the second length is a dimension in a second direction, and the first direction intersects with the second direction.
- a ratio of a second length of a projection of the first storage capacitor on the substrate to a second length of a projection of the second storage capacitor or the third storage capacitor on the substrate is 1 to 2.
- a first length of the orthographic projection of the second storage capacitor on the substrate is substantially the same as a first length of the orthographic projection of the third storage capacitor on the substrate
- a second length of the orthographic projection of the second storage capacitor on the substrate is substantially the same as a second length of the orthographic projection of the third storage capacitor on the substrate.
- the display substrate further includes a light-emitting structure layer disposed on a side of the driving circuit layer away from the substrate, the light-emitting structure layer including a plurality of light-emitting units, the plurality of light-emitting diodes including at least a red light-emitting diode emitting red light, a green light-emitting diode emitting green light, and a blue light-emitting diode emitting blue light, the red light-emitting diode being connected to the first pixel driving circuit, the green light-emitting diode being connected to the second pixel driving circuit, and the blue light-emitting diode being connected to the third pixel driving circuit.
- the light-emitting structure layer including a plurality of light-emitting units, the plurality of light-emitting diodes including at least a red light-emitting diode emitting red light, a green light-emitting diode emitting green light, and a blue light-emit
- At least one circuit unit includes a high-voltage connection line extending along a first direction and a high-voltage power line extending along a second direction, wherein the high-voltage power line is connected to the high-voltage connection line through a via to form a mesh connection structure for transmitting a high-voltage power signal, and the first direction intersects with the second direction.
- At least one circuit unit includes a low-voltage connection line extending along a first direction and a low-voltage power line extending along a second direction, the low-voltage power line is connected to the low-voltage connection line through a via to form a mesh connection structure for transmitting a low-voltage power signal, and the first direction intersects with the second direction.
- the low voltage power line includes a first low voltage power line and a second low voltage power line, the first low voltage power line is connected to a red light emitting diode, and the second low voltage power line is connected to a green light emitting diode and a blue light emitting diode.
- At least one circuit unit includes a first low voltage connection line extending along the first direction, and the first low voltage power line is connected to the first low voltage connection line through a via to form a mesh connection structure for transmitting a first low voltage power signal.
- At least one circuit unit includes a second low voltage connection line extending along the first direction, and the second low voltage power line is connected to the second low voltage connection line through a via to form a mesh connection structure for transmitting a second low voltage power signal.
- At least one circuit unit includes a high-frequency connecting line extending along a first direction and a high-frequency signal line extending along a second direction, wherein the high-frequency signal line is connected to the high-frequency connecting line through a via to form a mesh connection structure for transmitting a high-frequency signal, and the first direction intersects with the second direction.
- the display substrate further includes a test circuit and a plurality of data signal lines extending along a unit column direction, the data signal lines are connected to the pixel driving circuit, the detection circuit includes at least a plurality of detection units and a plurality of transmission lines, the plurality of detection units are correspondingly connected to the plurality of data signal lines through the plurality of transmission lines, a shielding line is arranged between at least one transmission line and an adjacent transmission line, and the shielding line is connected to a constant voltage signal line or a ground signal line.
- a distance between at least one transmission line and an adjacent shielding line is 10 ⁇ m to 20 ⁇ m.
- the transmission line and the shielding line are disposed in the same layer.
- the present disclosure further provides a display device, comprising the display substrate as described above.
- the present disclosure further provides a method for preparing a display substrate, comprising:
- a driving circuit layer is formed on a substrate, the driving circuit layer includes a plurality of circuit units, the plurality of circuit units include at least a first circuit unit, a second circuit unit and a third circuit unit, the first circuit unit includes a first pixel driving circuit, the first pixel driving circuit includes at least a first driving transistor, the second circuit unit includes a second pixel driving circuit, the second pixel driving circuit includes at least a second driving transistor, the third circuit unit includes a third pixel driving circuit, the third pixel driving circuit includes at least a third driving transistor; a channel width of the first driving transistor is greater than a channel width of the second driving transistor or the third driving transistor, and a channel length of the first driving transistor is the same as a channel length of the second driving transistor or the third driving transistor.
- FIG1 is a schematic structural diagram of a display device
- FIG2 is a schematic diagram of a planar structure of a display substrate
- FIG3 is an equivalent circuit diagram of a pixel driving circuit according to an exemplary embodiment of the present disclosure.
- FIG4 is a schematic structural diagram of a display substrate according to an exemplary embodiment of the present disclosure.
- FIG5A is a schematic structural diagram of a first driving transistor according to the present disclosure.
- FIG5B is a schematic diagram of the structure of a second driving transistor according to the present disclosure.
- FIG6A is a schematic diagram of the structure of a first storage capacitor according to the present disclosure.
- FIG6B is a schematic diagram of the structure of a second storage capacitor according to the present disclosure.
- FIG7 is a schematic diagram of a display substrate after a first conductive layer pattern is formed according to the present disclosure
- FIGS. 8A and 8B are schematic diagrams of a display substrate after a semiconductor layer pattern is formed according to the present disclosure
- FIG9 is a schematic diagram of a display substrate after a second insulating layer pattern is formed according to the present disclosure.
- FIGS. 10A and 10B are schematic diagrams of a display substrate after a second conductive layer pattern is formed according to the present disclosure
- FIG11 is a schematic diagram of a display substrate after a third insulating layer pattern is formed according to the present disclosure.
- FIGS. 12A and 12B are schematic diagrams of a display substrate after a third conductive layer pattern is formed according to the present disclosure
- FIG13 is a schematic diagram of a display substrate after forming a first flat layer pattern according to the present disclosure.
- FIGS. 14A and 14B are schematic diagrams of a display substrate after a fourth conductive layer pattern is formed according to the present disclosure
- FIG15 is a schematic diagram of a display substrate after a second flat layer pattern is formed according to the present disclosure.
- FIG16 is an equivalent circuit diagram of another pixel driving circuit according to an exemplary embodiment of the present disclosure.
- FIG17 is a schematic structural diagram of another display substrate according to an exemplary embodiment of the present disclosure.
- FIG18A is a schematic structural diagram of another first driving transistor disclosed in the present invention.
- FIG18B is a schematic diagram of the structure of another second driving transistor disclosed in the present invention.
- FIG19A is a schematic diagram of the structure of another first storage capacitor disclosed in the present invention.
- FIG19B is a schematic diagram of the structure of another second storage capacitor disclosed in the present invention.
- FIG20 is a schematic diagram of another display substrate after forming a first conductive layer pattern according to the present disclosure.
- 21A and 21B are schematic diagrams of another display substrate after a semiconductor layer pattern is formed in the present disclosure.
- 22A and 22B are schematic diagrams of another display substrate after forming a second conductive layer pattern according to the present disclosure
- FIG23 is a schematic diagram of another display substrate after a third insulating layer pattern is formed in the present disclosure.
- 24A and 24B are schematic diagrams of another display substrate after forming a third conductive layer pattern according to the present disclosure.
- FIG25 is a schematic diagram of another display substrate after forming a first flat layer pattern according to the present disclosure.
- 26A and 26B are schematic diagrams of another display substrate after a fourth conductive layer pattern is formed in the present disclosure.
- FIG26C is a schematic diagram of a power supply routing according to an exemplary embodiment of the present disclosure.
- FIG27 is a schematic diagram of another display substrate after forming a second planar layer pattern according to the present disclosure.
- FIG28 is a schematic structural diagram of yet another display substrate according to an exemplary embodiment of the present disclosure.
- FIG29 is a schematic diagram of another display substrate after forming a first conductive layer pattern according to the present disclosure.
- FIG30 is a schematic diagram of another display substrate after a semiconductor layer pattern is formed in the present disclosure.
- FIG31 is a schematic diagram of another display substrate after forming a second conductive layer pattern according to the present disclosure.
- FIG32 is a schematic diagram of another display substrate after a third insulating layer pattern is formed in the present disclosure.
- FIG33 is a schematic diagram of another display substrate after a third conductive layer pattern is formed in the present disclosure.
- FIG34 is a schematic diagram of another display substrate after forming a first flat layer pattern according to the present disclosure.
- FIG35A is a schematic diagram of another display substrate after a fourth conductive layer pattern is formed in the present disclosure.
- FIG35B is a schematic diagram of another power supply routing according to an exemplary embodiment of the present disclosure.
- FIG36 is a schematic diagram of another display substrate after forming a second flat layer pattern according to the present disclosure.
- FIG37 is a schematic diagram showing a substrate undergoing CT testing
- FIG38 is a schematic diagram of the structure of a detection circuit of an exemplary embodiment of the present disclosure.
- FIG. 39 is a schematic diagram of a connection between a shielding line and a constant voltage signal line according to an exemplary embodiment of the present disclosure.
- AA display area
- AT1 first active layer
- AT2 second active layer
- AT3 third active layer
- AT4 fourth active layer
- AT5 sixth active layer
- AT6 singleth active layer
- AT7 singleth active layer
- AT8 epiighth active layer
- AT9 noth active layer
- AT10 tenth active layer
- AT11 eleventh active layer
- AT12 the twelfth active layer
- CF1 the first electrode plate
- CF2 the second electrode plate
- CF3 third plate
- CF4 fourth plate
- CF5 sixth plate
- CF6 ixth plate
- CF7 sineth plate
- CF8 eighth plate
- CF9 ninth plate
- Cs1 first storage capacitor
- Cs2 second storage capacitor
- Cs3 third storage capacitor
- CT1 first control line
- CT2 second control line
- C1 first capacitor
- C2 second capacitor
- DTFT1 first driving transistor
- DTFT2 second driving transistor
- DTFT3 third driving transistor
- DataI data signal line
- DataT duration signal line
- EM luminous signal line
- FA binding area
- Gate1 first gate electrode
- Gate2 second gate electrode
- Gate3-B third bottom gate electrode
- Gate3-T the third top gate electrode
- Gate4 the fourth gate electrode
- Gate5 the fifth gate electrode
- Gate6 the sixth gate electrode
- Gate7 the seventh gate electrode
- Gate8 the eighth gate electrode
- Gate9 the ninth gate electrode
- Gate10 the tenth gate electrode
- Gate11 the eleventh gate electrode
- Gate12 the twelfth gate electrode; Hf—high-frequency signal line; Hf-C—high-frequency connecting line;
- S1 first scanning signal line
- S2 second scanning signal line
- VDD high voltage power line
- VDD-C high voltage connection line
- VSS low voltage power line
- VSS-C low voltage connection line
- Vint initial signal line
- 10 substrate
- 11 power electrode
- 200 display substrate
- 210 detection unit
- 220 control line
- 230 Detection line
- 240 Transmission line
- 250 shielding line.
- the proportions of the drawings in this disclosure can be used as a reference in the actual process, but are not limited to this.
- the width-to-length ratio of the channel, the thickness and spacing of each film layer, the width and spacing of each signal line can be adjusted according to actual needs.
- the number of pixels in the display substrate and the number of sub-pixels in each pixel are not limited to the numbers shown in the figures.
- the drawings described in this disclosure are only structural schematic diagrams, and one method of this disclosure is not limited to the shapes or values shown in the drawings.
- ordinal numbers such as “first”, “second” and “third” are provided to avoid confusion among constituent elements, and are not intended to limit the number.
- the terms “installed”, “connected”, and “connected” should be understood in a broad sense.
- it can be a fixed connection, or a detachable connection, or an integral connection; it can be a mechanical connection, or a connection; it can be a direct connection, or an indirect connection through an intermediate, or the internal communication of two elements.
- installed should be understood in a broad sense.
- it can be a fixed connection, or a detachable connection, or an integral connection; it can be a mechanical connection, or a connection; it can be a direct connection, or an indirect connection through an intermediate, or the internal communication of two elements.
- a transistor refers to an element including at least three terminals: a gate electrode, a drain electrode, and a source electrode.
- the transistor has a channel region between a drain electrode (drain electrode terminal, drain region, or drain electrode) and a source electrode (source electrode terminal, source region, or source electrode), and current can flow through the drain electrode, the channel region, and the source electrode.
- the channel region refers to a region where current mainly flows.
- the first electrode may be a drain electrode and the second electrode may be a source electrode, or the first electrode may be a source electrode and the second electrode may be a drain electrode.
- the functions of the "source electrode” and the “drain electrode” are sometimes interchanged. Therefore, in this specification, the “source electrode” and the “drain electrode” may be interchanged, and the “source terminal” and the “drain terminal” may be interchanged.
- connection includes the case where components are connected together through an element having some kind of electrical function.
- element having some kind of electrical function There is no particular limitation on the "element having some kind of electrical function” as long as it can transmit and receive electrical signals between the connected components.
- Examples of “element having some kind of electrical function” include not only electrodes and wiring, but also switching elements such as transistors, resistors, inductors, capacitors, and other elements having various functions.
- parallel means a state where the angle formed by two straight lines is greater than -10° and less than 10°, and therefore, also includes a state where the angle is greater than -5° and less than 5°.
- perpendicular means a state where the angle formed by two straight lines is greater than 80° and less than 100°, and therefore, also includes a state where the angle is greater than 85° and less than 95°.
- film and “layer” may be interchanged.
- conductive layer may be replaced by “conductive film”.
- insulating film may be replaced by “insulating layer”.
- thickness and “height” refer to the vertical distance between the surface of the film layer away from the substrate and the surface of the film layer close to the substrate.
- triangles, rectangles, trapezoids, pentagons or hexagons in this specification are not in the strict sense, and may be approximate triangles, rectangles, trapezoids, pentagons or hexagons, etc. There may be some small deformations caused by tolerances, and there may be chamfers, arc edges and deformations.
- FIG1 is a schematic diagram of the structure of a display device.
- the main structure of a large-size display device may include a plurality of display substrates 200 arranged on a motherboard 100, and the plurality of display substrates 100 are closely spliced together for image display.
- at least one display substrate 200 may include at least a driving circuit layer 20 arranged on a substrate 10 and a light emitting structure layer 30 arranged on a side of the driving circuit layer 20 away from the substrate.
- the driving circuit layer 20 may include a plurality of circuit units, at least one circuit unit may include a pixel driving circuit and a plurality of signal lines connected to the pixel driving circuit, and the pixel driving circuit is configured to receive a data voltage under the control of the signal line and output a corresponding current.
- the light emitting structure layer 30 may include a plurality of light emitting units, at least one light emitting unit may include a light emitting diode 40, the light emitting diode 40 in the plurality of light emitting units is correspondingly connected to the pixel driving circuit in the plurality of circuit units, and the light emitting diode 40 is configured to emit light of corresponding brightness under the drive of the output current of the corresponding pixel driving circuit.
- the circuit unit mentioned in the present disclosure refers to an area divided according to a pixel driving circuit
- the light-emitting unit mentioned in the present disclosure refers to an area divided according to a light-emitting diode.
- the positions of the light-emitting unit and the circuit unit may correspond, or the positions of the light-emitting unit and the circuit unit may not correspond, and the present disclosure does not limit this.
- the light emitting diode 40 may be a sub-millimeter light emitting diode Mini LED or a micro light emitting diode Micro LED.
- FIG. 2 is a schematic diagram of a planar structure of a display substrate.
- the display substrate may include a first sub-pixel P1 emitting a first color light, a second sub-pixel P2 emitting a second color light, and a third sub-pixel P3 emitting a third color light.
- each sub-pixel may include a circuit unit and a light-emitting unit.
- the first sub-pixel P1 may include a first circuit unit and a first light-emitting unit, the first light-emitting unit may include at least a first light-emitting diode emitting a first color light, and the first circuit unit may include at least a first pixel driving circuit connected to the first light-emitting diode.
- the second sub-pixel P2 may include a second circuit unit and a second light-emitting unit, the second light-emitting unit may include at least a second light-emitting diode emitting a second color light, and the second circuit unit may include at least a second pixel driving circuit connected to the second light-emitting diode.
- the third sub-pixel P3 may include a third circuit unit and a third light-emitting unit, the third light-emitting unit may include at least a third light-emitting diode emitting a third color light, and the third circuit unit may include at least a third pixel driving circuit connected to the third light-emitting diode.
- the first sub-pixel P1 may be a red (R) sub-pixel emitting red light
- the second sub-pixel P2 may be a green sub-pixel (G) emitting green light
- the third sub-pixel P3 may be a blue (B) sub-pixel emitting blue light
- the R sub-pixel, the G sub-pixel, and the B sub-pixel may form a pixel unit P.
- the three sub-pixels in the pixel unit P may be arranged in a horizontal parallel, vertical parallel, or in a triangular pattern, which is not limited in the present disclosure.
- the pixel unit P may include four sub-pixels, and the four sub-pixels may be arranged in a horizontal parallel arrangement, a vertical parallel arrangement, a square shape, a diamond shape, etc., which is not limited in the present disclosure.
- R chips for short red light-emitting diodes
- G/B chips for short blue and green light-emitting diodes
- the driving transistor (DTFT) in the pixel driving circuit is designed according to the current demand of the G/B chip, the required current value of 4 ⁇ A can be achieved when the gate-source voltage Vgs is 5V, but under the same cross-voltage, the driving transistor of the R chip cannot reach the required current value of 20 ⁇ A when the gate-source voltage Vgs is 5V, so that the R chip cannot meet the brightness demand. If the driving transistor is designed according to the current requirement of the R chip, the G/B chip will reach its required current at a smaller gate-source voltage Vgs, resulting in a small data range and inability to achieve more grayscales.
- the present disclosure provides a display substrate, and pixel driving circuits for driving red light emitting diodes, green light emitting diodes and blue light emitting diodes adopt different structures to avoid defects such as brightness not meeting requirements or not being able to achieve more grayscales.
- the display substrate includes a driving circuit layer disposed on a substrate and a light emitting structure layer disposed on a side of the driving circuit layer away from the substrate, the driving circuit layer includes a plurality of circuit units forming a plurality of unit rows and a plurality of unit columns, the light emitting structure layer includes a plurality of light emitting units, the circuit units include at least a pixel driving circuit, and the light emitting units include at least a light emitting diode; the plurality of circuit units include at least a first circuit unit provided with a first pixel driving circuit, a second circuit unit provided with a second pixel driving circuit, and a third circuit unit provided with a third pixel driving circuit, and the plurality of light emitting diodes include at least a first light emitting diode emitting a first color light, a second light emitting diode emitting a second color light, and a third light emitting diode emitting a third color light.
- a light-emitting diode and a third light-emitting diode emitting a third color light the first pixel driving circuit is connected to the first light-emitting diode, the second pixel driving circuit is connected to the second light-emitting diode, and the third pixel driving circuit is connected to the third light-emitting diode;
- the first pixel driving circuit at least includes a first driving transistor and a first storage capacitor
- the second pixel driving circuit at least includes a second driving transistor and a second storage capacitor
- the third pixel driving circuit at least includes a third driving transistor and a third storage capacitor
- the width-to-length ratio of the first driving transistor is greater than the width-to-length ratio of the second driving transistor or the third driving transistor
- the capacitance value of the first storage capacitor is greater than or equal to the capacitance value of the second storage capacitor or the third storage capacitor.
- a channel width of the first driving transistor is greater than a channel width of the second driving transistor or the third driving transistor, and a channel length of the first driving transistor is substantially the same as a channel length of the second driving transistor or the third driving transistor.
- an area of an orthographic projection of the first storage capacitor on the substrate is larger than an area of an orthographic projection of the second storage capacitor or the third storage capacitor on the substrate.
- the display substrate of the present disclosure is illustrated below through multiple examples.
- FIG3 is an equivalent circuit diagram of a pixel driving circuit of an exemplary embodiment of the present disclosure, illustrating a 12T3C pixel driving circuit structure.
- multiple light-emitting diodes in a display substrate may be driven by current mode. Since current-mode light-emitting diodes may have problems of color coordinate drift and low external quantum efficiency when driven at a lower current density, resulting in poor brightness uniformity, it is difficult to accurately represent low grayscale by only controlling the amplitude of the current.
- the pixel driving circuit of an exemplary embodiment of the present disclosure includes at least two types of data terminals: a current data terminal and a duration data terminal.
- the current data terminal is configured to provide current signals of different amplitudes to the light-emitting diodes
- the duration data terminal is configured to provide the light-emitting diodes with the time length of the above-mentioned current signal.
- the pixel driving circuit provided by the present exemplary embodiment may include at least a current control subcircuit DK and a duration control subcircuit SK.
- the current control subcircuit DK may include at least a first transistor T1, a second transistor T2, a third transistor T3, a fourth transistor T4, a fifth transistor T5, a sixth transistor T6, a seventh transistor T7, a twelfth transistor T12 and a storage capacitor Cs
- the duration control subcircuit SK may include at least an eighth transistor T8, a ninth transistor T9, a tenth transistor T10, an eleventh transistor T11, a first capacitor C1 and a second capacitor C2.
- the pixel driving circuit may include at least a first node N1, a second node N2, a third node N3, a fourth node N4, a fifth node N5, a sixth node N6, and a seventh node N7.
- the first node N1 is connected to the second electrode of the ninth transistor T9, the second electrode of the eleventh transistor T11 and the gate electrode of the twelfth transistor T12, respectively;
- the second node N2 is connected to the second electrode of the seventh transistor T7, the second electrode of the twelfth transistor T12 and the anode of the light emitting diode EL, respectively;
- the third node N3 is connected to the second electrode of the first transistor T1, the first electrode of the second transistor T2, the gate electrode of the third transistor T3 and the first end of the storage capacitor Cs, respectively;
- the fourth node N4 is connected to the second electrode of the second transistor T2, the second electrode of the third transistor T3 and the first electrode of the sixth transistor T6, respectively;
- the fifth node N5 is connected to the first electrode of the third transistor T3, the second electrode of the fourth transistor T4 and the second electrode of the fifth transistor T5, respectively;
- the sixth node N6 is connected to the second electrode of the eighth transistor T8, the gate electrode
- a gate electrode of the first transistor T1 is connected to the second scan signal line S2 , a first electrode of the first transistor T1 is connected to the initial signal line Vint, and a second electrode of the first transistor T1 is connected to the third node N3 .
- a gate electrode of the second transistor T2 is connected to the first scan signal line S1 , a first electrode of the second transistor T2 is connected to the third node N3 , and a second electrode of the second transistor T2 is connected to the fourth node N4 .
- a gate electrode of the third transistor T3 is connected to the third node N3
- a first electrode of the third transistor T3 is connected to the fifth node N5
- a second electrode of the third transistor T3 is connected to the fourth node N4 .
- a gate electrode of the fourth transistor T4 is connected to the first scan signal line S1
- a first electrode of the fourth transistor T4 is connected to the data signal line Data1
- a second electrode of the fourth transistor T4 is connected to the fifth node N5.
- a gate electrode of the fifth transistor T5 is connected to the light emitting signal line EM, a first electrode of the fifth transistor T5 is connected to the first power line VDD, and a second electrode of the fifth transistor T5 is connected to the fifth node N5.
- a gate electrode of the sixth transistor T6 is connected to the light emitting signal line EM, a first electrode of the sixth transistor T6 is connected to the fourth node N4, and a second electrode of the sixth transistor T6 is connected to a first electrode of the twelfth transistor T12.
- a gate electrode of the seventh transistor T7 is connected to the second scan signal line S2 , a first electrode of the seventh transistor T7 is connected to the initial signal line Vint, and a second electrode of the seventh transistor T7 is connected to the second node N2 .
- a gate electrode of the eighth transistor T8 is connected to the first control line CT1
- a first electrode of the eighth transistor T8 is connected to the duration signal line DataT
- a second electrode of the eighth transistor T8 is connected to the sixth node N6.
- a gate electrode of the ninth transistor T9 is connected to the sixth node N6 , a first electrode of the ninth transistor T9 is connected to the light emitting signal line EM, and a second electrode of the ninth transistor T9 is connected to the first node N1 .
- a gate electrode of the tenth transistor T10 is connected to the second control line CT2 , a first electrode of the tenth transistor T10 is connected to the duration signal line DataT, and a second electrode of the tenth transistor T10 is connected to the seventh node N7 .
- a gate electrode of the eleventh transistor T11 is connected to the seventh node N7 , a first electrode of the eleventh transistor T11 is connected to the high-frequency signal line Hf, and a second electrode of the eleventh transistor T11 is connected to the first node N1 .
- a gate electrode of the twelfth transistor T12 is connected to the first node N1
- a first electrode of the twelfth transistor T12 is connected to the second electrode of the sixth transistor T6
- a second electrode of the twelfth transistor T12 is connected to the second node N2 .
- a first end of the storage capacitor Cs is connected to the third node N3 , and a second end of the storage capacitor Cs is connected to the first power line VDD.
- a first end of the first capacitor C1 is connected to the sixth node N6 , and a second end of the first capacitor C1 is connected to the initial signal line Vint.
- a first end of the second capacitor C2 is connected to the seventh node N7, and a second end of the second capacitor C2 is connected to the initial signal line Vint.
- the first transistor T1 , the second transistor T2 , and the fourth transistor T4 to the twelfth transistor T12 may be switching transistors, and the third transistor T3 may be a driving transistor.
- the light emitting diode EL may be a Mini LED or a Micro LED.
- a first electrode of the light emitting diode EL is connected to a second node N2, and a second electrode of the light emitting diode EL is connected to a second power line VSS, and a signal of the second power line VSS is a continuously provided low-level signal, such as a DC low voltage.
- a signal of the first power line VDD is a continuously provided high-level signal, such as a DC high voltage.
- the first transistor T1 to the twelfth transistor T12 may be a P-type transistor, or may be an N-type transistor. Using the same type of transistors in the pixel driving circuit can simplify the process flow, reduce the process difficulty of the display panel, and improve the yield of the product. In some possible implementations, the first transistor T1 to the twelfth transistor T12 may include a P-type transistor and an N-type transistor.
- the first transistor T1 to the twelfth transistor T12 may be low-temperature polysilicon transistors, or oxide transistors, or low-temperature polysilicon transistors and metal oxide transistors.
- the active layer of the low-temperature polysilicon transistor uses low-temperature polysilicon (LTPS), and the active layer of the metal oxide transistor uses metal oxide semiconductor (Oxide).
- LTPS low-temperature polysilicon
- Oxide metal oxide semiconductor
- Low-temperature polysilicon transistors have advantages such as high mobility and fast charging, and oxide transistors have advantages such as low leakage current.
- Low-temperature polysilicon transistors and metal oxide transistors are integrated on a display substrate to form a low-temperature polycrystalline oxide (LTPO) display substrate, which can take advantage of the advantages of both, can achieve low-frequency driving, can reduce power consumption, and can improve display quality.
- LTPO low-temperature polycrystalline oxide
- the operation process of the pixel driving circuit may include:
- the operation process of the pixel driving circuit may include an initialization phase, a writing phase and a light-emitting phase, and the initialization phase may include a first sub-phase and a second sub-phase.
- the signals of the first scanning signal line S1 and the light-emitting signal line EM are high-level signals
- the signal of the second scanning signal line S2 is a low-level signal
- the first transistor T1 and the seventh transistor T7 are turned on.
- the first transistor T1 is turned on so that the signal of the initial signal line Vint is written into the third node N3, the storage capacitor Cs is initialized (reset), and the original charge in the storage capacitor Cs is cleared. Since the first end of the storage capacitor C is at a low level, the third transistor T3 is turned on.
- the seventh transistor T7 is turned on so that the signal of the initial signal line Vint is written into the second node N2, the first pole of the light-emitting diode EL is initialized (reset), the pre-stored voltage inside it is cleared, and the initialization is completed to ensure that the light-emitting diode EL does not emit light.
- the signal of the time length signal line DataT is a high level signal
- the signal of the second control line CT2 is a low level signal
- the tenth transistor T10 is turned on, so that the signal of the time length signal line DataT is written into the seventh node N7, and the second capacitor C2 is charged. Since the signal of the time length signal line DataT is a high level signal at this time, the eleventh transistor T11 is turned off, and the signal of the high frequency signal line Hf cannot be written into the first node N1.
- the signal of the duration signal line DataT is a low level signal
- the signal of the first control line CT1 is a low level signal
- the eighth transistor T8 is turned on, so that the signal of the duration signal line DataT is written into the sixth node N6, and the first capacitor C1 is charged. Since the signal of the duration signal line DataT is a low level signal at this time, the ninth transistor T9 is turned on, and the signal of the light emitting signal line EM is written into the first node N1.
- the data signal line DataI outputs a data voltage
- the signals of the second scanning signal line S2 and the light-emitting signal line E are high-level signals
- the signal of the first scanning signal line S1 is a low-level signal
- the second transistor T2 and the fourth transistor T4 are turned on.
- the second transistor T2 and the fourth transistor T4 are turned on so that the data voltage output by the data signal line DataI is provided to the third node N3 through the fifth node N5, the turned-on third transistor T3, the fourth node N4, and the turned-on second transistor T2, and the difference between the data voltage Vd output by the data signal line DataI and the threshold voltage Vth of the third transistor T3 is charged into the storage capacitor Cs, and the voltage of the first end (third node N3) of the storage capacitor Cs is Vd-
- the first capacitor C1 keeps the potential of the signal of the sixth node N6 unchanged, the ninth transistor T9 remains turned on, and the signal of the light-emitting signal line EM is written into the first node N1.
- the signal of the light emitting signal line EM is a low level signal
- the fifth transistor T5 and the sixth transistor T6 are turned on
- the first capacitor C1 maintains the potential of the signal of the sixth node N6
- the ninth transistor T9 remains turned on
- the signal of the light emitting signal line EM is written into the first node N1
- the twelfth transistor T12 is turned on.
- the power supply voltage output by the first power supply line VDD provides a driving voltage to the first electrode of the light emitting diode EL through the turned-on fifth transistor T5, the third transistor T3, the sixth transistor T6 and the twelfth transistor T12, driving the light emitting diode EL to emit light.
- the operation process of the pixel driving circuit includes: an initialization phase, a writing phase and a light-emitting phase, and the initialization phase may include a first sub-phase and a second sub-phase.
- the signals of the first scanning signal line S1 and the light-emitting signal line EM are high-level signals
- the signal of the second scanning signal line S2 is a low-level signal
- the first transistor T1 and the seventh transistor T7 are turned on.
- the first transistor T1 is turned on so that the signal of the initial signal line Vint is written into the third node N3, the storage capacitor Cs is initialized (reset), and the original charge in the storage capacitor Cs is cleared. Since the first end of the storage capacitor C is at a low level, the third transistor T3 is turned on.
- the seventh transistor T7 is turned on so that the signal of the initial signal line Vint is written into the second node N2, the first pole of the light-emitting diode EL is initialized (reset), the pre-stored voltage inside it is cleared, and the initialization is completed to ensure that the light-emitting diode EL does not emit light.
- the signal of the time length signal line DataT is a low level signal
- the signal of the second control line CT2 is a low level signal
- the tenth transistor T10 is turned on, so that the signal of the time length signal line DataT is written into the seventh node N7, and the second capacitor C2 is charged. Since the signal of the time length signal line DataT is a low level signal at this time, the eleventh transistor T11 is turned on, and the signal of the high frequency signal line Hf is written into the first node N1.
- the signal of the duration signal line DataT is a high level signal
- the signal of the first control line CT1 is a low level signal
- the eighth transistor T8 is turned on, so that the signal of the duration signal line DataT is written into the sixth node N6, and the first capacitor C1 is charged. Since the signal of the duration signal line DataT is a high level signal at this time, the ninth transistor T9 is turned off, and the signal of the light emitting signal line EM cannot be written into the first node N1.
- the data signal line DataI outputs a data voltage
- the signals of the second scanning signal line S2 and the light-emitting signal line E are high-level signals
- the signal of the first scanning signal line S1 is a low-level signal
- the second transistor T2 and the fourth transistor T4 are turned on.
- the second transistor T2 and the fourth transistor T4 are turned on so that the data voltage output by the data signal line DataI is provided to the third node N3 through the fifth node N5, the turned-on third transistor T3, the fourth node N4, and the turned-on second transistor T2, and the difference between the data voltage Vd output by the data signal line DataI and the threshold voltage Vth of the third transistor T3 is charged into the storage capacitor Cs, and the voltage of the first end (third node N3) of the storage capacitor Cs is Vd-
- the second capacitor C2 keeps the signal potential of the seventh node N7 unchanged, the eleventh transistor T11 is always turned on, and the signal of the high-frequency signal line Hf is written into the first node N1.
- the signal of the light-emitting signal line EM is a low-level signal
- the fifth transistor T5 and the sixth transistor T6 are turned on
- the second capacitor C2 keeps the signal potential of the seventh node N7 unchanged
- the eleventh transistor T11 is always turned on
- the signal of the high-frequency signal line Hf is written into the first node N1
- the twelfth transistor T12 is turned on.
- the power supply voltage output by the first power supply line VDD provides a driving voltage to the first electrode of the light-emitting diode EL through the turned-on fifth transistor T5, the third transistor T3, the sixth transistor T6 and the twelfth transistor T12, driving the light-emitting diode EL to emit light.
- the driving current output by the third transistor T3 in the pixel driving circuit is not affected by the threshold voltage of the third transistor T3, but is only related to the voltage of the data signal line and the voltage of the first power line, thereby eliminating the influence of the threshold voltage of the driving transistor on the driving current, ensuring uniform display brightness of the display product and improving the display effect.
- a control signal is provided to the first node N1 through the light-emitting signal line, so that the grayscale of the light-emitting diode is controlled by the driving current.
- a control signal is provided to the first node N1 through the high-frequency signal line, so that the grayscale of the light-emitting diode is controlled by the driving current and the light-emitting duration.
- the signal of the high-frequency signal line Hf is a pulse signal, and within an image frame, the signal of the high-frequency signal line Hf has multiple pulses.
- the frequency of the signal of the high-frequency signal line Hf may be greater than the frequency of the signal of the light-emitting signal line EM.
- the frequency of the signal of the high-frequency signal line Hf may be between 3000Hz and 60000Hz, and the frequency of the light-emitting signal line EM may be between 60Hz and 120Hz.
- the present disclosure controls the light-emitting duration through the high-frequency pulse signal of the high-frequency signal line, disperses the short light-emitting duration into one frame time, reduces the flicker that occurs when the grayscale displayed by the light-emitting diode connected to the pixel driving circuit is less than the threshold grayscale, and improves the display effect of the display product.
- FIG4 is a schematic diagram of the structure of a display substrate of an exemplary embodiment of the present disclosure, illustrating the structure of three circuit units, and the circuit unit includes the pixel driving circuit shown in FIG3.
- the display substrate may include at least a driving circuit layer disposed on a substrate and a light-emitting structure layer disposed on a side of the driving circuit layer away from the substrate.
- the driving circuit layer may include at least a plurality of circuit units forming a plurality of unit rows and a plurality of unit columns, the circuit unit may include at least a pixel driving circuit, the light-emitting structure layer may include a plurality of light-emitting units, the light-emitting units may include at least light-emitting diodes, and the light-emitting diodes in the plurality of light-emitting units are correspondingly connected to the pixel driving circuits in the plurality of circuit units, so that the light-emitting diodes emit light of corresponding brightness under the drive of the output current of the corresponding pixel driving circuit.
- the plurality of circuit units may include at least a first circuit unit Q1, a second circuit unit Q2, and a third circuit unit Q3 sequentially arranged along the first direction X
- the plurality of light emitting units may include at least a first light emitting unit, a second light emitting unit, and a third light emitting unit.
- the first circuit unit Q1 may include at least a first pixel driving circuit
- the second circuit unit Q2 may include at least a second pixel driving circuit
- the third circuit unit Q3 may include at least a third pixel driving circuit
- the first light emitting unit may include at least a first light emitting diode
- the second light emitting unit may include at least a second light emitting diode
- the third light emitting unit may include at least a third light emitting diode.
- the first pixel driving circuit is configured to be connected to the first light emitting diode
- the second pixel driving circuit is configured to be connected to the second light emitting diode
- the third pixel driving circuit is configured to be connected to the third light emitting diode.
- the first light emitting diode may be a red light emitting diode
- the second light emitting diode may be a green light emitting diode
- the third light emitting diode may be a blue light emitting diode.
- the first pixel driving circuit in the first circuit unit Q1 may include at least a first driving transistor DTFT1 and a first storage capacitor Cs1
- the second pixel driving circuit in the second circuit unit Q2 may include at least a second driving transistor DTFT2 and a second storage capacitor Cs2
- the third pixel driving circuit in the third circuit unit Q3 may include at least a third driving transistor DTFT3 and a third storage capacitor Cs3.
- the width-to-length ratio (W/L) of the first driving transistor DTFT1 may be greater than that of the second driving transistor DTFT2 , and the width-to-length ratio of the first driving transistor DTFT1 may be greater than that of the third driving transistor DTFT3 .
- the capacitance value of the first storage capacitor Cs1 may be greater than the capacitance value of the second storage capacitor Cs2 , and the capacitance value of the first storage capacitor Cs1 may be greater than the capacitance value of the third storage capacitor Cs3 .
- At least one circuit unit may include a high-voltage connection line VDD-C extending along a first direction X (unit row direction) and a high-voltage power line VDD extending along a second direction Y (unit column direction), the high-voltage connection line VDD is connected to a corresponding pixel driving circuit, the high-voltage power line VDD may be connected to the high-voltage connection line VDD-C through a via to form a mesh connection structure for transmitting a high-voltage power signal, and the first direction X and the second direction Y may intersect each other.
- At least one circuit unit may include a low voltage connection line VSS-C extending along a first direction X and a low voltage power line VSS extending along a second direction Y, the low voltage power line VSS being connected to a corresponding light emitting diode, and the low voltage power line VSS may be connected to the low voltage connection line VSS-C through a via to form a mesh connection structure for transmitting a low voltage power signal.
- structure A extends along direction B means that structure A may include a main part and a secondary part connected to the main part, the main part is roughly in the shape of a strip extending along a certain direction, the secondary part has no limitation on shape, and the main part is at least 60% of structure A; the main part extends along direction B, and the size of the main part extending along direction B is greater than the size of the secondary part extending along other directions.
- structure A extends along direction B means “the main part of structure A extends along direction B".
- FIG5A is a schematic diagram of the structure of a first driving transistor of the present disclosure
- FIG5B is a schematic diagram of the structure of a second driving transistor of the present disclosure
- the first driving transistor DTFT1 and the second driving transistor DTFT2 may each include an active layer Active, a gate electrode Gate, a first electrode Source, and a second electrode Drain
- the active layer Active includes a channel region and a source connection region and a drain connection region located on both sides of the channel region, the overlapping region of the gate electrode Gate and the active layer Active forms a channel region
- the first electrode Source is connected to the source connection region
- the second electrode Drain is connected to the drain connection region.
- the first driving transistor DTFT1 has a first width-to-length ratio
- the second driving transistor DTFT2 has a second width-to-length ratio
- the first width-to-length ratio may be greater than the second width-to-length ratio.
- the gate electrode Gate, the first electrode Source, and the second electrode Drain of the first driving transistor DTFT1 are all comb-shaped.
- the first sub-transistor has a first channel length L1 and a first sub-width z1
- the second sub-transistor has a first channel length L1 and a second sub-width z2
- the third sub-transistor has a first channel length L1 and a third sub-width z3
- the fourth sub-transistor has a first channel length L1 and a fourth sub-width z4.
- the first driving transistor DTFT1 has a first channel length L1 and a first channel width W1, and the first channel width W1 is the sum of the first sub-width z1, the second sub-width z2, the third sub-width z3, and the fourth sub-width z4.
- the gate electrode Gate, the first electrode Source, and the second electrode Drain of the second driving transistor DTFT2 are all strip-shaped, so the second driving transistor DTFT2 has a second channel length L2 and a second channel width W2.
- the first channel length L1 may be substantially the same as the second channel length L2 , and the first channel width W1 may be greater than the second channel width W2 .
- a ratio of the first channel width W1 to the second channel width W2 may be approximately 2 to 6.
- W1/W2 may be approximately 4.
- the second channel width of the second driving transistor DTFT2 and the third channel width of the third driving transistor DTFT3 may be substantially the same, and the second channel length of the second driving transistor DTFT2 and the third channel length of the third driving transistor DTFT3 may be substantially the same.
- Fig. 6A is a schematic diagram of the structure of a first storage capacitor of the present disclosure
- Fig. 6B is a schematic diagram of the structure of a second storage capacitor of the present disclosure.
- the first storage capacitor Cs1 has a first area
- the second storage capacitor Cs2 has a second area
- the first area can be larger than the second area.
- the first area and the second area may be the areas of the positive projections of the first storage capacitor Cs1 and the second storage capacitor Cs2 on the display substrate plane.
- the first storage capacitor Cs1 and the second storage capacitor Cs2 may include a plurality of stacked plates, the first area may be the minimum area of the positive projections of the plurality of plates in the first storage capacitor Cs1 on the display substrate plane, and the second area may be the minimum area of the positive projections of the plurality of plates in the second storage capacitor Cs2 on the display substrate plane.
- the shape of the first storage capacitor Cs1 and the second storage capacitor Cs2 may be polygonal, and the first storage capacitor Cs1 and the second storage capacitor Cs2 may have a first length M1 and a second length M2, respectively.
- the first length M1 may be the maximum dimension of the first storage capacitor Cs1 and the second storage capacitor Cs2 in the first direction X
- the second length M2 may be the maximum dimension of the first storage capacitor Cs1 and the second storage capacitor Cs2 in the second direction Y.
- the first length M1 and the second length M2 may be the projection lengths of the first storage capacitor Cs1 and the second storage capacitor Cs2 when projected onto the plane of the display substrate.
- the first length M1 of the first storage capacitor Cs1 may be substantially the same as the first length M1 of the second storage capacitor Cs2 , and the second length M2 of the first storage capacitor Cs1 may be greater than the second length M2 of the second storage capacitor Cs2 .
- the ratio of the second length M2 of the first storage capacitor Cs1 to the second length M2 of the second storage capacitor Cs2 may be approximately 1 to 2.
- the ratio of the second length M2 of the first storage capacitor Cs1 to the second length M2 of the second storage capacitor Cs2 may be approximately 1.3.
- the first length M1 of the second storage capacitor Cs2 may be substantially the same as the first length M1 of the third storage capacitor Cs3
- the second length M2 of the second storage capacitor Cs2 may be substantially the same as the second length M2 of the third storage capacitor Cs3 .
- the first circuit unit Q1, the second circuit unit Q2, and the third circuit unit Q3 may be sequentially arranged along the first direction X, and the positions of the first light-emitting diode, the second light-emitting diode, and the third light-emitting diode and the first circuit unit Q1, the second circuit unit Q2, and the third circuit unit Q3 may correspond or may not correspond, which is not limited in the present disclosure.
- the following is an exemplary explanation through the preparation process of the display substrate.
- the "patterning process" mentioned in the present disclosure includes processes such as coating photoresist, mask exposure, development, etching, and stripping photoresist for metal materials, inorganic materials or transparent conductive materials, and includes processes such as coating organic materials, mask exposure and development for organic materials.
- Deposition can be any one or more of sputtering, evaporation, and chemical vapor deposition
- coating can be any one or more of spraying, spin coating and inkjet printing
- etching can be any one or more of dry etching and wet etching, which are not limited in the present disclosure.
- Thin film refers to a layer of thin film made by deposition, coating or other processes of a certain material on a substrate. If the "thin film” does not require a patterning process during the entire production process, the “thin film” can also be called a “layer”. If the "thin film” requires a patterning process during the entire production process, it is called a “thin film” before the patterning process and a “layer” after the patterning process. The “layer” after the patterning process contains at least one "pattern”.
- the "A and B are arranged in the same layer” in the present disclosure means that A and B are formed simultaneously through the same patterning process, and the "thickness" of the film layer is the size of the film layer in the direction perpendicular to the display substrate.
- the orthographic projection of B is within the range of the orthographic projection of A” or "the orthographic projection of A includes the orthographic projection of B” means that the boundary of the orthographic projection of B falls within the boundary of the orthographic projection of A, or the boundary of the orthographic projection of A overlaps with the boundary of the orthographic projection of B.
- the preparation process of the driving circuit layer may include the following operations.
- Forming a first conductive layer pattern may include: depositing a first conductive film on a substrate, patterning the first conductive film through a patterning process, and forming a first conductive layer pattern disposed on the substrate, as shown in FIG7.
- the first conductive layer may be referred to as a first gate metal (GATE1) layer.
- the first conductive layer pattern of each circuit unit may include at least a first electrode plate CF1, a second electrode plate CF2, a third electrode plate CF3, and a third bottom gate electrode Gate3-B.
- the first plate CF1 may be in an “L” shape, and the first plate CF1 may be disposed at one side of the circuit unit in the second direction Y. In an exemplary embodiment, the first plate CF1 may serve as one plate of the first capacitor.
- the position, shape, and size of the first plate CF1 in the first circuit unit Q1 , the second circuit unit Q2 , and the third circuit unit Q3 may be substantially the same.
- the second plate CF2 may be rectangular, the corners of the rectangle may be chamfered, and the second plate CF2 may be disposed in the middle of the circuit unit in the second direction Y. In an exemplary embodiment, the second plate CF2 may serve as a plate of the second capacitor.
- the position, shape, and size of the second plate CF2 in the first circuit unit Q1 , the second circuit unit Q2 , and the third circuit unit Q3 may be substantially the same.
- the third plate CF3 may be rectangular, the corners of the rectangle may be chamfered, and the third plate CF3 may be disposed on one side of the circuit unit in the opposite direction of the second direction Y. In an exemplary embodiment, the third plate CF3 may serve as a plate of a storage capacitor.
- the second electrode plate CF2 in the second direction Y, may be located between the first electrode plate CF1 and the third electrode plate CF3.
- the position, shape, and size of the third plate CF3 in the second circuit unit Q2 and the third circuit unit Q3 may be substantially the same, but different from the shape and size of the third plate CF3 in the first circuit unit Q1.
- the area of the third plate CF3 in the first circuit unit Q1 may be greater than the area of the third plate CF3 in the second circuit unit Q2, and the area of the third plate CF3 in the first circuit unit Q1 may be greater than the area of the third plate CF3 in the third circuit unit Q3, so that the capacitance value of the storage capacitor in the first circuit unit Q1 is greater than the capacitance values of the storage capacitors in the second circuit unit Q2 and the third circuit unit Q3.
- the first length M1 of the third plate CF3 in the first circuit unit Q1, the second circuit unit Q2, and the third circuit unit Q3 may be substantially the same, and the second length M2 of the third plate CF3 in the first circuit unit Q1 may be greater than the second length M2 of the third plate CF3 in the second circuit unit Q2 and the third circuit unit Q3, so that the area of the third plate CF3 in the first circuit unit Q1 is greater than the area of the third plate CF3 in the second circuit unit Q2 and the third circuit unit Q3.
- the first length M1 may be the maximum dimension in the first direction X
- the second length M2 may be the maximum dimension in the second direction Y.
- the ratio of the second length M2 of the third plate CF3 in the first circuit unit Q1 to the second length M2 of the third plate CF3 in the second and third circuit units Q2 and Q3 may be about 1 to 2.
- the ratio may be about 1.3.
- the edge of the third plate CF3 close to the second plate CF2 in the first circuit unit Q1, the second circuit unit Q2 and the third circuit unit Q3 may be substantially flush, and the distance between the edge of the third plate CF3 close to the second plate CF2 and the edge of the second plate CF2 close to the third plate CF3 in each circuit unit may be substantially the same.
- the third bottom gate electrode Gate3-B may be used as a bottom gate electrode of a third transistor (driving transistor).
- the third bottom gate electrode Gate3-B may be located on one side of the first electrode plate CF1 in the opposite direction of the first direction X, and in the second direction Y, the third bottom gate electrode Gate3-B may be located on one side of the second electrode plate CF2 in the second direction Y.
- the third bottom gate electrode Gate3-B in the first circuit unit Q1 may include a plurality of sub-electrodes, each of which may be in the shape of a strip extending along the first direction X, and the plurality of sub-electrodes may be arranged at intervals along the second direction Y to form a comb-like structure.
- the third bottom gate electrode Gate3-B in the second circuit unit Q2 and the second circuit unit Q3 may include one sub-electrode to form an "L"-shaped structure.
- the width-to-length ratio of the driving transistor in the first circuit unit Q1 may be greater than the width-to-length ratio of the driving transistor in the second circuit unit Q2 and the third circuit unit Q3.
- each sub-electrode in the first circuit unit Q1 may form a first channel length L1 of the transistor
- the sub-electrodes in the second circuit unit Q2 may form a second channel length L2 of the transistor, and the first channel length L1 and the second channel length L2 may be substantially the same.
- multiple sub-electrodes in the first circuit unit Q1 can form multiple sub-widths z of the transistor, and the sub-electrodes in the second circuit unit Q2 can form a sub-width z of the transistor.
- the first channel width of the third transistor in the first circuit unit Q1 4*sub-width z
- the second channel width of the third transistor in the second circuit unit Q2 sub-width z, so the width-to-length ratio of the third transistor in the first circuit unit Q1 is approximately 4 times the width-to-length ratio of the third transistor in the second circuit unit Q2.
- the edge of the third bottom gate electrode Gate3-B close to the second electrode plate CF2 in the first circuit unit Q1, the second circuit unit Q2 and the third circuit unit Q3 can be basically flush, and the distance between the edge of the third bottom gate electrode Gate3-B close to the second electrode plate CF2 and the edge of the second electrode plate CF2 close to the third bottom gate electrode Gate3-B in each circuit unit can be basically the same.
- a plate connection line may be connected to one side of the third electrode plate CF3 in the first direction X or in the opposite direction of the first direction X.
- the plate connection line may be in the shape of a strip extending along the first direction X.
- a first end of the plate connection line is connected to the third electrode plate CF3 of the circuit unit.
- a second end of the plate connection line is connected to the third electrode plate CF3 of the adjacent circuit unit after extending along the first direction X or in the opposite direction of the first direction X, so as to connect the third electrode plates CF3 in a unit row.
- the plurality of third plates CF3 and the plurality of plate connection lines in a unit row may be interconnected integral structures.
- the third plate CF3 in each circuit unit is connected to a subsequently formed high-voltage power supply line, by forming the third plates CF3 of adjacent circuit units into an integral structure interconnected, the third plates CF3 of the integral structure may be reused as a high-voltage power supply signal line, and the plurality of third plates CF3 in a unit row may be ensured to have the same potential, which is beneficial to improving the uniformity of the panel, avoiding poor display of the display substrate, and ensuring the display effect of the display substrate.
- the first conductive layer pattern may further include a power electrode 11 disposed in the third circuit unit Q3, the power electrode 11 may be in a strip shape extending along the second direction Y, and may be disposed on one side of the third electrode plate CF3 in the first direction X.
- the power electrode 11 is configured to be connected to a subsequently formed high-voltage power line to achieve connection between the third electrode plate and the high-voltage power line.
- the third electrode plate CF3 and the power electrode 11 may be an integral structure connected to each other.
- forming a semiconductor layer pattern may include: sequentially depositing a first insulating film and a first semiconductor film on a substrate, patterning the first semiconductor film through a patterning process to form a first insulating layer covering the first conductive layer, and a semiconductor layer pattern disposed on the first insulating layer, as shown in FIGS. 8A and 8B , where FIG. 8B is a plan view schematic diagram of the semiconductor layer in FIG. 8A .
- the semiconductor layer pattern of each circuit unit may include at least the first active layer AT1 of the first transistor T1 to the twelfth active layer AT12 of the twelfth transistor T12 .
- the first active layer AT1, the second active layer AT2, the fourth active layer AT4, the seventh active layer AT7 and the tenth active layer AT10 may have a strip shape extending along the first direction X
- the third active layer AT3, the fifth active layer AT5, the sixth active layer AT6, the eighth active layer AT8, the ninth active layer AT9 and the twelfth active layer AT12 may have a strip shape extending along the second direction Y
- the eleventh active layer AT11 may have a rectangular shape.
- the first active layer AT1 may be located between the second electrode plate CF2 and the third electrode plate CF3, and the first active layer AT1 may serve as the active layer of the first transistor T1.
- the second active layer AT2 may be located between the second electrode plate CF2 and the third bottom gate electrode Gate3-B, and the second active layer AT2 may serve as the active layer of the second transistor T2.
- the orthographic projection of the third active layer AT3 on the substrate at least partially overlaps with the orthographic projection of the third bottom gate electrode Gate3-B on the substrate, and the third active layer AT3 may serve as the active layer of the third transistor T3.
- the fourth active layer AT4 may be located between the second electrode plate CF2 and the third bottom gate electrode Gate3-B, and located on the side of the second active layer AT2 in the opposite direction of the first direction X, and the fourth active layer AT4 may serve as the active layer of the fourth transistor T4.
- the fifth active layer AT5 may be located between the third active layer AT3 and the fourth active layer AT4, and the fifth active layer AT5 may serve as the active layer of the fifth transistor T5.
- the sixth active layer AT6 may be located between the first electrode plate CF1 and the third bottom gate electrode Gate3-B, and the sixth active layer AT6 may be used as the active layer of the sixth transistor T6.
- the seventh active layer AT7 may be located on one side of the first active layer AT1 in the first direction X, and the seventh active layer AT7 may be used as the active layer of the seventh transistor T7.
- the eighth active layer AT8 may be located on one side of the first electrode plate CF1 in the opposite direction of the second direction Y, and the eighth active layer AT8 may be used as the active layer of the eighth transistor T8.
- the ninth active layer AT9 may be located between the first electrode plate CF1 and the eighth active layer AT8, and the ninth active layer AT9 may be used as the active layer of the ninth transistor T9.
- the tenth active layer AT10 may be located on one side of the seventh active layer AT7 in the second direction Y, and the tenth active layer AT10 may be used as the active layer of the tenth transistor T10.
- the eleventh active layer AT11 may be located on one side of the tenth active layer AT10 in the second direction Y, and the eleventh active layer AT11 may be used as the active layer of the eleventh transistor T11.
- the twelfth active layer AT12 may be located between the second active layer AT2 and the third active layer AT3 and at one side of the fifth active layer AT5 in the first direction X.
- the twelfth active layer AT12 may serve as an active layer of the twelfth transistor T12.
- the first active layer AT1 and the seventh active layer AT7 may be located on a straight line extending along the first direction X
- the second active layer AT2 and the fourth active layer AT4 may be located on a straight line extending along the first direction X
- the fifth active layer AT5 and the twelfth active layer AT12 may be located on a straight line extending along the first direction X.
- the extension length of the third active layer AT3 in the first circuit unit Q1 may be greater than the extension length of the third active layer AT3 in the second circuit unit Q2 and the third circuit unit Q3, so that the width-to-length ratio of the driving transistor in the first circuit unit Q1 is greater than the width-to-length ratio of the driving transistor in the second circuit unit Q2 and the third circuit unit Q3.
- the first to twelfth active layers AT1 to AT12 may each include a first region, a second region, and a channel region between the first and second regions, and the first and second regions of a plurality of active layers may each be separately provided.
- Forming a second insulating layer pattern may include: depositing a second insulating film on the substrate on which the aforementioned pattern is formed, patterning the second insulating film using a patterning process to form a second insulating layer covering the semiconductor layer, wherein a plurality of vias are disposed on the second insulating layer, as shown in FIG. 9 .
- the plurality of via holes on the second insulating layer in each circuit unit may include at least a first via hole V1 , a second via hole V2 , a third via hole V3 , and a fourth via hole V4 .
- the orthographic projection of the first via hole V1 on the substrate is located within the range of the orthographic projection of the first electrode plate CF1 on the substrate, the second insulating layer and the first insulating layer in the first via hole V1 are etched away to expose the surface of the first electrode plate CF1, and the first via hole V1 is configured to connect a subsequently formed first connecting electrode to the first electrode plate CF1 through the via hole.
- the orthographic projection of the second via hole V2 on the substrate is located within the range of the orthographic projection of the second electrode plate CF2 on the substrate, the second insulating layer and the first insulating layer in the second via hole V2 are etched away to expose the surface of the second electrode plate CF2, and the second via hole V2 is configured to connect a subsequently formed second connecting electrode to the second electrode plate CF2 through the via hole.
- the orthographic projection of the third via hole V3 on the substrate is located within the range of the orthographic projection of the third electrode plate CF3 on the substrate, the second insulating layer and the first insulating layer in the third via hole V3 are etched away to expose the surface of the third electrode plate CF3, and the third via hole V3 is configured to connect a subsequently formed third connecting electrode to the third electrode plate CF3 through the via hole.
- the orthographic projection of the fourth via hole V4 on the substrate is located within the range of the orthographic projection of the third bottom gate electrode Gate3-B on the substrate, the second insulating layer and the first insulating layer in the fourth via hole V4 are etched away to expose the surface of the third bottom gate electrode Gate3-B, and the fourth via hole V4 is configured to connect a subsequently formed third top gate electrode to the third bottom gate electrode Gate3-B through the via hole.
- the plurality of vias on the second insulating layer may further include a fifth via V5.
- the orthographic projection of the fifth via V5 on the substrate is located within the range of the orthographic projection of the power electrode 11 on the substrate, the second insulating layer and the first insulating layer in the fifth via V5 are etched away, exposing the surface of the power electrode 11, and the fifth via V5 is configured to connect a subsequently formed seventh connection electrode to the power electrode 11 through the via.
- the first to fifth via holes V1 to V5 may be plural in order to increase connection reliability.
- Forming a second conductive layer pattern may include: depositing a second conductive film on the substrate on which the aforementioned pattern is formed, patterning the second conductive film using a patterning process, and forming a second conductive layer pattern disposed on the second insulating layer, as shown in FIGS. 10A and 10B , where FIG. 10B is a plan view schematically showing the second conductive layer in FIG. 10A .
- the second conductive layer may be referred to as a second gate metal (GATE2) layer.
- the second conductive layer pattern of each circuit unit includes at least: a fourth electrode plate CF4, a fifth electrode plate CF5, a sixth electrode plate CF6, a first scanning signal line S1, a second scanning signal line S2, a light emitting signal line EM, an initial signal line Vint, a high-frequency signal line Hf, a high-voltage connecting line VDD-C, a low-voltage connecting line VSS-C, a plurality of gate electrodes, and a plurality of connecting electrodes.
- the shape of the fourth plate CF4 can be an "L" shape, and a notch is provided at one corner.
- the orthographic projection of the fourth plate CF4 on the substrate at least partially overlaps with the orthographic projection of the first plate CF1 on the substrate.
- the fourth plate CF4 can serve as another plate of the first capacitor.
- the first plate CF1 and the fourth plate CF4 constitute a first capacitor of the pixel driving circuit.
- the position, shape, and size of the fourth plate CF4 in the first circuit unit Q1 , the second circuit unit Q2 , and the third circuit unit Q3 may be substantially the same.
- the shape of the fifth plate CF5 can be a rectangle with a notch at a corner, the orthographic projection of the fifth plate CF5 on the substrate at least partially overlaps with the orthographic projection of the second plate CF2 on the substrate, the fifth plate CF5 can serve as another plate of the second capacitor, and the second plate CF2 and the fifth plate CF5 constitute a second capacitor of the pixel driving circuit.
- the position, shape, and size of the fifth plate CF5 in the first circuit unit Q1 , the second circuit unit Q2 , and the third circuit unit Q3 may be substantially the same.
- the shape of the sixth plate CF6 can be a rectangle with a notch at a corner, the orthographic projection of the sixth plate CF6 on the substrate at least partially overlaps with the orthographic projection of the third plate CF3 on the substrate, the sixth plate CF6 can serve as another plate of the storage capacitor, and the third plate CF3 and the sixth plate CF6 constitute a storage capacitor of the pixel driving circuit.
- the position, shape, and size of the sixth plate CF6 in the second circuit unit Q2 and the third circuit unit Q3 may be substantially the same, but different from the shape and size of the sixth plate CF6 in the first circuit unit Q1.
- the area of the sixth plate CF6 in the first circuit unit Q1 may be greater than the area of the sixth plate CF6 in the second circuit unit Q2, and the area of the sixth plate CF6 in the first circuit unit Q1 may be greater than the area of the sixth plate CF6 in the third circuit unit Q3, so that the capacitance value of the storage capacitor in the first circuit unit Q1 is greater than the capacitance values of the storage capacitors in the second circuit unit Q2 and the third circuit unit Q3.
- the first length M1 of the sixth plate CF6 in the first circuit unit Q1, the second circuit unit Q2, and the third circuit unit Q3 may be substantially the same, and the second length M2 of the sixth plate CF6 in the first circuit unit Q1 may be greater than the second length M2 of the sixth plate CF6 in the second circuit unit Q2 and the third circuit unit Q3, so that the area of the sixth plate CF6 in the first circuit unit Q1 is greater than the area of the sixth plate CF6 in the second circuit unit Q2 and the third circuit unit Q3.
- the ratio of the second length M2 of the sixth plate CF6 in the first circuit unit Q1 to the second length M2 of the sixth plate CF6 in the second circuit unit Q2 and the third circuit unit Q3 may be about 1 to 2.
- the ratio may be about 1.3.
- the shapes of the first scan signal line S1, the second scan signal line S2, the light emitting signal line EM, the initial signal line Vint, the high frequency signal line Hf, the high voltage connection line VDD-C and the low voltage connection line VSS-C may be straight lines or folded lines with the main parts extending along the first direction X.
- the first scan signal line S1, the light emitting signal line EM and the high frequency signal line Hf may be located between the fourth plate CF4 and the fifth plate CF5, the high frequency signal line Hf may be located on one side of the fourth plate CF4 in the second direction Y, the light emitting signal line EM may be located on one side of the high frequency signal line Hf in the second direction Y, and the first scan signal line S1 may be located on one side of the light emitting signal line EM in the second direction Y.
- the second scan signal line S2 and the initial signal line Vint may be located between the fifth plate CF5 and the sixth plate CF6, the initial signal line Vint may be located on one side of the sixth plate CF6 in the second direction Y, and the second scan signal line S2 may be located on one side of the initial signal line Vint in the second direction Y.
- the high voltage connection line VDD-C may be located on a side of the third plate CF3 away from the fourth plate CF4
- the low voltage connection line VSS-C may be located on a side of the sixth plate CF6 away from the fifth plate CF5 .
- a high-frequency connection block is provided on a side of the high-frequency signal line Hf away from the light-emitting signal line EM, and the high-frequency connection block is configured to be connected to a twenty-sixth connection electrode formed subsequently.
- a high voltage connection block is disposed on one side of the high voltage connection line VDD-C close to the fourth electrode plate CF4 , and the high voltage connection block is configured to be connected to a sixteenth connection electrode formed subsequently.
- a low voltage connection block is provided on one side of the low voltage connection line VSS-C close to the sixth electrode plate CF6, and the low voltage connection block is configured to be connected to the subsequently formed thirty-second connection electrode.
- the low voltage connection block can be provided in the first circuit unit Q1 and the second circuit unit Q2, and the third circuit unit Q3 is not provided with a low voltage connection block.
- the first scan signal line S1 may be multiplexed as a first control line to control the on and off of the eighth transistor T8
- the second scan signal line S2 may be multiplexed as a second control line to control the on and off of the tenth transistor T10 .
- the multiple gate electrodes of each circuit unit may include at least a first gate electrode Gate1, a second gate electrode Gate2, a third top gate electrode Gate3-T, a fourth gate electrode Gate4, a fifth gate electrode Gate5, a sixth gate electrode Gate6, a seventh gate electrode Gate7, an eighth gate electrode Gate8, a ninth gate electrode Gate9, a tenth gate electrode Gate10, an eleventh gate electrode Gate11 and a twelfth gate electrode Gate12.
- the second gate electrode Gate2, the fourth gate electrode Gate4, and the eighth gate electrode Gate8 may be disposed on a side of the first scan signal line S1 away from the light emitting signal line EM.
- the second gate electrode Gate2 serves as a gate electrode of the second transistor T2, and an orthographic projection of the second gate electrode Gate2 on the substrate at least partially overlaps with an orthographic projection of the second active layer on the substrate.
- the fourth gate electrode Gate4 serves as a gate electrode of the fourth transistor T4, and an orthographic projection of the fourth gate electrode Gate4 on the substrate at least partially overlaps with an orthographic projection of the fourth active layer on the substrate.
- the eighth gate electrode Gate8 serves as a gate electrode of the eighth transistor T8, and an orthographic projection of the eighth gate electrode Gate8 on the substrate at least partially overlaps with an orthographic projection of the eighth active layer on the substrate.
- the first scan signal line S1 , the second gate electrode Gate2 , the fourth gate electrode Gate4 , and the eighth gate electrode Gate8 may be an integral structure connected to each other.
- the first gate electrode Gate1 and the seventh gate electrode Gate7 may be disposed on a side of the second scan signal line S2 close to the initial signal line Vint, and the tenth gate electrode Gate10 may be disposed on a side of the second scan signal line S2 away from the initial signal line Vint.
- the first gate electrode Gate1 serves as a gate electrode of the first transistor T1, and an orthographic projection of the first gate electrode Gate1 on the substrate at least partially overlaps with an orthographic projection of the first active layer on the substrate
- the seventh gate electrode Gate7 serves as a gate electrode of the seventh transistor T7
- an orthographic projection of the seventh gate electrode Gate7 on the substrate at least partially overlaps with an orthographic projection of the seventh active layer on the substrate
- the tenth gate electrode Gate10 serves as a gate electrode of the tenth transistor T10, and an orthographic projection of the tenth gate electrode Gate10 on the substrate at least partially overlaps with an orthographic projection of the tenth active layer on the substrate.
- the second scan signal line S2 , the first gate electrode Gate1 , the seventh gate electrode Gate7 , and the tenth gate electrode Gate10 may be an integral structure connected to each other.
- the first gate electrode Gate1, the second gate electrode Gate2, the seventh gate electrode Gate7, the eighth gate electrode Gate8 and the tenth gate electrode Gate10 can be two, forming a first transistor T1, a second transistor T2, a seventh transistor T7, an eighth transistor T8 and a tenth transistor T10 of a double-gate structure, which can enhance the driving capability, improve the current saturation of the light-emitting diode, and prevent and reduce the occurrence of leakage current.
- the third top gate electrode Gate3-T may serve as the top gate electrode of the third transistor T3, and the orthographic projection of the third top gate electrode Gate3-T on the substrate at least partially overlaps with the orthographic projection of the third active layer on the substrate.
- the shape of the third top gate electrode Gate3-T may be substantially the same as the shape of the third bottom gate electrode Gate3-B, the orthographic projection of the third top gate electrode Gate3-T on the substrate at least partially overlaps with the orthographic projection of the third bottom gate electrode Gate3-B on the substrate, and the third top gate electrode Gate3-T is connected to the third bottom gate electrode Gate3-B through the fourth via hole V4.
- a third gate block 103 is disposed on one side of the third top gate electrode Gate3-T close to the fourth electrode plate CF4.
- the shape of the third gate block 103 can be a broken line extending along the first direction X.
- the third gate block 103 is configured to be connected to a twelfth connecting electrode formed subsequently.
- the fifth gate electrode Gate5 may serve as a gate electrode of the fifth transistor T5, and an orthographic projection of the fifth gate electrode Gate5 on the substrate at least partially overlaps an orthographic projection of the fifth active layer on the substrate.
- the fifth gate electrode Gate5 may be located between the first scan signal line S1 and the third top gate electrode Gate3-T, and the shape of the fifth gate electrode Gate5 may be a comb shape.
- a fifth gate block 105 is disposed on one side of the fifth gate electrode Gate5 close to the first scan signal line S1.
- the fifth gate block 105 may be in the shape of a strip extending along the second direction Y.
- the fifth gate block 105 is configured to be connected to the subsequently formed twenty-seventh connection electrode.
- the sixth gate electrode Gate6 can be used as the gate electrode of the sixth transistor T6, and the orthographic projection of the sixth gate electrode Gate6 on the substrate at least partially overlaps with the orthographic projection of the sixth active layer on the substrate.
- the sixth gate electrode Gate6 can be located between the fourth plate CF4 and the third top gate electrode Gate3-T, and the shape of the sixth gate electrode Gate6 can be comb-shaped.
- a sixth gate block 106 is disposed on one side of the sixth gate electrode Gate6 close to the first scan signal line S1.
- the sixth gate block 106 may be shaped like a zigzag line extending along the second direction Y.
- the sixth gate block 106 is configured to be connected to a subsequently formed twenty-second connection electrode.
- the ninth gate electrode Gate9 can serve as the gate electrode of the ninth transistor T9, and the orthographic projection of the ninth gate electrode Gate9 on the substrate at least partially overlaps with the orthographic projection of the ninth active layer on the substrate.
- the ninth gate electrode Gate9 can be located on a side of the fourth plate CF4 close to the first scan signal line S1 and connected to the fourth plate CF4.
- the fourth plate CF4 and the ninth gate electrode Gate9 may be an integral structure connected to each other.
- the eleventh gate electrode Gate11 may serve as a gate electrode of the eleventh transistor T11, and an orthographic projection of the eleventh gate electrode Gate11 on the substrate at least partially overlaps an orthographic projection of the eleventh active layer on the substrate.
- the eleventh gate electrode Gate11 may be located on one side of the fifth plate CF5 in the first direction X, and the shape of the eleventh gate electrode Gate11 may be a folded line extending along the first direction X.
- the twelfth gate electrode Gate12 may serve as a gate electrode of the twelfth transistor T12, and an orthographic projection of the twelfth gate electrode Gate12 on the substrate at least partially overlaps an orthographic projection of the twelfth active layer on the substrate.
- the twelfth gate electrode Gate12 may be located between the first scan signal line S1 and the third top gate electrode Gate3-T, and the shape of the twelfth gate electrode Gate12 may be a comb shape.
- a twelfth gate block 112 is disposed on a side of the twelfth gate electrode Gate12 away from the fifth gate electrode Gate5.
- the twelfth gate block 112 may be in the shape of a strip extending along the first direction X.
- the twelfth gate block 112 is configured to be connected to a subsequently formed twenty-third connection electrode.
- the plurality of connection electrodes of each circuit unit includes at least a first connection electrode CO1 , a second connection electrode CO2 , a third connection electrode CO3 , a fourth connection electrode CO4 , a fifth connection electrode CO5 , and a sixth connection electrode CO6 .
- the first connection electrode CO1 may be rectangular in shape and may be located at the notch of the fourth electrode plate CF4 .
- the first connection electrode CO1 is connected to the first electrode plate CF1 through the first via hole V1 .
- the second connection electrode CO2 may be rectangular in shape and may be located at the notch of the fifth electrode plate CF5 .
- the second connection electrode CO2 may be connected to the second electrode plate CF2 through the second via hole V2 and may be connected to the eleventh gate electrode Gate11 .
- the second connection electrode CO2 and the eleventh gate electrode Gate11 may be an integral structure connected to each other.
- the third connection electrode CO3 may be rectangular in shape and may be located at the notch of the sixth electrode plate CF6 .
- the third connection electrode CO3 is connected to the third electrode plate CF3 through the third via hole V3 .
- the shape of the fourth connection electrode CO4 may be a zigzag line extending along the second direction Y.
- the fourth connection electrode CO4 may be disposed between the fifth gate electrode Gate5 and the twelfth gate electrode Gate12.
- the fourth connection electrode CO4 may be disposed on one side of the first scan signal line S1 in the second direction Y.
- the fourth connection electrode CO4 is configured to be connected to the thirteenth connection electrode and the fifteenth connection electrode formed subsequently.
- the fifth connection electrode CO5 may be in a zigzag shape extending along the first direction X, may be disposed between the first scan signal line S1 and the twelfth gate electrode Gate12 , and is configured to be connected to the nineteenth and twentieth connection electrodes formed subsequently.
- the sixth connection electrode CO6 may be in a strip shape extending along the first direction X, may be disposed between the second scan signal line S2 and the high-frequency signal line Hf, and is configured to be connected to subsequently formed twenty-fifth and twenty-sixth connection electrodes.
- the second conductive layer pattern may further include a seventh connection electrode CO7 disposed in the third circuit unit Q3.
- the shape of the seventh connection electrode CO7 may be rectangular.
- the seventh connection electrode CO7 is connected to the power electrode 11 through a fifth via hole V5.
- the seventh connection electrode CO7 is configured to be connected to a thirty-third connection electrode formed subsequently.
- the second conductive layer can be used as a shield to perform conductorization on the semiconductor layer.
- the semiconductor layer in the area shielded by the second conductive layer forms the channel region of the first transistor T1 to the twelfth transistor T12, and the semiconductor layer in the area not shielded by the first conductive layer is conductorized, that is, the first area and the second area of the first transistor T1 to the twelfth transistor T12 are both conductorized.
- forming the third insulating layer pattern may include: depositing a third insulating film on the substrate on which the aforementioned pattern is formed, patterning the third insulating film using a patterning process to form a third insulating layer covering the second conductive layer, wherein a plurality of vias are disposed on the third insulating layer, as shown in FIG. 11 .
- the plurality of via holes on the third insulating layer in each circuit unit includes at least an eleventh via hole V11 to a fifty-eighth via hole V58 .
- the orthographic projection of the eleventh via hole V11 on the substrate is located within the range of the orthographic projection of the first region of the first active layer on the substrate, the third insulating layer and the second insulating layer in the eleventh via hole V11 are etched away to expose the surface of the first region of the first active layer, and the eleventh via hole V11 is configured to connect a subsequently formed eleventh connecting electrode to the first region of the first active layer through the via hole.
- the orthographic projection of the twelfth via hole V12 on the substrate is located within the range of the orthographic projection of the second region of the first active layer on the substrate, the third insulating layer and the second insulating layer in the twelfth via hole V12 are etched away to expose the surface of the second region of the first active layer, and the twelfth via hole V12 is configured to connect a subsequently formed twelfth connecting electrode to the second region of the first active layer through the via hole.
- the orthographic projection of the thirteenth via hole V13 on the substrate is located within the range of the orthographic projection of the first region of the second active layer on the substrate, the third insulating layer and the second insulating layer in the thirteenth via hole V13 are etched away to expose the surface of the first region of the second active layer, and the thirteenth via hole V13 is configured to connect a subsequently formed twelfth connecting electrode to the first region of the second active layer through the via hole.
- the orthographic projection of the fourteenth via hole V14 on the substrate is located within the range of the orthographic projection of the second region of the second active layer on the substrate, the third insulating layer and the second insulating layer in the fourteenth via hole V14 are etched away to expose the surface of the second region of the second active layer, and the fourteenth via hole V14 is configured to connect a subsequently formed thirteenth connecting electrode to the second region of the second active layer through the via hole.
- the orthographic projection of the fifteenth via hole V15 on the substrate is located within the range of the orthographic projection of the first area of the third active layer on the substrate, the third insulating layer and the second insulating layer in the fifteenth via hole V15 are etched away to expose the surface of the first area of the third active layer, and the fifteenth via hole V15 is configured to connect a subsequently formed fourteenth connecting electrode to the first area of the third active layer through the via hole.
- the orthographic projection of the sixteenth via hole V16 on the substrate is located within the range of the orthographic projection of the second region of the third active layer on the substrate, the third insulating layer and the second insulating layer in the sixteenth via hole V16 are etched away to expose the surface of the second region of the third active layer, and the sixteenth via hole V16 is configured to connect the subsequently formed fifteenth connecting electrode to the second region of the third active layer through the via hole.
- the orthographic projection of the seventeenth via hole V17 on the substrate is located within the range of the orthographic projection of the first region of the fourth active layer on the substrate, the third insulating layer and the second insulating layer in the seventeenth via hole V17 are etched away to expose the surface of the first region of the fourth active layer, and the seventeenth via hole V17 is configured to connect a subsequently formed data signal line to the first region of the fourth active layer through the via hole.
- the orthographic projection of the eighteenth via hole V18 on the substrate is located within the range of the orthographic projection of the second region of the fourth active layer on the substrate, the third insulating layer and the second insulating layer in the eighteenth via hole V18 are etched away to expose the surface of the second region of the fourth active layer, and the eighteenth via hole V18 is configured to connect a subsequently formed fourteenth connecting electrode to the second region of the fourth active layer through the via hole.
- the orthographic projection of the nineteenth via hole V19 on the substrate is located within the range of the orthographic projection of the first region of the fifth active layer on the substrate, the third insulating layer and the second insulating layer in the nineteenth via hole V19 are etched away to expose the surface of the first region of the fifth active layer, and the nineteenth via hole V19 is configured to connect the subsequently formed sixteenth connecting electrode to the first region of the fifth active layer through the via hole.
- the orthographic projection of the twentieth via hole V20 on the substrate is located within the range of the orthographic projection of the second region of the fifth active layer on the substrate, the third insulating layer and the second insulating layer in the twentieth via hole V20 are etched away to expose the surface of the second region of the fifth active layer, and the twentieth via hole V20 is configured to connect a subsequently formed fourteenth connecting electrode to the second region of the fifth active layer through the via hole.
- the nineteenth via hole V19 and the twentieth via hole V20 are both in plural, and the plurality of the nineteenth via holes V19 and the plurality of the twentieth via holes V20 are alternately arranged in the second direction Y.
- the orthographic projection of the twenty-first via hole V21 on the substrate is located within the range of the orthographic projection of the first region of the sixth active layer on the substrate, the third insulating layer and the second insulating layer in the twenty-first via hole V21 are etched away to expose the surface of the first region of the sixth active layer, and the twenty-first via hole V21 is configured to connect the subsequently formed fifteenth connecting electrode to the first region of the sixth active layer through the via hole.
- the orthographic projection of the twenty-second via hole V22 on the substrate is located within the range of the orthographic projection of the second region of the sixth active layer on the substrate, the third insulating layer and the second insulating layer in the twenty-second via hole V22 are etched away to expose the surface of the second region of the sixth active layer, and the twenty-second via hole V22 is configured to connect the subsequently formed seventeenth electrode to the second region of the sixth active layer through the via hole.
- both the twenty-first via hole V21 and the twenty-second via hole V22 are in plural, and the plurality of the twenty-first via holes V21 and the plurality of the twenty-second via holes V22 are alternately arranged in the second direction Y.
- the orthographic projection of the twenty-third via hole V23 on the substrate is located within the range of the orthographic projection of the first region of the seventh active layer on the substrate, the third insulating layer and the second insulating layer in the twenty-third via hole V23 are etched away to expose the surface of the seventh region of the seventh active layer, and the twenty-third via hole V23 is configured to connect the subsequently formed eighteenth connecting electrode to the first region of the seventh active layer through the via hole.
- the orthographic projection of the twenty-fourth via hole V24 on the substrate is located within the range of the orthographic projection of the second region of the seventh active layer on the substrate, the third insulating layer and the second insulating layer in the twenty-fourth via hole V24 are etched away to expose the surface of the second region of the seventh active layer, and the twenty-fourth via hole V24 is configured to connect the subsequently formed nineteenth connecting electrode to the second region of the seventh active layer through the via hole.
- the orthographic projection of the twenty-fifth via hole V25 on the substrate is located within the range of the orthographic projection of the first region of the twelfth active layer on the substrate, the third insulating layer and the second insulating layer in the twenty-fifth via hole V25 are etched away to expose the surface of the first region of the twelfth active layer, and the twenty-fifth via hole V25 is configured to connect the subsequently formed seventeenth electrode to the first region of the twelfth active layer through the via hole.
- the orthographic projection of the twenty-sixth via hole V26 on the substrate is located within the range of the orthographic projection of the second region of the twelfth active layer on the substrate, the third insulating layer and the second insulating layer in the twenty-sixth via hole V26 are etched away to expose the surface of the second region of the twelfth active layer, and the twenty-sixth via hole V26 is configured to connect a subsequently formed twentieth connecting electrode to the second region of the twelfth active layer through the via hole.
- both the twenty-fifth via hole V25 and the twenty-sixth via hole V26 are in plural, and the plurality of the twenty-fifth via holes V25 and the plurality of the twenty-sixth via holes V26 are alternately arranged in the second direction Y.
- the orthographic projection of the twenty-seventh via V27 on the substrate is located within the range of the orthographic projection of the first region of the eighth active layer on the substrate, the third insulating layer and the second insulating layer in the twenty-seventh via V27 are etched away to expose the surface of the ninth region of the eighth active layer, and the twenty-seventh via V27 is configured to connect a subsequently formed time-length signal line to the first region of the eighth active layer through the via.
- the orthographic projection of the twenty-eighth via hole V28 on the substrate is located within the range of the orthographic projection of the second region of the eighth active layer on the substrate, the third insulating layer and the second insulating layer in the twenty-eighth via hole V28 are etched away to expose the surface of the second region of the eighth active layer, and the twenty-eighth via hole V28 is configured to connect the subsequently formed twenty-first connecting electrode to the second region of the eighth active layer through the via hole.
- the orthographic projection of the twenty-ninth via hole V29 on the substrate is located within the range of the orthographic projection of the first region of the ninth active layer on the substrate, the third insulating layer and the second insulating layer in the twenty-ninth via hole V29 are etched away to expose the surface of the first region of the ninth active layer, and the twenty-ninth via hole V29 is configured to connect the subsequently formed twenty-second connecting electrode to the first region of the ninth active layer through the via hole.
- the orthographic projection of the thirtieth via hole V30 on the substrate is located within the range of the orthographic projection of the second region of the ninth active layer on the substrate, the third insulating layer and the second insulating layer in the thirtieth via hole V30 are etched away to expose the surface of the second region of the ninth active layer, and the thirtieth via hole V30 is configured to connect the subsequently formed twenty-third connecting electrode to the second region of the ninth active layer through the via hole.
- the orthographic projection of the thirty-first via V31 on the substrate is located within the range of the orthographic projection of the first region of the tenth active layer on the substrate, the third insulating layer and the second insulating layer in the thirty-first via V31 are etched away to expose the surface of the first region of the tenth active layer, and the thirty-first via V31 is configured to connect a subsequently formed time-length signal line to the first region of the tenth active layer through the via.
- the orthographic projection of the thirty-second via hole V32 on the substrate is located within the range of the orthographic projection of the second region of the tenth active layer on the substrate, the third insulating layer and the second insulating layer in the thirty-second via hole V32 are etched away to expose the surface of the second region of the tenth active layer, and the thirty-second via hole V32 is configured to connect the subsequently formed twenty-fourth connecting electrode to the second region of the tenth active layer through the via hole.
- the orthographic projection of the thirty-third via hole V33 on the substrate is located within the range of the orthographic projection of the first region of the eleventh active layer on the substrate, the third insulating layer and the second insulating layer in the thirty-third via hole V33 are etched away to expose the surface of the first region of the eleventh active layer, and the thirty-third via hole V33 is configured to connect the subsequently formed twenty-fifth connecting electrode to the first region of the eleventh active layer through the via hole.
- the orthographic projection of the thirty-fourth via hole V34 on the substrate is located within the range of the orthographic projection of the second region of the eleventh active layer on the substrate, the third insulating layer and the second insulating layer in the thirty-fourth via hole V34 are etched away to expose the surface of the second region of the eleventh active layer, and the thirty-fourth via hole V34 is configured to connect the subsequently formed twenty-third connecting electrode to the second region of the eleventh active layer through the via hole.
- the orthographic projections of the thirty-fifth via hole V35 and the thirty-sixth via hole V36 on the substrate are located within the range of the orthographic projections of the light-emitting signal line EM on the substrate, the third insulating layer in the thirty-fifth via hole V35 and the thirty-sixth via hole V36 is etched away to expose the surfaces of the light-emitting signal line EM, respectively, and the thirty-fifth via hole V35 and the thirty-sixth via hole V36 are configured to connect the subsequently formed twenty-second connecting electrode and the twenty-seventh connecting electrode to the light-emitting signal line EM, respectively, through the above-mentioned via holes.
- the orthographic projections of the thirty-seventh via V37, the thirty-eighth via V38 and the thirty-ninth via V39 on the substrate are respectively located within the range of the orthographic projections of the initial signal line Vint on the substrate, the third insulating layer in the thirty-seventh via V37, the thirty-eighth via V38 and the thirty-ninth via V39 is etched away to expose the surfaces of the initial signal line Vint, respectively, and the thirty-seventh via V37, the thirty-eighth via V38 and the thirty-ninth via V39 are configured to connect the subsequently formed eleventh connecting electrode, the eighteenth connecting electrode and the twenty-eighth connecting electrode to the initial signal line Vint through the above-mentioned vias, respectively.
- the orthographic projection of the 40th via hole V40 on the substrate is located within the range of the orthographic projection of the high-frequency connecting block of the high-frequency signal line Hf on the substrate, the third insulating layer in the 40th via hole V40 is etched away to expose the surface of the high-frequency connecting block, and the 40th via hole V40 is configured to connect the subsequently formed twenty-sixth connecting electrode to the high-frequency signal line Hf through the via hole.
- the orthographic projection of the forty-first via V41 on the substrate is located within the range of the orthographic projection of the high-voltage connection block of the high-voltage connection line VDD-C on the substrate, the third insulating layer in the forty-first via V41 is etched away to expose the surface of the high-voltage connection block, and the forty-first via V41 is configured to connect the subsequently formed sixteenth connection electrode to the high-voltage connection line VDD-C through the via.
- the orthographic projection of the forty-second via hole V42 on the substrate is located within the range of the orthographic projection of the fifth electrode plate CF5 on the substrate, the third insulating layer in the forty-second via hole V42 is etched away to expose the surface of the fifth electrode plate CF5, and the forty-second via hole V42 is configured to connect the subsequently formed twenty-eighth connecting electrode to the fifth electrode plate CF5 through the via hole.
- the orthographic projection of the forty-third via hole V43 on the substrate is located within the range of the orthographic projection of the sixth electrode plate CF6 on the substrate, the third insulating layer in the forty-third via hole V43 is etched away to expose the surface of the sixth electrode plate CF6, and the forty-third via hole V43 is configured to connect the subsequently formed twelfth connecting electrode to the sixth electrode plate CF6 through the via hole.
- the orthographic projection of the forty-fourth via hole V44 on the substrate is located within the range of the orthographic projection of the first connection electrode CO1 on the substrate, the third insulating layer in the forty-fourth via hole V44 is etched away to expose the surface of the first connection electrode CO1, and the forty-fourth via hole V44 is configured to connect the subsequently formed seventh electrode plate to the first connection electrode CO1 through the via hole.
- the orthographic projection of the forty-fifth via hole V45 on the substrate is located within the range of the orthographic projection of the second connection electrode CO2 on the substrate, the third insulating layer in the forty-fifth via hole V45 is etched away to expose the surface of the second connection electrode CO2, and the forty-fifth via hole V45 is configured to connect the subsequently formed eighth electrode plate to the second connection electrode CO2 through the via hole.
- the orthographic projection of the forty-sixth via hole V46 on the substrate is located within the range of the orthographic projection of the third connecting electrode CO3 on the substrate, the third insulating layer in the forty-sixth via hole V46 is etched away to expose the surface of the third connecting electrode CO3, and the forty-sixth via hole V46 is configured to connect the subsequently formed ninth electrode plate to the third connecting electrode CO3 through the via hole.
- the orthographic projection of the forty-seventh via hole V47 on the substrate is located within the range of the orthographic projection of the first end of the fourth connection electrode CO4 on the substrate, the third insulating layer in the forty-seventh via hole V47 is etched away to expose the surface of the first end of the fourth connection electrode CO4, and the forty-seventh via hole V47 is configured to connect the subsequently formed thirteenth connection electrode to the first end of the fourth connection electrode CO4 through the via hole.
- the orthographic projection of the forty-eight via hole V48 on the substrate is located within the range of the orthographic projection of the second end of the fourth connection electrode CO4 on the substrate, the third insulating layer in the forty-eight via hole V48 is etched away to expose the surface of the second end of the fourth connection electrode CO4, and the forty-eight via hole V48 is configured to connect the subsequently formed fifteenth connection electrode to the second end of the fourth connection electrode CO4 through the via hole.
- the orthographic projection of the forty-ninth via hole V49 on the substrate is located within the range of the orthographic projection of the first end of the fifth connection electrode CO5 on the substrate, the third insulating layer in the forty-ninth via hole V49 is etched away to expose the surface of the first end of the fifth connection electrode CO5, and the forty-ninth via hole V49 is configured to connect the subsequently formed twentieth connection electrode to the first end of the fifth connection electrode CO5 through the via hole.
- the orthographic projection of the fiftieth via hole V50 on the substrate is located within the range of the orthographic projection of the second end of the fifth connecting electrode CO5 on the substrate, the third insulating layer in the fiftieth via hole V50 is etched away to expose the surface of the second end of the fifth connecting electrode CO5, and the fiftieth via hole V50 is configured to connect the subsequently formed nineteenth connecting electrode to the second end of the fifth connecting electrode CO5 through the via hole.
- the orthographic projection of the fifty-first via hole V51 on the substrate is located within the range of the orthographic projection of the first end of the sixth connection electrode CO6 on the substrate, the third insulating layer in the fifty-first via hole V51 is etched away to expose the surface of the first end of the sixth connection electrode CO6, and the fifty-first via hole V51 is configured to connect the subsequently formed twenty-fifth connection electrode to the first end of the sixth connection electrode CO6 through the via hole.
- the orthographic projection of the fifty-second via hole V52 on the substrate is located within the range of the orthographic projection of the second end of the sixth connection electrode CO6 on the substrate, the third insulating layer in the fifty-second via hole V52 is etched away to expose the surface of the second end of the sixth connection electrode CO6, and the fifty-second via hole V52 is configured to connect the subsequently formed twenty-sixth connection electrode to the second end of the sixth connection electrode CO6 through the via hole.
- the orthographic projection of the fifty-third via V53 on the substrate is located within the range of the orthographic projection of the third gate block 103 of the third top gate electrode Gate3-T on the substrate, the third insulating layer in the fifty-third via V53 is etched away to expose the surface of the third gate block 103, and the fifty-third via V53 is configured to connect the subsequently formed twelfth connecting electrode to the third top gate electrode Gate3-T through the via.
- the orthographic projection of the fifty-fourth via V54 on the substrate is located within the range of the orthographic projection of the fifth gate block 105 of the fifth gate electrode Gate5 on the substrate, the third insulating layer in the fifty-fourth via V54 is etched away to expose the surface of the fifth gate block 105, and the fifty-fourth via V54 is configured to connect the subsequently formed twenty-seventh connecting electrode to the fifth gate electrode Gate5 through the via.
- the orthographic projection of the fifty-fifth via V55 on the substrate is located within the range of the orthographic projection of the sixth gate block 106 of the sixth gate electrode Gate6 on the substrate, the third insulating layer in the fifty-fifth via V55 is etched away to expose the surface of the sixth gate block 106, and the fifty-fifth via V55 is configured to connect the subsequently formed twenty-second connecting electrode to the sixth gate electrode Gate6 through the via.
- the orthographic projection of the fifty-sixth via V56 on the substrate is located within the range of the orthographic projection of the twelfth gate block 112 of the twelfth gate electrode Gate12 on the substrate, the third insulating layer in the fifty-sixth via V56 is etched away to expose the surface of the twelfth gate block 112, and the fifty-sixth via V56 is configured to connect a subsequently formed twenty-third connecting electrode to the twelfth gate electrode Gate12 through the via.
- the orthographic projection of the fifty-seventh via V57 on the substrate is located within the range of the orthographic projection of the ninth gate electrode Gate9 on the substrate, the third insulating layer in the fifty-seventh via V57 is etched away to expose the surface of the ninth gate electrode Gate9, and the fifty-seventh via V57 is configured to connect the subsequently formed twenty-first connecting electrode to the ninth gate electrode Gate9 through the via.
- the orthographic projection of the fifty-eight via hole V58 on the substrate is located within the range of the orthographic projection of the eleventh gate electrode Gate11 on the substrate, the third insulating layer in the fifty-eight via hole V58 is etched away to expose the surface of the eleventh gate electrode Gate11, and the fifty-eight via hole V58 is configured to connect the subsequently formed twenty-fourth connecting electrode to the eleventh gate electrode Gate11 through the via hole.
- the plurality of via holes on the third insulating layer may further include fifty-ninth to sixty-second via holes V59 to V62 .
- the orthographic projection of the fifty-ninth via V59 on the substrate is located within the range of the orthographic projection of the high-voltage connecting line VDD-C in the third circuit unit Q3 on the substrate, the third insulating layer in the fifty-ninth via V59 is etched away to expose the surface of the high-voltage connecting line VDD-C, and the fifty-ninth via V59 is configured to connect the subsequently formed thirty-first connecting electrode to the high-voltage connecting line VDD-C through the via.
- the orthographic projection of the sixtieth via hole V60 on the substrate is located within the range of the orthographic projection of the low-voltage connection block of the low-voltage connection line VSS-C in the first circuit unit Q1 and the second circuit unit Q2 on the substrate, the third insulating layer in the sixtieth via hole V60 is etched away to expose the surface of the low-voltage connection block, and the sixtieth via hole V60 is configured to connect the subsequently formed thirty-second connection electrode to the low-voltage connection line VSS-C through the via hole.
- the orthographic projection of the sixty-first via hole V61 on the substrate is located within the range of the orthographic projection of the seventh connection electrode CO7 in the third circuit unit Q3 on the substrate, the third insulating layer in the sixty-first via hole V61 is etched away to expose the surface of the seventh connection electrode CO7, and the sixty-first via hole V61 is configured to connect the subsequently formed thirty-third connection electrode to the seventh connection electrode CO7 through the via hole.
- the orthographic projection of the sixty-second via hole V62 on the substrate is located within the range of the orthographic projection of the power electrode 11 in the third circuit unit Q3 on the substrate, the third insulating layer, the second insulating layer and the first insulating layer in the sixty-second via hole V62 are etched away to expose the surface of the power electrode 11, and the sixty-second via hole V62 is configured to connect the subsequently formed thirty-third connecting electrode to the power electrode 11 through the via hole.
- forming the third conductive layer pattern may include: depositing a third conductive film on the substrate on which the aforementioned pattern is formed, patterning the third conductive film using a patterning process, and forming a third conductive layer pattern disposed on the third insulating layer, as shown in FIGS. 12A and 12B, wherein FIG. 12B is a plan view schematically showing the third conductive layer in FIG. 12A.
- the third conductive layer may be referred to as a first source-drain metal (SD1) layer.
- the third conductive layer pattern of each circuit unit includes at least: a data signal line DataI, a time signal line DataT, a seventh electrode plate CF7, an eighth electrode plate CF8, a ninth electrode plate CF9, an anode connection block 12, and an eleventh connection electrode CO11 to a twenty-eighth connection electrode CO28.
- the shape of the data signal line DataI can be a line shape in which the main part extends along the second direction Y, and can be located on the side opposite to the first direction X of the circuit unit.
- the data signal line DataI is connected to the first area of the fourth active layer through the seventeenth via hole V17, thereby realizing that the data signal line DataI writes the data signal into the first electrode of the fourth transistor T4.
- the shape of the time length signal line DataT can be a line shape in which the main part extends along the second direction Y, and can be located on one side of the first direction X of the circuit unit.
- the time length signal line DataT is connected to the first area of the eighth active layer through the twenty-seventh via V27, and on the other hand, the time length signal line DataT is connected to the first area of the tenth active layer through the thirty-first via V31, thereby realizing that the time length signal line DataT writes the time length signal into the first electrode of the eighth transistor T8 and the first electrode of the tenth transistor T10 respectively.
- the shape of the seventh electrode plate CF7 may be an "L" shape
- the orthographic projection of the seventh electrode plate CF7 on the substrate at least partially overlaps the orthographic projection of the fourth electrode plate CF4 on the substrate
- the seventh electrode plate CF7 is connected to the first connection electrode CO1 through the forty-fourth via hole V44.
- the seventh electrode plate CF7 may serve as another electrode plate of the first capacitor, and the fourth electrode plate CF4 and the seventh electrode plate CF7 constitute another first capacitor of the pixel driving circuit.
- the seventh plate CF7 is connected to the first connection electrode CO1 through the forty-fourth via V44, and the first connection electrode CO1 is connected to the first plate CF1 through the via, the first plate CF1 and the seventh plate CF7 have the same potential, so that the first plate CF1, the fourth plate CF4 and the third plate 97 constitute a first capacitor of a parallel structure, the first plate CF1 and the fourth plate CF4 constitute a first capacitor of the pixel driving circuit, the fourth plate CF4 and the seventh plate CF7 constitute another first capacitor of the pixel driving circuit, and the two first capacitors are connected in parallel.
- the shape of the eighth electrode plate CF8 can be rectangular, the orthographic projection of the eighth electrode plate CF8 on the substrate overlaps at least partially with the orthographic projection of the fifth electrode plate CF5 on the substrate, and the eighth electrode plate CF8 is connected to the second connection electrode CO2 through the forty-fifth via hole V45.
- the eighth electrode plate CF8 can serve as another electrode plate of the second capacitor, and the fifth electrode plate CF5 and the eighth electrode plate CF8 constitute another second capacitor of the pixel driving circuit.
- the eighth electrode plate CF8 is connected to the second connecting electrode CO2 through the forty-fifth via V45, and the second connecting electrode CO2 is connected to the second electrode plate CF2 through the via, the second electrode plate CF2 and the eighth electrode plate CF8 have the same potential, so that the second electrode plate CF2, the fifth electrode plate CF5 and the eighth electrode plate CF8 constitute a second capacitor in a parallel structure, the second electrode plate CF2 and the fifth electrode plate CF5 constitute a second capacitor of the pixel driving circuit, the fifth electrode plate CF5 and the eighth electrode plate CF8 constitute another second capacitor of the pixel driving circuit, and the two second capacitors are connected in parallel.
- the shape of the ninth electrode plate CF9 may be rectangular, the orthographic projection of the ninth electrode plate CF9 on the substrate at least partially overlaps the orthographic projection of the sixth electrode plate CF6 on the substrate, and the ninth electrode plate CF9 is connected to the third connection electrode CO3 through the forty-sixth via hole V46.
- the ninth electrode plate CF9 may serve as another electrode plate of the storage capacitor, and the sixth electrode plate CF6 and the ninth electrode plate CF9 constitute another storage capacitor of the pixel driving circuit.
- the ninth plate CF9 is connected to the third connection electrode CO3 through the forty-sixth via V46, and the third connection electrode CO3 is connected to the third plate CF3 through the via, the third plate CF3 and the ninth plate CF9 have the same potential, so that the third plate CF3, the sixth plate CF6 and the ninth plate CF9 constitute a storage capacitor in a parallel structure, the third plate CF3 and the sixth plate CF6 constitute a storage capacitor of the pixel driving circuit, the sixth plate CF6 and the ninth plate CF9 constitute another storage capacitor of the pixel driving circuit, and the two storage capacitors are connected in parallel.
- the position, shape, and size of the ninth plate CF9 in the second circuit unit Q2 and the third circuit unit Q3 may be substantially the same, but different from the shape and size of the ninth plate CF9 in the first circuit unit Q1.
- the area of the ninth plate CF9 in the first circuit unit Q1 may be greater than the area of the ninth plate CF9 in the second circuit unit Q2, and the area of the ninth plate CF9 in the first circuit unit Q1 may be greater than the area of the ninth plate CF9 in the third circuit unit Q3, so that the capacitance value of the storage capacitor in the first circuit unit Q1 is greater than the capacitance values of the storage capacitors in the second circuit unit Q2 and the third circuit unit Q3.
- the first length M1 of the ninth plate CF9 in the first circuit unit Q1, the second circuit unit Q2, and the third circuit unit Q3 may be substantially the same, and the second length M2 of the ninth plate CF9 in the first circuit unit Q1 may be greater than the second length M2 of the ninth plate CF9 in the second circuit unit Q2 and the third circuit unit Q3, so that the area of the ninth plate CF9 in the first circuit unit Q1 is greater than the area of the ninth plate CF9 in the second circuit unit Q2 and the third circuit unit Q3.
- the ratio of the second length M2 of the ninth plate CF9 in the first circuit unit Q1 to the second length M2 of the ninth plate CF9 in the second circuit unit Q2 and the third circuit unit Q3 may be about 1 to 2.
- the ratio may be about 1.3.
- the shape of the eleventh connection electrode CO11 can be a strip shape extending along the second direction Y, the first end of the eleventh connection electrode CO11 is connected to the first region of the first active layer through the eleventh via hole V11, and the second end of the eleventh connection electrode CO11 is connected to the initial signal line Vint through the thirty-seventh via hole V37, thereby enabling the initial signal line Vint to write the initial signal into the first electrode of the first transistor T1.
- the shape of the twelfth connection electrode CO12 may be a strip shape extending along the second direction Y, the first end of the twelfth connection electrode CO12 close to the ninth electrode plate CF9 is connected to the sixth electrode plate CF6 through the forty-third via hole V43, the second end of the twelfth connection electrode CO12 close to the seventh electrode plate CF7 is connected to the third gate block 103 through the fifty-third via hole V53, and the portion between the first end and the second end of the twelfth connection electrode CO12 is connected to the second region of the first active layer through the twelfth via hole V12 on the one hand, and is connected to the first region of the second active layer through the thirteenth via hole V13 on the other hand.
- the twelfth connection electrode CO12 makes the second electrode of the first transistor T1, the first electrode of the second transistor T2, the gate electrode of the third transistor T3, and the sixth electrode plate CF6 have the same potential (i.e., the third node N3 of the pixel driving circuit), and the twelfth connection electrode CO12 may be referred to as a third node electrode.
- the thirteenth connection electrode CO13 may have a strip shape extending along the first direction X, a first end of the thirteenth connection electrode CO13 is connected to the second region of the second active layer through a fourteenth via hole V14, and a second end of the thirteenth connection electrode CO13 is connected to a first end of the fourth connection electrode CO4 through a forty-seventh via hole V47.
- the shape of the fourteenth connection electrode CO14 may be a zigzag line extending along the second direction Y, the first end of the fourteenth connection electrode CO14 is connected to the first region of the third active layer through the fifteenth via hole V15, the second end of the fourteenth connection electrode CO14 is connected to the second region of the fourth active layer through the eighteenth via hole V18, and the portion between the first end and the second end of the fourteenth connection electrode CO14 is connected to the second region of the fifth active layer through the twentieth via hole V20.
- the fourteenth connection electrode CO14 enables the first electrode of the third transistor T3, the second electrode of the fourth transistor T4, and the second electrode of the fifth transistor T5 to have the same potential (i.e., the fifth node N5 of the pixel driving circuit), and the fourteenth connection electrode CO14 may be referred to as a fifth node electrode.
- the shape of the fifteenth connection electrode CO15 may be a zigzag shape extending along the first direction X, the first end of the fifteenth connection electrode CO15 is connected to the second region of the third active layer through the sixteenth via hole V16, the second end of the fifteenth connection electrode CO15 is connected to the first region of the sixth active layer through the twenty-first via hole V21, and the portion between the first end and the second end of the fifteenth connection electrode CO15 is connected to the second end of the fourth connection electrode CO4 through the forty-eighth via hole V48.
- the fifteenth connection electrode CO15 enables the second electrode of the second transistor T2, the second electrode of the third transistor T3, and the first electrode of the sixth transistor T6 to have the same potential (i.e., the fourth node N4 of the pixel driving circuit), and the fifteenth connection electrode CO15 may be referred to as a fourth node electrode.
- the shape of the sixteenth connection electrode CO16 can be a zigzag line extending along the second direction Y, the first end of the sixteenth connection electrode CO16 is connected to the first area of the fifth active layer through the nineteenth via hole V19, and the second end of the sixteenth connection electrode CO16 is connected to the high-voltage connection line VDD-C through the forty-first via hole V41.
- the shape of the seventeenth connection electrode CO17 can be a zigzag line extending along the second direction Y, the first end of the seventeenth connection electrode CO17 is connected to the second region of the sixth active layer through the twenty-second via hole V22, and the second end of the seventeenth connection electrode CO17 is connected to the first region of the twelfth active layer through the twenty-fifth via hole V25, thereby realizing the connection between the second electrode of the sixth transistor T6 and the first electrode of the twelfth transistor T12.
- the shape of the eighteenth connection electrode CO18 can be a zigzag line extending along the second direction Y, the first end of the eighteenth connection electrode CO18 is connected to the initial signal line Vint through the thirty-eighth via hole V38, the second end of the eighteenth connection electrode CO18 is connected to the seventh electrode plate CF7, and the portion between the first end and the second end of the eighteenth connection electrode CO18 is connected to the first region of the seventh active layer through the twenty-third via hole V23, so that the initial signal line Vint writes the initial signal into the first electrode of the seventh transistor T7 and one electrode plate of the first capacitor.
- the shape of the nineteenth connection electrode CO19 can be a zigzag line extending along the second direction Y, the first end of the nineteenth connection electrode CO19 is connected to the second region of the seventh active layer through the twenty-fourth via hole V24, and the second end of the nineteenth connection electrode CO19 is connected to the second end of the fifth connection electrode CO5 through the fiftieth via hole V50.
- the shape of the twentieth connection electrode CO20 may be a zigzag shape extending along the second direction Y, the first end of the twentieth connection electrode CO20 is connected to the second region of the twelfth active layer through the twenty-sixth via hole V26, and the second end of the twentieth connection electrode CO20 is connected to the first end of the fifth connection electrode CO5 through the forty-ninth via hole V49.
- the twentieth connection electrode CO20 is connected to the first end of the fifth connection electrode CO5 and the nineteenth connection electrode CO19 is connected to the second end of the fifth connection electrode CO5, the nineteenth connection electrode CO19, the fifth connection electrode CO5 and the twentieth connection electrode CO20 that are connected to each other make the second electrode of the seventh transistor T7 and the second electrode of the twelfth transistor T12 have the same potential (i.e., the second node N2 of the pixel driving circuit).
- the anode connection block 12 may be disposed on a side of the nineteenth connection electrode CO19 away from the seventh electrode plate CF7 and connected to the nineteenth connection electrode CO19 via a connection line.
- the anode connection block 12 is configured to be connected to a subsequently formed anode connection electrode.
- the anode connection block 12 of the first circuit unit Q1 may be located on one side of the ninth plate CF9 in the first direction X
- the anode connection blocks 12 of the second circuit unit Q2 and the third circuit unit Q3 may be located on one side of the ninth plate CF9 in the opposite direction of the second direction Y.
- the shape of the twenty-first connection electrode CO21 may be a strip shape extending along the second direction Y, the first end of the twenty-first connection electrode CO21 is connected to the second region of the eighth active layer through the twenty-eighth via hole V28, and the second end of the twenty-first connection electrode CO21 is connected to the ninth gate electrode Gate9 through the fifty-seventh via hole V57. Since the ninth gate electrode Gate9 is connected to the fourth electrode plate CF4, the twenty-first connection electrode CO21 enables the second electrode of the eighth transistor T8, the gate electrode of the ninth transistor T9, and the fourth electrode plate CF4 to have the same potential (i.e., the sixth node N6 of the pixel driving circuit).
- the shape of the twenty-second connection electrode CO22 can be a strip shape extending along the second direction Y, the first end of the twenty-second connection electrode CO22 is connected to the first area of the ninth active layer through the twenty-ninth via hole V29, the second end of the twenty-second connection electrode CO22 is connected to the light emitting signal line EM through the thirty-fifth via hole V35, and the portion between the first end and the second end of the twenty-second connection electrode CO22 is connected to the sixth gate block 106 of the sixth gate electrode Gate6 through the fifty-fifth via hole V55, thereby realizing that the light emitting signal line EM controls the conduction or disconnection of the sixth transistor T6, and writes the light emitting signal into the first electrode of the ninth transistor T9.
- the shape of the twenty-third connecting electrode CO23 can be a strip shape extending along the second direction Y, the first end of the twenty-third connecting electrode CO23 is connected to the second area of the ninth active layer through the thirtieth via hole V30, the second end of the twenty-third connecting electrode CO23 is connected to the second area of the eleventh active layer through the thirty-fourth via hole V34, and the portion between the first end and the second end of the twenty-third connecting electrode CO23 is connected to the twelfth gate block 112 of the twelfth gate electrode Gate12 through the fifty-sixth via hole V56, thereby achieving the second electrode of the ninth transistor T9, the second electrode of the eleventh transistor T11 and the gate electrode of the twelfth transistor T12 having the same potential (i.e., the first node N1 of the pixel driving circuit).
- the shape of the twenty-fourth connection electrode CO24 may be a strip shape extending along the second direction Y, the first end of the twenty-fourth connection electrode CO24 is connected to the second region of the tenth active layer through the thirty-second via hole V32, and the second end of the twenty-fourth connection electrode CO24 is connected to the eleventh gate electrode Gate11 through the fifty-eight via hole V58.
- the twenty-fourth connection electrode CO24 enables the second electrode of the tenth transistor T10, the gate electrode of the eleventh transistor T11, and the second electrode plate CF2 to have the same potential (i.e., the seventh node N7 of the pixel driving circuit).
- the shape of the twenty-fifth connection electrode CO25 may be an “L” shape, a first end of the twenty-fifth connection electrode CO25 is connected to the first region of the eleventh active layer through the thirty-third via hole V33, and a second end of the twenty-fifth connection electrode CO25 is connected to the first end of the sixth connection electrode CO6 through the fifty-first via hole V51.
- the shape of the twenty-sixth connection electrode CO26 may be a strip shape extending along the second direction Y, the first end of the twenty-sixth connection electrode CO26 is connected to the high-frequency signal line Hf through the fortieth via hole V40, and the second end of the twenty-sixth connection electrode CO26 is connected to the second end of the sixth connection electrode CO6 through the fifty-second via hole V52. Since the high-frequency signal line Hf is connected to the first region of the eleventh active layer through the twenty-sixth connection electrode CO26, the sixth connection electrode CO6, and the twenty-fifth connection electrode CO25, the high-frequency signal line Hf writes the high-frequency signal into the first electrode of the eleventh transistor T11.
- the shape of the twenty-seventh connecting electrode CO27 can be a strip shape extending along the second direction Y, the first end of the twenty-seventh connecting electrode CO27 is connected to the light emitting signal line EM through the thirty-sixth via hole V36, and the second end of the twenty-seventh connecting electrode CO27 is connected to the fifth gate block 105 of the fifth gate electrode Gate5 through the fifty-fourth via hole V54, thereby realizing the light emitting signal line EM controlling the conduction or disconnection of the fifth transistor T5.
- the shape of the twenty-eighth connecting electrode CO28 can be a strip shape extending along the second direction Y, the first end of the twenty-eighth connecting electrode CO28 is connected to the initial signal line Vint through the thirty-ninth via hole V39, and the second end of the twenty-eighth connecting electrode CO28 is connected to the fifth electrode plate CF5 through the forty-second via hole V42, thereby realizing that the initial signal line Vint writes the initial signal to one electrode plate of the second capacitor.
- the third conductive layer may further include a thirty-first connection electrode CO31 , a thirty-second connection electrode CO32 , and a thirty-third connection electrode CO33 .
- the thirty-first connection electrode CO31 may be rectangular in shape and may be disposed in the third circuit unit Q3.
- the thirty-first connection electrode CO31 is connected to the high-voltage connection line VDD-C in the third circuit unit Q3 through the fifty-ninth via hole V59.
- the thirty-first connection electrode CO31 is configured to be connected to a high-voltage power supply line formed subsequently.
- the shape of the thirty-second connection electrode CO32 may be rectangular, and may be disposed in the first circuit unit Q1 and the second circuit unit Q2.
- the thirty-second connection electrode CO32 is connected to the low voltage connection block of the low voltage connection line VSS-C in the first circuit unit Q1 and the second circuit unit Q2 through the sixtieth via hole V60.
- the thirty-second connection electrode CO32 is configured to be connected to a low voltage power supply line formed subsequently.
- the thirty-third connection electrode CO33 may be rectangular in shape and may be disposed in the third circuit unit Q3. On one hand, the thirty-third connection electrode CO33 is connected to the seventh connection electrode CO7 through the sixty-first via hole V61, and on the other hand, the thirty-third connection electrode CO33 is connected to the power electrode 11 through the sixty-second via hole V62. In an exemplary embodiment, the thirty-third connection electrode CO33 is configured to be connected to a high-voltage power line formed subsequently.
- Forming a fourth insulating layer and a first planar layer pattern may include: first coating a first planar film on the substrate on which the aforementioned pattern is formed, patterning the first planar film using a patterning process, then depositing a fourth insulating film, patterning the first planar film using a patterning process, forming a first planar layer covering the third conductive layer pattern and a fourth insulating layer disposed on a side of the first planar layer away from the substrate, and a plurality of vias are disposed on the fourth insulating layer and the first planar layer, as shown in FIG. 13 .
- the plurality of via holes on the fourth insulating layer and the first planarizing layer in each circuit unit includes at least a sixty-fifth via hole V65.
- the orthographic projection of the sixty-fifth via hole V65 on the substrate is located within the range of the orthographic projection of the anode connection block 12 on the substrate, the fourth insulating film and the first flat film in the sixty-fifth via hole V65 are removed to expose the surface of the anode connection block 12, and the sixty-fifth via hole V65 is configured to connect a subsequently formed anode connection electrode to the anode connection block 12 through the via hole.
- the plurality of via holes on the fourth insulating layer and the first planar layer may further include a sixty-sixth via hole V66 , a sixty-seventh via hole V67 , and a sixty-eighth via hole V68 .
- the orthographic projection of the sixty-sixth via hole V66 on the substrate is located within the range of the orthographic projection of the thirty-first connecting electrode CO31 on the substrate, and can be set in the third circuit unit Q3.
- the fourth insulating film and the first flat film in the sixty-sixth via hole V66 are removed to expose the surface of the thirty-first connecting electrode CO31.
- the sixty-sixth via hole V66 is configured to connect a subsequently formed high-voltage power line to the thirty-first connecting electrode CO31 through the via hole.
- the orthographic projection of the sixty-seventh via hole V67 on the substrate is located within the range of the orthographic projection of the thirty-second connecting electrode CO32 on the substrate, and can be respectively arranged in the first circuit unit Q1 and the second circuit unit Q2.
- the fourth insulating film and the first flat film in the sixty-seventh via hole V67 are removed to expose the surface of the thirty-second connecting electrode CO32.
- the sixty-seventh via hole V67 is configured to connect a subsequently formed low-voltage power line to the thirty-second connecting electrode CO32 through the via hole.
- the orthographic projection of the sixty-eight via hole V68 on the substrate is located within the range of the orthographic projection of the thirty-third connecting electrode CO33 on the substrate, and can be set in the third circuit unit Q3.
- the fourth insulating film and the first flat film in the sixty-eight via hole V68 are removed to expose the surface of the thirty-third connecting electrode CO33.
- the sixty-eight via hole V68 is configured to connect a subsequently formed high-voltage power line to the thirty-third connecting electrode CO33 through the via hole.
- forming the fourth conductive layer pattern may include: depositing a fourth conductive film on the substrate on which the aforementioned pattern is formed, patterning the fourth conductive film using a patterning process, and forming a fourth conductive layer pattern disposed on the fourth insulating layer, as shown in FIGS. 14A and 14B , where FIG. 14B is a plan view of the fourth conductive layer in FIG. 14A .
- the fourth conductive layer may be referred to as a second source-drain metal (SD2) layer.
- the fourth conductive layer pattern of each circuit unit includes at least the anode connection electrode 13 .
- the shape of the anode connection electrode 13 may be rectangular, and the anode connection electrode 13 is connected to the anode connection block 12 through the sixty-fifth via hole V65, and the anode connection electrode 13 is configured to be bound and connected to the first electrode of the light-emitting diode.
- the anode connection block 12 is connected to the nineteenth connection electrode CO19, the nineteenth connection electrode CO19 is connected to the twentieth connection electrode CO20 through the fifth connection electrode CO5, and the twentieth connection electrode CO20 is connected to the second region of the twelfth active layer through the via hole, the connection between the anode connection electrode 13 and the second electrode of the seventh transistor T7 and the second electrode of the twelfth transistor T12 is realized, and the pixel driving circuit can drive the light-emitting diode to emit light.
- the fourth conductive layer pattern may further include at least a high voltage power line VDD and a low voltage power line VSS, the high voltage power line may be referred to as a first power line, and the low voltage power line may be referred to as a second power line.
- the high-voltage power line VDD may be shaped like a line extending along the second direction Y and may be disposed in the third circuit unit Q3.
- the high-voltage power line VDD is connected to the thirty-first connection electrode CO31 through the sixty-sixth via hole V66.
- the high-voltage power line VDD is connected to the thirty-third connection electrode CO33 through the sixty-eighth via hole V68.
- the thirty-first connection electrode CO31 is connected to the high-voltage connection line VDD-C through a via
- the high-voltage connection line VDD-C extending along the first direction X and the high-voltage power line VDD extending along the second direction Y form a mesh connection structure, which can not only minimize the resistance of the power transmission line and reduce the voltage drop of the power supply voltage, but also effectively improve the uniformity of the power supply voltage in the display substrate, effectively improve the uniformity within the signal surface, effectively improve the display uniformity, and improve the display quality and display quality.
- the high-voltage connection line VDD-C is connected to the sixteenth connection electrode CO16 of each circuit unit through the via hole, and the sixteenth connection electrode CO16 is connected to the first area of the fifth active layer through the via hole, the high-voltage power line VDD writes the first power signal to the first electrode of the fifth transistor T5 of each circuit unit.
- the thirty-third connection electrode CO33 is connected to the power electrode 11 through the seventh connection electrode CO7, the power electrode 11 is connected to the third electrode plate CF3 of the integrated structure, and the third electrode plate CF3 is connected to the ninth electrode plate CF9 through the third connection electrode CO3, the third electrode plate CF3 and the ninth electrode plate CF9 of the storage capacitor have the potential of the high-voltage power line VDD. Since the sixth electrode plate CF6 is connected to the twelfth connection electrode CO12 through the via hole, and the twelfth connection electrode CO12 is connected to the third top gate electrode Gate3-T through the via hole, the sixth electrode plate CF6 has the potential of the gate electrode of the third transistor T3.
- the third electrode plate CF3 having the potential of the high-voltage power line VDD and the sixth electrode plate CF6 having the potential of the gate electrode of the third transistor T3 constitute a storage capacitor of the pixel driving circuit
- the sixth electrode plate CF6 having the potential of the gate electrode of the third transistor T3 and the ninth electrode plate CF9 having the potential of the high-voltage power line VDD constitute another storage capacitor of the pixel driving circuit.
- the positive projection of the high-voltage power line VDD on the substrate overlaps at least partially with the positive projection of the twelfth connection electrode CO12 on the substrate. Since the high-voltage power line VDD is a constant potential, the high-voltage power line VDD can not only effectively shield the influence of data voltage jumps and other signals on key nodes in the pixel driving circuit, but also avoid the influence of data voltage jumps and other signals on the potential of key nodes, effectively avoid crosstalk deterioration, and improve the display effect.
- the low voltage power line VSS may be in a line shape extending along the second direction Y and may be respectively disposed in the first circuit unit Q1 and the second circuit unit Q2 , and is connected to the thirty-second connection electrode CO32 through the sixty-seventh via hole V67 .
- the low-voltage connection line VSS-C extending along the first direction X and the low-voltage power line VSS extending along the second direction Y form a mesh connection structure, which can not only minimize the resistance of the power transmission line and reduce the voltage drop of the power supply voltage, but also effectively improve the uniformity of the power supply voltage in the display substrate, effectively improve the uniformity within the signal surface, effectively improve the display uniformity, and improve the display quality and display quality.
- the positive projection of the low voltage power line VSS on the substrate overlaps at least partially with the positive projection of the twelfth connection electrode CO12 on the substrate. Since the low voltage power line VSS is a constant potential, the low voltage power line VSS can not only effectively shield the influence of data voltage jump and other signals on key nodes in the pixel driving circuit, but also avoid the influence of data voltage jump and other signals on the potential of key nodes, effectively avoid the deterioration of crosstalk, and improve the display effect.
- forming the fifth insulating layer and the second flat layer pattern may include: first depositing a fifth insulating film on the substrate on which the aforementioned pattern is formed, patterning the fifth insulating film by a patterning process, then coating a second flat film, then depositing a sixth insulating film, patterning the fifth insulating film, the second flat film, and the sixth insulating film by a patterning process to form a fifth insulating layer covering the fourth conductive layer pattern, a second flat layer disposed on a side of the fifth insulating layer away from the substrate, and a sixth insulating layer disposed on a side of the second flat layer away from the substrate, wherein a plurality of binding holes are disposed on the fifth insulating layer, the second flat layer, and the sixth insulating layer, as shown in FIG. 15 .
- the plurality of binding holes in each circuit unit includes: a first binding hole K1 and a second binding hole K2 .
- the shape of the first binding hole K1 can be rectangular, and the orthographic projection of the first binding hole K1 on the substrate is located within the range of the orthographic projection of the anode connecting electrode 13 on the substrate.
- the sixth insulating film, the second flat film and the fifth insulating film in the first binding hole K1 are removed to expose the surface of the anode connecting electrode 13.
- the area of the anode connecting electrode 13 exposed by the first binding hole K1 can be used as an anode pad.
- the first binding hole K1 is configured to enable the first pole of the light-emitting diode to be bound and connected to the anode connecting electrode 13 through the binding hole.
- the shape of the second binding hole K2 can be rectangular, and the orthographic projection of the second binding hole K2 on the substrate is located within the range of the orthographic projection of the low-voltage power line VSS on the substrate.
- the sixth insulating film, the second flat film and the fifth insulating film in the second binding hole K2 are removed to expose the surface of the low-voltage power line VSS.
- the area of the low-voltage power line VSS exposed by the second binding hole K2 can be used as a cathode pad, and the second binding hole K2 is configured to connect the second pole of the light-emitting diode to the low-voltage power line VSS through the binding hole.
- the driving circuit layer of this exemplary embodiment is prepared on the substrate.
- the driving circuit layer may include a plurality of circuit units, each of which may include a pixel driving circuit, and a first scanning signal line, a second scanning signal line, a light emitting signal line, a data signal line, a duration signal line, an initial signal line, a high-frequency signal line, and a high-voltage power supply line connected to the pixel driving circuit.
- the driving circuit layer may include at least a first conductive layer, a first insulating layer, a semiconductor layer, a second insulating layer, a second conductive layer, a third insulating layer, a third conductive layer, a first planar layer, a fourth insulating layer, a fourth conductive layer, a fifth insulating layer, and a second planar layer sequentially arranged on the substrate.
- the substrate may be a flexible substrate or a rigid substrate.
- the rigid substrate may include, but is not limited to, one or more of glass and quartz
- the flexible substrate may be, but is not limited to, one or more of polyethylene terephthalate, polyethylene terephthalate, polyetheretherketone, polystyrene, polycarbonate, polyarylate, polyarylate, polyimide, polyvinyl chloride, polyethylene, and textile fiber.
- the first conductive layer, the second conductive layer, the third conductive layer and the fourth conductive layer may be made of metal materials, such as any one or more of silver (Ag), copper (Cu), aluminum (Al) and molybdenum (Mo), or alloy materials of the above metals, such as aluminum neodymium alloy (AlNd) or molybdenum niobium alloy (MoNb), and may be a single layer structure, or a multi-layer composite structure, such as Mo/Cu/Mo, etc.
- metal materials such as any one or more of silver (Ag), copper (Cu), aluminum (Al) and molybdenum (Mo), or alloy materials of the above metals, such as aluminum neodymium alloy (AlNd) or molybdenum niobium alloy (MoNb)
- AlNd aluminum neodymium alloy
- MoNb molybdenum niobium alloy
- the first insulating layer, the second insulating layer, the third insulating layer and the fourth insulating layer may be made of any one or more of silicon oxide (SiOx), silicon nitride (SiNx) and silicon oxynitride (SiON), and may be a single layer, a multi-layer or a composite layer.
- the first planar layer and the second planar layer may be made of organic materials, such as resin, etc.
- the semiconductor layer may be made of one or more materials such as amorphous indium gallium zinc oxide (a-IGZO), zinc oxynitride (ZnON), indium zinc tin oxide (IZTO), amorphous silicon (a-Si), polycrystalline silicon (p-Si), sexithiophene, polythiophene, etc., that is, the present disclosure is applicable to transistors manufactured based on oxide technology, silicon technology, and organic technology.
- the material of the semiconductor layer may be polycrystalline silicon (p-Si).
- the subsequent preparation process may include: first, using a dispensing machine to add binding materials (such as solder paste) into a plurality of first binding holes and a plurality of second binding holes, and binding and connecting the first poles of a plurality of light-emitting diodes to the anode connection electrode through the first binding holes by a transfer die bonding process, and binding and connecting the second poles of a plurality of light-emitting diodes to the low-voltage power line through the second binding holes, thereby completing the connection between the light-emitting diodes and the corresponding pixel driving circuit.
- binding materials such as solder paste
- a covering film is coated on the substrate forming the aforementioned structure to form a covering layer, and the covering layer covers the plurality of light-emitting diodes.
- the plurality of light-emitting diodes and the covering layer may constitute a light-emitting structure layer.
- the display substrate provided by the exemplary embodiment of the present disclosure can well adapt to the differences in light output efficiency and yield between red light-emitting diodes, blue light-emitting diodes and green light-emitting diodes by setting the width-to-length ratio of the third transistor in the first circuit unit to be greater than the width-to-length ratio of the third transistor in the second circuit unit and the third circuit unit. It can not only meet the current value required by the red light-emitting diode, but also achieve more gray scales, thereby avoiding the problem that the brightness of the existing structure does not meet the requirements or cannot achieve more gray scales.
- the present disclosure can effectively reduce the jump amount of the gate voltage of the third transistor by increasing the capacitance value of the storage capacitor in the first circuit unit, and can ensure the correct writing of the gate voltage.
- the parasitic capacitance of the third transistor such as the gate-source capacitance Cgs and the gate-drain capacitance Cgd
- the gate voltage of the third transistor will jump when the gate electrode is disconnected and the light-emitting signal line is turned on due to capacitive coupling, thereby affecting the correct writing of the gate voltage. Since the jump amount of the gate voltage is inversely proportional to the capacitance value of the storage capacitor, increasing the capacitance value of the storage capacitor can effectively reduce the jump amount of the gate voltage of the third transistor.
- the present disclosure adopts a first capacitor, a second capacitor and a storage capacitor in a parallel structure, and minimizes the occupied space of the first capacitor, the second capacitor and the storage capacitor under the premise of ensuring the capacitance, which is conducive to achieving high-resolution display.
- the present disclosure forms a high-voltage power line and a low-voltage power line with a network connection structure, which can minimize the resistance of the power transmission line, reduce the voltage drop of the power supply voltage, effectively improve the uniformity of the power supply voltage in the display substrate, effectively improve the uniformity within the signal surface, effectively improve the display uniformity, and improve the display quality and display quality.
- the preparation process disclosed in the present disclosure can be well compatible with the existing preparation process, the process is simple to implement, easy to implement, high production efficiency, low production cost, and high yield rate.
- FIG16 is an equivalent circuit diagram of another pixel driving circuit of an exemplary embodiment of the present disclosure, illustrating a 11T3C pixel driving circuit structure.
- the pixel driving circuit provided by the exemplary embodiment may include at least a current control subcircuit DK and a duration control subcircuit SK.
- the current control subcircuit DK may include at least a first transistor T1, a second transistor T2, a third transistor T3, a fourth transistor T4, a fifth transistor T5, a sixth transistor T6, a seventh transistor T7 and a storage capacitor Cs, and the duration control subcircuit SK may include at least an eighth transistor T8, a ninth transistor T9, a tenth transistor T10, an eleventh transistor T11, a first capacitor C1 and a second capacitor C2. Different from the pixel driving circuit shown in FIG3, the twelfth transistor T12 is not provided in the present embodiment, and the duration control subcircuit SK is connected to the gate electrode of the sixth transistor T6.
- the first node N1 of this embodiment is respectively connected to the gate electrode of the sixth transistor T6, the second electrode of the ninth transistor T9 and the second electrode of the eleventh transistor T11
- the second node N2 is respectively connected to the second electrode of the sixth transistor T6, the second electrode of the seventh transistor T7 and the anode of the light emitting diode EL
- the other nodes are substantially the same as the structure shown in FIG. 3 .
- the gate electrode of the sixth transistor T6 is connected to the first node N1
- the first electrode of the sixth transistor T6 is connected to the fourth node N4
- the second electrode of the sixth transistor T6 is connected to the second node N2.
- the connection relationship between the first transistor T1 to the fifth transistor T5, the seventh transistor T7 to the eleventh transistor T11, the first capacitor C1, the second capacitor C2 and the storage capacitor Cs is substantially the same as the structure shown in FIG3, and will not be repeated here.
- FIG17 is a schematic diagram of the structure of another display substrate of an exemplary embodiment of the present disclosure, illustrating the structure of three circuit units, and the circuit unit includes the pixel driving circuit shown in FIG16.
- the plurality of circuit units may include at least a first circuit unit Q1, a blank unit KB, a second circuit unit Q2, and a third circuit unit Q3 sequentially arranged along the first direction X, the blank unit KB is configured to set a light emitting diode and transmit light, and no pixel driving circuit is arranged in the blank unit KB.
- the first pixel driving circuit in the first circuit unit Q1 is configured to be connected to the first light emitting diode
- the second pixel driving circuit in the second circuit unit Q2 is configured to be connected to the second light emitting diode
- the third pixel driving circuit in the third circuit unit Q3 is configured to be connected to the third light emitting diode.
- the first light emitting diode may be a red light emitting diode
- the second light emitting diode may be a green light emitting diode
- the third light emitting diode may be a blue light emitting diode.
- the first pixel driving circuit in the first circuit unit Q1 may include at least a first driving transistor DTFT1 and a first storage capacitor Cs1
- the second pixel driving circuit in the second circuit unit Q2 may include at least a second driving transistor DTFT2 and a second storage capacitor Cs2
- the third pixel driving circuit in the third circuit unit Q3 may include at least a third driving transistor DTFT3 and a third storage capacitor Cs3.
- the width-to-length ratio (W/L) of the first driving transistor DTFT1 may be greater than the width-to-length ratios of the second driving transistor DTFT2 and the third driving transistor DTFT3, and the capacitance value of the first storage capacitor Cs1 may be greater than the capacitance values of the second storage capacitor Cs2 and the third storage capacitor Cs3.
- At least one circuit unit may include a high-frequency connecting line Hf-C extending along a first direction X and a high-frequency signal line Hf extending along a second direction Y, and the high-frequency signal line Hf may be connected to the high-frequency connecting line Hf-C through a via to form a mesh connection structure for transmitting a high-frequency signal.
- At least one circuit unit may include a high-voltage connection line VDD-C extending along a first direction X and a high-voltage power line VDD extending along a second direction Y, the high-voltage connection line VDD being connected to a corresponding pixel driving circuit, and the high-voltage power line VDD may be connected to the high-voltage connection line VDD-C through a via to form a mesh connection structure for transmitting a high-voltage power signal.
- the low voltage connection line may include at least a first low voltage connection line VSS-C1 and a second low voltage connection line VSS-C2, and the low voltage power line may include at least a first low voltage power line VSS1 and a second low voltage power line VSS2.
- At least one circuit unit may include a first low-voltage connection line VSS-C1 extending along a first direction X and a first low-voltage power line VSS1 extending along a second direction Y, the first low-voltage power line VSS1 being connected to a first light-emitting diode, and the first low-voltage power line VSS1 being connected to the first low-voltage connection line VSS-C1 through a via to form a mesh connection structure for transmitting a first low-voltage power signal.
- At least one circuit unit may include a second low voltage connection line VSS-C2 extending along a first direction X and a second low voltage power line VSS2 extending along a second direction Y, the second low voltage power line VSS2 being connected to the second light emitting diode and the third light emitting diode, and the second low voltage power line VSS2 may be connected to the second low voltage connection line VSS-C2 through a via to form a mesh connection structure for transmitting a second low voltage power signal.
- Fig. 18A is a schematic diagram of the structure of another first driving transistor of the present disclosure
- Fig. 18B is a schematic diagram of the structure of another second driving transistor of the present disclosure.
- the first driving transistor DTFT1 and the second driving transistor DTFT2 may both include an active layer Active, a gate electrode Gate, a first electrode Source and a second electrode Drain
- the first driving transistor DTFT1 has a first width-to-length ratio
- the second driving transistor DTFT2 has a second width-to-length ratio
- the first width-to-length ratio may be greater than the second width-to-length ratio.
- the gate electrode Gate, the first electrode Source, and the second electrode Drain are all in a strip shape extending along the first direction X
- the active layer Active is all in a strip shape extending along the second direction Y
- the first drive transistor DTFT1 has a first channel length L1 and a first channel width W1
- the second drive transistor DTFT2 has a second channel length L2 and a second channel width W2
- the first channel length L1 and the second channel length L2 may be substantially the same
- the first channel width W1 may be greater than the second channel width W2.
- a ratio of the first channel width W1 to the second channel width W2 may be approximately 3 or so.
- the shapes and sizes of the gate electrodes Gate, the first electrodes Source, and the second electrodes Drain of the first driving transistor DTFT1 and the second driving transistor DTFT2 may be substantially the same, and the width of the active layer Active of the first driving transistor DTFT1 may be greater than the width of the active layer Active of the second driving transistor DTFT2, and the width may be the size of the active layer Active in the first direction X.
- the second channel width of the second driving transistor DTFT2 and the third channel width of the third driving transistor DTFT3 may be substantially the same, and the second channel length of the second driving transistor DTFT2 and the third channel length of the third driving transistor DTFT3 may be substantially the same.
- Fig. 19A is a schematic diagram of the structure of another first storage capacitor of the present disclosure
- Fig. 19B is a schematic diagram of the structure of another second storage capacitor of the present disclosure.
- the first storage capacitor Cs1 has a first area
- the second storage capacitor Cs2 has a second area
- the first area can be larger than the second area.
- the first length M1 of the first storage capacitor Cs1 may be substantially the same as the first length M1 of the second storage capacitor Cs2 , and the second length M2 of the first storage capacitor Cs1 may be greater than the second length M2 of the second storage capacitor Cs2 .
- a ratio of the second length M2 of the first storage capacitor Cs1 to the second length M2 of the second storage capacitor Cs2 may be approximately 1.8.
- the first length M1 of the second storage capacitor Cs2 may be substantially the same as the first length M1 of the third storage capacitor Cs3
- the second length M2 of the second storage capacitor Cs2 may be substantially the same as the second length M2 of the third storage capacitor Cs3 .
- the process of preparing the driving circuit layer of this embodiment may include the following operations.
- Forming a first conductive layer pattern may include: depositing a first conductive film on the substrate on which the aforementioned pattern is formed, and patterning the first conductive film through a patterning process to form a first conductive layer pattern disposed on the substrate, as shown in FIG. 20 .
- the first conductive layer pattern of each circuit unit may include at least a first electrode plate CF1, a second electrode plate CF2, a third electrode plate CF3, and a third bottom gate electrode Gate3-B.
- the shapes of the first electrode plate CF1, the second electrode plate CF2 and the third electrode plate CF3 can be rectangular, the corners of the rectangle can be chamfered, the first electrode plate CF1 and the second electrode plate CF2 can be arranged on the side of the circuit unit in the opposite direction of the second direction Y, the third bottom gate electrode Gate3-B can be arranged on the side of the circuit unit in the second direction Y, and the third electrode plate CF3 can be located between the first electrode plate CF1 and the third bottom gate electrode Gate3-B.
- the area of the third plate CF3 in the first circuit unit Q1 may be greater than the area of the third plate CF3 in the second circuit unit Q2, the area of the third plate CF3 in the first circuit unit Q1 may be greater than the area of the third plate CF3 in the third circuit unit Q3, and the position, shape and size of the third plate CF3 in the second circuit unit Q2 and the third circuit unit Q3 may be substantially the same.
- the first length M1 of the third plate CF3 in the first circuit unit Q1, the second circuit unit Q2, and the third circuit unit Q3 may be substantially the same, and the second length M2 of the third plate CF3 in the first circuit unit Q1 may be greater than the second length M2 of the third plate CF3 in the second circuit unit Q2 and the third circuit unit Q3, so that the area of the third plate CF3 in the first circuit unit Q1 is greater than the area of the third plate CF3 in the second circuit unit Q2 and the third circuit unit Q3.
- the ratio of the second length M2 of the third plate CF3 in the first circuit unit Q1 to the second length M2 of the third plate CF3 in the second and third circuit units Q2 and Q3 may be about 1 to 2.
- the ratio may be about 1.8.
- the shape of the third bottom gate electrode Gate3 -B may be an “L” shape, and the shapes of the third bottom gate electrode Gate3 -B in the first circuit unit Q1 , the second circuit unit Q2 , and the third circuit unit Q3 may be substantially the same.
- the third plates CF3 in one unit row may be connected to each other through plate connection lines, and a plurality of third plates CF3 and a plurality of plate connection lines in one unit row may be an integrated structure connected to each other.
- forming a semiconductor layer pattern may include: sequentially depositing a first insulating film and a first semiconductor film on a substrate, patterning the first semiconductor film through a patterning process to form a first insulating layer covering the first conductive layer, and a semiconductor layer pattern disposed on the first insulating layer, as shown in FIGS. 21A and 21B , where FIG. 21B is a plan view schematic diagram of the semiconductor layer in FIG. 21A .
- the semiconductor layer pattern of each circuit unit may include at least the first active layer AT1 of the first transistor T1 to the eleventh active layer AT11 of the eleventh transistor T11 .
- the first active layer AT1, the second active layer AT2, the fourth active layer AT4, the seventh active layer AT7, the eighth active layer AT8, the ninth active layer AT9 and the tenth active layer AT10 may have a strip shape extending along the first direction X
- the third active layer AT3 and the eleventh active layer AT11 may have a rectangular shape
- the fifth active layer AT5 and the sixth active layer AT6 may have a strip shape extending along the second direction Y.
- the first active layer AT1, the seventh active layer AT7 to the eleventh active layer AT118 may be located between the first electrode plate CF1 and the third electrode plate CF3.
- the eighth active layer AT8 may be located on one side of the first electrode plate CF1 in the second direction Y
- the tenth active layer AT10 may be located on one side of the eighth active layer AT8 in the second direction Y
- the eleventh active layer AT11 may be located on one side of the tenth active layer AT10 in the second direction Y
- the first active layer AT1 and the seventh active layer AT7 may be located on one side of the tenth active layer AT10 in the first direction X
- the first active layer AT1 and the seventh active layer AT7 may be an integral structure connected to each other
- the ninth active layer AT9 may be located on one side of the eleventh active layer AT11 in the first direction X.
- the second active layer AT2 to the sixth active layer AT6 may be located on one side of the third electrode plate CF3 in the second direction Y, the orthographic projection of the third active layer AT3 on the substrate at least partially overlaps with the orthographic projection of the third bottom gate electrode Gate3-B on the substrate, the second active layer AT2 may be located on one side of the third active layer AT3 in the first direction X, the fourth active layer AT4 may be located on one side of the third active layer AT3 in the opposite direction of the first direction X, the fifth active layer AT5 and the sixth active layer AT6 may be located between the third electrode plate CF3 and the third active layer AT3, and the sixth active layer AT6 may be located on one side of the fifth active layer AT5 in the first direction X.
- the width of the third active layer AT3 in the first circuit unit Q1 may be greater than the width of the third active layer AT3 in the second circuit unit Q2 and the third circuit unit Q3, and the width may be the dimension of the third active layer AT3 in the first direction X, so that the width-to-length ratio of the driving transistor in the first circuit unit Q1 is greater than the width-to-length ratio of the driving transistor in the second circuit unit Q2 and the third circuit unit Q3.
- forming the second conductive layer pattern may include: depositing a second insulating film and a second conductive film in sequence on the substrate on which the aforementioned pattern is formed, patterning the second conductive film using a patterning process to form a second insulating layer covering the semiconductor layer, and a second conductive layer pattern disposed on the second insulating layer, as shown in FIGS. 22A and 22B , wherein FIG. 22B is a plan view schematic diagram of the second conductive layer in FIG. 22A .
- the second conductive layer pattern of each circuit unit includes at least: a fourth electrode plate CF4, a fifth electrode plate CF5, a sixth electrode plate CF6, a first scan signal line S1, a second scan signal line S2, a light emitting signal line EM, a first control line CT1, an initial signal line Vint, a high-frequency connecting line Hf-C, a high-voltage connecting line VDD-C, a first low-voltage connecting line VSS-C1, a second low-voltage connecting line VSS-C2, a plurality of gate electrodes, and a plurality of connecting electrodes.
- the shape of the fourth plate CF4, the fifth plate CF5 and the sixth plate CF6 can be a rectangular shape with a notch at one corner.
- the orthographic projection of the fourth plate CF4 on the substrate overlaps at least partially with the orthographic projection of the first plate CF1 on the substrate, and the fourth plate CF4 can be used as another plate of the first capacitor, and the first plate CF1 and the fourth plate CF4 constitute a first capacitor of the pixel driving circuit.
- the orthographic projection of the fifth plate CF5 on the substrate overlaps at least partially with the orthographic projection of the second plate CF2 on the substrate, and the fifth plate CF5 can be used as another plate of the second capacitor, and the second plate CF2 and the fifth plate CF5 constitute a second capacitor of the pixel driving circuit.
- the orthographic projection of the sixth plate CF6 on the substrate overlaps at least partially with the orthographic projection of the third plate CF3 on the substrate, and the sixth plate CF6 can be used as another plate of the storage capacitor, and the third plate CF3 and the sixth plate CF6 constitute a storage capacitor of the pixel driving circuit.
- the position, shape and size of the sixth plate CF6 in the second circuit unit Q2 and the third circuit unit Q3 may be substantially the same, the area of the sixth plate CF6 in the first circuit unit Q1 may be greater than the area of the sixth plate CF6 in the second circuit unit Q2, and the area of the sixth plate CF6 in the first circuit unit Q1 may be greater than the area of the sixth plate CF6 in the third circuit unit Q3, so that the capacitance value of the storage capacitor in the first circuit unit Q1 is greater than the capacitance values of the storage capacitors in the second circuit unit Q2 and the third circuit unit Q3.
- the first length M1 of the sixth plate CF6 in the first circuit unit Q1, the second circuit unit Q2, and the third circuit unit Q3 may be substantially the same, and the second length M2 of the sixth plate CF6 in the first circuit unit Q1 may be greater than the second length M2 of the sixth plate CF6 in the second circuit unit Q2 and the third circuit unit Q3, so that the area of the sixth plate CF6 in the first circuit unit Q1 is greater than the area of the sixth plate CF6 in the second circuit unit Q2 and the third circuit unit Q3.
- the ratio of the second length M2 of the sixth plate CF6 in the first circuit unit Q1 to the second length M2 of the sixth plate CF6 in the second circuit unit Q2 and the third circuit unit Q3 may be about 1 to 2.
- the ratio may be about 1.8.
- the first scan signal line S1, the second scan signal line S2, the light emitting signal line EM, the first control line CT1, the initial signal line Vint, the high frequency connection line Hf-C, the high voltage connection line VDD-C, the first low voltage connection line VSS-C1, and the second low voltage connection line VSS-C may be in a straight line shape or a folded line shape with the main part extending along the first direction X.
- the first scan signal line S1 may be located on one side of the sixth electrode plate CF6 in the second direction Y
- the high frequency connection line Hf-C, the first low voltage connection line VSS-C1, and the second low voltage connection line VSS-C may be located on one side of the fourth electrode plate CF4 and the fifth electrode plate CF5 in the opposite direction of the second direction Y
- the second scan signal line S2 the light emitting signal line EM, the first control line CT1, the initial signal line Vint, and the high voltage connection line VDD-C may be located between the fourth electrode plate CF4 and the sixth electrode plate CF6.
- the first low voltage connection line VSS-C1 may be located on a side of the fourth electrode plate CF4 and the fifth electrode plate CF5 in an opposite direction to the second direction Y
- the second low voltage connection line VSS-C may be located on a side of the first low voltage connection line VSS-C1 away from the fourth electrode plate CF4 and the fifth electrode plate CF5
- the high frequency connection line Hf-C may be located on a side of the second low voltage connection line VSS-C away from the fourth electrode plate CF4 and the fifth electrode plate CF5.
- the high-voltage connection line VDD-C is configured to be connected to a subsequently formed high-voltage power line to form a mesh-like connection structure.
- the first low-voltage connection line VSS-C1 is configured to be connected to a subsequently formed first low-voltage power line to form a mesh-like connection structure.
- the second low-voltage connection line VSS-C2 is configured to be connected to a subsequently formed second low-voltage power line to form a mesh-like connection structure.
- the high-frequency connection line Hf-C is configured to be connected to a subsequently formed high-frequency signal line to form a mesh-like connection structure.
- the initial signal line Vint may be located on one side of the fourth electrode plate CF4 and the fifth electrode plate CF5 in the second direction Y
- the first control line CT1 may be located on one side of the initial signal line Vint in the second direction Y
- the second scan signal line S2 may be located on one side of the first control line CT1 in the second direction Y
- the high-voltage connection line VDD-C may be located on one side of the second scan signal line S2 in the second direction Y
- the light-emitting signal line EM may be located on one side of the second direction Y of the high-voltage connection line VDD-C.
- the second scan signal line S2 may be multiplexed as a second control line to control turning on and off of the tenth transistor T10 .
- the multiple gate electrodes of each circuit unit may include at least a first gate electrode Gate1, a second gate electrode Gate2, a third top gate electrode Gate3-T, a fourth gate electrode Gate4, a fifth gate electrode Gate5, a sixth gate electrode Gate6, a seventh gate electrode Gate7, an eighth gate electrode Gate8, a ninth gate electrode Gate9, a tenth gate electrode Gate10 and an eleventh gate electrode Gate11.
- the second gate electrode Gate2 and the fourth gate electrode Gate4 may be disposed on a side of the first scan signal line S1 close to the sixth electrode plate CF6.
- the second gate electrode Gate2 serves as the gate electrode of the second transistor T2, and the orthographic projection of the second gate electrode Gate2 on the substrate at least partially overlaps with the orthographic projection of the second active layer on the substrate.
- the fourth gate electrode Gate4 serves as the gate electrode of the fourth transistor T4, and the orthographic projection of the fourth gate electrode Gate4 on the substrate at least partially overlaps with the orthographic projection of the fourth active layer on the substrate.
- the first scan signal line S1, the second gate electrode Gate2, and the fourth gate electrode Gate4 may be an integrated structure connected to each other.
- the first gate electrode Gate1, the seventh gate electrode Gate7, and the tenth gate electrode Gate10 may be disposed on a side of the second scan signal line S2 away from the initial signal line Vint.
- the first gate electrode Gate1 serves as the gate electrode of the first transistor T1
- the orthographic projection of the first gate electrode Gate1 on the substrate at least partially overlaps with the orthographic projection of the first active layer on the substrate
- the seventh gate electrode Gate7 serves as the gate electrode of the seventh transistor T7
- the orthographic projection of the seventh gate electrode Gate7 on the substrate at least partially overlaps with the orthographic projection of the seventh active layer on the substrate
- the tenth gate electrode Gate10 serves as the gate electrode of the tenth transistor T10, and the orthographic projection of the tenth gate electrode Gate10 on the substrate at least partially overlaps with the orthographic projection of the tenth active layer on the substrate.
- the second scan signal line S2, the first gate electrode Gate1, the seventh gate electrode Gate7, and the tenth gate electrode Gate10 may be an
- the eighth gate electrode Gate8 may be disposed on a side of the first control line CT1 close to the initial signal line Vint.
- the eighth gate electrode Gate8 serves as a gate electrode of the eighth transistor T8, and the orthographic projection of the eighth gate electrode Gate8 on the substrate at least partially overlaps with the orthographic projection of the eighth active layer on the substrate.
- the first control line CT1 and the eighth gate electrode Gate8 may be an integral structure connected to each other.
- the third top gate electrode Gate3-T can serve as the top gate electrode of the third transistor T3, the orthographic projection of the third top gate electrode Gate3-T on the substrate at least partially overlaps with the orthographic projection of the third active layer on the substrate, and the orthographic projection of the third top gate electrode Gate3-T on the substrate at least partially overlaps with the orthographic projection of the third bottom gate electrode Gate3-B on the substrate.
- a third gate block 103 is disposed on one side of the third top gate electrode Gate3-T close to the sixth electrode plate CF6, and the shape of the third gate block 103 may be a folded line extending along the second direction Y, and a first end of the third gate block 103 is connected to the third top gate electrode Gate3-T, and a second end of the third gate block 103 is connected to the sixth electrode plate CF6.
- the third top gate electrode Gate3-T, the sixth electrode plate CF6, and the third gate block 103 may be an integrated structure connected to each other.
- the fifth gate electrode Gate5 may be used as a gate electrode of the fifth transistor T5, and the orthographic projection of the fifth gate electrode Gate5 on the substrate at least partially overlaps with the orthographic projection of the fifth active layer on the substrate.
- the fifth gate electrode Gate5 may be located between the light emitting signal line EM and the third top gate electrode Gate3-T, and located on one side of the third gate block 103 in the opposite direction of the first direction X, and the shape of the fifth gate electrode Gate5 may be comb-shaped.
- a fifth gate block 105 is disposed on one side of the fifth gate electrode Gate5 close to the light emitting signal line EM, and the fifth gate block 105 may be in the shape of a strip extending along the second direction Y.
- a first end of the fifth gate block 105 is connected to the fifth gate electrode Gate5, and a second end of the fifth gate block 105 is connected to the light emitting signal line EM, thereby realizing that the light emitting signal line EM can control the conduction or disconnection of the fifth transistor T5.
- the light emitting signal line EM, the fifth gate electrode Gate5, and the fifth gate block 105 may be an integrated structure connected to each other.
- the sixth gate electrode Gate6 may be used as a gate electrode of the sixth transistor T6, and the orthographic projection of the sixth gate electrode Gate6 on the substrate at least partially overlaps with the orthographic projection of the sixth active layer on the substrate.
- the sixth gate electrode Gate6 may be located between the light emitting signal line EM and the third top gate electrode Gate3-T, and located on one side of the third gate block 103 in the first direction X, and the shape of the sixth gate electrode Gate6 may be a comb shape.
- a sixth gate block 106 is disposed on a side of the sixth gate electrode Gate6 close to the light-emitting signal line EM.
- the shape of the sixth gate block 106 may be a strip shape extending along the second direction Y.
- the first end of the sixth gate block 106 is connected to the sixth gate electrode Gate6.
- the second end of the sixth gate block 106 is close to the light-emitting signal line EM.
- the sixth gate block 106 is configured to be connected to a sixty-second connecting electrode formed subsequently.
- the ninth gate electrode Gate9 may serve as a gate electrode of the ninth transistor T9, and an orthographic projection of the ninth gate electrode Gate9 on the substrate at least partially overlaps an orthographic projection of the ninth active layer on the substrate.
- the ninth gate electrode Gate9 may be located between the second scan signal line S2 and the high-voltage connection line VDD-C, and the shape of the ninth gate electrode Gate9 may be a strip extending along the second direction Y.
- the eleventh gate electrode Gate11 may serve as a gate electrode of the eleventh transistor T11, and the orthographic projection of the eleventh gate electrode Gate11 on the substrate at least partially overlaps with the orthographic projection of the eleventh active layer on the substrate.
- the eleventh gate electrode Gate11 may be between the second scan signal line S2 and the high-voltage connection line VDD-C, and the shape of the eleventh gate electrode Gate11 may be a folded line extending along the second direction Y.
- the plurality of connection electrodes of each circuit unit includes at least a forty-first connection electrode CO41 , a forty-second connection electrode CO42 , a forty-third connection electrode CO43 , a forty-fourth connection electrode CO44 , and a forty-fifth connection electrode CO45 .
- the forty-first connection electrode CO41 may be in the shape of a strip extending along the first direction X and may be disposed between the second scan signal line S2 and the high-voltage connection line VDD-C.
- the forty-first connection electrode CO41 is configured to be connected to a subsequently formed high-frequency signal line and a sixty-third connection electrode.
- the forty-second connection electrode CO42 may be in the shape of a line extending along the first direction X and may be disposed between the second scan signal line S2 and the high voltage connection line VDD-C.
- the forty-second connection electrode CO42 is configured to be connected to the sixty-first connection electrode and the sixty-second connection electrode formed subsequently.
- the forty-third connecting electrode CO43 may be in the shape of a line extending along the first direction X, and may be disposed on a side of the high-frequency connecting line Hf-C away from the fourth electrode plate CF4 and the fifth electrode plate CF5, and the forty-third connecting electrode CO43 is configured to be connected to the anode connecting block 12 of the second circuit unit Q2 formed subsequently and the fifty-second connecting electrode of the second circuit unit Q2.
- the forty-fourth connection electrode CO44 may be in the shape of a line extending along the first direction X, and may be disposed on a side of the forty-third connection electrode CO43 away from the high-frequency connection line Hf-C, and the forty-fourth connection electrode CO44 is configured to be connected to the anode connection block 12 of the third circuit unit Q3 formed subsequently and the fifty-second connection electrode of the third circuit unit Q3.
- the forty-fifth connection electrode CO45 may be rectangular in shape and may be disposed on one side of the forty-second connection electrode CO42 in the opposite direction of the second direction Y.
- the forty-fifth connection electrode CO45 is configured to be connected to a sixty-fourth connection electrode formed subsequently.
- the second conductive layer can be used as a shield to perform conductorization on the semiconductor layer.
- the semiconductor layer in the area shielded by the second conductive layer forms the channel region of the first transistor T1 to the twelfth transistor T12, and the semiconductor layer in the area not shielded by the first conductive layer is conductorized, that is, the first area and the second area of the first transistor T1 to the eleventh transistor T11 are both conductorized.
- forming the third insulating layer pattern may include: depositing a third insulating film on the substrate on which the aforementioned pattern is formed, patterning the third insulating film using a patterning process to form a third insulating layer covering the second conductive layer, wherein a plurality of vias are disposed on the third insulating layer, as shown in FIG. 23 .
- the plurality of vias on the third insulating layer in each circuit unit includes at least eleventh to twenty-fourth vias V11 to V24 , twenty-seventh to V27 to V34 , and seventy-seventh to V77 to V99 .
- the structures of the eleventh to twenty-fourth via holes V11 to V24 and the twenty-seventh to V27 to V34 are substantially the same as those of the aforementioned embodiment, wherein the eleventh to twenty-third via holes V11 and V23 are shared via holes.
- the orthographic projections of the seventy-seventh via V77 and the seventy-eighth via V78 on the substrate are located within the range of the orthographic projections of the eleventh gate electrode Gate11 on the substrate, the third insulating layer in the seventy-seventh via V77 and the seventy-eighth via V78 is etched away to expose the surface of the eleventh gate electrode Gate11, and the seventy-seventh via V77 and the seventy-eighth via V78 are configured to connect the subsequently formed fifty-ninth connecting electrode and the sixtieth connecting electrode to the eleventh gate electrode Gate11 through the above-mentioned vias, respectively.
- the orthographic projections of the seventy-ninth via hole V79 and the eightieth via hole V80 on the substrate are located within the range of the orthographic projections of the forty-second connecting electrode CO42 on the substrate, the third insulating layer in the seventy-ninth via hole V79 and the eightieth via hole V80 is etched away to expose the surfaces of the first end and the second end of the forty-second connecting electrode CO42, respectively, and the seventy-ninth via hole V79 and the eightieth via hole V80 are configured to connect the subsequently formed sixty-first connecting electrode and the sixty-second connecting electrode to the forty-second connecting electrode CO42 through the above-mentioned via holes, respectively.
- the orthographic projection of the eighty-first via hole V81 on the substrate is located within the range of the orthographic projection of the luminous signal line EM on the substrate, the third insulating layer in the eighty-first via hole V81 is etched away to expose the surface of the luminous signal line EM, and the eighty-first via hole V81 is configured to enable the subsequently formed sixty-fourth connecting electrode to be respectively connected to the luminous signal line EM through the via hole.
- the orthographic projections of the eighty-second via V82, the eighty-third via V83 and the eighty-fourth via V84 on the substrate are respectively located within the range of the orthographic projections of the initial signal line Vint on the substrate, the third insulating layers in the eighty-second via V82, the eighty-third via V83 and the eighty-fourth via V84 are etched away to expose the surfaces of the initial signal line Vint, respectively, and the eighty-second via V82, the eighty-third via V83 and the eighty-fourth via V84 are configured to connect the subsequently formed seventh electrode plate, eighth electrode plate and fifty-first connecting electrode to the initial signal line Vint through the above-mentioned vias, respectively.
- the orthographic projection of the eighty-fifth via V85 on the substrate is located within the range of the orthographic projection of the high-frequency connecting line Hf-C on the substrate, the third insulating layer in the eighty-fifth via V85 is etched away to expose the surface of the high-frequency connecting line Hf-C, and the eighty-fifth via V85 is configured to connect a subsequently formed high-frequency signal line to the high-frequency connecting line Hf-C through the via.
- the orthographic projection of the eighty-sixth via V86 on the substrate is located within the range of the orthographic projection of the high-voltage connecting line VDD-C on the substrate, the third insulating layer in the eighty-sixth via V86 is etched away to expose the surface of the high-voltage connecting line VDD-C, and the eighty-sixth via V86 is configured to connect the subsequently formed ninth electrode plate to the high-voltage connecting line VDD-C through the via.
- the orthographic projection of the eighty-seventh via V87 on the substrate is located within the range of the orthographic projection of the first electrode plate CF1 on the substrate, the third insulating layer, the second insulating layer and the first insulating layer in the eighty-seventh via V87 are etched away to expose the surface of the first electrode plate CF1, and the eighty-seventh via V87 is configured to connect the subsequently formed seventh electrode plate to the first electrode plate CF1 through the via.
- the orthographic projection of the eighty-eighth via V88 on the substrate is located within the range of the orthographic projection of the second electrode plate CF2 on the substrate, the third insulating layer, the second insulating layer and the first insulating layer in the eighty-eighth via V88 are etched away to expose the surface of the second electrode plate CF2, and the eighty-eighth via V88 is configured to connect the subsequently formed eighth electrode plate to the second electrode plate CF2 through the via.
- the orthographic projection of the eighty-ninth via V89 on the substrate is located within the range of the orthographic projection of the third electrode plate CF3 on the substrate, the third insulating layer, the second insulating layer and the first insulating layer in the eighty-ninth via V89 are etched away to expose the surface of the third electrode plate CF3, and the eighty-ninth via V89 is configured to connect the subsequently formed ninth electrode plate to the third electrode plate CF3 through the via.
- the orthographic projection of the ninetieth via hole V90 on the substrate is located within the range of the orthographic projection of the fourth electrode plate CF4 on the substrate, the third insulating layer in the ninetieth via hole V90 is etched away to expose the surface of the fourth electrode plate CF4, and the ninetieth via hole V90 is configured to connect the fifty-eighth connecting electrode formed subsequently to the fourth electrode plate CF4 through the via hole.
- the orthographic projection of the ninety-first via hole V91 on the substrate is within the range of the orthographic projection of the fifth electrode plate CF5 on the substrate, the third insulating layer in the ninety-first via hole V91 is etched away to expose the surface of the fifth electrode plate CF5, and the ninety-first via hole V91 is configured to connect the subsequently formed fifty-ninth connecting electrode to the fifth electrode plate CF5 through the via hole.
- the orthographic projection of the ninety-second via hole V92 on the substrate is located within the range of the orthographic projection of the sixth electrode plate CF6 on the substrate, the third insulating layer in the ninety-second via hole V92 is etched away to expose the surface of the sixth electrode plate CF6, and the ninety-second via hole V92 is configured to connect the subsequently formed fifty-seventh connecting electrode to the sixth electrode plate CF6 through the via hole.
- the orthographic projection of the ninety-third via hole V93 on the substrate is located within the range of the orthographic projection of the first end of the forty-first connecting electrode CO41 on the substrate, the third insulating layer in the ninety-third via hole V93 is etched away to expose the surface of the first end of the forty-first connecting electrode CO41, and the ninety-third via hole V93 is configured to connect a subsequently formed high-frequency connecting line to the forty-first connecting electrode CO41 through the via hole.
- the orthographic projection of the ninety-fourth via hole V94 on the substrate is located within the range of the orthographic projection of the second end of the forty-first connecting electrode CO41 on the substrate, the third insulating layer in the ninety-fourth via hole V94 is etched away to expose the surface of the second end of the forty-first connecting electrode CO41, and the ninety-fourth via hole V94 is configured to connect the subsequently formed sixty-third connecting electrode to the second end of the forty-first connecting electrode CO41 through the via hole.
- the orthographic projection of the ninety-fifth via V95 on the substrate is located within the range of the orthographic projection of the third top gate electrode Gate3-T on the substrate, the third insulating layer in the ninety-fifth via V95 is etched away to expose the surface of the third top gate electrode Gate3-T, and the ninety-fifth via V95 is configured to connect the subsequently formed fifty-fifth connecting electrode to the third top gate electrode Gate3-T through the via.
- the orthographic projection of the ninety-sixth via V96 on the substrate is located within the range of the orthographic projection of the third bottom gate electrode Gate3-B on the substrate, the third insulating layer, the second insulating layer and the first insulating layer in the ninety-sixth via V96 are etched away to expose the surface of the third bottom gate electrode Gate3-B, and the ninety-sixth via V96 is configured to connect the subsequently formed fifty-fifth connecting electrode to the third bottom gate electrode Gate3-B through the via.
- the orthographic projection of the ninety-seventh via V97 on the substrate is located within the range of the orthographic projection of the sixth gate block 106 of the sixth gate electrode Gate6 on the substrate, the third insulating layer in the ninety-seventh via V97 is etched away to expose the surface of the sixth gate block 106, and the ninety-seventh via V97 is configured to connect the subsequently formed sixty-second connecting electrode to the sixth gate electrode Gate6 through the via.
- the orthographic projection of the ninety-eight via hole V98 on the substrate is located within the range of the orthographic projection of the ninth gate electrode Gate9 on the substrate, the third insulating layer in the ninety-eight via hole V98 is etched away to expose the surface of the ninth gate electrode Gate9, and the ninety-eighth via hole V98 is configured to connect the subsequently formed fifty-eighth connecting electrode to the ninth gate electrode Gate9 through the via hole.
- the orthographic projection of the ninety-ninth via hole V99 on the substrate is within the range of the orthographic projection of the forty-fifth connecting electrode CO45 on the substrate, the third insulating layer in the ninety-ninth via hole V99 is etched away to expose the surface of the forty-fifth connecting electrode CO45, and the ninety-ninth via hole V99 is configured to connect the subsequently formed sixty-fourth connecting electrode to the forty-fifth connecting electrode CO45.
- the plurality of via holes on the third insulating layer may further include 101st to 106th via holes V101 to V106.
- the one-hundred-first via V101 can be arranged in the second circuit unit Q2, the orthographic projection of the one-hundred-first via V101 on the substrate is located within the range of the orthographic projection of the first low-voltage connecting line VSS-C1 on the substrate, the third insulating layer in the one-hundred-first via V101 is etched away to expose the surface of the first low-voltage connecting line VSS-C1, and the one-hundred-first via V101 is configured to connect the seventy-first connecting electrode formed subsequently to the first low-voltage connecting line VSS-C1 through the via.
- the one-hundred-second via V102 can be arranged in the first circuit unit Q1, the orthographic projection of the one-hundred-second via V102 on the substrate is located within the range of the orthographic projection of the second low-voltage connecting line VSS-C2 on the substrate, the third insulating layer in the one-hundred-second via V102 is etched away to expose the surface of the second low-voltage connecting line VSS-C2, and the one-hundred-second via V102 is configured to connect the seventy-second connecting electrode formed subsequently to the second low-voltage connecting line VSS-C2 through the via.
- the orthographic projection of the one-hundred and third via hole V103 on the substrate is located within the range of the orthographic projection of the first end of the forty-third connecting electrode CO43 on the substrate, the third insulating layer in the one-hundred and third via hole V103 is etched away to expose the surface of the first end of the forty-third connecting electrode CO43, and the one-hundred and third via hole V103 is configured to connect the anode connecting block of the second circuit unit Q2 formed subsequently to the first end of the forty-third connecting electrode CO43 through the via hole.
- the orthographic projection of the 104th via hole V104 on the substrate is located within the range of the orthographic projection of the second end of the 43rd connecting electrode CO43 on the substrate, the third insulating layer in the 104th via hole V104 is etched away to expose the surface of the second end of the 43rd connecting electrode CO43, and the 104th via hole V104 is configured to connect the 52nd connecting electrode of the subsequently formed second circuit unit Q2 to the second end of the 43rd connecting electrode CO43 through the via hole.
- the orthographic projection of the one-hundred-and-fifth via hole V105 on the substrate is located within the range of the orthographic projection of the first end of the forty-fourth connecting electrode CO44 on the substrate, the third insulating layer in the one-hundred-and-fifth via hole V105 is etched away to expose the surface of the first end of the forty-fourth connecting electrode CO44, and the one-hundred-and-fifth via hole V105 is configured to connect the anode connecting block of the subsequently formed third circuit unit Q3 to the first end of the forty-fourth connecting electrode CO44 through the via hole.
- the orthographic projection of the one-hundred-sixth via hole V106 on the substrate is located within the range of the orthographic projection of the second end of the forty-fourth connecting electrode CO44 on the substrate, the third insulating layer in the one-hundred-sixth via hole V106 is etched away to expose the surface of the second end of the forty-fourth connecting electrode CO44, and the one-hundred-sixth via hole V106 is configured to connect the fifty-second connecting electrode of the third circuit unit Q3 formed subsequently to the second end of the forty-fourth connecting electrode CO44 through the via hole.
- forming the third conductive layer pattern may include: depositing a third conductive film on the substrate on which the aforementioned pattern is formed, and patterning the third conductive film using a patterning process to form a third conductive layer pattern disposed on the third insulating layer, as shown in FIGS. 24A and 24B , where FIG. 24B is a plan view schematic diagram of the third conductive layer in FIG. 24A .
- the third conductive layer pattern of each circuit unit includes at least: a data signal line DataI, a high-frequency signal line Hf, a seventh electrode plate CF7, an eighth electrode plate CF8, a ninth electrode plate CF9, an anode connection block 12, and a fifty-first connection electrode CO51 to a sixty-fourth connection electrode CO64.
- the shape of the data signal line DataI can be a line shape in which the main part extends along the second direction Y, and can be located on the side opposite to the first direction X of the circuit unit.
- the data signal line DataI is connected to the first area of the fourth active layer through the seventeenth via V17 on the one hand, and is connected to the first area of the eighth active layer through the twenty-seventh via V27 on the other hand, and is connected to the first area of the tenth active layer through the thirty-first via V31 on the other hand, thereby realizing that the data signal line DataI writes the data signal into the first electrode of the fourth transistor T4, the first electrode of the eighth transistor T8, and the first electrode of the tenth transistor T10 respectively.
- the data signal line DataI may be multiplexed as a duration signal line DataT.
- the data signal line DataI is used to provide a duration signal to the first electrode of the eighth transistor T8 and the first electrode of the tenth transistor T10, respectively.
- the shape of the high-frequency signal line Hf can be a line shape in which the main part extends along the second direction Y, and can be located on the side opposite to the first direction X of the data signal line DataI.
- the high-frequency signal line Hf is connected to the first end of the forty-first connecting electrode CO41 through the ninety-third via hole V93, and on the other hand, the high-frequency signal line Hf is connected to the high-frequency connecting line Hf-C through the eighty-fifth via hole V85, thereby realizing the connection between the high-frequency connecting line Hf-C extending along the first direction X and the high-frequency signal line Hf extending along the second direction Y, forming a mesh connection structure for transmitting high-frequency signals.
- the shape of the seventh plate CF7 can be rectangular, and the orthographic projection of the seventh plate CF7 on the substrate overlaps at least partially with the orthographic projection of the fourth plate CF4 on the substrate.
- the seventh plate CF7 is connected to the first plate CF1 through the eighty-seventh via hole V87, and on the other hand, the seventh plate CF7 is connected to the initial signal line Vint through the eighty-second via hole V82.
- the seventh plate CF7 can be used as another plate of the first capacitor, and the fourth plate CF4 and the seventh plate CF7 constitute another first capacitor of the pixel driving circuit.
- the seventh plate CF7 is connected to the first plate CF1 through the via hole, the first plate CF1 and the seventh plate CF7 have the same initial signal potential, so that the first plate CF1, the fourth plate CF4 and the third plate 97 constitute a first capacitor of a parallel structure, the first plate CF1 and the fourth plate CF4 constitute a first capacitor of the pixel driving circuit, the fourth plate CF4 and the seventh plate CF7 constitute another first capacitor of the pixel driving circuit, and the two first capacitors are connected in parallel.
- the shape of the eighth plate CF8 can be rectangular, and the orthographic projection of the eighth plate CF8 on the substrate overlaps at least partially with the orthographic projection of the fifth plate CF5 on the substrate.
- the eighth plate CF8 is connected to the second plate CF2 through the eighty-eighth via hole V88, and on the other hand, the eighth plate CF8 is connected to the initial signal line Vint through the eighty-third via hole V83.
- the eighth plate CF8 can be used as another plate of the second capacitor, and the fifth plate CF5 and the eighth plate CF8 constitute another second capacitor of the pixel driving circuit.
- the eighth plate CF8 is connected to the second plate CF2 through the via hole, the second plate CF2 and the eighth plate CF8 have the same initial signal potential, so that the second plate CF2, the fifth plate CF5 and the eighth plate CF8 constitute a second capacitor of a parallel structure, the second plate CF2 and the fifth plate CF5 constitute a second capacitor of the pixel driving circuit, the fifth plate CF5 and the eighth plate CF8 constitute another second capacitor of the pixel driving circuit, and the two second capacitors are connected in parallel.
- the shape of the ninth electrode plate CF9 can be rectangular, and the orthographic projection of the ninth electrode plate CF9 on the substrate overlaps at least partially with the orthographic projection of the sixth electrode plate CF6 on the substrate.
- the ninth electrode plate CF9 is connected to the third electrode plate CF3 through the eighty-ninth via hole V89, and on the other hand, the ninth electrode plate CF9 is connected to the high-voltage connection line VDD-C through the eighty-sixth via hole V86.
- the ninth electrode plate CF9 can be used as another electrode plate of the storage capacitor, and the sixth electrode plate CF6 and the ninth electrode plate CF9 constitute another storage capacitor of the pixel driving circuit.
- the ninth electrode plate CF9 is connected to the third electrode plate CF3 through the via hole, the third electrode plate CF3 and the ninth electrode plate CF9 have the same first power supply potential, so that the third electrode plate CF3, the sixth electrode plate CF6 and the ninth electrode plate CF9 constitute a storage capacitor of a parallel structure, the third electrode plate CF3 and the sixth electrode plate CF6 constitute a storage capacitor of the pixel driving circuit, the sixth electrode plate CF6 and the ninth electrode plate CF9 constitute another storage capacitor of the pixel driving circuit, and the two storage capacitors are connected in parallel.
- the position, shape, and size of the ninth plate CF9 in the second circuit unit Q2 and the third circuit unit Q3 may be substantially the same, but different from the shape and size of the ninth plate CF9 in the first circuit unit Q1.
- the area of the ninth plate CF9 in the first circuit unit Q1 may be greater than the areas of the ninth plate CF9 in the second circuit unit Q2 and the third circuit unit Q3, so that the capacitance value of the storage capacitor in the first circuit unit Q1 is greater than the capacitance value of the storage capacitor in the second circuit unit Q2 and the third circuit unit Q3.
- the first length M1 of the ninth plate CF9 in the first circuit unit Q1, the second circuit unit Q2, and the third circuit unit Q3 may be substantially the same, and the second length M2 of the ninth plate CF9 in the first circuit unit Q1 may be greater than the second length M2 of the ninth plate CF9 in the second circuit unit Q2 and the third circuit unit Q3, so that the area of the ninth plate CF9 in the first circuit unit Q1 is greater than the area of the ninth plate CF9 in the second circuit unit Q2 and the third circuit unit Q3.
- the ratio of the second length M2 of the ninth plate CF9 in the first circuit unit Q1 to the second length M2 of the ninth plate CF9 in the second circuit unit Q2 and the third circuit unit Q3 may be about 1 to 2.
- the ratio may be about 1.8.
- the shape of the fifty-first connection electrode CO51 can be a strip shape extending along the second direction Y, the first end of the fifty-first connection electrode CO51 is connected to the first area of the first active layer (also the first area of the seventh active layer) through the eleventh via hole V11, and the second end of the fifty-first connection electrode CO51 is connected to the initial signal line Vint through the eighty-fourth via hole V84, thereby realizing that the initial signal line Vint writes the initial signal into the first electrode of the first transistor T1 and the first electrode of the seventh transistor T7.
- the shape of the fifty-second connection electrode CO52 can be a strip shape extending along the second direction Y, the first end of the fifty-second connection electrode CO52 is connected to the second area of the sixth active layer through the twenty-second via hole V22, and the second end of the fifty-second connection electrode CO52 is connected to the second area of the seventh active layer through the twenty-fourth via hole V24, so that the fifty-second connection electrode CO52 makes the second electrode of the sixth transistor T6 and the second electrode of the seventh transistor T7 have the same potential (i.e., the second node N2 of the pixel driving circuit).
- the anode connection block 12 of the first circuit unit Q1 can be set on a side of the fifty-second connection electrode CO52 of the first circuit unit Q1 away from the ninth electrode plate CF9, and connected to the fifty-second connection electrode CO52 of the first circuit unit Q1 through a connecting wire, thereby realizing the connection between the anode connection block 12 and the fifty-second connection electrode CO52 in the first circuit unit Q1.
- the anode connection block 12 of the second circuit unit Q2 can be arranged on a side in the opposite direction of the first direction X of the forty-third connection electrode CO43, and the anode connection block 12 is connected to the first end of the forty-third connection electrode CO43 through the one-hundred-and-third via hole V103, and the fifty-second connection electrode CO52 of the second circuit unit Q2 is connected to the second end of the forty-third connection electrode CO43 through the one-hundred-and-fourth via hole V104, thereby realizing the connection between the anode connection block 12 and the fifty-second connection electrode CO52 in the second circuit unit Q2.
- the anode connection block 12 of the third circuit unit Q3 can be arranged on a side in the opposite direction of the first direction X of the forty-fourth connection electrode CO44, and the anode connection block 12 is connected to the first end of the forty-fourth connection electrode CO44 through the one-hundred-and-fifth via hole V105, and the fifty-second connection electrode CO52 of the third circuit unit Q3 is connected to the second end of the forty-fourth connection electrode CO44 through the one-hundred-and-sixth via hole V106, thereby realizing the connection between the anode connection block 12 and the fifty-second connection electrode CO52 in the third circuit unit Q3.
- the shape of the fifty-third connecting electrode CO53 is a zigzag line, the first end of the fifty-third connecting electrode CO53 is connected to the second area of the second active layer through the fourteenth via hole V14, the second end of the fifty-third connecting electrode CO53 is connected to the second area of the third active layer through the sixteenth via hole V16, and the portion between the first end and the second end of the fifty-third connecting electrode CO53 is connected to the first area of the sixth active layer through the twenty-first via hole V21.
- the fifty-third connecting electrode CO53 enables the second electrode of the second transistor T2, the second electrode of the third transistor T3, and the first electrode of the sixth transistor T6 to have the same potential (i.e., the fourth node N4 of the pixel driving circuit).
- the shape of the fifty-fourth connecting electrode CO54 can be a zigzag line, the first end of the fifty-fourth connecting electrode CO54 is connected to the first area of the third active layer through the fifteenth via hole V15, the second end of the fifty-fourth connecting electrode CO54 is connected to the second area of the fifth active layer through the twentieth via hole V20, and the portion between the first end and the second end of the fifty-fourth connecting electrode CO54 is connected to the second area of the fourth active layer through the eighteenth via hole V18.
- the fifty-fourth connecting electrode CO54 enables the first electrode of the third transistor T3, the second electrode of the fourth transistor T4 and the second electrode of the fifth transistor T5 to have the same potential (i.e., the fifth node N5 of the pixel driving circuit).
- the shape of the fifty-fifth connection electrode CO55 may be a zigzag shape, the first end of the fifty-fifth connection electrode CO55 is connected to the first region of the second active layer through the thirteenth via hole V13, the second end of the fifty-fifth connection electrode CO55 is connected to the third top gate electrode Gate3-T through the ninety-fifth via hole V95, and the portion between the first end and the second end of the fifty-fifth connection electrode CO55 is connected to the third bottom gate electrode Gate3-B through the ninety-sixth via hole V96.
- the fifty-fifth connection electrode CO55 connects the third top gate electrode Gate3-T and the third bottom gate electrode Gate3-B to each other, so that the first electrode of the second transistor T2 and the gate electrode of the third transistor T3 are connected to each other.
- the shape of the fifty-sixth connecting electrode CO56 can be a zigzag line, the first end of the fifty-sixth connecting electrode CO56 is connected to the first region of the fifth active layer through the nineteenth via hole V19, the second end of the fifty-sixth connecting electrode CO56 is connected to the ninth electrode plate CF9, and the fifty-sixth connecting electrode CO56 enables the first electrode of the fifth transistor T5 and the ninth electrode plate CF9 to have the same potential.
- the fifty-sixth connection electrode CO56 and the ninth electrode plate CF9 may be an integral structure connected to each other.
- the shape of the fifty-seventh connection electrode CO57 may be a zigzag extending along the second direction Y, the first end of the fifty-seventh connection electrode CO57 is connected to the second region of the first active layer through the twelfth via hole V12, the second end of the fifty-seventh connection electrode CO57 is connected to the sixth electrode plate CF6 through the ninety-second via hole V92, and the fifty-seventh connection electrode CO57 enables the second electrode of the first transistor T1 and the sixth electrode plate CF6 to have the same potential.
- the sixth electrode plate CF6 and the third gate block 103 may be an integrated structure connected to each other, the second electrode of the first transistor T1 is connected to the sixth electrode plate CF6, and the first electrode of the second transistor T2 is connected to the gate electrode of the third transistor T3, the fifty-fifth connection electrode CO55 and the fifty-seventh connection electrode CO57 enable the second electrode of the first transistor T1, the first electrode of the second transistor T2, the gate electrode of the third transistor T3 and the sixth electrode plate CF6 to have the same potential (i.e., the third node N3 of the pixel driving circuit).
- the shape of the fifty-eighth connecting electrode CO58 can be a zigzag line extending along the second direction Y, the first end of the fifty-eighth connecting electrode CO58 is connected to the ninth gate electrode Gate9 through the ninety-eighth via hole V98, the second end of the fifty-eighth connecting electrode CO58 is connected to the fourth electrode plate CF4 through the ninetieth via hole V90, and the portion between the first end and the second end of the fifty-eighth connecting electrode CO58 is connected to the second region of the eighth active layer through the twenty-eighth via hole V28.
- the fifty-eighth connecting electrode CO58 makes the second electrode of the eighth transistor T8, the gate electrode of the ninth transistor T9 and the fourth electrode plate CF4 have the same potential (i.e., the sixth node N6 of the pixel driving circuit).
- the shape of the fifty-ninth connecting electrode CO59 can be a strip shape extending along the second direction Y, the first end of the fifty-ninth connecting electrode CO59 is connected to the eleventh gate electrode Gate11 through the seventy-seventh via hole V77, the second end of the fifty-ninth connecting electrode CO59 is connected to the fifth electrode plate CF5 through the ninety-first via hole V91, and the fifty-ninth connecting electrode CO59 enables the gate electrode of the eleventh transistor T11 and the fifth electrode plate CF5 to have the same potential.
- the shape of the sixtieth connection electrode CO60 may be a strip shape extending along the first direction X, the first end of the sixtieth connection electrode CO60 is connected to the second region of the tenth active layer through the thirty-second via hole V32, the second end of the sixtieth connection electrode CO60 is connected to the eleventh gate electrode Gate11 through the seventy-eighth via hole V78, and the sixtieth connection electrode CO60 enables the gate electrode of the eleventh transistor T11 and the second electrode of the tenth transistor T10 to have the same potential.
- the fifty-ninth connection electrode CO59 and the sixtieth connection electrode CO60 enable the second electrode of the tenth transistor T10, the gate electrode of the eleventh transistor T11, and the fifth electrode plate CF5 to have the same potential (i.e., the seventh node N7 of the pixel driving circuit).
- the shape of the sixty-first connection electrode CO61 may be a strip shape extending along the first direction X, the first end of the sixty-first connection electrode CO61 is connected to the second region of the eleventh active layer through the thirty-fourth via hole V34, the second end of the sixty-first connection electrode CO61 is connected to the first end of the forty-second connection electrode CO42 through the seventy-ninth via hole V79, the portion between the first end and the second end of the sixty-first connection electrode CO61 is connected to the second region of the ninth active layer through the thirtieth via hole V30, the sixty-first connection electrode CO61, the sixty-first connection electrode CO61 connects the second electrode of the ninth transistor T9 and the second electrode of the eleventh transistor T11 to each other.
- the sixty-second connection electrode CO62 may be in a strip shape extending along the second direction Y, a first end of the sixty-second connection electrode CO62 is connected to a second end of the forty-second connection electrode CO42 through an eightieth via hole V80, and a second end of the sixty-second connection electrode CO62 is connected to the sixth gate block 106 through a ninety-seventh via hole V97.
- the sixth gate block 106 is connected to the sixth gate electrode Gate6, the sixty-first connection electrode CO61 and the sixty-second connection electrode CO62 are connected through the forty-second connection electrode CO42, and thus the sixty-first connection electrode CO61 and the sixty-second connection electrode CO62 make the sixth gate electrode Gate6, the second electrode of the ninth transistor T9, and the second electrode of the eleventh transistor T11 have the same potential (i.e., the first node N1 of the pixel driving circuit).
- the sixty-third connection electrode CO63 may be in an "L" shape, a first end of the sixty-third connection electrode CO63 is connected to the first region of the eleventh active layer through the thirty-third via hole V33, and a second end of the sixty-third connection electrode CO63 is connected to the second end of the forty-first connection electrode CO41 through the ninety-fourth via hole V94. Since the first end of the forty-first connection electrode CO41 is connected to the high-frequency signal line Hf through the via hole, the high-frequency signal is written into the first electrode of the eleventh transistor T11.
- the shape of the sixty-fourth connecting electrode CO64 can be an "L" shape
- the first end of the sixty-fourth connecting electrode CO64 is connected to the first area of the ninth active layer through the twenty-ninth via hole V29
- the second end of the sixty-fourth connecting electrode CO64 is connected to the light-emitting signal line EM through the eighty-first via hole V81
- the area between the first end and the second end of the sixty-fourth connecting electrode CO64 is connected to the forty-fifth connecting electrode CO45 through the ninety-ninth via hole V99, thereby realizing the writing of the light-emitting signal into the first pole of the ninth transistor T9.
- the third conductive layer may further include a seventy-first connection electrode CO71 and a seventy-second connection electrode CO72 .
- the seventy-first connection electrode CO71 may be in the shape of a strip extending along the second direction Y, the seventy-first connection electrode CO71 may be disposed in the second circuit unit Q2, one end of the seventy-first connection electrode CO71 is connected to the first low-voltage connection line VSS-C1 through the one hundred and first via hole V101, and the seventy-first connection electrode CO71 is configured to be connected to a first power supply low-voltage line formed subsequently.
- the shape of the seventy-second connection electrode CO72 can be a strip shape extending along the second direction Y, the seventy-second connection electrode CO72 can be set in the first circuit unit Q1, one end of the seventy-second connection electrode CO72 is connected to the second low-voltage connection line VSS-C2 through the one hundred and second via hole V102, and the seventy-second connection electrode CO72 is configured to be connected to the second low-voltage power supply line formed subsequently.
- Forming a fourth insulating layer and a first planar layer pattern may include: first coating a first planar film on the substrate on which the aforementioned pattern is formed, patterning the first planar film using a patterning process, then depositing a fourth insulating film, patterning the fourth insulating film using a patterning process, forming a first planar layer covering the third conductive layer pattern and a fourth insulating layer disposed on a side of the first planar layer away from the substrate, and a plurality of vias are disposed on the fourth insulating layer and the first planar layer, as shown in FIG. 25 .
- the plurality of via holes may include at least a sixty-fifth via hole V65 , a seventieth via hole V70 , a seventy-first via hole V71 , and a seventy-second via hole V72 .
- the sixty-fifth via hole V65 can be arranged in each circuit unit, the orthographic projection of the sixty-fifth via hole V65 on the substrate is located within the range of the orthographic projection of the anode connection block 12 on the substrate, the fourth insulating film and the first flat film in the sixty-fifth via hole V65 are removed to expose the surface of the anode connection block 12, and the sixty-fifth via hole V65 is configured to connect a subsequently formed anode connection electrode to the anode connection block 12 through the via hole.
- the orthographic projection of the seventieth via hole V70 on the substrate is located within the range of the orthographic projection of the seventy-first connecting electrode CO71 on the substrate, the fourth insulating film and the first flat film in the seventieth via hole V70 are removed to expose the surface of the seventy-first connecting electrode CO71, and the seventieth via hole V70 is configured to connect a first low-voltage power line formed subsequently to the seventy-first connecting electrode CO71 through the via hole.
- the orthographic projection of the seventy-first via hole V71 on the substrate is located within the range of the orthographic projection of the seventy-second connecting electrode CO72 on the substrate, the fourth insulating film and the first flat film in the seventy-first via hole V71 are removed to expose the surface of the seventy-second connecting electrode CO72, and the seventy-first via hole V71 is configured to connect a second low-voltage power line formed subsequently to the seventy-second connecting electrode CO72 through the via hole.
- the orthographic projection of the seventy-second via hole V72 on the substrate is within the range of the orthographic projection of the high-voltage connecting line VDD-C on the substrate, the fourth insulating film, the first flat film and the third insulating layer in the seventy-second via hole V72 are removed to expose the surface of the high-voltage connecting line VDD-C, and the seventy-second via hole V72 is configured to connect a subsequently formed high-voltage power line to the high-voltage connecting line VDD-C through the via hole.
- Forming a fourth conductive layer pattern may include: depositing a fourth conductive film on the substrate on which the aforementioned pattern is formed, patterning the fourth conductive film using a patterning process, and forming a fourth conductive layer pattern disposed on the fourth insulating layer, as shown in FIGS. 26A and 26B , where FIG. 26B is a plan view schematic diagram of the fourth conductive layer in FIG. 26A .
- the fourth conductive layer pattern may include at least the anode connection electrode 13 , the high voltage power line VDD, the first low voltage power line VSS1 , and the second low voltage power line VSS2 .
- the shape of the anode connection electrode 13 may be rectangular, the anode connection electrode 13 is connected to the anode connection block 12 through the sixty-fifth via hole V65, and the anode connection electrode 13 is configured to be bound and connected to the first electrode of the light emitting diode.
- the high-voltage power line VDD may be in the shape of a line extending along the second direction Y, and the high-voltage power line VDD is connected to the high-voltage connection line VDD-C through the seventy-second via V72, thereby realizing the connection between the high-voltage connection line VDD-C extending along the first direction X and the high-voltage power line VDD extending along the second direction Y, thereby forming a mesh connection structure for transmitting a high-voltage power signal.
- the first low voltage power line VSS1 may be in the shape of a line extending along the second direction Y, and the first low voltage power line VSS1 is connected to the seventy-first connection electrode CO71 through the seventieth via hole V70. Since the seventy-first connection electrode CO71 is connected to the first low voltage connection line VSS-C1 through the via hole, the connection between the first low voltage connection line VSS-C1 extending along the first direction X and the first low voltage power line VSS1 extending along the second direction Y is achieved, forming a mesh connection structure for transmitting the first low voltage power signal.
- the second low voltage power line VSS2 may be in the shape of a line extending along the second direction Y, and the second low voltage power line VSS2 is connected to the seventy-second connection electrode CO72 through the seventy-first via hole V71. Since the seventy-second connection electrode CO72 is connected to the second low voltage connection line VSS-C2 through the via hole, the connection between the second low voltage connection line VSS-C2 extending along the first direction X and the second low voltage power line VSS2 extending along the second direction Y is realized, forming a mesh connection structure for transmitting the second low voltage power signal.
- FIG26C is a schematic diagram of a power supply line of an exemplary embodiment of the present disclosure, illustrating the structure of high-voltage power lines and low-voltage power lines in multiple circuit units.
- the high-voltage power line VDD, the first low-voltage power line VSS1, and the second low-voltage power line VSS2 may be in the shape of a line extending along the second direction Y, and the first low-voltage power line VSS1 and the second low-voltage power line VSS2 are arranged between adjacent high-voltage power lines VDD, and multiple anode connection electrodes 13 may be arranged between the first low-voltage power line VSS1 and the second low-voltage power line VSS2.
- a first pad block is provided on a side of the first low-voltage power line VSS1 close to the second low-voltage power line VSS2, and the first pad block is configured to connect the second electrode of the first light-emitting diode.
- a second pad block is provided on a side of the second low-voltage power line VSS2 close to the first low-voltage power line VSS1, and the second pad block is configured to connect the second electrodes of the second light-emitting diode and the third light-emitting diode.
- the low-voltage power line may include a first low-voltage power line, a second low-voltage power line, and a third low-voltage power line, which respectively provide low-voltage power signals to the first light-emitting diode, the second light-emitting diode, and the third light-emitting diode to minimize power consumption.
- forming the fifth insulating layer and the second flat layer pattern may include: first depositing a fifth insulating film on the substrate on which the aforementioned pattern is formed, then coating a second flat film, then depositing a sixth insulating film, patterning the fifth insulating film, the second flat film, and the sixth insulating film using a patterning process to form a fifth insulating layer covering the fourth conductive layer pattern, a second flat layer disposed on a side of the fifth insulating layer away from the substrate, and a sixth insulating layer disposed on a side of the second flat layer away from the substrate, wherein a plurality of binding holes are disposed on the fifth insulating layer, the second flat layer, and the sixth insulating layer, as shown in FIG. 27 .
- the plurality of binding holes at least include a plurality of first binding holes K1 and a plurality of second binding holes K2 , and the plurality of first binding holes K1 and the plurality of second binding holes K2 are both located in the region where the blank unit KB is located.
- the shape of the first binding hole K1 can be rectangular, and the orthographic projection of the first binding hole K1 on the substrate is located within the range of the orthographic projection of the anode connecting electrode 13 on the substrate.
- the sixth insulating film, the second flat film and the fifth insulating film in the first binding hole K1 are removed to expose the surface of the anode connecting electrode 13.
- the area of the anode connecting electrode 13 exposed by the first binding hole K1 can be used as an anode pad.
- the first binding hole K1 is configured to enable the first pole of the light-emitting diode to be bound and connected to the anode connecting electrode 13 through the binding hole.
- the shape of the second binding hole K2 may be rectangular.
- the orthographic projection of the second binding hole K2 of the first circuit unit Q1 on the substrate is located within the range of the orthographic projection of the first low-voltage power line VSS1 on the substrate, the sixth insulating film, the second flat film, and the fifth insulating film in the second binding hole K2 are removed, exposing the surface of the first low-voltage power line VSS1, and the area of the first low-voltage power line VSS1 exposed by the second binding hole K2 can be used as a cathode pad connected to the first light-emitting diode, and the second binding hole K2 is configured to connect the second pole of the first light-emitting diode to the first low-voltage power line VSS1 through the binding hole.
- the orthographic projections of the second binding holes K2 of the second circuit unit Q2 and the second circuit unit Q3 on the substrate are within the range of the orthographic projections of the second low-voltage power line VSS2 on the substrate, the sixth insulating film, the second flat film and the fifth insulating film in the second binding hole K2 are removed to expose the surface of the second low-voltage power line VSS2, and the area of the second low-voltage power line VSS2 exposed by the second binding hole K2 can be used as a cathode pad connecting the second light-emitting diode and the second light-emitting diode, and the second binding hole K2 is configured to connect the second poles of the second light-emitting diode and the third light-emitting diode to the second low-voltage power line VSS2 respectively through the binding hole.
- the driving circuit layer of this exemplary embodiment is prepared on the substrate.
- the display substrate provided by the exemplary embodiment of the present disclosure can not only meet the current value required by the red light-emitting diode and realize more gray scales, but also avoid the defects of the existing structure such as the brightness not meeting the requirements or not being able to realize more gray scales, but also effectively reduce the jump amount of the gate voltage of the third transistor, and ensure the correct writing of the gate voltage, by setting the width-to-length ratio of the third transistor in the first circuit unit to be greater than the width-to-length ratio of the third transistor in the second circuit unit and the third circuit unit, and setting the capacitance value of the storage capacitor in the first circuit unit to be greater than the capacitance value of the storage capacitor in the second circuit unit and the third circuit unit.
- the present disclosure adopts a first capacitor, a second capacitor and a storage capacitor in a parallel structure, and on the premise of ensuring the capacitance, minimizes the occupied space of the first capacitor, the second capacitor and the storage capacitor, which is conducive to achieving high-resolution display.
- the present disclosure forms a high-frequency signal line with a network connection structure, which can minimize the resistance of the high-frequency signal line, reduce the voltage drop of the high-frequency signal, effectively improve the uniformity of the power supply voltage in the display substrate, and effectively improve the uniformity within the signal surface.
- the present disclosure forms a high-voltage power line and a low-voltage power line with a network connection structure, which can minimize the resistance of the power transmission line, reduce the voltage drop of the power supply voltage, effectively improve the uniformity of the power supply voltage in the display substrate, effectively improve the uniformity within the signal surface, effectively improve the display uniformity, and improve the display quality and display quality.
- the present disclosure can effectively reduce power consumption and minimize power consumption by adding a first low-voltage power line and a second low-voltage power line.
- Studies have shown that when the light-emitting diode is driven to emit light, there is a certain difference in the voltage at both ends of the R chip, the G chip and the B chip. For example, when the emission brightness is the same, the voltage required at both ends of the R chip is about 2V lower than the voltage required at both ends of the B chip. If the low-voltage power supply voltage is designed according to the cross-voltage requirement of the B chip, the cross-voltage of the R chip will exceed the cross-voltage requirement, thereby increasing power consumption.
- the present disclosure independently designs the low-voltage power supplies of the R chip and the G/B chip, uses the first low-voltage power line to provide the R chip with a first low-voltage power signal, and the second low-voltage power line to provide the G/B chip with a second low-voltage power signal, and controls the low-voltage power supply voltages of different chips respectively. While ensuring the normal driving of the pixel driving circuit, it can effectively reduce power consumption and minimize power consumption.
- FIG28 is a schematic diagram of the structure of another display substrate of an exemplary embodiment of the present disclosure, illustrating the structure of three circuit units, wherein the circuit units include the pixel driving circuit shown in FIG16.
- the plurality of circuit units may include at least a first circuit unit Q1, a second circuit unit Q2, and a third circuit unit Q3 sequentially arranged along the first direction X, wherein the first pixel driving circuit in the first circuit unit Q1 is configured to be connected to the first light emitting diode, the second pixel driving circuit in the second circuit unit Q2 is configured to be connected to the second light emitting diode, the third pixel driving circuit in the third circuit unit Q3 is configured to be connected to the third light emitting diode, the first light emitting diode may be a red light emitting diode, the second light emitting diode may be a green light emitting diode, and the third light emitting diode may be a blue light emitting diode.
- the aspect ratio of the first driving transistor DTFT1 may be greater than that of the second driving transistor DTFT2 and the third driving transistor DTFT3, and the capacitance value of the first storage capacitor Cs1 may be substantially the same as that of the second storage capacitor Cs2 and the third storage capacitor Cs3.
- At least one circuit unit may include a high-frequency connecting line Hf-C extending along a first direction X and a high-frequency signal line Hf extending along a second direction Y, and the high-frequency signal line Hf may be connected to the high-frequency connecting line Hf-C through a via to form a mesh connection structure for transmitting a high-frequency signal.
- At least one circuit unit may include a high-voltage connection line VDD-C extending along a first direction X and a high-voltage power line VDD extending along a second direction Y, the high-voltage connection line VDD being connected to a corresponding pixel driving circuit, and the high-voltage power line VDD may be connected to the high-voltage connection line VDD-C through a via to form a mesh connection structure for transmitting a high-voltage power signal.
- At least one circuit unit may include a low voltage connection line VSS-C extending along a first direction X and a low voltage power line VSS extending along a second direction Y, and the low voltage power line VSS may be connected to the low voltage connection line VSS-C through a via to form a mesh connection structure for transmitting a low voltage power signal.
- the structure of the driving transistor of this embodiment can be substantially the same as the structure of the driving transistor shown in FIG. 17
- the structure of the storage capacitor of this embodiment can be substantially the same as the structure of the storage capacitor shown in FIG. 17 , except that the areas of the first storage capacitor Cs1, the second storage capacitor Cs2, and the third storage capacitor Cs3 can be substantially the same.
- the process of preparing the driving circuit layer of this embodiment may include the following operations.
- the first conductive layer pattern of each circuit unit may include at least: a first electrode plate CF1, a second electrode plate CF2, a third electrode plate CF3 and a third bottom gate electrode Gate3-B, as shown in FIG. 29 .
- the shapes of the first electrode plate CF1, the second electrode plate CF2 and the third electrode plate CF3 may be rectangular, the corners of the rectangular shape may be chamfered, the first electrode plate CF1 and the second electrode plate CF2 may be arranged on one side of the circuit unit in the opposite direction of the second direction Y, the third bottom gate electrode Gate3-B may be arranged on one side of the circuit unit in the second direction Y, and the third electrode plate CF3 may be located between the first electrode plate CF1 and the third bottom gate electrode Gate3-B.
- the first electrode plate CF1 is arranged on one side of the second electrode plate CF2 in the first direction X.
- the position and shape of the third plate CF3 in the three circuit units may be substantially the same, the first length M1 and the second length M2 of the third plate CF3 in the three circuit units may be substantially the same, and the area of the third plate CF3 in the three circuit units may be substantially the same.
- the position, shape, and size of the third bottom gate electrode Gate3 -B may be substantially the same as the structure shown in FIG. 20 .
- each circuit unit may include at least the first active layer AT1 of the first transistor T1 to the eleventh active layer AT11 of the eleventh transistor T11 , as shown in FIG. 30 .
- the positions and shapes of the first to eleventh active layers AT1 to AT11 may be substantially the same as those of the structures shown in FIGS. 21A and 21B , except that the tenth active layer AT10 may be located on one side of the second direction Y of the second electrode plate CF2, and the eighth active layer AT8 may be located on one side of the second direction Y of the tenth active layer AT10.
- the second conductive layer pattern of each circuit unit at least includes: a fourth electrode plate CF4, a fifth electrode plate CF5, a sixth electrode plate CF6, a first scanning signal line S1, a second scanning signal line S2, a light emitting signal line EM, a second control line CT2, an initial signal line Vint, a high-frequency connection line Hf-C, a high-voltage connection line VDD-C, a low-voltage connection line VSS-C, a plurality of gate electrodes and a plurality of connection electrodes, as shown in FIG. 31 .
- the positions of the fourth electrode plate CF4, the fifth electrode plate CF5 and the sixth electrode plate CF6 can be substantially the same as the structures shown in Figures 22A and 22B, except that the fourth electrode plate CF4 is arranged on one side of the fifth electrode plate CF5 in the first direction X, and the position, shape and size of the sixth electrode plate CF6 in the first circuit unit Q1, the second circuit unit Q2 and the third circuit unit Q3 can be substantially the same.
- the positions and shapes of the first scan signal line S1, the second scan signal line S2, the light emitting signal line EM, the second control line CT2, the initial signal line Vint, the high-frequency connection line Hf-C, the high-voltage connection line VDD-C and the low-voltage connection line VSS-C may be substantially the same as those of the structures shown in FIGS. 22A and 22B , except that only one low-voltage connection line VSS-C is provided in the present embodiment, and the second scan signal line S2 is multiplexed as the first control line to control the conduction and disconnection of the eighth transistor T8.
- the multiple gate electrodes of each circuit unit may include at least a first gate electrode Gate1, a second gate electrode Gate2, a third top gate electrode Gate3-T, a fourth gate electrode Gate4, a fifth gate electrode Gate5, a sixth gate electrode Gate6, a seventh gate electrode Gate7, an eighth gate electrode Gate8, a ninth gate electrode Gate9, a tenth gate electrode Gate10 and an eleventh gate electrode Gate11.
- the plurality of connection electrodes of each circuit unit include at least a forty-first connection electrode CO41, a forty-second connection electrode CO42, and a forty-fifth connection electrode CO45, and positions and shapes of the forty-first connection electrode CO41, the forty-second connection electrode CO42, and the forty-first connection electrode CO41 may be substantially the same as those shown in FIGS. 22A and 22B.
- the positions and functions of the multiple vias can be basically the same as the structure shown in Figure 23. The difference is that since the forty-third connecting electrode and the forty-fourth connecting electrode are not provided, and the shapes of the ninth gate electrode Gate9 and the eleventh gate electrode Gate11 are different, the positions of the corresponding vias are different, which will not be repeated here.
- the third conductive layer pattern at least includes: a data signal line DataI, a high-frequency signal line Hf, a seventh electrode plate CF7, an eighth electrode plate CF8, a ninth electrode plate CF9, an anode connection block 12 and a plurality of connection electrodes, as shown in FIG. 33 .
- the positions, shapes and connection structures of the data signal line DataI, the high-frequency signal line Hf, the seventh electrode plate CF7, the eighth electrode plate CF8 and the ninth electrode plate CF9 may be substantially the same as those shown in FIGS. 24A and 24B , except that the seventh electrode plate CF7 is disposed on one side of the eighth electrode plate CF8 in the first direction X, and the size and area of the ninth electrode plate CF9 in the first circuit unit Q1, the second circuit unit Q2 and the third circuit unit Q3 may be substantially the same.
- the plurality of connecting electrodes may include at least a fifty-first connecting electrode CO51, a fifty-second connecting electrode CO52, a fifty-third connecting electrode CO53, a fifty-fourth connecting electrode CO54, a fifty-fifth connecting electrode CO55, a fifty-sixth connecting electrode CO56, a fifty-seventh connecting electrode CO57, a fifty-eighth connecting electrode CO58, a fifty-ninth connecting electrode CO59, a sixty-first connecting electrode CO60, a sixty-first connecting electrode CO61, a sixty-second connecting electrode CO62, a sixty-third connecting electrode CO63 and a sixty-fourth connecting electrode CO64, and the positions, shapes and connection structures of the above connecting electrodes may be substantially the same as those shown in FIGS.
- the fifty-first connecting electrode CO51 is further connected to the seventh electrode plate CF7 through a via
- the fifty-eighth connecting electrode CO58 is connected to the eleventh gate electrode Gate11
- the fifty-ninth connecting electrode CO59 is connected to the ninth gate electrode Gate9, and so on, which will not be repeated here.
- the anode connection block 12 of each circuit unit and the fifty-second connection electrode CO52 are an integral structure connected to each other.
- the third conductive layer may further include a seventy-first connection electrode CO71.
- the seventy-first connection electrode CO71 may be in a strip shape extending along the second direction Y, the seventy-first connection electrode CO71 may be disposed in the second circuit unit Q2, one end of the seventy-first connection electrode CO71 is connected to the low voltage connection line VSS-C through a via hole, and the seventy-first connection electrode CO71 is configured to be connected to a power low voltage line formed subsequently.
- Patterns of the fourth insulating layer and the first planar layer are formed.
- a plurality of via holes are arranged on the fourth insulating layer and the first planar layer in each circuit unit, as shown in FIG. 34 .
- the plurality of vias may include at least a sixty-fifth via V65, a seventieth via V70, and a seventy-second via V72, and positions and functions of the plurality of vias may be substantially the same as those of the structure shown in FIG. 25 .
- the fourth conductive layer pattern may include at least the anode connection electrode 13, the high voltage power line VDD and the low voltage power line VSS, as shown in FIGS. 35A and 35B , wherein FIG. 35B is a schematic diagram of another power routing of an exemplary embodiment of the present disclosure, illustrating the structure of the high voltage power line and the low voltage power line in multiple circuit units.
- the high voltage power line VDD and the low voltage power line VSS may be in the shape of a line extending along the second direction Y, the high voltage connection line VDD-C extending along the first direction X is connected to the high voltage power line VDD extending along the second direction Y through a via hole to form a mesh connection structure for transmitting a high voltage power signal, and the low voltage connection line VSS-C extending along the first direction X is connected to the low voltage power line VSS extending along the second direction Y through a via hole to form a mesh connection structure for transmitting a low voltage power signal.
- a high voltage opening and a low voltage opening are respectively provided on the high voltage power line VDD and the low voltage power line VSS.
- a "T"-shaped low voltage power line and three anode connection electrodes 13 may be provided in the high voltage opening.
- Two anode connection electrodes 13 may be provided in the low voltage opening.
- the low voltage power line is configured to connect to the second pole of the light emitting diode.
- a pad block is provided on one side of the low voltage power line VSS close to the high voltage power line VDD. The pad block is configured to connect to the second pole of the light emitting diode.
- the position, shape and connection structure of the anode connection electrode 13 may be substantially the same as those shown in FIGS. 26A and 26B , and will not be described in detail herein.
- the fifth insulating layer and the second planar layer are patterned.
- the fifth insulating layer, the second planar layer and the sixth insulating layer in each circuit unit are provided with first binding holes K1 and second binding holes K2, as shown in FIG. 36 .
- the location and function of the binding hole can be substantially the same as the structure shown in FIG. 27 .
- the driving circuit layer of this exemplary embodiment is prepared on the substrate.
- the display substrate provided by the exemplary embodiment of the present disclosure can meet the current value required by the red light-emitting diode and achieve more gray scales by setting the width-to-length ratio of the third transistor in the first circuit unit to be greater than the width-to-length ratio of the third transistor in the second circuit unit and the third circuit unit, thereby avoiding the problem that the brightness of the existing structure does not meet the requirements or cannot achieve more gray scales.
- the present disclosure adopts a first capacitor, a second capacitor and a storage capacitor in a parallel structure, and on the premise of ensuring the capacitance, minimizes the occupied space of the first capacitor, the second capacitor and the storage capacitor, which is conducive to achieving high-resolution display.
- the present disclosure forms a high-frequency signal line with a network connection structure, which can minimize the resistance of the high-frequency signal line, reduce the voltage drop of the high-frequency signal, effectively improve the uniformity of the power supply voltage in the display substrate, and effectively improve the uniformity within the signal surface.
- the present disclosure forms a high-voltage power line and a low-voltage power line with a network connection structure, which can minimize the resistance of the power transmission line, reduce the voltage drop of the power supply voltage, effectively improve the uniformity of the power supply voltage in the display substrate, effectively improve the uniformity within the signal surface, effectively improve the display uniformity, and improve the display quality and display quality.
- the display substrate preparation process needs to perform multiple tests, one of which is an important test using a test circuit CT to perform a screen test, also known as CT test.
- CT test is to input a test signal to the display substrate to make the light-emitting diodes emit light, and to check whether each light-emitting diode is good through a defect detection device to confirm whether the display substrate has defects.
- FIG37 is a schematic diagram of a display substrate for CT detection.
- the display substrate may include a display area AA and a binding area FA located on one side of the display area AA.
- the display area AA may include multiple circuit units and multiple light-emitting units.
- the circuit unit may include at least a pixel driving circuit.
- the light-emitting unit may include at least a light-emitting diode.
- the light-emitting diode may be connected to the pixel driving circuit of the corresponding circuit unit.
- the display area AA may also include multiple data signal lines DataI, each of which is connected to multiple pixel driving circuits in a unit column.
- the binding area FA may include a detection circuit
- the detection circuit may include at least a plurality of detection units 210, at least one control line 220, and at least one detection line 230.
- the plurality of detection units 210 may be sequentially arranged at set intervals along the first direction X, and the positions of the plurality of detection units 210 may correspond one-to-one to the positions of the plurality of data signal lines DataI in the display area AA.
- Each detection unit 210 may include a control terminal, an input terminal, and an output terminal, one end of the control line 220 is connected to a pin of the binding pin area, and the other end of the control line 220 may be connected to a control terminal of the plurality of detection units 210, and the control line 220 is configured to control the conduction or disconnection of the plurality of detection units 210.
- One end of the detection line 230 is connected to a pin of the binding pin area, and the other end of the detection line 230 can be connected to an input end of a plurality of detection units 210.
- the output ends of the plurality of detection units 210 can be connected to a plurality of data signal lines DataI of the display area AA.
- the detection unit 210 is configured to output the signal output by the detection line 230 to the data signal line DataI of the display area AA under the control of the control line 220, so as to realize CT detection of the display substrate.
- Fig. 38 is a schematic diagram of the structure of the detection circuit of the exemplary embodiment of the present disclosure.
- the detection circuit may include at least a plurality of detection units 210, a control line 220 and a detection line 230, and the output ends of the plurality of detection units 210 may be connected to a plurality of data signal lines DataI of the display area through a plurality of transmission lines 240, and the shape of the plurality of transmission lines 240 may be a folded line extending toward the display area, and the spacing between adjacent transmission lines 240 may be substantially the same.
- a shielding line 250 may be disposed between at least one transmission line 240 and an adjacent transmission line 240 , and the shape of the shielding line 250 may be substantially the same as that of the transmission line 240 .
- the transmission line 240 and the shielding line 250 may be disposed in the same layer and simultaneously formed through the same patterning process.
- the distance between the edge of the shielding wire 250 close to the transmission line 240 and the edge of the transmission line 240 close to the shielding wire 250 may be about 10 ⁇ m to 20 ⁇ m.
- the distance between the edge of the shielding wire 250 close to the transmission line 240 and the edge of the transmission line 240 close to the shielding wire 250 may be about 15 ⁇ m.
- the shielding line 250 may be connected to a constant voltage signal line or a ground signal line, and the shielding line 250 is configured to reduce a data voltage jump of the transmission line 240 caused by a coupling capacitance.
- the constant voltage signal line may be a high voltage power line, or may be a low voltage power line, or may be an initial signal line.
- Fig. 39 is a schematic diagram of a shielding line connected to a constant voltage signal line in an exemplary embodiment of the present disclosure.
- the constant voltage signal line can be an initial signal line Vint
- the shielding line 250 and the initial signal line Vint can be arranged in different conductive layers
- the shielding line 250 can be connected to the initial signal line Vint through a via K0.
- the initial signal line Vint may be connected to the plurality of shielding lines 250 through the plurality of vias K0 , respectively, to provide a constant voltage signal to the plurality of shielding lines 250 .
- the present disclosure sets a shielding line between the transmission lines of the detection circuit, which can effectively shield the coupling capacitance between adjacent transmission lines and reduce data voltage jumps. Studies have shown that when the detection circuit performs CT detection, due to the existence of coupling capacitance between adjacent transmission lines, the coupling capacitance will cause data voltage jumps, resulting in test errors.
- the present disclosure sets a shielding line between the transmission lines of the detection circuit, and the shielding line is connected to the constant voltage signal line.
- the constant voltage shielding line can effectively shield the coupling capacitance between adjacent transmission lines, thereby effectively reducing data voltage jumps, which can not only improve the accuracy of test data, but also does not require the addition of additional signals and will not affect the data voltage.
- the display substrate provided by the exemplary embodiments of the present disclosure can be applicable to any LED driving pixel circuit, including P-type PAM, P-type PAM+PWM, N-type PAM, N-type PAM+PWM, and LTPO-type PAM and PAM+PWM circuits.
- the exemplary embodiment of the present disclosure also provides a method for preparing a display substrate to prepare the aforementioned display substrate.
- the preparation method may include:
- a driving circuit layer is formed on a substrate, the driving circuit layer includes a plurality of circuit units, the plurality of circuit units include at least a first circuit unit, a second circuit unit and a third circuit unit, the first circuit unit includes a first pixel driving circuit, the first pixel driving circuit includes at least a first driving transistor, the second circuit unit includes a second pixel driving circuit, the second pixel driving circuit includes at least a second driving transistor, the third circuit unit includes a third pixel driving circuit, the third pixel driving circuit includes at least a third driving transistor; a channel width of the first driving transistor is greater than a channel width of the second driving transistor or the third driving transistor, and a channel length of the first driving transistor is the same as a channel length of the second driving transistor or the third driving transistor.
- the exemplary embodiments of the present disclosure further provide a display device, including the display substrate of the above-mentioned embodiment.
- the display device can be any product or component with a display function, such as a mobile phone, a tablet computer, a television, a monitor, a notebook computer, a digital photo frame or a navigator.
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Abstract
Description
Claims (20)
- 一种显示基板,包括设置在基底上的驱动电路层,所述驱动电路层包括多个电路单元,所述多个电路单元至少包括第一电路单元、第二电路单元和第三电路单元,所述第一电路单元包括第一像素驱动电路,所述第一像素驱动电路至少包括第一驱动晶体管,所述第二电路单元包括第二像素驱动电路,所述第二像素驱动电路至少包括第二驱动晶体管,所述第三电路单元包括第三像素驱动电路,所述第三像素驱动电路至少包括第三驱动晶体管;所述第一驱动晶体管的沟道宽度大于所述第二驱动晶体管或者所述第三驱动晶体管的沟道宽度,所述第一驱动晶体管的沟道长度与所述第二驱动晶体管或者所述第三驱动晶体管的沟道长度相同。
- 根据权利要求1所述的显示基板,其中,所述第一驱动晶体管的沟道宽度与所述第二驱动晶体管或者所述第三驱动晶体管的沟道宽度的比值为2至6。
- 根据权利要求1所述的显示基板,其中,所述第二驱动晶体管的沟道宽度与所述第三驱动晶体管的沟道宽度相同,所述第二驱动晶体管的沟道长度与所述第三驱动晶体管的沟道长度相同。
- 根据权利要求1所述的显示基板,其中,所述第一像素驱动电路还包括第一存储电容,所述第二像素驱动电路还包括第二存储电容,所述第三像素驱动电路还包括第三存储电容;所述第一存储电容的电容值大于或等于所述第二存储电容或者所述第三存储电容的电容值。
- 根据权利要求4所述的显示基板,其中,所述第一存储电容在所述基底上正投影的面积大于所述第二存储电容或者所述第三存储电容在所述基底上正投影的面积。
- 根据权利要求5所述的显示基板,其中,所述第一存储电容在所述基底上正投影的第一长度与所述第二存储电容或者所述第三存储电容在所述基底上正投影的第一长度相同,所述第一存储电容在所述基底上正投影的第二长度大于或等于所述第二存储电容或者所述第三存储电容在所述基底上正投影的第二长度,所述第一长度为第一方向的尺寸,所述第二长度为第二方向尺寸,所述第一方向与所述第二方向交叉。
- 根据权利要求6所述的显示基板,其中,所述第一存储电容在所述基底上正投影的第二长度与所述第二存储电容或者所述第三存储电容在所述基底上正投影的第二长度的比值为1至2。
- 根据权利要求6所述的显示基板,其中,所述第二存储电容在所述基底上正投影的第一长度与所述第三存储电容在所述基底上正投影的第一长度相同,所述第二存储电容在所述基底上正投影的第二长度与所述第三存储电容在所述基底上正投影的第二长度相同。
- 根据权利要求1所述的显示基板,其中,所述显示基板还包括设置在所述驱动电路层远离所述基底一侧的发光结构层,所述发光结构层包括多个发光单元,所述多个发光二极管至少包括出射红色光线的红色发光二极管、出射绿色光线的绿色发光二极管和出射蓝色光线的蓝色发光二极管,所述红色发光二极管与所述第一像素驱动电路连接,所述绿色发光二极管与所述第二像素驱动电路连接,所述蓝色发光二极管与所述第三像素驱动电路连接。
- 根据权利要求1至9任一项所述的显示基板,其中,至少一个电路单元包括沿着第一方向延伸的高压连接线和沿着第二方向延伸的高压电源线,所述高压电源线通过过孔与所述高压连接线连接,形成传输高压电源信号的网状连通结构,所述第一方向与所述第二方向交叉。
- 根据权利要求1至9任一项所述的显示基板,其中,至少一个电路单元包括沿着第一方向延伸的低压连接线和沿着第二方向延伸的低压电源线,所述低压电源线通过过孔与所述低压连接线连接,形成传输低压电源信号的网状连通结构,所述第一方向与所述第二方向交叉。
- 根据权利要求11所述的显示基板,其中,所述低压电源线包括第一低压电源线和第二低压电源线,所述第一低压电源线与红色发光二极管连接,所述第二低压电源线与绿色发光二极管和蓝色发光二极管连接。
- 根据权利要求12所述的显示基板,其中,至少一个电路单元包括沿着所述第一方向延伸的第一低压连接线,所述第一低压电源线通过过孔与所述第一低压连接线连接,形成传输第一低压电源信号的网状连通结构。
- 根据权利要求12所述的显示基板,其中,至少一个电路单元包括沿着所述第一方向延伸的第二低压连接线,所述第二低压电源线通过过孔与所 述第二低压连接线连接,形成传输第二低压电源信号的网状连通结构。
- 根据权利要求1至9任一项所述的显示基板,其中,至少一个电路单元包括沿着第一方向延伸的高频连接线和沿着第二方向延伸的高频信号线,所述高频信号线通过过孔与所述高频连接线连接,形成传输高频信号的网状连通结构,所述第一方向与所述第二方向交叉。
- 根据权利要求1至9任一项所述的显示基板,其中,所述显示基板还包括测试电路和多条数据信号线,所述数据信号线与所述像素驱动电路连接,所述检测电路至少包括多个检测单元和多条传输线,所述多个检测单元通过所述多条传输线与所述多条数据信号线对应连接,至少一条传输线与相邻的传输线之间设置有屏蔽线,所述屏蔽线与恒压信号线或者接地信号线连接。
- 根据权利要求16所述的显示基板,其中,至少一条传输线与相邻的屏蔽线之间的距离为10μm至20μm。
- 根据权利要求16所述的显示基板,其中,所述传输线和所述屏蔽线同层设置。
- 一种显示装置,包括如权利要求1至18中任一项所述的显示基板。
- 一种显示基板的制备方法,包括:在基底上形成驱动电路层,所述驱动电路层包括多个电路单元,所述多个电路单元至少包括第一电路单元、第二电路单元和第三电路单元,所述第一电路单元包括第一像素驱动电路,所述第一像素驱动电路至少包括第一驱动晶体管,所述第二电路单元包括第二像素驱动电路,所述第二像素驱动电路至少包括第二驱动晶体管,所述第三电路单元包括第三像素驱动电路,所述第三像素驱动电路至少包括第三驱动晶体管;所述第一驱动晶体管的沟道宽度大于所述第二驱动晶体管或者所述第三驱动晶体管的沟道宽度,所述第一驱动晶体管的沟道长度与所述第二驱动晶体管或者所述第三驱动晶体管的沟道长度相同。
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| CN202280005221.0A CN118541803A (zh) | 2022-12-22 | 2022-12-22 | 显示基板及其制备方法、显示装置 |
| JP2024569139A JP2025539967A (ja) | 2022-12-22 | 2022-12-22 | 表示基板及びその製造方法、表示装置 |
| PCT/CN2022/141082 WO2024130652A1 (zh) | 2022-12-22 | 2022-12-22 | 显示基板及其制备方法、显示装置 |
| US18/555,254 US20250081609A1 (en) | 2022-12-22 | 2022-12-22 | Display Substrate, Preparation Method Therefor, and Display Apparatus |
| EP22968948.4A EP4513564A4 (en) | 2022-12-22 | 2022-12-22 | DISPLAY SUBSTRATE AND MANUFACTURING METHOD THEREOF, AND DISPLAY APPARATUS |
| TW112128600A TWI860802B (zh) | 2022-12-22 | 2023-07-31 | 顯示基板及其製備方法、顯示裝置 |
| TW113136159A TW202503726A (zh) | 2022-12-22 | 2023-07-31 | 顯示基板及其製備方法、顯示裝置 |
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| EP (1) | EP4513564A4 (zh) |
| JP (1) | JP2025539967A (zh) |
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| US20240021553A1 (en) * | 2022-07-12 | 2024-01-18 | SK Hynix Inc. | Semiconductor device including two or more stacked semiconductor structures |
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| CN118985020B (zh) * | 2023-03-16 | 2026-01-16 | 京东方科技集团股份有限公司 | 像素驱动电路及其驱动方法、显示装置 |
| US20250322804A1 (en) * | 2024-04-10 | 2025-10-16 | Innolux Corporation | Electronic device |
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| US20030179166A1 (en) * | 2002-03-19 | 2003-09-25 | Chun-Huai Li | Driving circuit of display |
| JP2012237931A (ja) * | 2011-05-13 | 2012-12-06 | Japan Display Central Co Ltd | アクティブマトリクス型有機発光表示装置 |
| WO2021104428A1 (zh) * | 2019-11-29 | 2021-06-03 | 京东方科技集团股份有限公司 | 显示基板以及显示装置 |
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| KR100814854B1 (ko) * | 2006-11-09 | 2008-03-20 | 삼성에스디아이 주식회사 | 유기전계발광표시장치 및 그 구동방법 |
| JP4614106B2 (ja) * | 2008-06-18 | 2011-01-19 | ソニー株式会社 | 自発光表示装置および電子機器 |
| CN111429834B (zh) * | 2019-01-08 | 2021-08-20 | 群创光电股份有限公司 | 电子装置及驱动电路 |
| DE112020000561A5 (de) * | 2019-01-29 | 2021-12-02 | Osram Opto Semiconductors Gmbh | Videowand, treiberschaltung, ansteuerungen und verfahren derselben |
| US11854483B2 (en) * | 2019-10-31 | 2023-12-26 | Sharp Kabushiki Kaisha | Display device, pixel circuit, and method for driving same |
| JP7451328B2 (ja) * | 2020-07-06 | 2024-03-18 | 株式会社ジャパンディスプレイ | 表示装置 |
| CN115241254B (zh) * | 2020-07-28 | 2025-09-23 | 武汉天马微电子有限公司 | 一种显示面板及显示装置 |
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- 2022-12-22 JP JP2024569139A patent/JP2025539967A/ja active Pending
- 2022-12-22 CN CN202280005221.0A patent/CN118541803A/zh active Pending
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- 2022-12-22 EP EP22968948.4A patent/EP4513564A4/en active Pending
- 2022-12-22 WO PCT/CN2022/141082 patent/WO2024130652A1/zh not_active Ceased
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| US20030179166A1 (en) * | 2002-03-19 | 2003-09-25 | Chun-Huai Li | Driving circuit of display |
| JP2012237931A (ja) * | 2011-05-13 | 2012-12-06 | Japan Display Central Co Ltd | アクティブマトリクス型有機発光表示装置 |
| WO2021104428A1 (zh) * | 2019-11-29 | 2021-06-03 | 京东方科技集团股份有限公司 | 显示基板以及显示装置 |
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| US12354984B2 (en) * | 2022-07-12 | 2025-07-08 | SK Hynix Inc. | Semiconductor device including two or more stacked semiconductor structures |
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| TW202427449A (zh) | 2024-07-01 |
| CN118541803A (zh) | 2024-08-23 |
| JP2025539967A (ja) | 2025-12-11 |
| TWI860802B (zh) | 2024-11-01 |
| EP4513564A1 (en) | 2025-02-26 |
| EP4513564A4 (en) | 2025-09-17 |
| TW202503726A (zh) | 2025-01-16 |
| US20250081609A1 (en) | 2025-03-06 |
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