WO2024213152A1 - 一种扬声器 - Google Patents

一种扬声器 Download PDF

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Publication number
WO2024213152A1
WO2024213152A1 PCT/CN2024/087645 CN2024087645W WO2024213152A1 WO 2024213152 A1 WO2024213152 A1 WO 2024213152A1 CN 2024087645 W CN2024087645 W CN 2024087645W WO 2024213152 A1 WO2024213152 A1 WO 2024213152A1
Authority
WO
WIPO (PCT)
Prior art keywords
driving
area
vibration
driving beam
loudspeaker
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2024/087645
Other languages
English (en)
French (fr)
Inventor
周文兵
张磊
廖风云
齐心
顾善勇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Shokz Co Ltd
Original Assignee
Shenzhen Shokz Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Shokz Co Ltd filed Critical Shenzhen Shokz Co Ltd
Priority to CN202480001556.4A priority Critical patent/CN119156833A/zh
Priority to EP24787396.1A priority patent/EP4496345A4/en
Priority to US18/916,684 priority patent/US12363484B2/en
Publication of WO2024213152A1 publication Critical patent/WO2024213152A1/zh
Priority to US19/266,459 priority patent/US20250344025A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
    • H04R9/06—Loudspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
    • H04R9/02—Details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2400/00—Loudspeakers
    • H04R2400/11—Aspects regarding the frame of loudspeaker transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2499/00—Aspects covered by H04R or H04S not otherwise provided for in their subgroups
    • H04R2499/10—General applications
    • H04R2499/11—Transducers incorporated or for use in hand-held devices, e.g. mobile phones, PDA's, camera's
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/02—Diaphragms for electromechanical transducers; Cones characterised by the construction
    • H04R7/04—Plane diaphragms

Definitions

  • the present invention relates to the field of acoustic technology, and in particular to a loudspeaker.
  • Piezoelectric speakers use the inverse piezoelectric effect of piezoelectric materials to generate vibrations and radiate sound waves outward. Compared with traditional electric speakers, they have the advantages of high electromechanical energy conversion efficiency, low energy consumption, small size, and high integration. With the current trend of miniaturization and integration of devices, piezoelectric speakers have extremely broad prospects and future. Speakers generally include three core parts: a driving part, a vibration part, and a supporting auxiliary part. The biggest problem faced by general piezoelectric speakers, especially micro speakers, is the insufficient driving capacity of the driving part, which results in a low output sound pressure level (SPL) of the speaker in a specific frequency range (for example, 20Hz-20kHz range), resulting in low sensitivity in the audible domain.
  • SPL output sound pressure level
  • An embodiment of the present specification provides a speaker, comprising: a shell, a driving unit and a vibration unit, wherein the driving unit is fixed to the shell, and the driving unit is transmission-connected to the vibration unit; wherein the driving unit comprises a plurality of driving beams, any one of the driving beams comprises a fixed area and a suspended area, any one of the driving beams is connected to the shell via the fixed area, and any one of the driving beams is transmission-connected to the vibration unit via the suspended area.
  • FIG1A is a schematic diagram of the internal structure of a speaker according to some embodiments of the present specification.
  • FIG1B is a schematic diagram of the internal structure of a speaker according to other embodiments of the present specification.
  • FIG2 is a schematic diagram of a model of a mass-spring-damper system according to some embodiments of the present specification
  • FIG3 is a velocity resonance curve diagram of a mass-spring-damper system according to some embodiments of the present specification.
  • FIG4 is a schematic diagram of an equivalent mechanical model of a loudspeaker according to some embodiments of this specification.
  • FIG5 is a schematic diagram of a speaker according to some embodiments of the present specification.
  • FIG6 is a schematic diagram of a speaker from another perspective according to some embodiments of this specification.
  • FIG7 is a schematic cross-sectional view of the speaker shown in FIG6 of this specification.
  • FIG8 is a schematic diagram of the structure of a driving unit according to some embodiments of this specification.
  • FIG9 is a schematic diagram of the connection between the driving beam and the vibration transmission unit according to some embodiments of this specification.
  • FIG10 is another schematic diagram of the structure of a driving unit according to some embodiments of this specification.
  • FIG11 is a schematic diagram of the internal structure of a driving beam according to some embodiments of the present specification.
  • FIG. 12 is a schematic diagram of frequency response curves of a loudspeaker corresponding to different parameters ⁇ according to some embodiments of this specification;
  • FIG. 13 is a schematic diagram of frequency response curves of a loudspeaker corresponding to different ⁇ values according to some embodiments of this specification;
  • FIGS. 14A to 14E are schematic diagrams of driving beams of different structures according to some embodiments of the present specification.
  • FIG15A is a partial structural diagram of an exemplary speaker according to some embodiments of the present specification.
  • FIG15B is a schematic diagram of the internal structure of the driving unit of the speaker in FIG15A of this specification;
  • FIG15C is a partial structural diagram of an exemplary speaker according to some embodiments of the present specification.
  • FIG15D is a schematic diagram of the internal structure of the driving unit of the speaker in FIG15C of this specification.
  • 16A to 16G are schematic diagrams of driving units with different structures according to some embodiments of this specification.
  • 17A to 17K are schematic diagrams of driving units of different structures according to some embodiments of this specification.
  • FIG17L is a schematic diagram of the internal structure of the driving unit corresponding to FIG17K of this specification.
  • FIG17M is a schematic diagram of a deformation of the driving beam shown in FIG17L of this specification.
  • FIG17N is a schematic diagram of frequency response curves of a loudspeaker including a folded structure driving beam and a loudspeaker including a non-folded structure driving beam according to FIG17L of this specification;
  • FIG17O is another schematic diagram of the internal structure of the driving unit corresponding to FIG17K of this specification.
  • FIG17P is a schematic diagram of a deformation of the driving beam shown in FIG17O of this specification.
  • FIG17Q is a schematic diagram of frequency response curves of a loudspeaker including a folded structure driving beam and a loudspeaker including a non-folded structure driving beam according to FIG17O of this specification;
  • FIG17R is another schematic diagram of the internal structure of the driving unit corresponding to FIG17K of this specification.
  • FIG17S is another schematic diagram of the structure of a driving unit according to some embodiments of this specification.
  • FIG17T is another schematic diagram of the structure of a driving unit according to some embodiments of this specification.
  • 18A and 18B are schematic diagrams of the internal structure of driving units with different structures according to some embodiments of this specification.
  • FIG18C is a schematic diagram of frequency response curves of a loudspeaker corresponding to different ⁇ according to some embodiments of this specification.
  • 19A and 19B are schematic diagrams of driving units with different structures according to some embodiments of this specification.
  • FIG20A is a first view of the speaker shown in FIG1B of the present specification.
  • FIG20B is a cross-sectional view of the speaker shown in FIG20A according to the present specification.
  • FIG20C is a second view of the speaker shown in FIG1B of the present specification.
  • FIG20D is a cross-sectional view of the speaker shown in FIG20C according to the present specification.
  • FIG20E is a schematic diagram of the structure of a speaker according to some embodiments of this specification.
  • FIG20F is a cross-sectional view of the speaker shown in FIG20E of the present specification.
  • FIG20G is a schematic diagram of the structure of a speaker according to other embodiments of the present specification.
  • FIG20H is a cross-sectional view of the speaker shown in FIG20G of the present specification.
  • FIG20I is a schematic diagram of the structure of a speaker according to yet other embodiments of the present specification.
  • FIG20J is a cross-sectional view of the speaker shown in FIG20I of the present specification.
  • FIG21A is a projection diagram of a driving beam along a vibration direction of a vibration unit according to some embodiments of the present specification
  • 21B to 21M are projection diagrams of the driving beam and the diaphragm along the vibration direction of the vibration unit shown in some embodiments of this specification;
  • FIG22 is a projection diagram of a driving beam and a diaphragm along the z direction shown in some other embodiments of this specification;
  • FIG. 23 is a frequency response curve diagram of a loudspeaker corresponding to different values of ⁇ according to some embodiments of this specification.
  • FIG. 25 is a frequency response curve diagram of a loudspeaker corresponding to different values of ⁇ according to some embodiments of this specification.
  • FIG. 27 is a side view of a driving beam with electrodes along the y direction according to some embodiments of the present specification.
  • FIG. 28 is a side view of a driving beam with electrodes along the y direction according to some embodiments of the present specification.
  • FIG29 is a projection diagram of a driving beam along the z direction shown in some embodiments of the present specification.
  • FIG30 is a schematic diagram of frequency response curves of loudspeakers corresponding to different ⁇ values according to some embodiments of this specification.
  • FIG33 is a schematic diagram of a frequency response curve of a loudspeaker corresponding to different ⁇ according to some embodiments of this specification;
  • 34A to 34F are projection diagrams of a driving beam along the z direction according to some embodiments of the present specification.
  • FIG35 is a partial schematic diagram of a vibration unit according to some embodiments of the present specification.
  • FIG36 is a schematic diagram of the structure of a diaphragm according to some embodiments of the present specification.
  • FIG37 is a schematic diagram of a vibration unit according to some embodiments of the present specification.
  • FIG38B is a deformation cloud diagram of the speaker corresponding to FIG38A according to another perspective of this specification;
  • FIG39B is a deformation cloud diagram of the speaker corresponding to FIG39A of this specification from another perspective;
  • FIG41 is a schematic diagram of frequency response curves of loudspeakers corresponding to different z according to some embodiments of this specification.
  • FIG42 is a schematic diagram of a diaphragm according to some embodiments of the present specification.
  • FIG43 is a schematic diagram of frequency response curves of a loudspeaker corresponding to different lambda values according to some embodiments of this specification.
  • 44A to 44C are partial schematic diagrams of speakers according to some embodiments of the present specification.
  • FIG45 is a schematic diagram of the internal structure of a speaker with a slit structure according to some embodiments of this specification.
  • 46A-46B are schematic diagrams of partial structures of speakers according to some embodiments of the present specification.
  • FIG47 is a schematic diagram of a partial structure of a speaker according to yet other embodiments of the present specification.
  • FIG48 is a projection diagram of a vibration unit along the vibration direction of a diaphragm according to some embodiments of this specification.
  • FIG49A is a schematic diagram of a speaker according to some embodiments of the present specification.
  • FIG49B is a projection diagram of a driving beam and a diaphragm along a vibration direction of a vibration unit according to some embodiments of the present specification
  • 50A to 50B are schematic diagrams of a loudspeaker including a plurality of parallel driving units according to some embodiments of the present specification.
  • system means for distinguishing different components, elements, parts, portions or assemblies at different levels.
  • device means for distinguishing different components, elements, parts, portions or assemblies at different levels.
  • unit means for distinguishing different components, elements, parts, portions or assemblies at different levels.
  • the words can be replaced by other expressions.
  • FIG. 1A is a schematic diagram of the internal structure of a loudspeaker according to some embodiments of the present specification.
  • FIG. 1B is a schematic diagram of the internal structure of a loudspeaker according to other embodiments of the present specification.
  • FIG. 2 is a schematic diagram of a model of a mass-spring-damper system according to some embodiments of the present specification.
  • FIG. 3 is a velocity resonance curve diagram of a mass-spring-damper system according to some embodiments of the present specification.
  • FIG. 4 is a schematic diagram of an equivalent mechanical model of a loudspeaker according to some embodiments of the present specification. The vibration process of the loudspeaker is described below in conjunction with FIG. 1A to FIG. 4.
  • the speaker 100 may include a housing 110 , a driving unit 120 , a vibration unit 130 , etc.
  • the driving unit 120 is fixed to the housing 110 , and the driving unit 120 is in transmission connection with the vibration unit 130 .
  • the speaker 100 can be used to convert an audio signal (e.g., an electrical signal containing sound information) into a sound signal.
  • the speaker 100 can be a bone conduction speaker, an air conduction speaker, or a bone-air conduction combined speaker.
  • the speaker 100 can be applied to glasses, smart bracelets, headphones, hearing aids, smart helmets, smart watches, smart clothing, smart backpacks, smart accessories, etc., or any combination thereof.
  • the speaker 100 can be applied to functional myopia glasses, reading glasses, cycling glasses, or sunglasses, etc., or it can be intelligent glasses, such as audio glasses with headphone functions.
  • the speaker 100 can also be applied to head-mounted devices such as helmets, augmented reality (AR) devices, or virtual reality (VR) devices.
  • the augmented reality device or virtual reality device may include a virtual reality helmet, virtual reality glasses, augmented reality helmets, augmented reality glasses, etc., or any combination thereof.
  • the virtual reality device and/or augmented reality device may include Google Glass, Oculus Rift, Hololens, Gear VR, etc.
  • the driving unit 120 serves as the driving end of the speaker 100, and provides driving force for the speaker 100 by converting electrical energy into mechanical energy.
  • the types of the driving unit 120 may include, but are not limited to, electromagnetic, electrostatic, piezoelectric, etc.
  • the vibration unit 130 serves as the load end of the speaker 100, and includes a diaphragm 131 and a central reinforcement member 132.
  • the diaphragm 131 may include an edge fixing portion 1311, a folding ring portion 1312, and a central portion 1313, wherein the edge fixing portion 1311 may be fixedly connected to the housing 110 of the speaker 100, and the central portion 1313 may be provided with a central reinforcement member 132.
  • the central reinforcement member 132 may be a single part, located on the upper side or the lower side of the central portion 1313. In some embodiments, the central reinforcement member 132 may also be a plurality of parts, located on the upper side and the lower side of the central portion 1313, respectively.
  • the drive unit 120 may be connected to the central reinforcement member 132, or the drive unit 120 may be directly connected to the central portion 1313 of the diaphragm 131 to achieve mechanical energy transmission from the drive end (drive unit 120) to the load end (vibration unit 130).
  • the speaker 100 may include a supporting auxiliary structure, which mainly includes a connecting and fixing portion between the drive unit 120 and the vibration unit 130 (for example, Such as the vibration transfer unit 140), the housing 110, etc.
  • the diaphragm 131 can separate the space in the housing 110 into two acoustic cavities (such as the front cavity 111 and the rear cavity 112), and the speaker 100 can be provided with corresponding structures in the acoustic cavity (such as the front cavity 111 and the rear cavity 112), such as providing corresponding sound outlet holes (such as the sound outlet hole 111a connected to the front cavity 111, etc.) on the housing 110, and providing a damping mesh 113 on the sound outlet holes, etc., so as to adjust the sensitivity and Q value of the frequency response curve of the speaker 100 and improve the output performance of the speaker 100.
  • the speaker 100 can be equivalent to a model of multiple mass-spring-damper systems connected in series and in parallel.
  • the system undergoes forced vibration under the action of the excitation load, and transmits force and displacement; when the operating frequency is close to the natural frequency f0 of a mass-spring-damper system, the system will resonate, causing the speaker 100 to vibrate at a higher speed at the local structure corresponding to the system, which is ultimately reflected in the presence of corresponding peaks and valleys on the frequency response curve of the speaker 100.
  • M is the system mass
  • R is the system damping
  • K is the system elastic coefficient
  • F is the driving force amplitude
  • x is the system displacement
  • ⁇ is the external force circular frequency.
  • v is the movement speed and va is the movement speed amplitude.
  • the output sound pressure amplitude (sound pressure level) of the loudspeaker 100 is positively correlated with the output motion speed of the mass-spring-damper system, that is, p a ⁇ va .
  • the output motion velocity amplitude of each mass-spring-damper system of the loudspeaker 100 can be adjusted.
  • each unit of the speaker 100 may be equivalent to a mechanical model as shown in FIG. 4 .
  • One end of the driving unit 120 is fixedly connected to the housing 110, and the other end is connected to the vibration unit 130, and the driving unit 120 is in contact with the air. Since the driving unit 120 has a corresponding mass Md, damping R, and stiffness K, it can be equivalently connected to the housing 110 through a spring with a stiffness of Kd and a damper with a damping of Rd, and has a mass Md as an inertial unit. Further, the driving unit 120 is connected to the vibration unit 130 through a spring Kp and a damping Rp, and the driving unit 120 is connected to the air load through a spring Ka2 and a damping Ra2.
  • the drive unit 120 as an electrical energy-mechanical energy conversion unit, can output force F1 or displacement S1 for the vibration system of the speaker 100.
  • the force F1 or displacement S1 output by the drive unit 120 it is necessary to increase the force F1 or displacement S1 output by the drive unit 120, and match the impedance between the drive unit 120 and the vibration unit 130, so that the force F1 or displacement S1 output by the drive unit 120 can be transmitted to the vibration unit 130 with minimal loss, so that the vibration unit 130 outputs the maximum displacement or speed.
  • all the masses of the diaphragm 131, the central reinforcement 132, and the vibration transfer unit 140 can be equivalent to the total mass Mn.
  • the diaphragm 131 is connected to the housing 110 through a spring with a stiffness of Km and a damper with a damping of Rm.
  • the diaphragm 131 is connected to the air load through the spring Ka1 and the damping Ra1, and the radiation of sound pressure is achieved by pushing the air to move.
  • the load of the diaphragm 131 changes with the change of the movement displacement of the diaphragm 131, so the diaphragm 131 is a variable load.
  • the load of the vibration unit 130 also includes the air part pushed by the diaphragm 131.
  • This part of the load is an inertial load, which is mainly determined by the amount of air pushed by the diaphragm 131.
  • the amount of air pushed by the diaphragm 131 also determines the sound pressure level that the speaker 100 can output.
  • the vibration unit 130 can also be called a diaphragm assembly.
  • the diaphragm 131 in order to improve the output performance (such as the output sound pressure level) of the speaker 100, the diaphragm 131 can be designed to improve the The amount of air pushed is increased (i.e., the vibration amplitude of the vibration unit 130 is increased).
  • the force and displacement output by the driving unit 120 can be designed to be increased (for example, the structure of the driving beam 122 of the driving unit 120 can be designed, etc.), and on the other hand, the transmission efficiency of the force and displacement between the driving unit 120 and the vibration unit 130 can be designed to be increased (for example, the coupling elastic structure 124 of the driving unit 120 can be designed, etc.).
  • the driving unit 120 includes a plurality of driving beams, and any one of the driving beams includes a fixed area and a suspended area. Any one of the driving beams is connected to the housing 110 through the fixed area to achieve fixation, and any one of the driving beams is connected to the vibration unit 130 through the suspended area to drive the vibration unit 130 to vibrate and generate sound output.
  • the structure of the driving unit 120 can be designed to enhance the driving ability (output force and displacement) of the driving unit 120, thereby enhancing the output sound pressure level of the speaker 100.
  • the suspended area has a length dimension in the direction extending from the fixed area to the suspended area; and the suspended area has a thickness dimension in the vibration direction of the vibration unit 130 (diaphragm 131).
  • deformation is mainly generated in the suspended area, thereby providing driving force and displacement for the vibration unit 130.
  • the drive unit 120 as a spring-mass-damping system, provides stiffness and mass for the entire loudspeaker 100, thereby affecting the resonant frequency of the loudspeaker 100.
  • the stiffness and mass of the drive unit 120 can be adjusted, thereby achieving control of the vibration mode of the loudspeaker 100 to optimize the output performance of the loudspeaker.
  • FIG5 is a schematic diagram of a speaker according to some embodiments of the present specification
  • FIG6 is a schematic diagram of a speaker from another perspective according to some embodiments of the present specification
  • FIG7 is a cross-sectional schematic diagram of the speaker shown in FIG6
  • FIG8 is a structural schematic diagram of a driving unit according to some embodiments of the present specification
  • FIG9 is a connection schematic diagram of a driving beam and a vibration transmission unit according to some embodiments of the present specification.
  • FIG10 is another structural schematic diagram of a driving unit according to some embodiments of the present specification.
  • FIG11 is a schematic diagram of the internal structure of a driving beam according to some embodiments of the present specification.
  • the speaker 100 may include a housing 110, a driving unit 120 and a vibration unit 130.
  • the housing 110 mainly provides a platform for mounting and fixing other components of the speaker 100.
  • the shape of the housing 110 may be circular, elliptical, quadrilateral (including but not limited to square, rectangle, diamond, kite, etc.), pentagon, hexagon, octagon and other polygons. The following is an exemplary description of the speaker 100 with the shape of the housing 110 being a rectangle.
  • the housing 110, the driving unit 120 and the vibration unit 130 may form an acoustic cavity (e.g., a rear cavity 112), as shown in Figure 7.
  • the vibration of the vibration unit 130 may drive the air in the rear cavity 112 to vibrate and produce sound output. In some embodiments, the vibration unit 130 may also vibrate to drive the air on the side of the vibration unit 130 away from the rear cavity 112 to vibrate and produce sound output.
  • the driving unit 120 is fixed to the housing 110, and the driving unit 120 is connected to the vibration unit 130 in a transmission manner.
  • the driving unit 120 can drive the vibration unit 130 to vibrate to generate sound output.
  • the driving unit 120 may include a driving beam 122, and the driving beam 122 may be a beam-shaped structure.
  • the driving beam 122 may include a fixed area 122-1 and a suspended area 122-2, the driving beam 122 is connected to the housing 110 through the fixed area 122-1, and the driving beam 122 is connected to the vibration unit 130 in a transmission manner through the suspended area 122-2 (or the free end of the driving beam 122). Referring to FIGS.
  • the suspended area 122-2 in the direction extending from the fixed area 122-1 to the suspended area 122-2, the suspended area 122-2 has a length dimension l; in the vibration direction of the vibration unit 130, the suspended area 122-2 (driving beam 122) has a thickness dimension h.
  • the vibration direction of the vibration unit 130 is the deformation direction of the driving beam 122.
  • the length dimension l and the thickness dimension h of the suspended area 122-2 can affect the deformation of the suspended area 122-2, thereby affecting the force and displacement output by the driving beam 122, and further affecting the output sound pressure level of the speaker 100. Therefore, the length dimension l and the thickness dimension h of the suspended area 122-2 can be designed to improve the output sound pressure level of the speaker 100.
  • the driving unit 120 may further include a coupling elastic structure 124.
  • the suspended area 122-2 of the driving beam 122 is connected to the vibration unit 130 through the coupling elastic structure 124.
  • the coupling elastic structure 124 may effectively transmit the force and displacement generated by the deformation of the driving beam 122 to the vibration unit 130.
  • the number of driving beams 122 may be one or more, and the number of coupling elastic structures 124 corresponding to each driving beam 122 may be one or more.
  • the coupling elastic structure 124 may be made of semiconductor materials, polymer materials, etc.
  • Exemplary semiconductor materials may include silicon (Si), silicon dioxide (SiO2), silicon nitride (SiNx), silicon carbide (SiC), etc.
  • Exemplary polymer materials may include polyimide (PI), parylene, polydimethylsiloxane (PDMS), hydrogel, photoresist, silica gel, silicone gel, silicone sealant, etc.
  • the coupling elastic structure 124 may have a single-layer or multi-layer structure.
  • the coupling elastic structure 124 may have a single-layer structure made of a semiconductor material (e.g., Si, SiO2) or a polymer material (e.g., polyimide).
  • the coupling elastic structure 124 may have a multi-layer structure made of multiple semiconductor materials (e.g., a Si/SiO2 double-layer structure, a Si/SiNx double-layer structure, etc.).
  • the coupling elastic structure 124 may have a multi-layer structure made of multiple polymer materials.
  • the coupling elastic structure 124 may have a multi-layer structure made of a polymer material and a semiconductor material.
  • the driving unit 120 may further include a base 126.
  • 120 is fixed to the housing 110 through a base 126.
  • the shape of the base 126 can be consistent with the shape of the housing 110.
  • the base 126 can be a rectangular ring.
  • the fixed area 122-1 of the driving beam 122 is fixed to the base 126.
  • the length of the fixed area 122-1 can be regarded as the same as the width of the base 126.
  • the length of the fixed area 122-1 can also be less than the width of the base 126.
  • the length dimension l of the suspended area 122 can be obtained by subtracting the width of the corresponding base 126 from the total length of the driving beam 122.
  • the vibration unit 130 can receive the force or displacement transmitted by the driving unit 120 and generate corresponding vibrations, thereby driving the air to move.
  • the vibration unit 130 mainly includes a diaphragm 131 and a central reinforcement member 132.
  • the diaphragm 131 is transmission-connected to the suspended area 122-2 of one or more driving beams 122 through the coupling elastic structure 124, and the force and displacement generated by the deformation of the suspended area 122-2 are transmitted to the diaphragm 131, driving the diaphragm 131 to vibrate.
  • the diaphragm 131 can be regarded as being partially connected to the air inertial load through springs and damping, and the radiation of sound pressure is realized through air movement.
  • the air part load pushed by the diaphragm 131 is an inertial load, which is mainly determined by the amount of air pushed by the diaphragm 131.
  • the amount of air pushed by the diaphragm 131 also determines the sound pressure level that the speaker 100 can output.
  • the material of the diaphragm 131 can include but is not limited to organic polymer materials.
  • the organic polymer material can be any one of polyethylene terephthalate (PET), polyetherimide (PEI), polyimide (PI), polyetheretherketone (PEEK), silica gel, etc. or a combination thereof.
  • the diaphragm 131 can have a single-layer or multi-layer structure.
  • the diaphragm 131 can have a single-layer structure made of a polymer material (e.g., polyimide).
  • the diaphragm 131 can have a multi-layer structure made of multiple polymer materials.
  • the central reinforcement 132 is disposed in the central area of the diaphragm 131.
  • the central reinforcement 132 can adjust the stiffness of the diaphragm 131, thereby adjusting the vibration mode of the diaphragm 131, thereby improving the vibration mode of the speaker 100 and enhancing the output performance of the speaker 100.
  • the central reinforcement 132 can adjust the high-order vibration mode of the diaphragm 131 at high frequencies.
  • the range of high frequencies corresponding to different scenarios may be different.
  • high frequencies may refer to above 3kHz; for example, in other scenarios, high frequencies may also refer to 10kHz-20kHz, etc.
  • the central reinforcement 132 may be disposed on the side of the diaphragm 131 close to the rear cavity 112 (as shown in FIG. 7), or on the side of the elastic member 131 away from the rear cavity 112.
  • the material of the central reinforcement 132 may include metal materials, semiconductor materials, anisotropic materials, etc.
  • Exemplary metal materials may include stainless steel, aluminum alloy, magnesium-lithium alloy, copper, copper alloy, etc.
  • Exemplary anisotropic materials may include carbon fiber, FR4 epoxy glass fiber board, etc.
  • Exemplary semiconductor materials may include silicon (Si), silicon dioxide (SiO 2 ), silicon nitride (SiNx), silicon carbide (SiC), etc.
  • the central reinforcement 132 when the material of the central reinforcement 132 is a semiconductor material, the central reinforcement 132 may have a single-layer or multi-layer structure.
  • the central reinforcement 132 may have a single-layer structure made of a semiconductor material (e.g., Si, SiO 2 ).
  • the coupled elastic structure 124 may have a multi-layer structure made of multiple semiconductor materials (e.g., a Si/SiO 2 double-layer structure, a Si/SiNx double-layer structure, etc.).
  • the speaker 100 may further include a vibration transmission unit 140.
  • the vibration transmission unit 140 is respectively connected to the driving unit 120 (for example, the driving beam 122 or the coupling elastic structure 124) and the diaphragm 131.
  • the vibration transmission unit 140 can transmit the driving force and displacement output by the driving unit 120 to the diaphragm 131, and promote the diaphragm 131 to vibrate, thereby generating sound output.
  • the vibration transmission unit 140 in order to reduce the transmission loss of the force and displacement between the driving unit 120 and the diaphragm 131, can select a material with high stiffness and low density.
  • the material of the vibration transmission unit 140 may include metal materials, semiconductor materials, etc.
  • Exemplary metal materials may include stainless steel, aluminum alloy, magnesium-lithium alloy, copper, copper alloy, etc.
  • Exemplary semiconductor materials may include silicon (Si), silicon dioxide (SiO2), silicon nitride (SiNx), silicon carbide (SiC), etc.
  • the central reinforcement 132 may have a single-layer or multi-layer structure.
  • the vibration transfer unit 140 may have a single-layer structure made of a semiconductor material (e.g., Si, SiO2).
  • the vibration transfer unit 140 may have a multi-layer structure made of multiple semiconductor materials (e.g., a Si/SiO2 double-layer structure, a Si/SiNx double-layer structure, etc.).
  • a single driving beam 122 can be regarded as a loaded beam-shaped cantilever beam structure, and its natural frequency calculation formula can be determined by formula (6):
  • the suspended region 122-2 in the direction extending from the fixed region 122-1 to the suspended region 122-2 (i.e., the x direction shown in the figure), the suspended region 122-2 has a length dimension l; in the vibration direction of the vibration unit 130 (i.e., the z direction shown in the figure), the suspended region 122-2 has a thickness dimension h.
  • the value of the ratio of the thickness dimension of the suspended area 122-2 to the square of the length dimension of the suspended area 122-2 to the power of one-half is in the range of 0.01-0.3.
  • a parameter ⁇ may be defined to represent the relationship between the length dimension l and the thickness dimension h of the suspended area 122-2. That is, ⁇ is the power of one-half of the ratio of the thickness dimension h to the square of the length dimension l.
  • ⁇ may be represented by formula (7):
  • the value of ⁇ can reflect the stiffness of the suspended area 122-2 of the driving beam 122.
  • the thickness h of the suspended area 122-2 is small, the length l is large, the suspended area 122-2 is easy to deform, and the stiffness is small.
  • the thickness h of the suspended area 122-2 is large, the length l is small, the suspended area 122-2 is not easy to deform, and the stiffness is large.
  • the value range of ⁇ can be 0.01-0.3, so as to design the deformation of the suspended area 122-2 and the stiffness and mass of the driving unit 120, thereby improving the sensitivity of the speaker 100, optimizing the vibration mode of the speaker 100, and enhancing the output performance of the speaker 100.
  • ⁇ For more information about ⁇ , please refer to Figure 12 and related content, which will not be repeated here.
  • FIG12 is a schematic diagram of the frequency response curves of the loudspeaker corresponding to different parameters ⁇ shown in some embodiments of the present specification.
  • the stiffness of the driving beam 122 is very small, the driving beam 122 cannot effectively drive the load, the output of the loudspeaker 100 is very low, the overall height of curve L121 is low, and a second-order mode is generated in a lower frequency band (e.g., 500Hz-2000Hz), resulting in frequency response peaks and valleys.
  • a second-order mode is generated in a lower frequency band (e.g., 500Hz-2000Hz), resulting in frequency response peaks and valleys.
  • the value of ⁇ gradually increases from 0.04 to 0.15, the overall corresponding curve gradually moves upward, the resonance peak position of the corresponding curve gradually moves to the right, and the corresponding resonance frequency f gradually increases.
  • the resonance peak corresponding to curve L124 is between 1000Hz-2000Hz, that is, the corresponding resonance frequency f is between 1000Hz-2000Hz; the overall height of curve L124 is relatively high, and the low-frequency (e.g., 500Hz-2000Hz) output of the speaker 100 is relatively high, but the mid-high frequency (e.g., above 2000Hz) output is relatively low.
  • the stiffness of the driving beam 122 is relatively large, and the resonance peak corresponding to curve L125 is located to the right, and the corresponding resonance frequency f is between 2000Hz-5000Hz; the overall height of curve L125 is relatively high, and the speaker 100 has a relatively high output sound pressure level in the mid-high frequency (e.g., above 2000Hz), but the output of the speaker 100 in the low frequency (e.g., 1000Hz-2000Hz) is relatively low.
  • the value range of ⁇ can be 0.04-0.15.
  • the value range of ⁇ in order to improve the output of the speaker 100 in low frequency and mid-high frequency, can be 0.05-0.13.
  • the value of ⁇ can be 0.1, so that the speaker 100 has a higher output in both low frequency and mid-high frequency ranges.
  • the main frequency band range of the speaker 100 can be determined according to different application scenarios of the speaker 100, so that different values of the parameter ⁇ can be used.
  • the value of ⁇ can be 0.15
  • the corresponding resonant frequency f of the speaker 100 is between 2000Hz-5000Hz
  • the output of the speaker 100 in the middle and high frequencies is relatively large.
  • the effective frequency band of the speaker 100 needs to be as wide as possible.
  • the value of ⁇ can be 0.09, and the frequency response curve L123 of the corresponding speaker 100 has a relatively large flat area, and has a relatively large output in both low frequencies (e.g., 500Hz-2000Hz) and middle and high frequencies (e.g., above 2000Hz).
  • the vibration direction of the vibration unit 130 is the deformation direction (i.e., the z direction) of the driving beam 122.
  • the driving beam 122 includes a substrate layer 1225, a first electrode layer 12211, a piezoelectric layer 12212, a second electrode layer 12213, and a reinforcement layer 1223 stacked along the vibration direction (i.e., the z direction) of the vibration unit 130.
  • the first electrode layer 12211, the piezoelectric layer 12212, and the second electrode layer 12213 may form a piezoelectric structure 1221, and the first electrode layer 12211 and the second electrode layer 12213 are respectively located on opposite sides of the piezoelectric layer 12212.
  • the piezoelectric structure 1221 may cause the driving unit 120 to output vibrations from the suspended region 122-2 in response to an electrical signal. In the extension direction from the fixed region 122-1 to the suspended region 122-2, the piezoelectric structure 1221 may partially or completely cover the suspended region 122-2.
  • the piezoelectric structure 1221 can be deformed under the action of the driving voltage, thereby generating vibration.
  • the piezoelectric layer 12212 may be made of a material having a piezoelectric effect (e.g., piezoelectric ceramics, piezoelectric quartz, piezoelectric crystals, piezoelectric polymers, etc.).
  • the material of the piezoelectric layer 12212 may include, but is not limited to, aluminum nitride (AlN), lead zirconate titanate (PZT), zinc oxide (ZnO), etc.
  • the first electrode layer 12211 and the second electrode layer 12213 may be made of a material with strong conductivity (e.g., metal, alloy, conductive polymer material, etc.).
  • the first electrode layer 12211 and the second electrode layer 12213 may include metal silver (Ag), molybdenum (Mo), copper (Cu), gold (Au), titanium-gold alloy (Ti/Au), titanium (Ti), aluminum (Al), etc.
  • the reinforcement layer 1223 can change the mechanical properties of the driving unit 120, for example, improve the damping and stiffness of the driving unit 120.
  • the reinforcement layer 1223 can be attached to the piezoelectric structure 1221 (for example, the second electrode layer 12213 away from the substrate layer 1225).
  • the piezoelectric structure 1221 can drive the reinforcement layer 1223 to vibrate.
  • the reinforcement layer 1223 can be made of semiconductor materials, polymer materials, etc. Exemplary semiconductor materials may include silicon (Si), silicon oxide (SiO 2 ), silicon nitride (SiNx), silicon carbide (SiC), etc.
  • Exemplary polymer materials may include polyimide (PI), polyparaxylene (Parylene), polydimethylsiloxane (PDMS), hydrogel, photoresist, silica gel, silicone gel, silicone sealant, etc.
  • the reinforcement layer 1223 when the reinforcement layer 1223 is made of a semiconductor material, the reinforcement layer 1223 may have a single-layer or multi-layer structure.
  • the reinforcing layer 1223 may have a single-layer structure made of a semiconductor material (e.g., Si, SiO 2 ).
  • the reinforcing layer 1223 may have a multi-layer structure made of multiple semiconductor materials (e.g., a Si/SiO 2 double-layer structure, a Si/SiNx double-layer structure, etc.).
  • the reinforcing layer 1223 may also be made of an anisotropic material.
  • Exemplary anisotropic materials may include carbon fiber, FR4 epoxy glass fiber board, etc.
  • the reinforcing layer 1223 may also be made of a metal material.
  • Exemplary metal materials may include stainless steel, aluminum alloy, magnesium-lithium alloy, copper, copper alloy, etc.
  • the driving beam 122 may further include a piezoelectric seed layer (not shown in the figure), which may be disposed on a side of the piezoelectric structure 1221 away from the reinforcement layer 1223.
  • the piezoelectric seed layer may allow the piezoelectric layer 12212 to have a better 001 crystal orientation.
  • the material of the piezoelectric seed layer may include a conductive material, such as strontium oxide (SrO), zirconium oxide (ZrO 2 ), etc.
  • the driving beam 122 may further include a buffer layer (not shown in the figure), which may be disposed on a side of the piezoelectric structure 1221 away from the reinforcement layer 1223, for example, the buffer layer may be disposed on a side of the piezoelectric seed layer close to the reinforcement layer 1223.
  • the buffer layer may also allow the piezoelectric layer 12212 to have a better 001 crystal orientation.
  • the material of the buffer layer may include, but is not limited to, lithium niobate (LiNbO 3 ), etc.
  • the driving beam 122 may further include a substrate layer 1225 (as shown in FIG. 11 ), and the substrate layer 1225 is disposed on a side of the piezoelectric structure 1221 away from the reinforcing layer 1223.
  • the substrate layer 1225 may be disposed on a side of the buffer layer away from the reinforcing layer 1223.
  • the substrate layer 1225 may cooperate with the reinforcing layer 1223 to adjust the stiffness and damping of the driving unit 120, as well as the position of the neutral plane (not shown in the figure) of the driving unit 120, thereby adjusting the output performance of the driving unit 120.
  • the piezoelectric structure 1221 may be located on one side of the neutral plane of the driving beam 122 (for example, the neutral plane is located in the reinforcing layer 1223), so that when the driving unit 120 is bent, the elongation (or compression) deformation generated by the tensile stress (or compressive stress) of the piezoelectric structure 1221 can generate a greater vibration.
  • the stiffness of the driving unit 120 can be adjusted by setting the substrate layer 1225, thereby adjusting the vibration mode of the driving unit 120 and improving the output performance of the speaker 100.
  • the material of the substrate layer 1225 may include, but is not limited to, semiconductor materials.
  • Exemplary semiconductor materials may include silicon (Si), silicon dioxide (SiO 2 ), silicon nitride (SiNx), silicon carbide (SiC), etc.
  • the substrate layer 1225 may have a single-layer or multi-layer structure.
  • the substrate layer 1225 may have a single-layer structure made of a semiconductor material (e.g., Si, SiO 2 ).
  • the substrate layer 1225 may have a multi-layer structure made of multiple semiconductor materials (e.g., a Si/SiO 2 double-layer structure, a Si/SiNx double-layer structure, etc.).
  • the substrate layer 1225 may directly use SOI (Silicon On Insulator) wafer top silicon.
  • the substrate layer 1225 is the internal load of the driving beam 122 relative to the piezoelectric layer 12212.
  • the parameter ⁇ can be defined as the ratio of the thickness hc of the substrate layer 1225 to the thickness hp1 of the piezoelectric layer 12212, and the reasonable relationship between the thickness hp1 of the piezoelectric layer 12212 and the thickness hc of the substrate layer 1225 can be determined based on the frequency response curve diagram of the speaker corresponding to different ⁇ .
  • the relevant content please refer to FIG. 13 and its related description.
  • the parameter ⁇ can be defined as the ratio of the thickness hc of the substrate layer 1225 to the thickness hp1 of the piezoelectric layer 12212:
  • FIG13 is a schematic diagram of the frequency response curves of the loudspeaker corresponding to different ⁇ values according to some embodiments of the present specification.
  • the thickness hc of the substrate layer 1225 is larger, thus providing a larger internal load for the piezoelectric layer 12212, limiting the movement of the driving beam 122, and thus reducing the output of the speaker 100, and the overall height of the corresponding curve L134 is lower.
  • the thickness hc of the substrate layer 1225 is larger, thus providing a larger internal load for the piezoelectric layer 12212, limiting the movement of the driving beam 122, and the output of the speaker 100 is significantly reduced, and the curve L135 is located below the curve L134 as a whole.
  • the thickness hc of the substrate layer 1225 is significantly reduced, thus providing a significantly reduced internal load for the piezoelectric layer 12212, and limiting the movement of the driving beam 122, and thus significantly increasing the output of the speaker 100, and the corresponding curve L133 is significantly moved upward relative to the curve L134 as a whole.
  • the thickness hc of the substrate layer 1225 is further reduced compared to the piezoelectric layer 12212, so the internal load provided by the substrate layer 1225 for the piezoelectric layer 12212 is further reduced, the motion restriction of the driving beam 122 is further reduced, the output of the loudspeaker 100 is further increased, and the corresponding curve L132 is obviously moved upward as a whole relative to the curve L133.
  • the resonance peak of the corresponding curve gradually shifts to the left, and the low-frequency (e.g., 0Hz-2000Hz) output of the loudspeaker 100 gradually increases.
  • the internal load provided by the substrate layer 1225 is 0, that is, without the substrate layer 1225, the output of the speaker 100 can also be increased, and the corresponding curve L131 is obviously moved upward as a whole relative to the curves L133 and L134.
  • the curve L131 is obviously located below the curve L132 in the low frequency range (for example, below 1000 Hz), and the curve L131 is not much different from the curve L132 in the medium and high frequency range (for example, above 1500 Hz).
  • the substrate layer 1225 and the reinforcement layer 1223 are designed, which can play the role of adjusting the stiffness and resonant frequency f of the driving beam 122, increasing reliability, adjusting the neutral plane position of the driving beam 122, and adjusting the internal load of the driving beam 122.
  • the substrate layer 1225 in order to process the driving beam 122, can be used as a cutoff layer for processing, so the design of the substrate layer 1225 can improve the yield (i.e., qualified rate) of the driving beam 122.
  • the value range of ⁇ can be 0-2. In some embodiments, in order to further improve the output performance of the speaker 100, the value range of ⁇ can be 0-1.5.
  • the structure of the driving unit 120 may also affect the driving force and displacement outputted by the driving unit 120 , and the resonant frequency f, thereby affecting the output performance, resonant frequency f, reliability, and manufacturing process of the speaker 100 .
  • 14A to 14E are schematic diagrams of driving beams with different structures according to some embodiments of the present specification.
  • the driving beam 122 may include two piezoelectric structures (i.e., a first piezoelectric structure 1221a and a second piezoelectric structure 1221b) and two reinforcement layers (i.e., a first reinforcement layer 1223a and a second reinforcement layer 1223b).
  • a first piezoelectric structure 1221a and a second piezoelectric structure 1221b two piezoelectric structures
  • two reinforcement layers i.e., a first reinforcement layer 1223a and a second reinforcement layer 1223b.
  • the first piezoelectric structure 1221a, the second piezoelectric structure 1221b, the first reinforcement layer 1223a, and the second reinforcement layer 1223b are connected in sequence.
  • the second electrode layer 12213 located between the two can be shared, as shown in FIG14A . That is, in the thickness direction of the driving beam 122, from bottom to top, the first electrode layer 12211, the first piezoelectric layer 12212a, the second electrode layer 12213, the second piezoelectric layer 12212b, the third electrode layer 12214, the first reinforcement layer 1223a, and the second reinforcement layer 1223b are sequentially distributed.
  • the materials of the first reinforcement layer 1223a and the second reinforcement layer 1223b may be the same or different.
  • the polarization direction of each piezoelectric layer (such as the first piezoelectric layer 12212a and the second piezoelectric layer 12212b) and the positive and negative applied voltage can be designed so that the deformation direction of the piezoelectric layers on one side of the neutral plane of the driving beam 122 is the same, that is, the same is elongation deformation or shortening deformation; by designing the thickness of the piezoelectric layer and the reinforcement layer, the neutral plane is located inside the first reinforcement layer 1223a or the second reinforcement layer 1223b.
  • the polarization directions of any two adjacent piezoelectric layers (such as the first piezoelectric layer 12212a and the second piezoelectric layer 12212b) are opposite (the two cases represented by the dotted arrow and the solid arrow as shown in FIG14A), and the potential direction and the polarization direction of the voltage applied to the driving beam 122 are the same as those of the piezoelectric layers (such as the first piezoelectric layer 12212a and the second piezoelectric layer 12212b); or the potential direction and the polarization direction of the voltage applied to the driving beam 122 are opposite as those of the piezoelectric layers (such as the first piezoelectric layer 12212a and the second piezoelectric layer 12212b).
  • the thickness hd 1 of the first electrode layer 12211, the thickness hd 2 of the second electrode layer 12213, and the thickness hd 3 of the third electrode layer 12214 may be 20 nm-200 nm.
  • the value of the design parameter ⁇ is adjusted to adjust the stiffness of the driving beam 122, and the thickness hd 1 of the first electrode layer 12211, the thickness hd 2 of the second electrode layer 12213, and the thickness hd 3 of the third electrode layer 12214 may be 40 nm-130 nm.
  • the thickness hd 1 of the first electrode layer 12211, the thickness hd 2 of the second electrode layer 12213, and the thickness hd 3 of the third electrode layer 12214 may be the same or different.
  • the thickness hp 1 of the first piezoelectric layer 12212a and the thickness hp 2 of the second piezoelectric layer 12212b may be 1 ⁇ m-5 ⁇ m.
  • the value of the design parameter ⁇ is adjusted to adjust the stiffness of the driving beam 122, and the thickness hp 1 of the first piezoelectric layer 12212a and the thickness hp 2 of the second piezoelectric layer 12212b may be 1.5 ⁇ m-2.5 ⁇ m.
  • the thickness hp 1 of the first piezoelectric layer 12212a and the thickness hp 2 of the second piezoelectric layer 12212b may be the same or different.
  • the thickness hj 1 of the first reinforcing layer 1223a and the thickness hj 2 of the second reinforcing layer 1223b can be 5 ⁇ m-40 ⁇ m.
  • the value of the design parameter ⁇ is adjusted to adjust the stiffness of the driving beam 122.
  • the thickness hj 1 of the first reinforcing layer 1223a and the thickness hj 2 of the second reinforcing layer 1223b can be 5 ⁇ m-25 ⁇ m.
  • the thickness hj 1 of the first reinforcing layer 1223a and the thickness hj 2 of the second reinforcing layer 1223b can be the same or different.
  • the thickness hj 1 of the first reinforcing layer 1223a and the thickness hj 2 of the second reinforcing layer 1223b may be 2 ⁇ m-15 ⁇ m.
  • the value of the design parameter ⁇ is adjusted to adjust the stiffness of the driving beam 122.
  • the thickness hj 1 of the first reinforcing layer 1223a and the thickness hj 2 of the second reinforcing layer 1223b may be 3 ⁇ m-10 ⁇ m.
  • the thickness hj 1 of the first reinforcing layer 1223a and the thickness hj 2 of the second reinforcing layer 1223b may be the same or different.
  • the driving force and displacement output by the driving beam 122 can be adjusted, thereby improving the output performance of the speaker 100 .
  • the driving beam 122 may include three piezoelectric structures (i.e., a first piezoelectric structure 1221a, a second piezoelectric structure 1221b, and a third piezoelectric structure 1221c) and two reinforcement layers (i.e., a first reinforcement layer 1223a and a second reinforcement layer 1223b).
  • the first piezoelectric structure 1221a, the second piezoelectric structure 1221b, the third piezoelectric structure 1221c, the first reinforcement layer 1223a, and the second reinforcement layer 1223b are connected in sequence.
  • the electrode layer located between the two can be shared.
  • the first piezoelectric structure 1221a and the second piezoelectric structure 1221b can share the second electrode layer 12213
  • the second piezoelectric structure 1221b and the third piezoelectric structure 1221c can share the third electrode layer 12214. That is, in the thickness direction of the driving beam 122, from bottom to top, the first electrode layer 12211, the first piezoelectric layer 12212a, the second electrode layer 12213, the second piezoelectric layer 12212b, the third electrode layer 12214, the third piezoelectric layer 1221c, the fourth electrode layer 12215, the first reinforcement layer 1223a, and the second reinforcement layer 1223b are distributed in sequence.
  • the materials of the two reinforcement layers can be the same or different.
  • a piezoelectric seed layer, a buffer layer, etc. can also be provided.
  • the driving beam 122 may include a piezoelectric structure 1221, two reinforcement layers (i.e., a first reinforcement layer 1223a and a second reinforcement layer 1223b) and a substrate layer 1225.
  • the substrate layer 1225, the piezoelectric structure 1221, the first reinforcement layer 1223a and the second reinforcement layer 1223b are connected in sequence. That is, in the thickness direction of the driving beam 122, from bottom to top, the substrate layer 1225, the first electrode layer 12211, the piezoelectric layer 12212, the second electrode layer 12213, the first reinforcement layer 1223a and the second reinforcement layer 1223b are distributed in sequence.
  • the materials of the two reinforcement layers may be the same or different.
  • a piezoelectric seed layer, a buffer layer, etc. may also be provided between the first electrode layer 12211 and the substrate layer 1225 (i.e., below the first electrode layer 12211 and above the substrate layer 1225) in the thickness direction of the driving beam 122.
  • the thickness hc of the substrate layer 1225 may be 100 nm-5000 nm.
  • the value of the design parameter ⁇ is adjusted to adjust the stiffness of the driving beam 122, and the thickness hc of the substrate layer 1225 may be 200 nm-2000 nm.
  • the driving beam 122 may include a piezoelectric structure 1221 and two reinforcement layers (i.e., a first reinforcement layer 1223a and a second reinforcement layer 1223b).
  • the piezoelectric structure 1221, the first reinforcement layer 1223a, and the second reinforcement layer 1223b are connected in sequence. That is, in the thickness direction of the driving beam 122, from bottom to top, the substrate layer 1225, the first electrode layer 12211, the piezoelectric layer 12212, the second electrode layer 12213, the first reinforcement layer 1223a, and the second reinforcement layer 1223b are distributed in sequence.
  • the materials of the two reinforcement layers may be the same or different.
  • a piezoelectric seed layer, a buffer layer, etc. may also be provided below the first electrode layer 12211.
  • the number of reinforcing layers 1223 of the driving beam 122 may be one, two, or multiple of other numbers.
  • the driving beam 122 may include a piezoelectric structure 1221, a reinforcing layer 1223, and a substrate layer 1225. In the thickness direction of the driving beam 122, from bottom to top, the substrate layer 1225, the piezoelectric structure 1221, and the reinforcing layer 1223 are connected in sequence. That is, in the thickness direction of the driving beam 122, from bottom to top, the substrate layer 1225, the first electrode layer 12211, the piezoelectric layer 12212, the second electrode layer 12213, and the reinforcing layer 1223 are distributed in sequence.
  • a piezoelectric seed layer, a buffer layer, etc. may also be provided between the first electrode layer 12211 and the substrate layer 1225 (i.e., below the first electrode layer 12211 and above the substrate layer 1225).
  • the driving beam 122 may include a piezoelectric structure 1221 and a reinforcing layer 1223. In the thickness direction of the driving beam 122, from bottom to top, the piezoelectric structure 1221 and the reinforcing layer 1223 are sequentially connected.
  • the substrate layer 1225, the first electrode layer 12211, the piezoelectric layer 12212, the second electrode layer 12213, and the reinforcing layer 1223 are sequentially distributed.
  • a piezoelectric seed layer, a buffer layer, etc. may also be provided below the first electrode layer 12211.
  • the thickness of the substrate layer 1225 and/or the thickness of the reinforcement layer 1223 can be directly increased to adjust the The stiffness of the driving unit 120 is increased, but increasing the thickness of the substrate layer 1225 and/or the thickness of the reinforcement layer 1223 will increase the load of the piezoelectric layer 12212, resulting in a decrease in the output of the driving unit 120.
  • the driving beam 122 includes a piezoelectric structure and one or more reinforcement layers stacked along the vibration direction (i.e., z direction) of the vibration unit 130, and a groove structure may be provided on the reinforcement layer farthest from the piezoelectric structure (e.g., the second reinforcement layer 1223b shown in Figures 14A to 14D).
  • the groove structure in a direction extending from the fixed region 122 - 1 to the suspended region 122 - 2 , includes a plurality of reinforcing components that are spaced apart, and a groove is provided between any two adjacent reinforcing components.
  • FIG15A is a schematic diagram of a partial structure of an exemplary speaker according to some embodiments of the present specification.
  • FIG15B is a schematic diagram of the internal structure of a drive unit of the speaker in FIG15A.
  • FIG15C is a schematic diagram of a partial structure of an exemplary speaker according to some embodiments of the present specification.
  • FIG15D is a schematic diagram of the internal structure of a drive unit of the speaker in FIG15C.
  • the reinforcing layer 1223 may include a plurality of reinforcing components arranged at intervals along the length direction of the driving beam 122 (i.e., the x direction shown in Fig. 15A).
  • the distance between the neutral plane of the driving unit 120 and the geometric intermediate plane of the piezoelectric layer 12212 can be increased while continuing to increase the thickness of the reinforcing layer 1223 (e.g., the thickness of each reinforcing component), while keeping the load (i.e., the total mass of the substrate layer 1225 and the reinforcing layer 1223) unchanged or reduced; on the other hand, the stiffness of the driving unit 120 can be adjusted by arranging the reinforcing components at intervals, so as to achieve impedance matching between the driving unit 120 and its load, thereby comprehensively improving the output performance of the driving unit 120.
  • a plurality of reinforcing components and the spaces between adjacent reinforcing components together constitute a groove structure.
  • the groove structure in the direction extending from the fixed area 122-1 to the suspended area 122-2 (i.e., the x direction shown in Figure 15A), includes multiple grooves, and the size of the groove close to the fixed area 122-1 is larger than the size of the groove far from the fixed area 122-1, so as to reduce the constraint of the reinforcing component of the fixed area 122-1 close to the driving beam 122 on the bending and deformation of the beam-like structure.
  • the reinforcing component 1223-1 can be arranged as a first reinforcing component at a position of the driving beam 122 close to the fixed area 122-1, and the reinforcing component 1223-4 can be arranged as a second reinforcing component at a position of the driving beam 122 close to the suspended area 122-2.
  • Other reinforcing components e.g., reinforcing components 1223-2, 1223-3, etc.
  • the thickness of the plurality of reinforcing components in the vibration direction of the driving beam 122 can be the same or different.
  • the thickness of the plurality of reinforcing components in the vibration direction of the driving beam 122 can be the same, so as to facilitate the preparation of the reinforcing layer 1223 (or the driving unit 120).
  • the thickness of the plurality of reinforcing components in the vibration direction of the driving beam 122 can be different.
  • the thickness of the reinforcing components in the suspended area 122-2 near the driving beam 122 can be greater than the thickness of the reinforcing components located in the middle area of the beam-like structure of the driving beam 122.
  • the intervals between adjacent reinforcing components form a plurality of grooves (such as groove 1223-7, groove 1223-8, etc.) of the groove structure, and the stiffness of the driving unit 120 can be adjusted by adjusting the size of the groove (i.e., the size of the interval between each two adjacent reinforcing components in the extension direction of the beam-like structure of the driving beam 122).
  • the size of each groove in the extension direction of the beam-like structure of the driving beam 122 can be the same or different.
  • the size wj1 of the groove 1223-7 between the reinforcing component 1223-1 and the reinforcing component 1223-2 can be different from the size wj2 of the groove 1223-8 between the reinforcing component 1223-3 and the reinforcing component 1223-4.
  • the size of the groove close to the fixed area 122-1 is larger than the size of the groove far from the fixed area 122-1.
  • the size wj1 of the groove 1223-7 is larger than the size wj2 of the groove 1223-8.
  • the vibration close to the fixed area 122-1 has a greater impact on the vibration of the driving beam 122.
  • the vibration effect close to the fixed area 122-1 can be improved.
  • the dimensions of the plurality of reinforcing components along the extension direction (x direction) of the beam-like structure of the driving beam 122 may be the same or different.
  • the dimension wp1 of the reinforcing component 1223-5 along the extension direction (x direction) of the beam-like structure of the driving beam 122 may be different from the dimension wp2 of the reinforcing component 1223-6 along the extension direction (x direction) of the beam-like structure of the driving beam 122.
  • different positions of the driving beam 122 contribute differently to the bending deformation.
  • the deformation of the driving beam near the fixed area 122-1 of the driving unit 120 contributes more to the overall deformation of the driving beam than the contribution of the suspended area 122-2 of the driving beam 122.
  • different sizes of reinforcing components can be arranged at different positions in the extension direction of the beam-like structure, and the load of the piezoelectric layer 12212 and the overall stiffness of the driving unit 120 can be adjusted while the position of the neutral plane of the driving unit 120 is effectively adjusted, so that the driving unit 120 outputs a larger displacement, and at the same time, the driving unit 120 and its load (for example, the vibration part of the speaker) are impedance matched or substantially matched, so that the displacement generated by the speaker 100 can be effectively transmitted.
  • the width of the reinforcing component far from the fixing area 122-1 is greater than the width of the reinforcing component close to the fixing area 122-1.
  • the dimension wp2 of the reinforcing component 1223-6 along the extending direction (x direction) of the beam-like structure of the driving beam 122 is greater than the dimension wp1 of the reinforcing component 1223-5 close to the fixing area 122-1 along the extending direction (x direction) of the beam-like structure of the driving beam 122.
  • the vibration close to the fixed area 122-1 has a greater impact on the vibration of the driving beam 122.
  • the vibration effect close to the fixed area 122-1 can be improved.
  • multiple reinforcement components can be arranged along the extension direction of the beam-like structure of the driving beam 122 in a manner of first decreasing in size and then increasing in size.
  • a larger reinforcement component can be arranged at the free end of the driving beam 122 or the fixed area 122-1, while a smaller reinforcement component can be arranged in the middle part of the beam-like structure.
  • the thickness of the reinforcing component can be adjusted by the larger reinforcing component in the area with smaller strain, while reducing the constraint on the deformation of the beam-like structure of the driving beam 122;
  • the stiffness of the beam-like structure of the driving beam 122 can be enhanced by the larger reinforcing component in the area with larger strain, thereby making the beam-like structure of the driving beam 122 less likely to break during bending vibration, thereby enhancing the reliability of the beam-like structure of the driving beam 122;
  • a smaller reinforcing component in the middle area of the beam-like structure of the driving beam 122 while increasing the stiffness of the beam-like structure, the deformation constraint of the reinforcing component on the beam-like structure can be reduced as much as possible,
  • the driving unit 120 includes two groups of driving beams located on opposite sides of the housing 110 , each of the two groups of driving beams includes one or more driving beams, and the shapes of the driving beams include rectangle, trapezoid or circular chamfer.
  • 16A to 16G are schematic diagrams of driving units with different structures according to some embodiments of the present specification.
  • the output performance, resonance frequency f, reliability and manufacturing process of the loudspeaker 100 are adjusted by designing the shape of the driving beam 122 of the driving unit 120 .
  • the driving unit 120 may include two driving beams 122, and both driving beams 122 are rectangular structures, and the fixed area 122-1 and the suspended area 122-2 are respectively arranged at the ends of the two opposite sides of the rectangular structure.
  • the fixed areas 122-1 of the two driving beams 122 are respectively arranged at the two long sides of the base 126 of the rectangular ring structure.
  • the suspended areas 122-2 of the two driving beams 122 are respectively connected to the vibration transmission unit 140 through one or more coupling elastic structures 124, and the vibration signal is transmitted to the vibration unit 130 through the vibration transmission unit 140.
  • the driving unit 120 may include two driving beams 122, and both driving beams 122 are trapezoidal structures, the fixed area 122-1 is arranged at one end where the longer lower base of the trapezoidal structure is located, and the suspended area 122-2 is arranged at one end where the shorter upper base of the trapezoidal structure is located.
  • the fixed areas 122-1 of the two driving beams 122 are respectively arranged at the two long sides of the base 126 of the rectangular ring structure.
  • the suspended areas 122-2 of the two driving beams 122 are respectively connected to the vibration transmission unit 140 through one or more coupling elastic structures 124, and the vibration signal is transmitted to the vibration unit 130 through the vibration transmission unit 140.
  • the design of the driving beam 122 of the trapezoidal structure shown in FIG16A can reduce the stress of the local area of the driving beam 122 and improve the reliability; at the same time, the stiffness of the driving beam 122 is adjusted, thereby affecting the output performance and the resonant frequency f of the speaker 100.
  • the driving unit 120 may include two driving beams 122, and both driving beams 122 have rounded structures. Specifically, one end of the suspended area of the driving beam 122 is provided with a rounded corner with a smooth transition, as shown in FIG16B . In some embodiments, the arc radius corresponding to the rounded corner is not greater than the length l of the suspended area 122-2.
  • the fixed areas 122-1 of the two driving beams 122 are respectively arranged at the two long sides of the base 126 of the rectangular ring structure.
  • the suspended areas 122-2 of the two driving beams 122 are respectively connected to the vibration transfer unit 140 through one or more coupling elastic structures 124, and the vibration signal is transmitted to the vibration unit 130 through the vibration transfer unit 140.
  • the design of the driving beam 122 with a rounded corner structure shown in Figure 16B can further reduce the stress in the local area of the driving beam 122 and improve the reliability; at the same time, the stiffness of the driving beam 122 is adjusted, thereby affecting the output performance and resonant frequency f of the speaker 100.
  • the output performance, resonance frequency f, reliability and manufacturing process of the loudspeaker 100 may also be adjusted.
  • the driving unit 120 may include a plurality of driving beams 122 of rectangular structures (or a plurality of trapezoidal structures, or a plurality of structures with rounded corners, etc.), and the plurality of driving beams 122 may be respectively arranged on the two long sides of the base 126 of the rectangular ring structure, and the number of driving beams 122 arranged on the two long sides may be the same or different.
  • the fixed areas 122-1 of each driving beam 122 are respectively connected to the long sides of the base 126.
  • the suspended areas 122-2 of each driving beam 122 transmit the vibration signal to the vibration unit 130 through the vibration transmission unit 140 through the corresponding coupling elastic structure 124.
  • the suspended areas 122-2 of each driving beam 122 may be connected or may not be connected and are independent of each other.
  • the number of the resonant frequencies of the plurality of driving beams 122 may be at least one, that is, the resonant frequencies of the plurality of driving beams 122 may all be the same, or at least one may be different, thereby improving the resonance of the speaker 100. The number of peaks is increased to improve the output performance of the speaker 100.
  • the driving unit 120 further includes two sets of driving beams 122 located on another opposite side of the housing 110 .
  • the driving unit 120 may include four driving beams 122, all of which are trapezoidal structures, and the fixed area 122-1 is arranged at one end where the lower bottom of the trapezoidal structure is longer, and the suspended area 122-2 is arranged at one end where the upper bottom of the trapezoidal structure is shorter.
  • a pair of the four driving beams 122, the corresponding fixed areas 122-1 are respectively arranged at the two long sides of the base 126 of the rectangular ring structure.
  • the pair of driving beams 122 can be defined as long-side driving beams 122A.
  • Another pair of the four driving beams 122, the corresponding fixed areas 122-1 are respectively arranged at the two short sides of the base 126 of the rectangular ring structure.
  • the pair of driving beams 122 can be defined as short-side driving beams 122B.
  • the suspended areas 122-2 corresponding to the four driving beams 122 are respectively connected to the vibration transmission unit 140 through one or more coupling elastic structures 124, and the vibration signal is transmitted to the vibration unit 130 through the vibration transmission unit 140.
  • the tilt and flip modes of the speaker 100 can be reduced, and the output performance of the speaker 100 can be improved.
  • the driving force and displacement of the driving unit 120 can be improved, thereby increasing the output sound pressure level of the speaker 100.
  • the resonant frequency of the long-side driving beam 122A and the resonant frequency of the short-side driving beam 122B are located in different frequency bands, so that the speaker 100 has multiple resonant frequencies, the coverage frequency band range of the speaker 100 is increased, and the output performance of the speaker 100 is enhanced.
  • the resonant frequencies of the two driving beams 122 included therein may also be the same or different so as to increase the number of resonant peaks and output performance of the speaker 100.
  • the driving unit 120 may include four driving beams 122 of rectangular structures (or four structures with rounded corners, etc.), one pair of the four driving beams 122 may be arranged at two long sides of the base 126 of the rectangular ring structure, and another pair of the four driving beams 122 may be arranged at two short sides of the base 126 of the rectangular ring structure.
  • a pair of driving beams 122 arranged at the long sides of the base 126 may be defined as long side driving beams 122A
  • a pair of driving beams 122 arranged at the short sides of the base 126 may be defined as short side driving beams 122B.
  • each driving beam 122 The fixed areas 122-1 of each driving beam 122 are respectively connected to the long sides of the base 126.
  • the suspended areas 122-2 of each driving beam 122 transmit the vibration signal to the vibration unit 130 through the vibration transmission unit 140 through the corresponding coupling elastic structure 124.
  • the design of providing driving beams 122 on all four sides of the base 126 shown in FIG. 16E can reduce the tilt and flip modes of the speaker 100 , while further improving the output of the speaker 100 .
  • the transmission effect of force and displacement between the driving unit 120 and the vibration unit 130 can be improved, thereby enhancing the output performance of the speaker 100 .
  • the vibration transfer unit 140 shown in FIG16F may include an I-shaped structure.
  • the design of the I-shaped structure enables the force and displacement generated by the short-side driving beam 122B to be effectively transmitted to the vibration unit 130, thereby improving the energy transfer efficiency from the driving unit 120 to the vibration unit 130, and further improving the output performance of the speaker 100.
  • the vibration characteristics of the driving unit 120 can be adjusted, thereby affecting the vibration characteristics of the loudspeaker 100 and improving the output performance of the loudspeaker 100 .
  • the driving beam 122 is not directly connected to the base 126, but the driving beam 122 is indirectly connected to the base 126 through the coupling elastic structure 124.
  • the suspended area 122-2 of the driving beam 122 can be the part of the driving beam 122 between the coupling elastic structure 124 connected to the base 126 and the coupling elastic structure 124 connected to the vibration transfer unit 140.
  • the base 126 can be regarded as the fixed area 122-1 of the driving beam 122.
  • the setting that the driving beam 122 is indirectly connected to the base 126 through the coupling elastic structure 122 can make the driving beam 122 itself act as a spring mass system, which has its own resonant frequency, thereby affecting the overall vibration characteristics of the driving unit 120, and then adjusting the vibration characteristics of the speaker 100.
  • the structure of the driving beam 122 and the vibration transfer unit 140 can be designed to adjust the mass and/or impedance of the driving unit 120 and the vibration characteristics of the driving unit 120, thereby adjusting the vibration characteristics of the speaker 100 and improving the output performance of the speaker 100.
  • the vibration transfer unit 140 includes a ring structure, and any set of driving beams 122 are connected to different areas of the vibration transfer unit 140 .
  • 17A to 17K are schematic diagrams of driving units with different structures according to some embodiments of the present specification.
  • the vibration transmission unit 140 is an annular structure, and the suspended area 122-2 of the driving beam 122 is directly connected to the outer side of the vibration transmission unit 140 of the annular structure, and the force and displacement of the driving beam 122 are transmitted to the vibration unit 130.
  • the force and displacement generated by the long side driving beam 122A and the short side driving beam 122B can be effectively transmitted to the vibration unit 130.
  • Unit 130 thereby improving the driving performance of the driving unit 120, and further improving the output performance of the speaker 100.
  • one or more coupling elastic structures 124 can also be set between the four driving beams 122 and the vibration transfer unit 140 of the annular structure to connect them, so as to achieve impedance adjustment of the driving unit 120 and improve the output performance of the speaker 100.
  • the vibration transfer unit 140 is connected to a second driving beam, and the second driving beam is indirectly connected to the housing 110 .
  • the driving unit 120 shown in FIG. 17B may further include a second driving beam, which is disposed in the vibration transfer unit 140 of the annular structure, and the second driving beam is connected to the inner side of the vibration transfer unit 140 of the annular structure.
  • the second driving beam may also provide driving force and displacement for the vibration unit 130, thereby improving the output performance of the speaker 100.
  • the second driving beam may include two rectangular driving beams 122, and the two rectangular driving beams 122 are respectively connected to the two long sides of the vibration transfer unit 140 of the annular structure.
  • the two rectangular driving beams 122 respectively connected to the two long sides of the inner side of the vibration transfer unit 140 of the annular structure may be referred to as the long-side second driving beam 122C.
  • the vibration unit further includes a mass element, and one end of the second driving beam away from the vibration transmission unit is directly connected to the mass element; or, one end of the second driving beam away from the vibration transmission unit is connected to the mass element via a coupling elastic structure.
  • the second driving beam 122C may be connected to a mass element M 2 .
  • a mass element M 2 For example, one end of each of the two long-side second driving beams 122C away from the vibration transmission unit 140 is connected to the mass element M 2 .
  • the mass element M 2 and the long-side second driving beam 122C may form a spring mass damping system, which may affect the vibration characteristics of the driving unit 120 , thereby affecting the vibration characteristics of the speaker 100 and improving the output performance of the speaker 100 .
  • the second driving beam may include two trapezoidal driving beams 122 respectively connected to the inner side of the short side of the vibration transmission unit 140 of the annular structure in addition to the two long-side second driving beams 122C.
  • the two trapezoidal driving beams 122 respectively connected to the two short sides of the vibration transmission unit 140 of the annular structure may be defined as short-side second driving beams 122D, as shown in FIG. 17C.
  • the second driving beams (e.g., the long-side second driving beams 122C and the short-side second driving beams 122D) may provide driving force and displacement for the vibration unit 130, thereby improving the output performance of the speaker 100.
  • the second driving beam (e.g., the long-side second driving beam 122C and the short-side second driving beam 122D) may be connected to a mass element M2 via a coupling elastic structure 124.
  • a coupling elastic structure 124 For example, one end of each of the two long-side second driving beams 122C away from the vibration transmission unit 140 and one end of each of the two short-side second driving beams 122D away from the vibration transmission unit 140 are respectively connected to the mass element M2 via one or more coupling elastic structures 124.
  • the mass element M2 , the coupling elastic structure 124, and the second driving beam may constitute a spring mass damping system, which may affect the vibration characteristics of the driving unit 120, thereby affecting the vibration characteristics of the speaker 100 and improving the output performance of the speaker 100.
  • the vibration unit further includes a mass element, and the vibration transfer unit is connected to the mass element via a coupling elastic structure.
  • the inner side of the ring-shaped vibration transfer unit 140 may be connected to a mass element M 2 via a coupling elastic structure 124.
  • the mass element M 2 and the coupling elastic structure 124 may form a spring mass damping system, which may affect the vibration characteristics of the driving unit 120, thereby affecting the vibration characteristics of the speaker 100 and improving the output performance of the speaker 100.
  • the suspended area 122-2 of the long side driving beam 122A and the suspended area of the short side driving beam 122B are respectively connected to the outer side of the vibration transfer unit 140 of the rectangular structure through one or more coupling elastic structures 124, so as to transfer the force and displacement generated by the long side driving beam 122A and the short side driving beam 122B to the vibration unit 130.
  • the coupling elastic structure 124 By providing the coupling elastic structure 124 between the long side driving beam 122A and the vibration transfer unit 140 and between the short side driving beam 122B and the vibration transfer unit 140, the impedance adjustment of the driving unit 120 is achieved, and the output performance of the speaker 100 is improved.
  • the mass element M 2 , the coupling elastic structure 124 and the second driving beam structure eg, the long-side second driving beam 122C and the short-side second driving beam 122D
  • can form a spring mass damping system which can affect the vibration characteristics of the vibration unit 130 , thereby affecting the vibration characteristics of the speaker 100 and improving the output performance of the speaker 100 .
  • the suspended area 122-2 of the long side driving beam 122A and the suspended area of the short side driving beam 122B are respectively connected to the outer side of the vibration transfer unit 140 of the rectangular structure through one or more coupling elastic structures 124, so that the force and displacement generated by the long side driving beam 122A and the short side driving beam 122B are transmitted to the vibration unit 130.
  • the coupling elastic structure 124 between the long side driving beam 122A and the vibration transfer unit 140 and between the short side driving beam 122B and the vibration transfer unit 140, the impedance of the driving unit 120 is adjusted, and the output performance of the speaker 100 is improved.
  • the mass element M2 and the coupling elastic structure 124 can form a spring mass damping system, which can affect the vibration characteristics of the driving unit 120, thereby affecting the vibration characteristics of the speaker 100 and improving the output performance of the speaker 100.
  • the shape structure of the driving beam 122 (such as the long side driving beam 122A, the short side driving beam 122B, the long side second driving beam 122C, and the short side second driving beam 122D) included therein may include but is not limited to a rectangular structure, a trapezoidal structure, a structure with rounded corners, etc., and this specification does not impose any restrictions on this.
  • two sets of driving beams 122 arranged opposite to each other may extend alternately, and the corresponding vibration transmission unit 140 may include a folding structure, and any set of driving beams 122 are connected to different areas of the vibration transmission unit 140.
  • any driving beam 122 may be directly connected to the vibration transmission unit 140; or, any driving beam 122 may be connected to the vibration transmission unit 140 through a coupling elastic structure 124.
  • the size of the driving beam 122 can be adjusted in a larger range, so that the resonant frequency of the speaker 100 can be adjusted in a larger range, thereby improving the output performance of the speaker 100.
  • multiple driving beams 122 can be designed separately so that the multiple driving beams 122 can have one or more resonant frequencies f, so as to adjust the vibration mode of the speaker 100.
  • each driving beam 122 can be independent of each other, so that each driving beam 122 can generate deformation output driving force and displacement separately, so as to adjust the vibration mode of the speaker 100.
  • the driving unit 120 may include two groups of driving beams located on opposite sides of the housing 110, each of the two groups of driving beams includes one or more driving beams 122 (for example, the number of driving beams 122 may be three, five, six, etc.), and the multiple driving beams 122 are arranged in sequence.
  • the multiple driving beams 122 may be independent of each other, or at least one driving beam 122 may be connected by a structure, such as covering a flexible film, designing an elastic connection structure, etc.
  • any two adjacent driving beams 122 are staggered and extended (i.e., mutually staggered).
  • the fixed area 122-1 of one driving beam 122 is set on one of the long sides of the base 126, and the fixed area 122-1 of the other driving beam 122 is set on the other long side of the base 126, and the suspended areas 122-2 of the two driving beams 122 are respectively connected to the vibration transfer unit 140 through one or more coupling elastic structures 124, so as to realize the elastic connection between the driving beam 122 and the vibration transfer unit 140, so as to transfer the force and displacement output by the driving beam 122 to the vibration unit 130.
  • the ends where the suspended areas 122-2 of the plurality of driving beams 122 are located are also staggered.
  • the vibration transfer unit 140 can be a folding structure, as shown in FIG. 17G.
  • the adjustment range of the size of the driving beam 122 can be increased, so that the length l of the suspended area 122-2 of the driving beam 122 can be close to the length or width of the rectangular structure of the base 126, so that the resonant frequency of the speaker 100 can be adjusted accordingly in a larger range, thereby improving the output performance of the speaker 100.
  • each driving beam 122 and the corresponding coupling elastic structure 124 and vibration transfer unit 140 can be independently arranged.
  • different resonant frequencies f can be achieved by separately designing different driving beams 122, so as to achieve the adjustment of the vibration mode of the speaker 100; and each driving beam 122 can be excited separately, so that each driving beam 122 can generate deformation output driving force and displacement separately, thereby achieving the adjustment of the vibration mode of the speaker 100.
  • the suspended area 122-2 of the driving beam 122 can be directly connected to the vibration transfer unit 140, thereby improving the transmission efficiency of force and displacement between the driving beam 122 and the vibration unit 130, improving the output of the vibration unit 130, and thus improving the output performance of the speaker 100.
  • the deflection (maximum deformation) of the driving beam 122 during deformation can affect the driving force and displacement output by the driving beam 122, thereby affecting the maximum displacement of the diaphragm 131 of the vibration unit 130 during vibration, affecting the amount of air pushed by the diaphragm 131, and further affecting the output performance of the speaker 100.
  • the deflection of the driving beam 122 is significantly affected by the length of the driving beam 122.
  • the driving force and displacement output by the driving unit 120 can be increased by increasing the equivalent length of the suspended area 122-2 of the driving beam 122, increasing the vibration displacement of the diaphragm 131 of the vibration unit 130, and further improving the output performance of the speaker 100.
  • each of the two relatively arranged groups of driving beams 122 includes a driving beam 122 with a bending structure, and the two driving beams 122 with a bending structure in the two groups of driving beams 122 are each coupled to the same vibration transfer unit 140 at one end away from the corresponding fixed area 122 - 1.
  • the driving unit 120 may include two driving beams 122, and the fixed areas 122-1 of the two driving beams 122 are respectively fixed to two opposite long sides of the base 126.
  • each driving beam 122 may be a folding structure, and each driving beam 122 may include one or more bending structures, and the multiple bending structures of the driving beam 122 extend along the extension direction of the long side of the base 126.
  • the more the number of bending structures the longer the equivalent length of the suspended area 122-2 of the corresponding driving beam 122, the greater the deflection of the driving beam 122 when deformed, and the better the output performance of the speaker 100.
  • the extension direction from the fixed area 122-1 of the driving beam 122 to the suspended area 122-2 may be perpendicular to the two long sides of the base 126 (i.e., the extension direction of the short side of the base 126).
  • the deformation of the part of the driving beam 122 along the extension direction of the short side of the substrate 126 is relatively small, and the deformation mainly occurs in the part of the driving beam 122 along the extension direction of the short side of the substrate 126.
  • the equivalent length l of the driving beam 122 can be the sum of the equivalent lengths (length l 1 , length l 2 and length l 3 ) of the three bending structures in the extension direction of the short side of the substrate 126 in FIG. 17I, and the equivalent length of each bending structure is not greater than the short side size of the substrate 126.
  • the bending structure refers to the structure on the driving beam 122 that mainly produces deformation. For example, as shown in FIG. 17I, the part of the suspended area 122-2 of the driving beam 122 along the extension direction of the short side of the substrate 126 is the main deformed part of the driving beam 122.
  • the part of the suspended area 122-2 of the driving beam 122 extending along the long side of the substrate 126 mainly plays a connecting role, and is used to connect the three bending structures.
  • the end of the suspended area 122-2 of the driving beam 122 i.e., the end of the driving beam 122 away from the fixed area 122-1
  • the vibration transfer unit 140 can be transmission-connected to the vibration transfer unit 140, and the driving force and displacement generated by the deformation of the driving beam 122 are transmitted to the vibration unit 130 through the vibration transfer unit 140.
  • the suspended areas 122-2 of the two driving beams 122 can be respectively connected to the vibration transfer unit 140 through one or more coupling elastic structures 124.
  • the provision of the coupling elastic structure 124 can achieve impedance adjustment of the driving unit 120 and improve the output performance of the speaker 100.
  • the fixed areas 122-1 of the two driving beams 122 are respectively fixed to the two opposite short sides of the substrate 126.
  • the extension direction from the fixed area 122-1 of the driving beam 122 to the suspended area 122-2 can be perpendicular to the two short sides of the substrate 126 (i.e., the extension direction of the long side of the substrate 126).
  • the equivalent length l of the driving beam 122 can be the sum of the equivalent lengths of multiple bending structures in the extension direction of the long side of the substrate 126 in FIG. 17K, and the equivalent length of each bending structure is not greater than the long side size of the substrate 126.
  • the driving beam 122 may include two bending structures, and the equivalent length l of the driving beam 122 may be the sum of the equivalent lengths (length l 1 , length l 2 ) of the two bending structures in the extension direction along the long side of the substrate 126 in FIG17K .
  • the design range of the equivalent length of the bending structure of the driving beam 122 is larger.
  • the driving beam 122 of the driving unit 120 shown in FIG17K may have fewer bending structures, thereby reducing the stress concentration of the driving beam 122 and increasing the working reliability of the driving beam 122 .
  • the above-mentioned equivalent length is mainly the equivalent length l of the suspended area 122 - 2 .
  • FIG17L is a schematic diagram of the internal structure of the driving unit corresponding to FIG17K
  • FIG17M is a schematic diagram of the deformation of the driving beam shown in FIG17L
  • FIG17N is a schematic diagram of the frequency response curves of the speaker including the folding structure driving beam and the speaker including the non-folding structure driving beam shown in FIG17L.
  • FIG17L only shows a partial internal structure of the driving unit 120 including a driving beam 122.
  • the driving beam 122 is provided with a first electrode covering area T1 and a second electrode covering area T2, the first electrode covering area T1 can be located at one end of the suspended area 122-2 on the driving beam 122 close to the fixed area 122-1, and the second electrode covering area T2 can be located at one end of the suspended area 122-2 on the driving beam 122 close to the vibration transmission unit 140.
  • the electrode layer 12211 in the first electrode covering area T1 and the second electrode covering area T2 can be conductive.
  • the same polarity voltage is applied to the first electrode covering area T1 and the second electrode covering area T2, so that the portions of the driving beam 122 corresponding to the first electrode covering area T1 and the second electrode covering area T2 respectively generate bending deformation in the same direction at the same time, so as to improve the output displacement of the driving beam 122 and enhance the output performance of the speaker 100.
  • the portion of the suspended area 122-2 on the driving beam 122 close to the fixed area 122-1 and the portion of the suspended area 122-2 on the driving beam 122 close to the vibration transmission unit 140 generate bending deformation upward or downward at the same time.
  • the A1A2 segment of the deformed driving beam 122 is bent upward, and the A2A3 segment is bent upward.
  • the solid line structure represents the driving beam 122 before deformation
  • the dotted line structure represents the driving beam 122 after deformation.
  • the bending deformation of the driving beam 122 portion (A1A2 segment) close to the fixed area 122-1 forms a vertical displacement (deflection value) y 1
  • the bending of the driving beam 122 portion (A2A3 segment) close to the vibration transmission unit 140 forms a vertical displacement (deflection value) y 2
  • the overall vertical displacement of the driving beam 122 is y 1 +y 2 , thereby increasing the output displacement of the driving beam 122, effectively increasing the displacement of the speaker 100, and thus improving the output performance of the speaker 100.
  • the broken line L1711 represents the frequency response curve of the loudspeaker 100 including the driving beam 122 of the folded structure as shown in FIG. 17L
  • the broken line L1712 represents the frequency response curve of the loudspeaker 100 including the driving beam 122 of the non-folded structure.
  • the broken line L1711 is obviously located above the broken line L1712, and the output of the loudspeaker 100 including the driving beam 122 of the folded structure in the low frequency range (e.g., 200 Hz-450 Hz) is significantly improved.
  • FIG17O is another schematic diagram of the internal structure of the driving unit corresponding to FIG17K
  • FIG17P is a schematic diagram of the deformation of the driving beam shown in FIG17O
  • FIG17Q is a schematic diagram of the frequency response curves of the speaker including the folded structure driving beam and the speaker including the non-folded structure driving beam shown in FIG17O.
  • FIG17O in some embodiments, compared with the driving unit 120 shown in FIG17L, in FIG17O
  • the same polarity voltage is applied according to the polarization direction of the corresponding piezoelectric layer 12212, and the same polarity voltage is applied to the first electrode covering area T1 and the second electrode covering area T2, so that the parts of the driving beam 122 corresponding to the first electrode covering area T1 and the second electrode covering area T2 respectively produce the same direction of bending deformation at the same time
  • the first electrode covering area T1 and the third electrode covering area T3 are applied with opposite polarity voltages, so that the parts of the driving beam 122 corresponding to the first electrode covering area T1 and the third electrode covering area T3 (that is, the part of the suspended area 122-2 close to the fixed area 122-1, such as the A1A2 segment shown in Figure 17P) are second-order bending, and
  • the first-order bending refers to the bending in one direction as a whole.
  • the A2A3 section of the deformed driving beam 122 is bent upward as a whole.
  • the second-order bending refers to the bending in two directions on both sides of the suspended area 122-2 near the fixed area 122-1 in the length direction.
  • the A1A2 section of the deformed driving beam 122 is bent in two directions on both sides (A1 and A2) in the length direction, A1 is bent upward, and A2 is bent downward.
  • the solid line structure represents the driving beam 122 before deformation
  • the dotted line structure represents the driving beam 122 after deformation.
  • the bending deformation of the driving beam 122 portion (A1A2 segment) close to the fixed area 122-1 forms a vertical displacement (deflection value) y 1
  • the bending of the driving beam 122 portion (A2A3 segment) close to the vibration transmission unit 140 forms a vertical displacement (deflection value) y 2
  • the overall vertical displacement of the driving beam 122 is y 1 +y 2 , thereby increasing the output displacement of the driving beam 122, effectively increasing the displacement of the speaker 100, and thus improving the output performance of the speaker 100.
  • the broken line L1721 represents the frequency response curve of the loudspeaker 100 including the driving beam 122 of the folded structure as shown in FIG. 17O
  • the broken line L1722 represents the frequency response curve of the loudspeaker 100 including the driving beam 122 of the non-folded structure.
  • the broken line L1721 is obviously located above the broken line L1722, and the output of the loudspeaker 100 with the driving beam 122 of the folded structure in the low frequency range (e.g., 200 Hz-1000 Hz) is significantly improved.
  • FIG17R is another schematic diagram of the internal structure of the driving unit corresponding to FIG17K.
  • the driving unit 120 shown in FIG17R further includes a second vibration transfer unit 140', and the vibration transfer unit 140 and the second vibration transfer unit 140' are respectively arranged at the two ends of the extension direction of the folding structure of the suspended area 122-2 of the driving beam 122, as shown in FIG17R.
  • the driving force and displacement generated by the vibration of the driving beam 122 can be further effectively transferred to the vibration unit 130, thereby improving the output sound pressure level of the speaker 100; at the same time, the vibration mode of the driving beam 122 can be effectively adjusted, thereby adjusting the vibration mode of the speaker 100 and improving the output performance of the speaker 100.
  • FIG. 17S is another schematic diagram of the structure of the driving unit according to some embodiments of the present specification.
  • the driving unit 120 may include four driving beams 122, and the four driving beams 122 may all be rectangular structures. Two of the four driving beams 122 may be spaced apart on one of the short sides of the substrate 126, and the other two may be spaced apart on the other short side of the substrate 126.
  • the four driving beams 122 may be connected to the vibration transfer unit 140 through one or more coupling elastic structures 124, respectively, so as to transfer the force and displacement output by the driving beam 122 to the vibration unit 130.
  • the extension direction of the four driving beams 122 (i.e., the direction from the fixed area 122-1 to the suspended area 122-2) is parallel to the long side direction of the substrate 126.
  • the size adjustment range of the driving beam 122 is large, so that the resonant frequency of the speaker 100 can be adjusted accordingly in a large range, thereby improving the output performance of the speaker 100.
  • the driving beam 122 with a rectangular structure can effectively reduce the possibility of stress concentration on the driving beam 122 and improve the working reliability of the driving beam 122.
  • Figure 17T is another structural schematic diagram of the drive unit shown in some embodiments of this specification.
  • the speaker 100 may include multiple (for example, 2, 3, 4 or more) drive units 120, and each drive unit 120 may include a corresponding drive beam 122, a coupling elastic structure 124, and a vibration transfer unit 140.
  • the multiple drive units 120 can be connected to each other, for example, the multiple drive units 120 can be connected through their respective corresponding bases 126.
  • at least one of the multiple drive units 120 can also be set separately and not connected to other drive units 120.
  • the multiple drive units 120 can be distributed in any shape, such as a straight line, a rectangle, a T-shape, etc., and this specification does not impose too many restrictions on this.
  • the multiple drive units 120 operate independently of each other and do not affect each other. Through the above settings, different drive units 120 can be designed individually so that multiple drive units 120 can have different resonant frequencies. At the same time, each drive unit 120 can be excited individually to achieve the adjustment of the vibration mode of the speaker 100 and improve the output performance of the speaker 100.
  • any one of the driving beams 122 may be connected to the vibration transfer unit 140 via the coupling elastic structure 124 .
  • the driving beam 122 includes a piezoelectric structure 1221 and one or more reinforcement layers 1223 stacked along the vibration direction (ie, z direction) of the vibration unit 130 , and the reinforcement layer 1223 farthest from the piezoelectric structure 1221 is connected to the coupling elastic structure 124 .
  • 18A and 18B are schematic diagrams of the internal structure of driving units with different structures according to some embodiments of the present specification.
  • the driving beam 122 in some embodiments, in the vibration direction of the vibration unit 130, the driving beam 122 includes interconnected
  • the piezoelectric structure 1221 is connected to the reinforcement layer 1223, and the reinforcement layer 1223 is connected to the coupling elastic structure 124.
  • the piezoelectric structure 1221 can make the driving unit 120 output vibration from the suspended area 122-2 in response to the electrical signal.
  • the piezoelectric structure 1221 In the extension direction from the fixed area 122-1 to the suspended area 122-2, the piezoelectric structure 1221 can partially or completely cover the suspended area 122.
  • the piezoelectric structure 1221 can be deformed under the action of the driving voltage, thereby generating vibration.
  • the piezoelectric structure 1221 may include two electrode layers (e.g., a first electrode layer 12211 and a second electrode layer 12213) and a piezoelectric layer 12212, and the two electrode layers are respectively located on opposite sides of the piezoelectric layer 12212, as shown in FIG18A.
  • a first electrode layer 12211 and a second electrode layer 12213 e.g., a first electrode layer 12211 and a second electrode layer 12213
  • the two electrode layers are respectively located on opposite sides of the piezoelectric layer 12212, as shown in FIG18A.
  • the difference between the driving beam 122 shown in Figure 18B and the driving beam 122 shown in Figure 18A is that the driving beam 122 shown in Figure 18B includes two reinforcement layers (i.e., a first reinforcement layer 1223a and a second reinforcement layer 1223b), and the reinforcement layer 1223B farthest from the piezoelectric structure 1221 is connected to the coupling elastic structure 124.
  • the driving beam 122 shown in Figure 18B includes two reinforcement layers (i.e., a first reinforcement layer 1223a and a second reinforcement layer 1223b), and the reinforcement layer 1223B farthest from the piezoelectric structure 1221 is connected to the coupling elastic structure 124.
  • the force and displacement generated by the piezoelectric layer 12212 itself are determined by the size of the driving beam 122 and the material of the piezoelectric layer 12212. Once the size of the driving beam 122 and the material of the piezoelectric layer 12212 are determined, the greater the distance between the piezoelectric layer 12212 and the neutral plane of the driving unit 120, the greater the deformation of the driving beam 122 (or driving unit 120).
  • the ratio of the thickness dimension of the coupling elastic structure 124 to the thickness dimension of the driving beam 122 is 0.65-1.
  • the parameter ⁇ may be defined as the ratio of the thickness h0 of the coupling elastic structure 124 to the thickness h of the driving beam 122 in the vibration direction (ie, z direction) of the vibration unit 130:
  • FIG18C is a schematic diagram of the frequency response curves of the loudspeaker corresponding to different ⁇ according to some embodiments of the present specification.
  • the output sound pressure level of the loudspeaker 100 in the frequency range between the two resonance peaks gradually increases.
  • the value range of ⁇ in order to make the loudspeaker 100 have a larger output sound pressure level in the range of 500Hz-20kHz, the value range of ⁇ can be 0.65-1. In some embodiments, in order to make the loudspeaker 100 have a larger output sound pressure level in the range of 800Hz-20kHz and have a relatively flat sound pressure curve, the value range of ⁇ can be 0.82-1. In some embodiments, in order to make the speaker 100 have a larger output sound pressure level and a flatter sound pressure curve in the range of 1kHz-20kHz, the value range of ⁇ can be 0.88-1. In some embodiments, in order to make the speaker 100 have a larger output sound pressure level and a flatter sound pressure curve in the range of 1.5kHz-20kHz, the value range of ⁇ can be 0.9-1.
  • the stiffness of the coupling elastic structure 124 can be adjusted by changing the structure of the coupling elastic structure 124.
  • the coupling elastic structure 124 can include a strip structure, and the base 126, the driving beam 122, the coupling elastic structure 124, and the vibration transmission unit 140 can form a continuous sheet structure, thereby efficiently transmitting the force and displacement of the driving beam 122 to the vibration unit 130.
  • a hollow structure may be provided on the coupling elastic structure 124 to adjust the stiffness of the coupling elastic structure 124 .
  • FIG. 19A and FIG. 19B are schematic diagrams of drive units of different structures according to some embodiments of this specification.
  • a hollow structure may be provided on the coupling elastic structure 124 of the strip structure.
  • the stiffness of the coupling elastic structure 124 can be effectively adjusted, so as to achieve the matching of the impedance of the coupling elastic structure 124 with the impedance of the driving beam 122 and the impedance of the vibration unit 130.
  • the hollow structure may include a circle (as shown in FIG. 19A), a triangle, a quadrilateral or other polygon, and any other arbitrary shape, and this specification does not impose too many restrictions on this.
  • the coupling elastic structure 124 includes a bending structure to adjust the stiffness of the coupling elastic structure 124 .
  • the coupling elastic structure 124 may include a folding structure.
  • the coupling elastic structure 124 of the folding structure may include at least one bending structure.
  • the coupling elastic structure 124 may have greater flexibility in a smaller space, so that the impedance of the coupling elastic structure 124 may be realized in a larger range.
  • the impedance of the driving beam 122 and the impedance of the vibration unit 130 are matched.
  • the speaker 100 may not include the vibration transfer unit 140, in which case the drive unit 120 may be directly connected to the vibration unit 130.
  • any one of the drive beams 122 is stacked in different areas of the vibration unit 130.
  • the drive unit 120 may include a drive beam 122
  • the vibration unit 130 may include a diaphragm 131
  • the diaphragm 131 may not include the central reinforcement member 132 as shown in FIG. 1A .
  • One end of the drive beam 122 (the end close to the fixed area 122-1) is fixedly connected to the housing 110, and the other end (the end close to the suspended area 122-2) is suspended.
  • the diaphragm 131 may be directly covered on the drive beam 122, and the diaphragm 131 may vibrate with the vibration of the drive beam 122, thereby pushing the air in the front cavity 111 and generating sound.
  • the diaphragm 131 may partially or completely cover the drive beam 122.
  • the diaphragm 131 may completely cover the driving beam 122, and form a vibration suspension region 1314 at the gap position formed by the driving beam 122.
  • the diaphragm 131 may only cover an area within half of the length of the driving beam 122 near the free end of the driving beam 122 (i.e., near the end of the suspension region 122-2), and at the same time cover the gap position formed by the driving beam 122, so as to form a vibration suspension region 1314 at the gap position.
  • the speaker shown in FIG1B since there are no loads such as the vibration transmission unit 140 and the central reinforcement member 132, a larger proportion of the driving force can be used to push the air load to generate a sound signal under the same drive unit structure, thereby improving the output SPL of the speaker 100. Furthermore, by omitting structures such as the vibration transmission unit 140 and the central reinforcement member 132, the overall thickness of the speaker 100 can be significantly reduced, which is of great significance for micro speakers.
  • Fig. 20A is a first view of the speaker shown in Fig. 1B according to the present specification.
  • Fig. 20B is a cross-sectional view of the speaker shown in Fig. 20A.
  • Fig. 20C is a second view of the speaker shown in Fig. 1B according to the present specification.
  • Fig. 20D is a cross-sectional view of the speaker shown in Fig. 20C.
  • the vibration unit 130 can be connected to the driving beam 122 and cover the gap formed by the driving beam 122 to separate the acoustic cavity into a front cavity 111 and a rear cavity 112 located on opposite sides of the vibration unit 130.
  • the vibration unit 130 can be used to receive the deformation or displacement of the driving beam 122 and generate vibrations transmitted outward. Due to the non-redundant structural design between the vibration unit 130 and the driving beam 122, the vibration unit 130 directly responds to the deformation or displacement of the driving beam 122 to generate vibrations.
  • the speaker 100 in this embodiment can use a larger proportion of the vibration driving force to generate sound signals, so that the output sound pressure level is improved, and at the same time, the overall thickness of the speaker 100 is significantly reduced, which has a great inspiration for the design and development of the micro speaker 100.
  • the vibration unit 130 may include a diaphragm 131, which is connected to the driving beam 122 and covers the empty area between the driving beam 122 and the base 126 or the shell 110.
  • the diaphragm 131 directly responds to the deformation or displacement of the driving beam 122 to generate vibration, and can drive the air in the acoustic cavity to generate fluctuations, that is, sound waves (sound signals) with a larger proportion of vibration driving force.
  • the sound waves can be transmitted to the outside through the holes that connect the acoustic cavity to the outside (for example, the sound outlet holes set on the shell 110, or the opening of the base 126, etc.).
  • the diaphragm 131 can be a thin film structure with elasticity.
  • the material of the diaphragm 131 may include, but is not limited to, one or more of polyimide (PI), polyethylene terephthalate (PET), polyethyleneimine (PEI), polyetheretherketone (PEEK), silicone, polycarbonate (PC), vinyl polymer (PVC), acrylonitrile-butadiene-styrene copolymer (ABS), polyethylene (PE), polyparaxylene (PPX), etc., and may also be a multilayer composite material formed by compounding the above materials.
  • PI polyimide
  • PET polyethylene terephthalate
  • PEI polyethyleneimine
  • PEEK polyetheretherketone
  • silicone silicone
  • PC polycarbonate
  • PVC vinyl polymer
  • ABS acrylonitrile-butadiene-styrene copolymer
  • PE polyethylene
  • PPX polyparaxylene
  • the side of the diaphragm 131 close to the rear cavity 112 is connected to the side of the driving beam 122 close to the front cavity 111, and the diaphragm 131 pushes the air in the front cavity 111 to generate sound waves, and the sound waves can be transmitted outward through the hole connecting the front cavity 111 to the outside.
  • the side of the diaphragm 131 close to the front cavity 111 is connected to the side of the driving beam 122 close to the rear cavity 112, and the diaphragm 131 pushes the air in the rear cavity 112 to generate sound waves, and the sound waves can be transmitted outward through the hole connecting the rear cavity 112 to the outside.
  • the side of the diaphragm 131 close to the front cavity 111 is connected to the side of the driving beam 122 close to the rear cavity 112, and the diaphragm 131 pushes the air in the rear cavity 112 to generate sound waves, and the sound waves can be transmitted outward through the hole connecting the rear cavity 112 to the outside.
  • the driving beam 122 is disposed on the side of the diaphragm 131 located in the rear cavity 112, or the driving beam 122 is disposed on the side of the diaphragm 131 located in the front cavity 111, and the diaphragm 131 pushes the air in the rear cavity 112 to generate sound waves, and the sound waves can be transmitted outward through the hole connecting the rear cavity 112 to the outside.
  • the diaphragm 131 is connected to the driving beam 122, and its peripheral side can be connected to the inner wall of the housing 110 or the base 126.
  • the diaphragm 131 can also be connected to the driving beam 122 by connecting its peripheral side to the side surface of the driving beam 122 near its free end.
  • the diaphragm 131 is provided on both sides of the driving beam 122 close to the front cavity 111 and close to the rear cavity 112. In this case, the diaphragms 131 on both sides can respectively push the air in the front cavity 111 and the rear cavity 112 to generate sound waves, and the sound waves can be transmitted to the outside through the holes that connect the front cavity 111 and the rear cavity 112 to the outside.
  • Fig. 20E is a schematic diagram of the structure of a speaker according to some embodiments of the present specification.
  • Fig. 20F is a cross-sectional view of the speaker shown in Fig. 20E.
  • the loudspeaker 100 shown in FIGS. 20E to 20F is similar to the loudspeaker 100 shown in FIGS. 1B and 20A to 20D, except that the loudspeaker 100 further includes a mass element M 2 .
  • the mass element M 2 is a rectangular parallelepiped structure, connected to the side of the diaphragm 131 close to the front cavity 111, and located in the center of the diaphragm 131 , so that when the diaphragm 131 carries the mass element M 2 , the force and vibration state of the diaphragm 131 are balanced.
  • the mass element M 2 may also be biased.
  • the central area of the diaphragm 131 is provided.
  • the mass element M2 is not connected to other components (eg, the housing 110).
  • Fig. 20G is a schematic diagram of the structure of a speaker according to some other embodiments of the present specification.
  • Fig. 20H is a cross-sectional view of the speaker shown in Fig. 20G.
  • the loudspeaker 100 shown in FIGS. 20G to 20H is similar to the loudspeaker 100 shown in FIGS. 20E to 20F, except that the mass element M2 is connected to the side of the diaphragm 131 close to the rear cavity 112. In some embodiments, to ensure the flexibility and vibration displacement of the diaphragm 131, the mass element M2 is not connected to other components (such as the driving beam 122).
  • the side of the driving beam 122 close to the rear cavity 112 may also be provided with a second diaphragm 131, and the arrangement of the second diaphragm 131 is similar to that of the diaphragm 131, for example, the side of the second diaphragm 131 close to the front cavity 111 is connected to the side of the driving beam 122 close to the rear cavity 112.
  • the side of the mass element M2 close to the front cavity 111 is connected to the diaphragm 131
  • the side of the mass element M2 close to the rear cavity 112 is connected to the second diaphragm 131, so that the sound waves of the loudspeaker 100 can be output through the front cavity 111 and the rear cavity 112.
  • the second diaphragm 131 may also be disposed in the rear cavity 112.
  • the second diaphragm 131 is connected to the shell 110 (or the base 126) through its peripheral side or edge area.
  • the mass element M2 is disposed protruding from the driving beam 122, and its side close to the front cavity 111 is connected to the diaphragm 131, and its side close to the rear cavity 112 is connected to the second diaphragm 131.
  • Fig. 20I is a schematic diagram of the structure of a speaker according to some other embodiments of the present specification.
  • Fig. 20J is a cross-sectional view of the speaker shown in Fig. 20I.
  • the loudspeaker 100 shown in FIGS. 20I to 20J is similar to the loudspeaker 100 shown in FIGS. 20G to 20H, except that: a mass element M2 is connected to the side of the diaphragm 131 close to the front cavity 111 and the rear cavity 112.
  • the second diaphragm 131 can be arranged by connecting with the mass element M2 located in the rear cavity 112; when the diaphragm 131 is located on the side of the driving beam 122 close to the rear cavity 112, the second diaphragm 131 can be arranged by connecting with the mass element M2 located in the front cavity 111.
  • the driving beam 122, the mass element M2 , the diaphragm 131, etc. please refer to the relevant parts of the above text, such as FIGS. 1A to 17K, etc.
  • the driving unit 120 includes two groups of driving beams 122 located on opposite sides of the housing 110 , each of the two groups of driving beams 122 includes one or more driving beams 122 , and the shape of the driving beams 122 includes rectangle, trapezoid or circular chamfer.
  • Fig. 21A is a projection diagram of the driving beam along the vibration direction of the vibration unit shown in some embodiments of this specification.
  • the vibration direction of the vibration unit 130 refers to the z direction in Fig. 10, Fig. 11, etc.
  • the driving beam 122 includes a fixed region 122 - 1 and a suspended region 122 - 2 .
  • each set of drive beams 122 includes one or more drive beams 122 .
  • 21B to 21M are projection diagrams of the driving beam and the diaphragm along the vibration direction of the vibration unit shown in some embodiments of this specification.
  • multiple driving beams 122 are spaced apart on both sides of the base 126 extending along the y direction, and the multiple driving beams 122 on both sides are arranged correspondingly, and the fixed end of the driving beam 122 (the end close to the fixed area 122-1) is connected to the base 126, and the diaphragm 131 covers each driving beam.
  • the width of the multiple driving beams distributed in the y direction is consistent with the width of the acoustic cavity in the y direction.
  • the driving beams 122 and the driving beams 122 can be connected by the above-mentioned coupling elastic structure 124, or they can be arranged independently of each other.
  • the resonant frequencies of the multiple driving beams 122 can be the same, or the resonant frequency of at least one driving beam 122 in the multiple driving beams 122 can be different. In some embodiments, the different resonant frequencies of the multiple driving beams 122 can be achieved by adjusting their sizes, for example, the free ends of the multiple driving beams 122 (the end close to the suspended area 122-2) are not on the same straight line along the y direction.
  • the driving unit 120 further includes two sets of driving beams 122 located on another opposite side of the housing 110 .
  • the two driving beams 122 arranged opposite to each other along the x direction are identical, and the suspended areas 122-2 of the driving beams 122 are both trapezoidal in shape, and the long sides along the y direction are arranged close to the fixed areas 122-1 of the driving beams 122, and the diaphragm 131 covers the trapezoidal driving beams 122, and the diaphragm 131 is connected and fixed to the base 126 (or the housing 110) of the speaker 100 around.
  • the corner of the trapezoidal driving beam 122 at its free end can be set as a rounded corner (not shown in FIG21C ).
  • the driving beam 122 of FIG. 21D is similar to the driving beam 122 shown in FIG. 21C , except that: the base 126 is further provided with driving beams 122 on both sides of the y direction, and the driving beams 122 on both sides of the y direction are defined as short-side driving beams 122, and the short-side driving beams 122 can be triangular beams.
  • the driving beams 122 are provided on all four sides of the base 126, and the structural balance can reduce the tilt and flip modes of the loudspeaker 100.
  • the short-side driving beams 122 can be trapezoidal beams or beams of other shapes.
  • the driving beams 122 on both sides of the x direction are defined as long-side driving beams 122, and the driving force of the driving beams 122 can be improved by adjusting the sizes of the long-side driving beams 122 and the short-side driving beams 122, so as to increase the output sound pressure level of the loudspeaker 100.
  • the dimensions of the long side driving beam 122 and the short side driving beam 122 can be adjusted so that their resonant frequencies are located in different frequency bands, that is, the resonant frequencies of the long side driving beam 122 and the short side driving beam 122 are different, so that the speaker 100 has multiple resonant frequencies.
  • the dimensions of the long side driving beam 122 or the short side driving beam 122 can also be designed so that their resonant frequencies are located in different frequency bands, that is, the two long side driving beams 122 or the two short side driving beams 122
  • the different resonant frequencies enable the loudspeaker 100 to generate more resonant peaks and improve the sound pressure level output, which is also applicable to driving beams 122 of other shapes and structures.
  • the vibration unit 130 further includes a mass element M 2 , and any set of driving beams 122 are connected to different regions of the mass element M 2 .
  • the driving beam 122 of Fig. 21E is similar to the driving beam 122 shown in Fig. 21D, except that the loudspeaker 100 further includes a mass element M2 .
  • the mass element M2 is connected to the central area of the diaphragm 131 and is located between two driving beams 122 arranged opposite to each other along the x direction.
  • the driving beam 122 of FIG21F is similar to the driving beam 122 shown in FIG21E, except that the corner at the free end of the driving beam 122 is rounded, and compared with the driving beam 122 of FIG21D, the rounded corner at the free end can reduce the stress in the local area of the driving beam 122 and improve the reliability.
  • the radius of the rounded corner does not exceed the length dimension l of the suspended area 122-2 of the driving beam 122.
  • the mass element M2 comprises a ring-shaped structure.
  • the driving beam 122 of FIG21G is similar to the driving beam 122 shown in FIG21D , except that the loudspeaker 100 further includes a mass element M 2 , which is a ring-shaped structure.
  • the mass element M 2 of the ring-shaped structure is connected to the central area of the diaphragm 131 and is correspondingly located between the long-side driving beam 122 and the short-side driving beam 122.
  • the mass element M 2 of the ring-shaped structure can make the driving beams 122 on the four sides of the base 126 have a certain corresponding mass distribution.
  • the vibration unit 130 further includes a second driving beam 122E, and the second driving beam 122E is indirectly connected to the housing 110 .
  • the vibration unit 130 further includes a mass element M 2 , and the second driving beam 122E is connected to the mass element M 2 .
  • the driving beam 122 of FIG. 21H is similar to the driving beam 122 shown in FIG. 21D , except that the speaker 100 further includes a second driving beam 122E and a mass element M 2 , and the mass element M 2 is connected to the central area of the diaphragm 131.
  • the second driving beam 122E is located in the acoustic cavity and can be connected to the base 126 of the speaker 100, so that the speaker 100 can generate more resonance peaks and improve the sound pressure level output.
  • the second driving beam 122E can be connected to the diaphragm 131.
  • the second driving beam 122E is connected to the central area of the diaphragm 131
  • the mass element M 2 can be connected to the second driving beam 122E
  • the second driving beam 122E and the mass element M 2 are respectively connected to two opposite sides of the diaphragm 131, and the two sides of the diaphragm 131 are respectively located in the front cavity 111 and the rear cavity 112.
  • the speaker 100 may include a plurality of drive units 120.
  • the arrangement of the plurality of drive units 120 may be as shown in FIG. 21I , where the plurality of drive units 120 are arranged in parallel, and the drive units 120 include a base 126 and a drive beam 122, and the base 126 is connected to the drive beam 122 on all sides.
  • the arrangement of the plurality of drive units 120 is not limited to the parallel arrangement shown in FIG. 21I , and may also be a regular or irregular arrangement such as an array, an oblique line, a ring, or a fan.
  • the driving unit 120 further includes a second driving beam 122E, which is connected to the driving beams 122 around the base 126 via a coupling elastic structure 124.
  • the arrangement of multiple driving beams 122 and the second driving beam 122E enables the speaker 100 to generate more resonance peaks and improve the sound pressure level output.
  • the coupling elastic structure 124 please refer to FIG7 to FIG10 and their related descriptions.
  • two sets of driving beams 122 that are arranged opposite to each other may be arranged to extend in a staggered manner.
  • the driving beam 122 of FIG. 21J is similar to the driving beam 122 shown in FIG. 21B , except that: the multiple driving beams 122 distributed on both sides of the base 126 along the y direction are arranged in a staggered manner, that is, the free end of the driving beam 122 (the end close to the suspended area 122-2) extends to the opposite side of the base 126.
  • Such an arrangement can adjust the length of the driving beam 122 in a large range on the basis of a certain length of the speaker 100 along the x direction, so as to adjust the resonant frequency of the speaker 100 in a larger range.
  • each driving beam 122 can be individually designed, and the modal adjustment of the diaphragm 131 of the speaker 100 can also be achieved by individually exciting each driving beam 122.
  • the mechanism of individually exciting each driving beam 122 can also be applied to other embodiments including multiple independent driving beams 122, such as the embodiments shown in FIG. 21B , FIG. 21D , etc.
  • each set of driving beams 122 may include a driving beam 122 having a bent structure.
  • the driving beam 122 is a shape with multiple bends. Its fixed end (the end close to the fixed area 122-1) is connected to the long side of the base 126 and is arranged close to the short side of the base 126 (extending along the x direction). Its free end (the end close to the suspended area 122-2) extends in the y direction, and the free ends of the two driving beams 122 are close to each other.
  • the length of the driving beam 122 along the x direction is slightly smaller than the length of the acoustic cavity along the x direction.
  • the diaphragm 131 covers the two driving beams 122.
  • the length of the driving beam 122 can be increased in a limited acoustic cavity.
  • different sections on the driving beam 122 can be excited by separate voltages to achieve modal adjustment of different areas on the diaphragm 131.
  • two driving beams 122 are arranged on both sides of the base 126 along the x direction.
  • the driving beams 122 are in a shape with multiple bends.
  • the fixed ends thereof are connected to the short sides of the base 126 and are arranged close to the long sides of the base 126.
  • the free ends thereof extend in the x direction.
  • the free ends of the two driving beams 122 are close to each other.
  • the width of the driving beams 122 along the y direction is slightly smaller than the width of the acoustic cavity along the y direction.
  • the diaphragm 131 Covering two driving beams 122.
  • Such a design can effectively increase the vibration displacement of the driving beam 122, thereby effectively increasing the amplitude of the diaphragm 131, thereby improving the output sound pressure level.
  • the first beam 531 is connected to the base 126, and the first beam 531 and the second beam 532 are both arranged along the y direction and connected by another beam.
  • different driving beams 122 may be connected via a coupling elastic structure 124 .
  • the driving beam 122 shown in FIG. 21M is similar to the driving beam 122 shown in FIG. 21C , except that: the two driving beams 122 arranged opposite to each other along the x direction are elastically connected by a coupling elastic structure 124.
  • the two driving beams 122 may be connected by one or more coupling elastic structures 124.
  • the multiple coupling elastic structures 124 between the two driving beams 122 may be evenly spaced and distributed.
  • the shape of the coupling elastic structure 124 may be a regular shape such as a folded shape, a rectangle, a trapezoid, other polygons, or an irregular shape.
  • the thickness of the coupling elastic structure 124 along the z direction may be equal to the total thickness of each layer of the driving beam 122.
  • the material and material distribution of the coupling elastic structure 124 are consistent with the material and distribution of each layer of the driving beam 122.
  • the thickness of the coupling elastic structure 124 may also be the thickness of at least one layer of each layer of the driving beam 122.
  • the material and material distribution of the coupling elastic structure 124 may also be the material and distribution of at least one layer of each layer of the driving beam 122.
  • the thickness of the coupling elastic structure 124 may be inconsistent with the total thickness of the driving beam 122 .
  • the material of the coupling elastic structure 124 may be a material with a certain elasticity other than the materials of the various layers of the driving beam 122 .
  • the vibration unit 130 includes a hollow area not covered by the driving beam 122, extending from the fixed area 122-1 to the suspended area 122-2, the suspended area 122-2 has a length dimension, the sum of the length of the driving beam 122 and half the length of the hollow area is defined as a first parameter, and the ratio of the length dimension of the suspended area 122-2 to the first parameter is 0.7-1.
  • the edge area of the driving beam 122 close to its peripheral side along the length direction x is a fixed area 122-1 connected to the shell 110 (or the base 126), the area of the driving beam 122 suspended in the acoustic cavity is a suspended area 122-2, and the area between the suspended area 122-2 and the shell 110 (or the base 126) is a vacant area.
  • the movement of the suspended area 122-2 of the driving beam 122 provides driving force for the speaker 100.
  • the long side of the driving beam 122 is a fixed side
  • the short side is a suspended side.
  • the long side of the driving beam 122 extends along the width direction y (see FIG22 ) of the driving beam 122, and the short side extends along the length direction x (see FIG22 ) of the driving beam 122.
  • part of the vibration area of the diaphragm 131 is covered by the driving beam 122, and the other part is not covered by the driving beam 122.
  • the part of the vibration area of the diaphragm 131 not covered by the driving beam 122 is defined as the hollow area 131-1.
  • the size of the hollow area 131-1 can affect the vibration mode of the diaphragm 131.
  • the sum of the length of the driving beam 122 and half of the length of the hollow area 131-1 is defined as the first parameter lt. Since the two driving beams 122 spaced apart along the x direction of the loudspeaker 100 are symmetrically arranged, lt is marked in FIG.
  • the relationship between the length l of the suspended area 122-2 of the driving beam 122 and lt determines the length size ratio of the diaphragm 131.
  • the width of the hollow area 131 - 1 of the diaphragm 131 along the y direction is defined as wt, and the relationship between the width w of the driving beam 122 and wt determines the width dimension ratio of the hollow area 131 - 1 of the diaphragm.
  • the hollow area 131-1 of the diaphragm 131 is relatively large, for example, the ratio of l to lt and/or the ratio of w to wt is small, the hollow area 131-1 of the diaphragm 131 is relatively large, which causes the hollow area 131-1 to generate local modes at lower frequencies, which are inconsistent with the modes of the driving beam 122, and even modes in opposite directions, which will make the audio response have more peaks and valleys, and the output sound pressure level is relatively low;
  • the length dimension ratio and width dimension ratio of the hollow area 131-1 are relatively small, for example, the ratio of l to lt and the ratio of w to wt are large, the diaphragm 131 covers a larger area of the driving beam 122, which reduces the stiffness of the driving beam 122 and reduces the resonant frequency, thereby making the mid- and high-frequency output of the speaker 100 poor, so it is necessary to reasonably design the relationship between l and lt
  • a physical quantity ⁇ is defined as:
  • FIG. 23 is a frequency response curve diagram of a loudspeaker corresponding to different values of ⁇ according to some embodiments of this specification.
  • the length dimension of the hollow region 131-1 accounts for a large proportion, and a local resonance of the hollow region 131-1 is formed in a relatively low frequency range (for example, a frequency range less than 1 kHz), generating a first resonance peak F221 of the frequency response curve.
  • the length dimension l of the suspended region 122-2 is relatively small, so the rigidity of the driving beam 122 is relatively large, and a second resonance peak F222 of the frequency response curve is generated at a relatively high frequency.
  • two resonance peaks appear in the low-to-medium frequency range (for example, a frequency range less than 6 kHz), affecting the flatness of the frequency response curve of the loudspeaker 100.
  • the hollow area 131 - 1 when the length dimension of the hollow area 131-1 accounts for a large proportion, the hollow area
  • the region 131 - 1 generates a local mode in a lower frequency range, which is inconsistent with the mode of the driving beam 122 and is opposite to the mode of the driving beam 122.
  • the region 131 - 2 refers to the vibration region of the diaphragm 131.
  • the length dimension l of the suspended area 122-2 increases, and the length dimension proportion of the hollow area 131-1 decreases, so that it is not easy for the local resonance of the hollow area 131-1 to occur at a lower frequency, so that the local mode of the hollow area 131-1 in the wide frequency band of the middle and low frequencies can follow the mode of the suspended area 122-2, showing a consistent movement direction, so that the loudspeaker 100 obtains a relatively flat frequency response curve in the wide frequency band of the middle and low frequencies.
  • the frequency response flatness and output sound pressure level of the speaker 100 can be adjusted by adjusting the ratio of the length dimension l of the suspended area 122-2 to the first parameter lt.
  • the value range of ⁇ can be 0.7-1. In some embodiments, the value range of ⁇ can be 0.75-1. In some embodiments, the value range of ⁇ can be 0.7-0.95, so that the speaker 100 has a certain sound pressure level output in a wider frequency band, and the frequency response curve is relatively flat in the wider frequency band, so as to improve the sound quality performance of the speaker 100.
  • the sound quality of the speaker 100 can also be adjusted by reasonably designing the relationship between the width w of the driving beam 122 and the width wt of the hollow area 131-1.
  • the ratio of the width dimension w of the suspended area 122-2 to the width dimension wt of the hollow area 131-1 is 0.5-0.95.
  • a physical quantity ⁇ is defined as:
  • FIG. 25 is a frequency response curve diagram of a loudspeaker corresponding to different values of ⁇ according to some embodiments of this specification.
  • the hollow area 131 - 1 when the width dimension of the hollow area 131 - 1 accounts for a large proportion, the hollow area 131 - 1 generates a local mode in a lower frequency range, which is inconsistent with the mode of the driving beam 122 and is opposite to the mode of the driving beam 122 .
  • the driving beam 122 movement provides driving force, which will increase the output sound pressure level of the loudspeaker 100 in a wider frequency band, so the width w of the driving beam 122 can be preferably selected to be a larger value.
  • the width w of the driving beam 122 will make the width area of the hollow region 131-1 too small, thereby increasing the local stiffness and further increasing the resonant frequency of the speaker 100, which will reduce the output. Therefore, the width w of the driving beam 122 cannot be too large.
  • the frequency response flatness and output sound pressure level of the speaker 100 can be adjusted by adjusting the ratio of the width w of the driving beam 122 to the width wt of the hollow area 131-1.
  • the value range of ⁇ can be 0.5-0.95. In some embodiments, the value range of ⁇ can be 0.65-0.95, so that the speaker 100 has a certain sound pressure level output in a wider frequency band, and the frequency response curve is relatively flat in the wider frequency band, so as to improve the sound quality performance of the speaker 100.
  • the suspended region 122 - 2 of any one of the driving beams 122 of the speaker 100 includes an electrode covered region.
  • the suspended area 122 - 2 of any one driving beam 122 of the speaker 100 includes a non-electrode covering area, and the non-electrode covering area is at least partially located at an end of the driving beam 122 away from the fixed area 122 - 1 .
  • the electrodes in the driving beam 122 are used to transmit electrical signals (e.g., apply voltage) to the driving beam 122.
  • the electrode when the driving unit 120 is connected to the vibration unit 130 through the vibration transmission unit 140, the electrode can be set on the side of the driving beam 122 away from the vibration transmission unit 140.
  • the electrode when the driving unit 120 is directly connected to the vibration unit 130, for example, when the diaphragm 131 directly covers the surface of the driving beam 122, the electrode can be connected to the side of the driving beam 122 away from the diaphragm 131.
  • the electrode can be a regular shape such as a rectangle, a circle, a polygon, or any irregular shape.
  • an electrode layer of the driving beam 122 can include one electrode or multiple electrodes, and the multiple electrodes can be distributed arbitrarily, for example, the multiple electrodes can be distributed in an array.
  • the electrode can cover the entire side of the driving beam 122, or it can cover a local area on the side of the driving beam 122. In some embodiments, the electrodes may be evenly distributed on the side of the driving beam 122 or unevenly distributed.
  • FIG27 is a side view of a driving beam with electrodes shown in some embodiments of the present specification along the y direction.
  • one side of the driving beam 122 is a fixed area 122-1, and the fixed area 122-1 is connected to the housing 110 or the substrate 126.
  • the opposite side of the fixed area 122-1 along the x direction is a suspended area 122-2.
  • the electrodes cover the entire length direction x of the driving beam 122.
  • FIG28 is a side view of a driving beam with electrodes shown in some embodiments of the present specification along the y direction.
  • one side of the driving beam 122 is a fixed area 122-1, and the fixed area 122-1 is connected to the shell 110 or the substrate 126.
  • the opposite side of the fixed area 122-1 along the x direction is a suspended area 122-2.
  • the electrode covers the area within a partial range of the fixed area 122-1 along the length direction x, and the area covered by the electrode on the surface of the driving beam 122 is defined as the electrode covering area 1215.
  • the driving beam 122 deforms in response to an electrical signal, the driving beam 122 deforms only in the electrode covering area 1215, so the vibration form of the driving beam 122 can be effectively controlled by adjusting the distribution of the electrodes, thereby adjusting the output sound pressure level of the speaker 100.
  • the suspended area 122-2 of the driving beam 122 covered by the electrode includes a non-electrode covering area, and the non-electrode covering area is at least partially located at the end of the driving beam 122 away from the fixed area 122-1, which is convenient for controlling the vibration form of the driving beam 122.
  • the vibration form of the driving beam 122 can be effectively controlled by adjusting the coverage area of the electrode in the length direction x of the driving beam 122, thereby adjusting the vibration displacement of the driving beam 122 to adjust the output sound pressure level of the speaker 100.
  • FIG. 29 is a projection diagram of a driving beam along the z direction according to some embodiments of the present specification.
  • the electrode covering area 1215 may be in a rectangular shape, and the electrode covering area 1215 is disposed in the suspended area 122-2 of the driving beam 122, and the width of the electrode covering area 1215 is consistent with the width of the suspended area 122-2 of the driving beam 122.
  • the electrode covering area 1215 in order to facilitate the control of the vibration form of the driving beam 122, may be disposed close to the fixed area 122-1 of the driving beam 122. In some embodiments, the electrode covering area 1215 may also be disposed close to the suspended area 122-2 of the driving beam 122, and the electrode covering area 1215 may also be located in the middle between the fixed area 122-1 and the suspended area 122-2 of the driving beam 122.
  • the electrode since the fixed area 122-1 is fixed to the substrate 126 or the housing 110 and does not participate in the vibration of the driving beam 122, the electrode may be disposed only in the suspended area 122-2, and of course the electrode may also be disposed in the fixed area 122-1 as required.
  • the vibration mode of the driving beam 122 can be adjusted by properly designing the relationship between the length dimension of the electrode covering area 1215 along the length direction x and the length dimension of the driving beam 122.
  • the electrode covering area 1215 can be a rectangular shape as an example. It should be noted that the electrode covering area 1215 can also be other shapes (for example, a trapezoid, a rounded rectangle, etc.).
  • a ratio of a length dimension of the electrode covering region 1215 to a length dimension of the suspended region 122 - 2 is 0.3-1.
  • a physical quantity ⁇ is defined as:
  • la is the length of the electrode covering area 1215 on the driving beam 122 along the length direction x
  • l is the length of the suspended area 122-2 along the length direction x
  • ⁇ is the ratio of la to l.
  • FIG30 is a schematic diagram of the frequency response curves of the loudspeaker corresponding to different ⁇ shown in some embodiments of the present specification.
  • the corresponding curve gradually moves downward, and the output sound pressure level of the loudspeaker 100 gradually decreases.
  • the corresponding curve moves downward significantly, and the output sound pressure level of the loudspeaker 100 decreases significantly. This is because when the value of ⁇ is too small, the ratio of the length of the electrode covering area 1215 on the driving beam 122 to the length of the suspended area 122-2 is too small, and the length of the area in the suspended area 122-2 of the driving beam 122 where deformation occurs to generate driving force is too small, resulting in the driving beam generated by the driving beam 122 being too small, thereby reducing the output sound pressure level of the speaker 100.
  • the area of the driving beam 122 close to its fixed area 122-1 and the suspended area 122-2 (for example, the deformation reverse area 301 shown in FIG31 ) will have a mode with the opposite deformation direction at certain frequencies.
  • the portion of the suspended area 122-2 not covered by the electrode only transmits vibration as a mechanical structure without deformation, so that the deformation amount of the mode with the opposite deformation direction in certain frequencies in the area close to the speaker 100 (for example, the deformation reverse area 311a shown in FIG32) is reduced, which can push more air and output a larger sound accordingly.
  • Pressure level As shown in FIG32, when the length of the electrode covering area 1215 is appropriately reduced, the portion of the suspended area 122-2 not covered by the electrode only transmits vibration as a mechanical structure without deformation, so that the deformation amount of the mode with the opposite deformation direction in certain frequencies in the area close to the speaker 100 (for example, the deformation reverse area 311a shown in FIG32) is reduced, which can push more air and output a larger sound accordingly. Pressure level.
  • the speaker 100 in order to make the driving beam 122 generate a larger driving force, can have a larger output sound pressure level, and the ratio ⁇ of the length la of the electrode covering area 1215 to the length l of the suspended area 122-2 can be in the range of 0.3-1. In some embodiments, in order to further increase the output sound pressure level of the speaker 100, the ratio ⁇ of the length la of the electrode covering area 1215 to the length l of the suspended area 122-2 can be in the range of 0.5-0.1. In some embodiments, in order to further increase the output sound pressure level of the speaker 100, the ratio ⁇ of the length la of the electrode covering area 1215 to the length l of the suspended area 122-2 can be in the range of 0.5-0.75.
  • the ratio ⁇ of the length la of the electrode covering area 1215 to the length l of the suspended area 122-2 can be in the range of 0.5-0.8, so as to increase the vibration displacement of the driving beam 122, thereby improving the output sound pressure level of the speaker 100.
  • the driving force of the driving beam 122 can be enhanced by designing the covering area of the electrode on the driving beam 122 (i.e., the relationship between the area of the electrode covering area 1215 and the area of the suspended area 122-2), thereby improving the output sound pressure level of the speaker 100.
  • the total area of the suspended region 122-2 may be defined as Sk
  • the area of the electrode covered region 1215 may be defined as Sd
  • the parameter ⁇ may be defined as the ratio of the area Sd of the electrode covered region 1215 to the total area Sk of the suspended region 122-2:
  • the parameter ⁇ may represent the ratio of the area of the deformed portion of the driving beam 122 (ie, the area corresponding to the electrode covering area 122 - 21 ) to the total area of the suspended area 122 - 2 .
  • FIG33 is a schematic diagram of the frequency response curves of the speaker corresponding to different ⁇ according to some embodiments of the present specification.
  • the value range of ⁇ can be 0.28-1.
  • the ratio ⁇ of the area of the electrode covering area 1215 to the area of the suspended area 122-2 can be in the range of 0.3-1. In some embodiments, in order to make the speaker 100 have a larger output sound pressure level, the ratio ⁇ of the area of the electrode covering area 1215 to the area of the suspended area 122-2 can be in the range of 0.5-1.
  • the shape of the electrode covering area 1215 can also be designed to affect the driving force of the driving beam 122, thereby affecting the output sound pressure level of the speaker 100, and adjusting the vibration mode of the driving beam 122 and the speaker 100.
  • 34A to 34F are projection diagrams of a driving beam along the z direction according to some embodiments of the present specification.
  • the electrode covering area 1215 is disposed in the suspended area 122-2, and the electrode covering area 1215 may be in a trapezoidal shape.
  • the width of the first side 12151 of the electrode covering area 1215 (i.e., the side disposed close to the fixed area 122-1) along the y direction is consistent with the width of the suspended area 122-2 in the y direction, and the second side 12152 of the electrode covering area 1215 opposite to the first side is spaced a certain distance b from a side of the suspended area 122-2 away from the fixed area 122-1 (see FIG34A).
  • the electrode covering area 1215 shown in Figure 34B is similar to the electrode covering area 1215 shown in Figure 34A, with the difference that: on the electrode covering area 1215, there is an arc chamfer between the long side of the side close to the suspended area 122-2 and away from the fixed area 122-1 and the short side along the x-direction, that is, it can be considered that on the electrode covering area 1215, the width dimension of the long side away from the fixed area 122-1 along the y-direction is smaller than the width dimension of the long side close to the fixed area 122-1 along the y-direction.
  • the electrode coverage area 1215 shown in FIG34C is similar to the electrode coverage area 1215 shown in FIG29 , except that: the original rectangular electrode coverage area 1215 extends a small rectangular area along the x direction, and the width of the small rectangular area along the y direction is smaller than the width of the original rectangular area. In some embodiments, the small rectangular area can be located in the middle of the electrode coverage area 1215 along the y direction.
  • the electrode coverage area 1215 shown in FIG. 34D is similar to the electrode coverage area 1215 shown in FIG. 34C , with the difference being that a small area is extended out in a trapezoidal shape, and its long side along the y direction is arranged close to the original rectangular area.
  • the substrate 126 of the speaker 100 may also be covered with electrodes for the lead wires of the electrical signal.
  • the electrodes on the substrate 126 may be covered on the end surface connected to the driving beam 122.
  • the electrodes on the substrate 126 may be one or more electrodes, and the multiple electrodes may be randomly distributed, for example, the multiple electrodes may be distributed in an array.
  • the electrodes may cover the entire end surface where the substrate 126 and the driving beam 122 are connected, or may cover a local area on the end surface.
  • the electrodes may be evenly distributed or unevenly distributed on the end surface where the substrate 126 and the driving beam 122 are connected. The following lists several distribution methods of the electrodes on the end surface of the substrate 126, which are not intended to be limiting.
  • the electrode covering area 1215 shown in FIG34E further includes a second covering area 1216 on the end surface of the substrate 126.
  • the second covering area 1216 is rectangular in shape, and the width of the second covering area 1216 in the y direction is consistent with the width of the driving beam 122 in the y direction.
  • the second covering area 1216 can be arranged close to the driving beam suspension area.
  • the electrode covering area 1215 shown in FIG34F further includes a second covering area 1216 on the end surface of the substrate 126.
  • the second covering area 1216 includes a plurality of second electrode areas 12161.
  • the plurality of second electrode areas 12161 are spaced apart along the y direction.
  • the width of the plurality of second electrode areas 12161 distributed in the y direction is consistent with the width of the driving beam 122 in the y direction.
  • the second covering area 1216 can be arranged close to the driving beam suspension area.
  • the vibration unit 130 includes a movable area, the movable area is provided with a reinforcement portion, the reinforcement portion at least partially covers the movable area, and the center of the reinforcement portion coincides with the projection of the center of the movable area in the vibration direction of the vibration unit.
  • the reinforcement portion can adjust the stiffness of the vibration unit 130, thereby adjusting the vibration mode of the vibration unit 130, thereby improving the vibration mode of the speaker 100 and enhancing the output performance of the speaker 100.
  • Fig. 35 is a partial schematic diagram of a vibration unit according to some embodiments of the present specification.
  • Fig. 36 is a structural schematic diagram of a diaphragm according to some embodiments of the present specification.
  • Fig. 37 is a schematic diagram of a vibration unit according to some embodiments of the present specification.
  • the vibration unit 130 may include a diaphragm 131 and a central reinforcement member 132.
  • the diaphragm 131 may include an edge fixing portion 1311, a folding ring portion 1312, and a central portion 1313, wherein the edge fixing portion 1311 may be fixedly connected to the housing 110 of the loudspeaker 100, and the central portion 1313 may be provided with a central reinforcement member 132.
  • the drive unit 120 may be connected to the central reinforcement member 132, or the drive unit 120 may be directly connected to the central portion 1313 of the diaphragm 131, to achieve mechanical energy transmission from the drive end (drive unit 120) to the load end (vibration unit 130).
  • the movable region 1314 is the region of the diaphragm 131 excluding the portion where the diaphragm 131 is connected to the housing 110. That is, the movable region 1314 is the region of the diaphragm 131 excluding the edge fixing portion 1311. In some embodiments, the movable region 1314 may be composed of the folding ring portion 1312 and the central portion 1313.
  • the movable region 1314 is provided with a reinforcement portion 1321.
  • the reinforcement portion 1321 may be composed of a central reinforcement member 132 and a central portion 1313 corresponding to the central reinforcement member 132.
  • the reinforcement portion 1321 at least partially covers the movable region 1314, and the center of the reinforcement portion 1321 coincides with the projection of the center of the movable region 1314 in the vibration direction of the vibration unit 130.
  • the area of the movable region 1314 not covered by the reinforcement portion 1321 is the vibration suspension area 1322 of the diaphragm 131. That is, the vibration suspension area 1322 of the diaphragm 131 refers to the area of the movable region 1314 excluding the reinforcement portion 1321.
  • the vibration unit 130 includes a diaphragm 131, the area of the diaphragm 131 covered by the reinforcement portion 1321 is defined as the reinforcement portion area Sq, and the area of the movable region 1322 of the diaphragm 131 is defined as Sm. In some embodiments, the ratio of the reinforcement portion area Sq to the movable region area Sm is 0.5-0.85.
  • the parameter ⁇ may be defined as the ratio of the area Sq of the reinforcement portion 1321 to the area Sm of the movable region 1322 of the diaphragm:
  • the proportion of the area of the vibration suspension area 1322 in the movable area 1314 can be determined, thereby determining the high-order resonance frequency of the mid-high frequency of the speaker 100 and adjusting the local mode of the diaphragm 131.
  • the driving beam 122 can generate a 2nd-order mode, resulting in a very small movement displacement of the driving unit 120 and the vibration transfer unit 140 of the loudspeaker 100, thereby resulting in a small displacement of the diaphragm assembly (i.e., the vibration unit 130, including the diaphragm 131 and/or the central reinforcement 132), and further, resulting in a trough in the frequency response of the loudspeaker 100 within the mid-high frequency range.
  • the diaphragm assembly i.e., the vibration unit 130, including the diaphragm 131 and/or the central reinforcement 132
  • the vibration suspension area 1322 by designing the size of the vibration suspension area 1322, the vibration suspension area 1322 generates a local mode within the frequency band where the driving beam 122 generates a 2nd-order mode, thereby offsetting the problem of a trough in the output frequency response of the loudspeaker 100 within the mid-high frequency range caused by a small displacement of the diaphragm 131 due to the generation of the 2nd-order mode by the driving beam 122.
  • FIG38B is a deformation cloud diagram of the speaker corresponding to FIG38A from another perspective.
  • FIG39B is a deformation cloud diagram of the speaker corresponding to FIG39A from another perspective.
  • FIG41 is a schematic diagram of frequency response curves of speakers corresponding to different ⁇ as shown in some embodiments of this specification.
  • the deformation cloud diagram of the loudspeaker shows that in the frequency band where the driving beam 122 generates the second-order mode, the vibration suspension area 1322 can generate a local mode, thereby contributing to the diaphragm assembly pushing the air, corresponding to the frequency response curve (as shown in FIG41 , curve L412) in which there is no trough or the trough is improved in this frequency band.
  • the stiffness of the diaphragm 131 can be adjusted, and the low-frequency resonance frequency f 0 of the speaker 100 can be adjusted in the low-frequency band.
  • the local stiffness of the diaphragm 131 can be adjusted in the mid-high frequency band to adjust the local mode, and further cooperate with the drive unit 120 of the speaker 100 to achieve peak and valley adjustment of the mid-high frequency frequency response curve.
  • the frequency response curve of the loudspeaker 100 e.g., curves L412 and L413
  • the value range of ⁇ can be 0.5-0.85.
  • the edge of the diaphragm 131 includes an edge fillet
  • the movable region 1314 has a length dimension in a direction extending from the fixed region 122-1 to the suspended region 122-2.
  • the ratio of the radius of the edge fillet to half of the length dimension of the movable region 1314 is 0-0.7.
  • the edge of the diaphragm 131 is connected to the speaker housing 110.
  • the edge of the diaphragm is connected to the housing 110 at the corner.
  • stress concentration is easily caused, which causes the diaphragm 131 to wrinkle or even be damaged.
  • it will also increase the harmonic distortion of the speaker 100, affecting the reliability of the speaker 100.
  • the diaphragm edge fillet can be designed at the corner position, but the diaphragm edge fillet will change the area of the vibration suspension area 1322 of the speaker near the specific position, which will affect the local mode of the vibration suspension area 1322 in the middle and high frequencies. Therefore, it is necessary to design the size of the diaphragm edge fillet to ensure that the vibration suspension area 1322 can still effectively form a local mode in the middle and high frequencies, thereby offsetting the problem of the speaker output frequency response having a trough in this frequency band caused by the small displacement of the diaphragm due to the second-order mode generated by the driving beam 122.
  • FIG42 is a schematic diagram of a diaphragm according to some embodiments of the present specification.
  • the parameter ⁇ can be defined as the ratio between the radius l R of the fillet of the diaphragm edge and the half length l m of the diaphragm movable area along the length direction of the driving beam (as shown in the x direction in FIG42):
  • the area ratio of the vibration suspension region 1322 near the corner position of the loudspeaker can be determined, thereby determining the mid-high frequency resonance frequency of the loudspeaker 100 and adjusting the local mode of the diaphragm 131 .
  • FIG43 is a schematic diagram of the frequency response curves of the loudspeaker corresponding to different ⁇ according to some embodiments of the present specification.
  • the value range of ⁇ in order to make the speaker 100 have a relatively flat frequency response curve in the mid-high frequency band, the value range of ⁇ may be 0-0.7. In some embodiments, the value range of ⁇ may be 0.2-0.6. In some embodiments, the value range of ⁇ may be 0.3-0.5.
  • the structure of the reinforcement portion 1321 may be designed to adjust the stiffness of the connection area between the speaker drive unit 120 and the diaphragm assembly, thereby adjusting the mode of the diaphragm assembly.
  • the reinforcing portion 1321 is hollowed out; or, a notch is provided on the peripheral side of the reinforcing portion 1321 .
  • 44A , 44B and 44C are partial schematic diagrams of speakers according to some embodiments of the present specification.
  • the central reinforcement member 132 may have a notch 1323 in the connection area between the drive unit 120 and the diaphragm assembly to effectively adjust the stiffness of the connection area between the speaker drive unit 120 and the diaphragm assembly, thereby adjusting the mode of the diaphragm assembly.
  • the notch 1323 may be located in the middle of the connection area between the drive unit 120 and the diaphragm assembly. In some embodiments, the notch 1323 may be located at the edge of the connection area between the drive unit 120 and the diaphragm assembly (as shown in FIG. 44A ).
  • the shape of the notch 1323 may be circular, elliptical, quadrilateral (including but not limited to square, rectangle, diamond, etc.), pentagon, hexagon, octagon and other polygons, etc.
  • the outline of the notch 1323 may be composed of a straight line (as shown in FIG. 44A ) or an arc (as shown in FIG. 44C ).
  • the driving unit 120 and the vibration unit 130 of the speaker 100 may be an integrated structure.
  • the driving unit 120 and the vibration unit 130 may be an integrated structure both prepared by a microelectromechanical system (MEMS) process.
  • the vibration unit 130 may be made of semiconductor materials, polymer materials, and the like.
  • Exemplary semiconductor materials may include silicon (Si), silicon dioxide (SiO2), silicon nitride (SiNx), silicon carbide (SiC), and the like.
  • Exemplary polymer materials may include polyimide (PI), polyparaxylene (Parylene), polydimethylsiloxane (PDMS), hydrogel, photoresist, silica gel, silicone gel, silicone sealant, and the like.
  • the driving unit 120, the vibration unit 130, and the housing 110 are connected by assembly.
  • the drive unit 120 and the vibration unit 130 of the speaker 100 may be separate structures.
  • the drive unit 120 may be prepared by MEMS technology, and the vibration unit 130 may be prepared by traditional processes such as die casting, vacuum forming, hot pressing or injection molding.
  • the vibration unit 130 may be made of a rigid material. Exemplary rigid materials may include aluminum alloy, carbon fiber, magnesium-lithium alloy, stainless steel, plastic, etc.
  • the drive unit 120 and the vibration unit 130 may be assembled by bonding or the like.
  • FIG. 45 is a schematic diagram of the internal structure of a speaker with a slit structure according to some embodiments of the present specification.
  • the vibration unit 130 is not directly connected to the housing 110, and a slit structure 150 is provided between the vibration unit 130 and the inner wall of the housing 110.
  • the slit structure 150 is a 360° annular structure.
  • the width of the slit structure 150 in order to prevent the front cavity 111 and the rear cavity 112 from leaking sound when the vibration unit 130 moves, causing an acoustic short circuit to reduce the output of the speaker 100, can be 5 ⁇ m-30 ⁇ m. In some embodiments, in order to further avoid the acoustic short circuit causing the output of the speaker 100 to be reduced, the width of the slit structure 150 can be 10 ⁇ m-20 ⁇ m.
  • the shape structure of the vibration transfer unit 140 can be designed to increase the contact area between the vibration transfer unit 140 and the vibration unit 130 .
  • Figures 46A to 46B are schematic diagrams of partial structures of speakers according to some embodiments of the present specification.
  • the speaker shown in Figure 46A is similar to the speaker shown in Figure 1A, except that the vibration transfer unit of the speaker shown in Figure 46A is a trapezoidal structure.
  • the speaker shown in Figure 46B is similar to the speaker shown in Figure 1A, except that the vibration transfer unit of the speaker shown in Figure 46B is an I-shaped structure.
  • the stiffness/mass ratio of the vibration unit 130 may be increased.
  • FIG. 47 is a schematic diagram of a partial structure of a speaker according to some other embodiments of the present specification.
  • the speaker shown in FIG47 is similar to the speaker shown in FIG1A, except that the vibration unit 130 of the speaker shown in FIG47 is a stepped structure.
  • the stepped vibration unit 130 may be a vibration membrane added to the center of the vibration membrane 131 (not shown in the figure). The area of the newly added vibration membrane is smaller than the area of the original vibration membrane 131.
  • FIG. 48 is a projection diagram of the vibration unit along the vibration direction of the diaphragm according to some embodiments of the present specification.
  • the speaker shown in FIG. 48 is similar to the speaker shown in FIG. 1A , except that the diaphragm 131 of the vibration unit 130 shown in FIG. 48 has a reinforcement portion 1321.
  • the reinforcement portion 1321 can be arranged along the length and width direction of the diaphragm 131, and the projection pattern formed by the reinforcement portion 1321 has one or more hollow structures.
  • the reinforcement portion please refer to the relevant parts of the previous text, such as FIG. 35 to FIG. 37 .
  • the stiffness/mass ratio of the vibration unit 130 can be further increased to ensure that the diaphragm is always along the vibration direction (i.e., the z direction) during movement, thereby avoiding the occurrence of local deformation modes of the vibration unit 130.
  • the drive beam 122 has a drive beam reinforcement layer.
  • FIG. 49A is a schematic diagram of a speaker according to some embodiments of the present specification.
  • the speaker shown in FIG. 49A is similar to the speaker shown in FIG. 1A, except that the driving beam 122 of the speaker shown in FIG. 49A has a driving beam reinforcement layer 122-3.
  • the driving beam reinforcement layer 122-3 can be arranged on the side of the driving beam 122 away from the vibration unit 130 to strengthen the driving beam 122.
  • the driving beam reinforcement layer 122-3 can connect the suspended areas 122-2 of different driving beams 122, and multiple driving beams 122 are connected to the vibration transfer unit 140 or the vibration unit 130 through the driving beam reinforcement layer 122-3.
  • the driving beam reinforcement layer 122-3 can be composed of a polymer material or a semiconductor material. Exemplary polymer materials include polyimide, photoresist, parylene, hydrogel, etc. Exemplary semiconductor materials include one or more composite materials of silicon, silicon nitride, silicon oxide, silicon carbide, etc.
  • a slit structure 150 may be designed between the driving beam 122 and the base 126 of the driving unit 120 of the speaker, or between different driving beams 122 .
  • FIG. 49B is a projection diagram of the driving beam and the diaphragm along the vibration direction of the vibration unit according to some embodiments of the present specification.
  • the speaker shown in FIG. 49B is similar to the speaker shown in FIG. 49A , except that a slit structure 150 exists between the driving beam 122 and the base 126 of the speaker shown in FIG. 49B .
  • a slit structure 150 between adjacent driving beams 122 there is a slit structure 150 between adjacent driving beams 122 .
  • the speaker 100 may include a plurality of drive units 120 arranged in parallel.
  • 50A to 50B are schematic diagrams of a loudspeaker including a plurality of parallel driving units according to some embodiments of the present specification.
  • the speaker 100 may include a plurality of parallel drive units (such as drive units 120-1, 120-2, 120-n, etc.).
  • the plurality of drive units are respectively connected to a vibration unit 130 through corresponding vibration transmission units 140, and the plurality of drive units jointly provide sufficient power for the vibration of the vibration unit 130 to increase the vibration amplitude of the vibration unit 130 and improve the output of the speaker 100.
  • the drive beams of the plurality of drive units may be respectively connected to the bottom wall of the housing 110 through the base 126, and the portion between adjacent bases 126 may be used as a drive unit, and the corresponding portion of the housing 110 is correspondingly provided with an acoustic hole for sound output.
  • the speaker shown in Figure 50B is similar to the speaker shown in Figure 50A, except that the speaker 100 shown in Figure 50B does not include the vibration transfer unit 140, and multiple parallel driving units (such as driving units 120-1, 120-2, 120-n, etc.) are directly connected to the vibration unit 130 (such as the diaphragm 131).
  • multiple parallel driving units such as driving units 120-1, 120-2, 120-n, etc.
  • providing multiple parallel drive units in a speaker can increase the distribution range of the sound output by the speaker and enhance the volume; in addition, different drive units can also adapt to the conversion of electrical signals and sound signals of different frequencies respectively, making the audio performance more comprehensive.
  • the present application uses specific words to describe the embodiments of the present application.
  • “one embodiment”, “an embodiment”, and/or “some embodiments” refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that “one embodiment” or “an embodiment” or “an alternative embodiment” mentioned twice or more in different positions in this specification does not necessarily refer to the same embodiment.
  • some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.
  • numbers describing the number of components and attributes are used. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about”, “approximately” or “substantially” in some examples. Unless otherwise specified, “about”, “approximately” or “substantially” indicate that the numbers are allowed to vary by ⁇ 20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may change according to the required features of individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and adopt the general method of retaining digits. Although the numerical domains and parameters used to confirm the breadth of their range in some embodiments of the present application are approximate values, in specific embodiments, the setting of such numerical values is as accurate as possible within the feasible range.

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Abstract

本说明书的一个或多个实施例涉及一种扬声器，包括：壳体、驱动单元与振动单元，所述驱动单元固定于所述壳体，所述驱动单元与所述振动单元传动连接；其中，所述驱动单元包括多个驱动梁，任意一个驱动梁包括固定区域以及悬空区域，所述任意一个驱动梁通过所述固定区域与所述壳体连接，所述任意一个驱动梁通过所述悬空区域与所述振动单元传动连接。

Description

一种扬声器
交叉引用
本说明书要求于2023年04月14日递交的中国申请202310444739.0，2023年04月14日递交的中国申请202310446118.6，以及2023年04月14日递交的中国申请202310425028.9的优先权，其所有内容通过引用的方式包含于此。
技术领域
本说明书涉及声学技术领域，特别涉及一种扬声器。
背景技术
压电式的扬声器是利用压电材料的逆压电效应产生振动向外辐射声波，与传统电动式扬声器相比，具有机电换能效率高、能耗低、体积小、集成度高等优势。在当今器件小型化和集成化的趋势下，压电式的扬声器具有极其广阔的前景与未来。扬声器一般包括驱动部分、振动部分、支撑辅助部分三大核心部分。一般的压电式的扬声器，尤其是微型扬声器，面临的最大问题即为驱动部分的驱动能力不足，导致扬声器在特定频率范围(例如20Hz-20kHz范围)的输出声压级(Sound Pressure Level，SPL)较低，从而导致其在可听域内灵敏度较低。
发明内容
本说明书实施例提供一种扬声器，包括：壳体、驱动单元与振动单元，所述驱动单元固定于所述壳体，所述驱动单元与所述振动单元传动连接；其中，所述驱动单元包括多个驱动梁，任意一个驱动梁包括固定区域以及悬空区域，所述任意一个驱动梁通过所述固定区域与所述壳体连接，所述任意一个驱动梁通过所述悬空区域与所述振动单元传动连接。
附图说明
本说明书将以示例性实施例的方式进一步说明，这些示例性实施例将通过附图进行详细描述。这些实施例并非限制性的，在这些实施例中，相同的编号表示相同的结构，其中：
图1A是根据本说明书一些实施例所示的扬声器的内部结构示意图；
图1B是根据本说明书另一些实施例所示的扬声器的内部结构示意图；
图2是根据本说明书一些实施例所示的质量-弹簧-阻尼系统的模型示意图；
图3是根据本说明书一些实施例所示的质量-弹簧-阻尼系统速度共振曲线图；
图4是根据本说明书一些实施例所示的扬声器的等效力学模型示意图；
图5是根据本说明书一些实施例所示的扬声器的示意图；
图6是根据本说明书一些实施例所示的另一视角的扬声器的示意图；
图7是根据本说明书图6所示的扬声器的截面示意图；
图8是根据本说明书一些实施例所示的驱动单元的结构示意图；
图9是根据本说明书一些实施例所示的驱动梁与振动传递单元的连接示意图；
图10是根据本说明书一些实施例所示的驱动单元的另一结构示意图；
图11是根据本说明书一些实施例所示的驱动梁的内部结构示意图；
图12是根据本说明书一些实施例所示的不同的参数α对应的扬声器的频响曲线示意图；
图13是根据本说明书一些实施例所示不同的β对应的扬声器的频响曲线示意图；
图14A～图14E是根据本说明书一些实施例所示的不同结构的驱动梁的示意图；
图15A是根据本说明书一些实施例所示的示例性扬声器的局部结构示意图；
图15B是根据本说明书图15A中扬声器的驱动单元的内部结构示意图；
图15C是根据本说明书一些实施例所示的示例性扬声器的局部结构示意图；
图15D是根据本说明书图15C中扬声器的驱动单元的内部结构示意图；
图16A～图16G是根据本说明书一些实施例所示的不同结构的驱动单元的示意图；
图17A～图17K是根据本说明书一些实施例所示的不同结构的驱动单元的示意图；
图17L是根据本说明书图17K所对应的驱动单元的内部结构示意图；
图17M是根据本说明书图17L所示的驱动梁的变形示意图；
图17N是根据本说明书图17L所示的包括折型结构驱动梁的扬声器与包括非折型结构驱动梁的扬声器的频响曲线示意图；
图17O是根据本说明书图17K所对应的驱动单元的另一内部结构示意图；
图17P是根据本说明书图17O所示的驱动梁的变形示意图；
图17Q是根据本说明书图17O所示的包括折型结构驱动梁的扬声器与包括非折型结构驱动梁的扬声器的频响曲线示意图；
图17R是根据本说明书图17K所对应的驱动单元的另一内部结构示意图；
图17S是根据本说明书一些实施例所示的驱动单元的另一结构示意图；
图17T是根据本说明书一些实施例所示的驱动单元的另一结构示意图；
图18A与图18B是根据本说明书一些实施例所示的不同结构的驱动单元的内部结构示意图；
图18C是根据本说明书一些实施例所示的不同的κ对应的扬声器的频响曲线示意图；
图19A和图19B是根据本说明书一些实施例所示的不同结构的驱动单元的示意图；
图20A是根据本说明书图1B所示的扬声器的第一视图；
图20B是根据本说明书图20A所示的扬声器的截面图；
图20C是根据本说明书图1B所示的扬声器的第二视图；
图20D是根据本说明书图20C所示的扬声器的截面图；
图20E是根据本说明书一些实施例所示的扬声器的结构示意图；
图20F是根据本说明书图20E所示的扬声器的截面图；
图20G是根据本说明书另一些实施例所示的扬声器的结构示意图；
图20H是根据本说明书图20G所示的扬声器的截面图；
图20I是根据本说明书又一些实施例所示的扬声器的结构示意图；
图20J是根据本说明书图20I所示的扬声器的截面图；
图21A是本说明书一些实施例所示的驱动梁沿振动单元的振动方向的投影图；
图21B～图21M是本说明书一些实施例所示的驱动梁及振膜沿振动单元的振动方向的投影图；
图22是本说明书另一些实施例所示的驱动梁及振膜沿z方向的投影图；
图23是根据本说明书一些实施例所示的μ不同取值对应的扬声器的频响曲线图；
图24是根据本说明书一些实施例所示的μ＝0.6时驱动梁及振膜沿x方向及y方向对称线划分四分之一部分的振动变形云图；
图25是根据本说明书一些实施例所示的δ不同取值对应的扬声器的频响曲线图；
图26是根据本说明书一些实施例所示的δ＝0.5时驱动梁及振膜沿x方向及y方向对称线划分四分之一部分的振动变形云图；
图27是本说明书一些实施例所示的具有电极的驱动梁沿y方向的侧视图；
图28是本说明书一些实施例所示的具有电极的驱动梁沿y方向的侧视图；
图29是本说明书一些实施例所示的驱动梁沿z方向的投影图；
图30是根据本说明书一些实施例所示的不同的γ对应的扬声器的频响曲线示意图；
图31是根据本说明书一些实施例所示的γ＝1时驱动梁及振膜沿x方向及y方向对称线划分四分之一部分的振动变形云图；
图32是根据本说明书一些实施例所示的γ＝0.75时驱动梁及振膜沿x方向及y方向对称线划分四分之一部分的振动变形云图；
图33是根据本说明书一些实施例所示的不同的τ对应的扬声器的频响曲线示意图；
图34A～图34F是根据本说明书一些实施例所示的驱动梁沿z方向的投影图；
图35是根据本说明书一些实施例所示的振动单元的局部示意图；
图36是根据本说明书一些实施例所示的振膜的结构示意图；
图37是根据本说明书一些实施例所示的振动单元的示意图；
图38A是根据本说明书一些实施例所示的当参数ζ＝0.5时对应的扬声器的变形云图；
图38B是根据本说明书图38A对应的扬声器的另一视角的变形云图；
图39A是根据本说明书一些实施例所示的当参数ζ＝0.4时对应的扬声器的变形云图；
图39B是根据本说明书图39A对应的扬声器的另一视角的变形云图；
图40是根据本说明书一些实施例所示的当参数ζ＝0.9时对应的扬声器的变形云图；
图41是根据本说明书一些实施例所示的不同的ζ对应的扬声器的频响曲线示意图；
图42是根据本说明书一些实施例所示的振膜的示意图；
图43是根据本说明书一些实施例所示的不同的λ对应的扬声器的频响曲线示意图；
图44A～图44C是根据本说明书一些实施例所示的扬声器的局部示意图；
图45是根据本说明书一些实施例所示的具有狭缝结构的扬声器的内部结构示意图；
图46A～46B是根据本说明书一些实施例所示的扬声器的部分结构的示意图；
图47是根据本说明书又一些实施例所示的扬声器的部分结构的示意图；
图48是根据本说明书一些实施例所示的振动单元沿振膜振动方向的投影图；
图49A是根据本说明书一些实施例所示的扬声器的示意图；
图49B是根据本说明书一些实施例所示的驱动梁及振膜沿振动单元的振动方向的投影图；
图50A～50B是根据本说明书一些实施例所示的包括多个并列的驱动单元的扬声器的示意图。
具体实施方式
为了更清楚地说明本说明书实施例的技术方案，下面将对实施例描述中所需要使用的附图作简单的介绍。显而易见地，下面描述中的附图仅仅是本说明书的一些示例或实施例，对于本领域的普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图将本说明书应用于其它类似情景。除非从语言环境中显而易见或另做说明，图中相同标号代表相同结构或操作。
应当理解，本文使用的“系统”、“装置”、“单元”和/或“模块”是用于区分不同级别的不同组件、元件、部件、部分或装配的一种方法。然而，如果其他词语可实现相同的目的，则可通过其他表达来替换所述词语。
如本说明书和权利要求书中所示，除非上下文明确提示例外情形，“一”、“一个”、“一种”和/或“该”等词并非特指单数，也可包括复数。一般说来，术语“包括”与“包含”仅提示包括已明确标识的步骤和元素，而这些步骤和元素不构成一个排它性的罗列，方法或者设备也可能包含其它的步骤或元素。
本说明书中使用了流程图用来说明根据本说明书的实施例的系统所执行的操作。应当理解的是，前面或后面操作不一定按照顺序来精确地执行。相反，可以按照倒序或同时处理各个步骤。同时，也可以将其他操作添加到这些过程中，或从这些过程移除某一步或数步操作。
图1A是根据本说明书一些实施例所示的扬声器的内部结构示意图。图1B是根据本说明书另一些实施例所示的扬声器的内部结构示意图。图2是根据本说明书一些实施例所示的质量-弹簧-阻尼系统的模型示意图。图3是根据本说明书一些实施例所示的质量-弹簧-阻尼系统速度共振曲线图。图4是根据本说明书一些实施例所示的扬声器的等效力学模型示意图。以下结合图1A～图4对扬声器的振动过程进行说明。
请参照图1A，在一些实施例中，扬声器100可以包括壳体110、驱动单元120、振动单元130等。在一些实施例中，驱动单元120固定于壳体110，驱动单元120与振动单元130传动连接。
扬声器100可以用于将音频信号(例如，含有声音信息的电信号)转换为声音信号。在一些实施例中，扬声器100可以为骨传导扬声器、气导扬声器或骨气导结合的扬声器。在一些实施例中，扬声器100可以应用于眼镜、智能手环、耳机、助听器、智能头盔、智能手表、智能服装、智能背包、智能配件等，或其任意组合。例如，扬声器100可以应用于功能型的近视眼镜、老花镜、骑行眼镜或太阳镜等，也可以是智能化的眼镜，例如具有耳机功能的音频眼镜。在一些实施例中，扬声器100还可以应用于头盔、增强现实(Augmented Reality,AR)设备或虚拟现实(Virtual Reality,VR)设备等头戴式设备。在一些实施例中，增强现实设备或虚拟现实设备可以包括虚拟现实头盔、虚拟现实眼镜、增强现实头盔、增强现实眼镜等或其任何组合。例如，虚拟现实设备和/或增强现实设备可以包括Google Glass、Oculus Rift、Hololens、Gear VR等。
驱动单元120作为扬声器100的驱动端，通过将电能转换为机械能，为扬声器100提供驱动力。驱动单元120的类型可以包括但不限于电磁式、静电式、压电式等。振动单元130作为扬声器100的负载端，包括振膜131、中心加强件132。在一些实施例中，振膜131可以包括边缘固定部1311、折环部1312、中心部1313，其中边缘固定部1311可以与扬声器100的壳体110固定连接，中心部1313可以设置有中心加强件132。在一些实施例中，中心加强件132可为单个零件，位于中心部1313上侧或者下侧。在一些实施例中，中心加强件132也可为多个零件，分别位于中心部1313上侧和下侧。驱动单元120可连接至中心加强件132，或者，驱动单元120也可以直接连接至振膜131的中心部1313，实现驱动端(驱动单元120)到负载端(振动单元130)的机械能传递。在一些实施例中，扬声器100可以包括支持辅助结构，支持辅助结构主要包括驱动单元120与振动单元130之间的连接固定部分(例 如振动传递单元140)、壳体110等。在一些实施例中，振膜131可以将壳体110内的空间分隔为两个声学腔体(例如前腔111与后腔112)，扬声器100可以在声学腔体(例如前腔111与后腔112)设置相应的结构，例如壳体110上设置对应的出声孔(例如与前腔111连通的出声孔111a等)、设置于出声孔的阻尼网布113等，从而实现对扬声器100的频响曲线灵敏度、Q值调节，提升扬声器100的输出性能。
在一些实施例中，对于扬声器100，其可以等效为多个质量-弹簧-阻尼系统通过串、并联的模型。在实际工作时，在扬声器100的工作频率远离某一个质量-弹簧-阻尼系统的固有频率f0时，该系统在激励载荷的作用下发生受迫振动，进行力和位移的传递；当工作频率接近某一个质量-弹簧-阻尼系统的固有频率f0时，该系统便会产生谐振，使得扬声器100在该系统对应的局部结构处发生较大的振动速度，最终体现为扬声器100的频响曲线上存在对应的峰谷。
请参照图2，以图2所示的单个质量-弹簧-阻尼系统进行分析。图2所示的单个质量-弹簧-阻尼系统的运动可用以下公式(1)进行描述：
其中，M为系统质量，R为系统阻尼，K为系统弹性系数，F为驱动力幅值，x为系统位移，ω为外力圆频率。
求解上述公式(1)的稳态速度可得：
其中，v为运动速度，va为运动速度幅值。
结合公式(1)与公式(2)，则该系统的运动速度幅值为：
其中，Qm为力学品质因子，
对va除以归一化因子定义vB为归一化速度，则有：
请参照图3，当系统的工作频率f等于质量-弹簧-阻尼系统固有频率f0时，即f＝f0时，质量-弹簧-阻尼系统输出运动速度获得最大值为：
而扬声器100的输出声压幅值(声压级)与质量-弹簧-阻尼系统的输出运动速度成正相关，即pa∝va。
因此，通过设计扬声器100的各个质量-弹簧-阻尼系统的输出运动速度幅值，即可对扬声器100的输出声压级进行调控。
请参照图4，在一些实施例中，扬声器100的各个单元(例如驱动单元120、振动单元130等)可等效为如图4所示的力学模型。
驱动单元120的一端与壳体110固定连接，另一端与振动单元130连接，同时驱动单元120与空气接触。由于驱动单元120具有相应的质量Md、阻尼R、刚度K，因而可等效通过具有刚度为Kd的弹簧和阻尼为Rd的阻尼器与壳体110进行连接，具有作为惯性单元的质量Md。进一步的，驱动单元120通过弹簧Kp、阻尼Rp与振动单元130连接，且驱动单元120通过弹簧Ka2、阻尼Ra2与空气负载连接。更进一步的，驱动单元120作为电能-机械能转换单元，可为扬声器100振动系统输出力F1或者位移S1，为了提升扬声器100的输出声压级，需要提升驱动单元120输出的力F1或者位移S1，以及匹配驱动单元120与振动单元130之间的阻抗，使得驱动单元120输出的力F1或者位移S1能以最小损失传递至振动单元130，使得振动单元130输出最大的位移或速度。
在振动单元130中，可以将振膜131、中心加强件132、振动传递单元140的所有质量等效为总质量Mn，振膜131通过具有刚度为Km的弹簧和阻尼为Rm的阻尼器与壳体110进行连接，同时振膜131通过弹簧Ka1、阻尼Ra1与空气负载连接，通过推动空气运动实现声压的辐射。振膜131的负载随振膜131的运动位移的变化而变化，因而振膜131为一个变化的负载。在一些实施例中，振动单元130的负载还包括振膜131推动的空气部分，该部分负载为惯性负载，主要由振膜131推动的空气量大小确定，同时振膜131推动的空气量也决定了扬声器100可输出的声压级大小。在一些实施例中，振动单元130也可以称为振膜组件。
综上所述，为了提升扬声器100的输出性能(例如输出声压级)，可以设计提升振膜131的 推动空气量的大小(即提升振动单元130的振动幅度)。而为了提升振动单元130的振动幅度，一方面可以设计提升驱动单元120输出的力与位移(例如对驱动单元120的驱动梁122的结构进行设计等)，另一方面可以设计提升驱动单元120与振动单元130之间力与位移的传递效率(例如对驱动单元120的耦合弹性结构124进行设计等)。
在一些实施例中，驱动单元120包括多个驱动梁，任意一个驱动梁包括固定区域以及悬空区域。任意一个驱动梁通过固定区域与壳体110连接实现固定，任意一个驱动梁通过悬空区域与振动单元130传动连接，以驱动振动单元130振动产生声音输出。在一些实施例中，可以通过对驱动单元120的结构进行设计，以增强驱动单元120的驱动能力(输出的力与位移)，从而增强扬声器100的输出声压级。在一些实施例中，在从固定区域延伸至悬空区域的方向上，悬空区域具有长度尺寸；在振动单元130(振膜131)的振动方向上，悬空区域具有厚度尺寸。在驱动梁振动的过程中，主要为悬空区域产生形变，从而为振动单元130提供驱动力与位移。通过对驱动梁的悬空区域的尺寸设计，可以对驱动梁的形变量进行调控，从而增强驱动梁的驱动能力，增强扬声器100的输出。另一方面，驱动单元120作为一个弹簧-质量-阻尼系统，会为整个扬声器100提供刚度与质量，从而影响扬声器100的谐振频率。而通过对驱动梁的结构参数的设计，可以调整驱动单元120的刚度与质量，从而实现对扬声器100的振动模态的调控，以优化扬声器的输出性能。
图5是根据本说明书一些实施例所示的扬声器的示意图，图6是根据本说明书一些实施例所示的另一视角的扬声器的示意图，图7是图6所示的扬声器的截面示意图，图8是根据本说明书一些实施例所示的驱动单元的结构示意图，图9是根据本说明书一些实施例所示的驱动梁与振动传递单元的连接示意图。图10是根据本说明书一些实施例所示的驱动单元的另一结构示意图。图11是根据本说明书一些实施例所示的驱动梁的内部结构示意图。
请参照图5、图6与图7，在一些实施例中，扬声器100可以包括壳体110、驱动单元120与振动单元130。壳体110主要为扬声器100的其他部件提供安装固定的平台。在一些实施例中，壳体110的形状可以为圆形、椭圆形、四边形(包括但不限于正方形、长方形、菱形、筝形等)、五边形、六边形、八边形以及其他多边形等。以下以壳体110的形状为矩形，对扬声器100进行示例性说明。在一些实施例中，壳体110、驱动单元120与振动单元130可以围成声学腔体(例如后腔112)，如图7所示。在一些实施例中，振动单元130振动可以带动后腔112内的空气振动产生声音输出。在一些实施例中，振动单元130也可以振动带动振动单元130背离后腔112的一侧的空气振动产生声音输出。
驱动单元120固定于壳体110，且驱动单元120与振动单元130传动连接。驱动单元120可以驱动振动单元130振动以产生声音输出。请参照图8与图10，在一些实施例中，驱动单元120可以包括驱动梁122，驱动梁122可以为梁状结构。驱动梁122可以包括固定区域122-1与悬空区域122-2，驱动梁122通过固定区域122-1与壳体110连接，驱动梁122通过悬空区域122-2(或驱动梁122的自由端)与振动单元130传动连接。请参照图8、图10、图11，在一些实施例中，在从固定区域122-1延伸至悬空区域122-2的方向上，悬空区域122-2具有长度尺寸l；在振动单元130的振动方向上，悬空区域122-2(驱动梁122)具有厚度尺寸h。其中，由于振动单元130的振动由驱动梁122的形变驱动产生，因此振动单元130的振动方向即为驱动梁122的形变方向。悬空区域122-2的长度尺寸l与厚度尺寸h可以影响到悬空区域122-2的形变，从而影响驱动梁122输出的力与位移，进而影响到扬声器100的输出声压级。因此，可以对悬空区域122-2的长度尺寸l与厚度尺寸h进行设计，以提升扬声器100的输出声压级。
请参照图7-图10，在一些实施例中，驱动单元120还可以包括耦合弹性结构124，驱动梁122的悬空区域122-2通过耦合弹性结构124与振动单元130传动连接，耦合弹性结构124可以有效地将驱动梁122形变产生的力与位移传递至振动单元130。在一些实施例中，驱动梁122的数量可以为一个或多个，每个驱动梁122对应的耦合弹性结构124的数量可以为一个或多个。在一些实施例中，耦合弹性结构124可以由半导体材料、高分子材料等制成。示例性半导体材料可以包括硅(Si)、二氧化硅(SiO2)、氮化硅(SiNx)、碳化硅(SiC)等。示例性高分子材料可以包括聚酰亚胺(Polyimide、PI)、聚对二甲苯(Parylene)、聚二甲基硅氧烷(Polydimethylsiloxane，PDMS)、水凝胶、光刻胶、硅胶、硅凝胶、硅密封胶等。在一些实施例中，耦合弹性结构124可以具有单层或多层结构。例如，耦合弹性结构124可以具有由一种半导体材料(例如，Si、SiO2)或一种高分子材料(例如，聚酰亚胺)制成的单层结构。又例如，耦合弹性结构124可以具有由多种半导体材料制成的多层结构(例如，Si/SiO2双层结构、Si/SiNx双层结构等)。再例如，耦合弹性结构124可以具有由多种高分子材料制备的多层结构。又例如，耦合弹性结构124可具有由高分子材料和半导体材料制成的多层结构。
请参照图7、图8与图10，在一些实施例中，驱动单元120还可以包括基体126，驱动单元 120通过基体126固定于壳体110。在一些实施例中，基体126的形状可以与壳体110的形状一致，例如当壳体110为矩形时，基体126可以为矩形环。请参照图10，在一些实施例中，驱动梁122的固定区域122-1固定于基体126。在从固定区域122-1延伸至悬空区域122-2的方向上，固定区域122-1的长度可以视为与基体126的宽度相同。在一些实施例中，固定区域122-1的长度也可以小于基体126的宽度。当固定区域122-1的长度可以视为与基体126的宽度相同时，对应地，悬空区域122的长度尺寸l可以通过驱动梁122的总长度减去对应基体126的宽度得到。
在一些实施例中，振动单元130可以接收驱动单元120传递的力或者位移而产生相应振动，从而推动空气运动。请参照图5与图7，在一些实施例中，振动单元130主要包括振膜131与中心加强件132。其中，振膜131通过耦合弹性结构124与一个或多个驱动梁122的悬空区域122-2传动连接，悬空区域122-2的形变产生的力与位移传递至振膜131，驱动振膜131振动。振膜131可视为通过弹簧、阻尼与空气惯性负载部分连接，通过空气运动实现声压的辐射。振膜131推动的空气部分负载为惯性负载，主要由振膜131推动的空气量大小确定，同时振膜131推动的空气量也决定了扬声器100可输出的声压级大小。而通过增强驱动单元120的驱动性能，可以增大振膜131输出的最大位移或速度，增加振膜131的推动的空气量，增强扬声器100的输出性能。在一些实施例中，振膜131的材质可以是包括但不限于有机高分子材料等。在一些实施例中，有机高分子材料可以为聚对苯二甲酸乙二酯(Polyethylene Terephthalate，PET)、聚醚酰亚胺(Polyetherimide，PEI)、聚酰亚胺(Polyimide，PI)、聚醚醚酮(Polyetheretherketone，PEEK)、硅胶等中的任意一种或其组合。在一些实施例中，振膜131可以具有单层或多层结构。例如，振膜131可以具有由一种高分子材料(例如，聚酰亚胺)制成的单层结构。又例如，振膜131可以具有由多种高分子材料制备的多层结构。
在一些实施例中，中心加强件132设置于振膜131的中心区域。中心加强件132可以调节振膜131的刚度，从而调节振膜131的振动模态，从而改善扬声器100的振动模态，提升扬声器100的输出性能。例如，中心加强件132可以调节振膜131在高频的高阶振动模态。其中，不同场景下对应的高频的范围可以有所区别。例如，在一些场景下，高频可以是指3kHz以上；又例如，在另一些场景下，高频也可以指10kHz-20kHz等。在一些实施例中，中心加强件132可以设置于振膜131靠近后腔112的一侧(如图7所示)，也可以设置于弹性件131背离后腔112的一侧。在一些实施例中，中心加强件132的材质可以包括金属材料、半导体材料、各向异性的材料等。示例性金属材料可以包括不锈钢、铝合金、镁锂合金、铜、铜合金等。示例性各向异性的材料可以包括碳纤维、FR4环氧玻璃纤维板等。示例性半导体材料可以包括硅(Si)、二氧化硅(SiO2)、氮化硅(SiNx)、碳化硅(SiC)等。在一些实施例中，当中心加强件132的材质为半导体材料时，中心加强件132可以具有单层或多层结构。例如，中心加强件132可以具有由一种半导体材料(例如，Si、SiO2)制成的单层结构。又例如，耦合弹性结构124可以具有由多种半导体材料制成的多层结构(例如，Si/SiO2双层结构、Si/SiNx双层结构等)。
请参照图7、图8与图9，在一些实施例中，扬声器100还可以包括振动传递单元140，振动传递单元140分别与驱动单元120(例如驱动梁122或耦合弹性结构124)、振膜131传动连接，振动传递单元140可以将驱动单元120输出的驱动力与位移传递至振膜131，推动振膜131振动，从而产生声音输出。在一些实施例中，为了减小驱动单元120与振膜131之间的力与位移的传递损耗，振动传递单元140可以选择刚度大密度小的材料。在一些实施例中，振动传递单元140的材质可以包括金属材料、半导体材料等。示例性金属材料可以包括不锈钢、铝合金、镁锂合金、铜、铜合金等。示例性半导体材料可以包括硅(Si)、二氧化硅(SiO2)、氮化硅(SiNx)、碳化硅(SiC)等。在一些实施例中，当振动传递单元140的材质为半导体材料时，中心加强件132可以具有单层或多层结构。例如，振动传递单元140可以具有由一种半导体材料(例如，Si、SiO2)制成的单层结构。又例如，振动传递单元140可以具有由多种半导体材料制成的多层结构(例如，Si/SiO2双层结构、Si/SiNx双层结构等)。
在一些实施例中，单个驱动梁122可以视为带负载的梁状悬臂梁结构，其固有频率计算公式可以通过公式(6)确定：
其中，βnl为常数项，随着n的取值不同，其具有不同的取值，具体如下：β1l＝＝1.875104，β2l＝4.694091，β3l＝7.854757，β4l＝10.995541，β5l＝14.1372；E为驱动梁122的材料的杨氏模量，I为惯性矩，ρ为驱动梁122的材料的密度，l为悬臂梁长度(即驱动梁122的悬空区域122的长度尺寸)，h为悬臂梁厚度(即驱动梁122、悬空区域122-2的厚度尺寸)。
由公式(6)可得，通过对驱动梁122的结构及尺寸进行设计，可以调节驱动梁122的固有频率，从而改善扬声器100的输出性能。
在一些实施例中，参见图7、图10以及图11，对于任意一个驱动梁122，从固定区域122-1延伸至悬空区域122-2的方向上(即图中所示的x方向)，悬空区域122-2具有长度尺寸l；在振动单元130的振动方向上(即图中所示的z方向)，悬空区域122-2具有厚度尺寸h。
在一些实施例中，悬空区域122-2的厚度尺寸与悬空区域122-2的长度尺寸的平方的比值的二分之一次幂的取值范围为0.01-0.3。在一些实施例中，可以定义参数α表示悬空区域122-2的长度尺寸l与厚度尺寸h之间的关系。即，α为厚度尺寸h与长度尺寸l的平方的比值的二分之一次幂。例如，α可以通过公式(7)表示：
在一些实施例中，α的取值可以反应驱动梁122的悬空区域122-2的刚度。当α的取值较小时，悬空区域122-2的厚度h较小，长度l较大，悬空区域122-2易变形，刚度较小。当α的取值较大时，悬空区域122-2的厚度h较大，长度l较小，悬空区域122-2不易变形，刚度较大。在一些实施例中，α的取值范围可以为0.01-0.3，以对悬空区域122-2的形变以及驱动单元120的刚度与质量进行设计，从而提升扬声器100的灵敏度，优化扬声器100的振动模态，增强扬声器100的输出性能。有关α的更多内容，请参照图12及其相关内容，在此不再赘述。
图12是根据本说明书一些实施例所示的不同的参数α对应的扬声器的频响曲线示意图。如图12所示，曲线L121表示α＝0.02时，对应扬声器100的频响曲线；曲线L122表示α＝0.04时，对应扬声器100的频响曲线；曲线L123表示α＝0.09时，对应扬声器100的频响曲线；曲线L124表示α＝0.1时，对应扬声器100的频响曲线；曲线L125表示α＝0.15时，对应扬声器100的频响曲线。由图12可知，当α＝0.02时，为驱动梁122刚度非常小的情况，驱动梁122无法有效驱动负载，扬声器100的输出很低，曲线L121整体高度低，且在较低频段(例如500Hz-2000Hz)产生二阶模态，导致频响峰谷。当α＝0.04时，驱动梁122的刚度较小，对应曲线L122的整体高度较低，扬声器100的输出较低，且曲线L122对应的谐振峰的位置靠左，对应谐振频率f在低频范围的500Hz-1000Hz之间。相较于α＝0.02，α＝0.04时扬声器100的输出增加，曲线L122整体位于曲线L121上方，且曲线L122不会在较低频段(例如500Hz-2000Hz)出现峰谷，扬声器100的频率响应特性明显变好。随着α的取值从0.04逐渐增大至0.15，对应曲线的整体逐渐上移，对应曲线的谐振峰位置逐渐右移，对应谐振频率f逐渐增大。当α＝0.1时，曲线L124对应的谐振峰在1000Hz-2000Hz之间，即对应谐振频率f在1000Hz-2000Hz之间；曲线L124整体高度较高，扬声器100的低频(例如500Hz-2000Hz)输出较高，但中高频(例如2000Hz以上)输出较低。当α＝0.15时，驱动梁122的刚度较大，曲线L125对应的谐振峰位置靠右，对应谐振频率f在2000Hz-5000Hz之间；曲线L125整体高度较高，扬声器100在中高频(例如2000Hz以上)具有较高的输出声压级，但是扬声器100在低频(例如1000Hz-2000Hz)的输出较低。综合考虑，为了使扬声器100在低频与中高频的范围内均具有一定的输出，α的取值范围可以为0.04-0.15。在一些实施例中，为了提升扬声器100在低频与中高频的输出，α的取值范围可以为0.05-0.13。例如，α的取值可以为0.1，从而使得扬声器100在低频与中高频范围内均具有较高的输出。
需要说明的是，可以根据扬声器100的应用场景的不同，确定扬声器100的主要使用频段范围，从而采用不同取值的参数α。例如，当扬声器100主要在高频场景使用时，α的取值可以为0.15，扬声器100对应的谐振频率f在2000Hz-5000Hz之间，扬声器100在中高频的输出较大。又例如，当扬声器100主要应用于全频段的应用场景时，扬声器100的有效频段需要尽可能的宽，此时α的取值可以为0.09，对应扬声器100的频响曲线L123即具有较大范围的平坦区域，且在低频(例如500Hz-2000Hz)与中高频(例如2000Hz以上)均具有较大的输出。
由于振动单元130的振动由驱动梁122的形变驱动产生，因此振动单元130的振动方向即为驱动梁122的形变方向(即z方向)。在一些实施例中，如图11所示，驱动梁122包括沿振动单元130的振动方向(即z方向)堆叠的衬底层1225、第一电极层12211、压电层12212、第二电极层12213以及加强层1223。
在一些实施例中，如图11所示，第一电极层12211、压电层12212、第二电极层12213可以组成压电结构1221，第一电极层12211和第二电极层12213分别位于压电层12212相反的两侧。在一些实施例中，压电结构1221可以响应于电信号而使驱动单元120从悬空区域122-2输出振动。在从固定区域122-1到悬空区域122-2的延伸方向上，压电结构1221可以部分或完全覆盖悬空区域122-2。
在一些实施例中，压电结构1221可以在驱动电压的作用下发生变形，从而产生振动。在一些 实施例中，压电层12212可以由具有压电效应的材料(例如压电陶瓷、压电石英、压电晶体、压电聚合物等)制成。示例性的，压电层12212的材料可以包括但不限于氮化铝(AlN)、锆钛酸铅(PZT)、氧化锌(ZnO)等。在一些实施例中，第一电极层12211和第二电极层12213可以由导电性较强的材料(例如，金属、合金、导电高分子材料等)制成。例如，第一电极层12211和第二电极层12213可以包括金属银(Ag)、钼(Mo)、铜(Cu)、金(Au)、钛金合金(Ti/Au)、钛(Ti)、铝(Al)等。
加强层1223可以改变驱动单元120的力学性能，例如提升驱动单元120的阻尼以及刚度。在一些实施例中，加强层1223可以贴附在压电结构1221(例如，远离衬底层1225的第二电极层12213)上。压电结构1221可以带动加强层1223振动。在一些实施例中，加强层1223可以由半导体材料、高分子材料等制成。示例性半导体材料可以包括硅(Si)、氧化硅(SiO2)、氮化硅(SiNx)、碳化硅(SiC)等。示例性高分子材料可以包括聚酰亚胺(Polyimide、PI)、聚对二甲苯(Parylene)、聚二甲基硅氧烷(Polydimethylsiloxane，PDMS)、水凝胶、光刻胶、硅胶、硅凝胶、硅密封胶等。在一些实施例中，当加强层1223由半导体材料制成时，加强层1223可以具有单层或多层结构。例如，加强层1223可以具有由一种半导体材料(例如，Si、SiO2)制成的单层结构。又例如，加强层1223可以具有由多种半导体材料制成的多层结构(例如，Si/SiO2双层结构、Si/SiNx双层结构等)。在一些实施例中，加强层1223还可以由各向异性的材料制成。示例性各向异性的材料可以包括碳纤维、FR4环氧玻璃纤维板等。在一些实施例中，加强层1223还可以由金属材料制成。示例性金属材料可以包括不锈钢、铝合金、镁锂合金、铜、铜合金等。
在一些实施例中，驱动梁122还可以包括压电种子层(图中未示出)，压电种子层可以设置于压电结构1221远离加强层1223的一侧。压电种子层可使得压电层12212具有更好的001晶向。在一些实施例中，压电种子层的材质可以包括导电材质等，例如氧化锶(SrO)、氧化锆(ZrO2)等。在一些实施例中，驱动梁122还可以包括缓冲层(图中未示出)，缓冲层可以设置于压电结构1221远离加强层1223的一侧，例如，缓冲层可以设置于压电种子层靠近加强层1223的一侧。缓冲层也可使得压电层12212具有更好的001晶向。在一些实施例中，缓冲层的材质可以包括但不限于铌酸锂(LiNbO3)等。
在一些实施例中，驱动梁122还可以包括衬底层1225(如图11所示)，衬底层1225设置于压电结构1221远离加强层1223的一侧，例如，衬底层1225可以设置于缓冲层远离加强层1223的一侧。衬底层1225可以与加强层1223配合，以调节驱动单元120的刚度与阻尼，以及驱动单元120的中性面(图中未示出)位置，从而调节驱动单元120的输出性能。例如，通过调节衬底层1225的厚度可以使压电结构1221整体位于驱动梁122的中性面的一侧(例如中性面位于加强层1223内)，以使驱动单元120弯曲时，压电结构1221的张应力(或压应力)产生的伸长(或压缩)变形能够产生更大的振动。又例如，可以通过衬底层1225的设置，调节驱动单元120的刚度，从而调节驱动单元120的振动模态，提升扬声器100的输出性能。在一些实施例中，衬底层1225的材质可以包括但不限于半导体材料。示例性半导体材料可以包括硅(Si)、二氧化硅(SiO2)、氮化硅(SiNx)、碳化硅(SiC)等。在一些实施例中，衬底层1225可以具有单层或多层结构。例如，衬底层1225可以具有由一种半导体材料(例如，Si、SiO2)制成的单层结构。又例如，衬底层1225可以具有由多种半导体材料制成的多层结构(例如，Si/SiO2双层结构、Si/SiNx双层结构等)。在一些实施例中，衬底层1225可以直接使用SOI(Silicon On Insulator)晶圆顶硅。
在一些实施例中，请参照图11，当驱动梁122仅包括一个压电结构1221时，衬底层1225相对于压电层12212为驱动梁122的内部负载。通过合理设计压电层12212的厚度hp1与衬底层1225的厚度hc之间关系，可以实现对扬声器100的输出声压级的有效调节。例如，可以定义参数β为衬底层1225的厚度hc与压电层12212的厚度hp1的比值，并基于不同的β对应的扬声器的频响曲线示意图确定合理的压电层12212的厚度hp1与衬底层1225的厚度hc之间关系，相关内容的更多说明可以参见图13及其相关描述。
在一些实施例中，可以定义参数β为衬底层1225的厚度hc与压电层12212的厚度hp1的比值：
图13是根据本说明书一些实施例所示不同的β对应的扬声器的频响曲线示意图。如图13所示，曲线L131表示β＝0时，对应扬声器100的频响曲线；曲线L132表示β＝0.25时，对应扬声器100的频响曲线；曲线L133表示β＝1时，对应扬声器100的频响曲线；曲线L134表示β＝2时，对应扬声器100的频响曲线；曲线L135表示β＝3时，对应扬声器100的频响曲线。由图13可知，当β＝2时， 相较压电层12212而言，衬底层1225的厚度hc较大，因而为压电层12212提供了较大的内部负载，限制了驱动梁122的运动，进而降低了扬声器100的输出，对应曲线L134的整体高度较低。当β＝3时，相较于β＝2，衬底层1225的厚度hc更大，因而为压电层12212提供更大的内部负载，限制驱动梁122的运动，扬声器100的输出明显降低，曲线L135整体位于曲线L134下方。当β的取值从2减小到1时，相较压电层12212而言，衬底层1225的厚度hc明显减小，因而其为压电层12212提供的内部负载明显减小，驱动梁122的运动限制明显减小，进而扬声器100输出明显增加，对应曲线L133相对于曲线L134明显整体上移。当β的取值从1减小到0.25时，相较压电层12212而言，衬底层1225的厚度hc进一步减小，因而其为压电层12212提供的内部负载进一步减小，驱动梁122的运动限制进一步减小，扬声器100输出进一步增加，对应曲线L132相对于曲线L133明显整体上移。且在β的取值从2减小到0.25的过程中，对应曲线的谐振峰逐渐左移，扬声器100的低频(例如0Hz-2000Hz)输出逐渐增加。当β的取值减小到0时，相较压电层12212而言，衬底层1225提供的内部负载为0，即不设置衬底层1225，也可以使得扬声器100的输出增加，对应曲线L131相对于曲线L133与曲线L134明显整体上移，曲线L131在低频范围(例如1000Hz以下)明显位于曲线L132下方，在中高频范围(例如1500Hz以上)曲线L131与曲线L132相差不大。对于扬声器100结构而言，在驱动梁122的厚度方向上，对衬底层1225、加强层1223进行设计，可以起到调节驱动梁122的刚度与谐振频率f、增加可靠性、调节驱动梁122的中性面位置、调节驱动梁122的内部负载的作用。在一些实施例中，可以设计驱动梁122不包括衬底层1225，即β＝0对应的结构。在一些实施例中，为了驱动梁122的加工过程中，可以将衬底层1225作为截止层进行工艺加工，因而衬底层1225的设计可提高驱动梁122加工的良率(即合格率)。综合考虑，为了使扬声器100在全频段具有较高的输出，β的取值范围可以为0-2。在一些实施例中，为了进一步提升扬声器100的输出性能，β的取值范围可以为0-1.5。
在一些实施例中，驱动单元120的结构也可以影响到驱动单元120的输出的驱动力与位移、谐振频率f，从而影响到扬声器100的输出性能、谐振频率f、可靠性以及制造工艺。
图14A～图14E是根据本说明书一些实施例所示的不同结构的驱动梁的示意图。
在一些实施例中，如图14A所示，驱动梁122可以包括两个压电结构(即第一压电结构1221a与第二压电结构1221b)与两个加强层(即第一加强层1223a和第二加强层1223b)。在驱动梁122的厚度方向上(即z方向，下同)，由下至上，第一压电结构1221a、第二压电结构1221b、第一加强层1223a、第二加强层1223b依次连接。且对于相邻的两个压电结构(即第一压电结构1221a和第二压电结构1221b)，可以共用位于两者之间的第二电极层12213，如图14A所示。即，在驱动梁122的厚度方向上，由下至上，第一电极层12211、第一压电层12212a、第二电极层12213、第二压电层12212b、第三电极层12214、第一加强层1223a、第二加强层1223b依次分布。其中，第一加强层1223a和第二加强层1223b的材质可以相同或不同。
为了使得驱动梁122在振动单元130的振动方向(即z方向)上具有较大的位移，可以选择通过设计各个压电层(如第一压电层12212a和第二压电层12212b)的极化方向与施加电压的正负，使得位于驱动梁122的中性面一侧的压电层变形方向相同，即同为伸长变形或缩短变形；通过设计压电层与加强层的厚度尺寸，使得中性面位于第一加强层1223a或者第二加强层1223b内部。优选的，可以设计使得任意相邻的两个压电层(如第一压电层12212a和第二压电层12212b)的极化方向相反(如图14A所示的虚线箭头与实线箭头代表的两种情况)，并且在驱动梁122施加电压为各个压电层(如第一压电层12212a和第二压电层12212b)的电势方向与极化方向均相同；或在驱动梁122施加电压为各个压电层(如第一压电层12212a和第二压电层12212b)的电势方向与极化方向均相反。
在一些实施例中，在驱动梁122的厚度方向上，第一电极层12211的厚度hd1、第二电极层12213的厚度hd2与第三电极层12214的厚度hd3可以为20nm-200nm。在一些实施例中，根据公式(7)，为了调节驱动梁122的厚度h，设计参数α的取值，调节驱动梁122的刚度，第一电极层12211的厚度hd1、第二电极层12213的厚度hd2与第三电极层12214的厚度hd3可以为40nm-130nm。其中，第一电极层12211的厚度hd1、第二电极层12213的厚度hd2与第三电极层12214的厚度hd3的取值可以相同或不同。
在一些实施例中，第一压电层12212a的厚度hp1、第二压电层12212b的厚度hp2可以为1μm-5μm。在一些实施例中，根据公式(7)，为了调节驱动梁122的厚度h，设计参数α的取值，调节驱动梁122的刚度，第一压电层12212a的厚度hp1、第二压电层12212b的厚度hp2可以为1.5μm-2.5μm。其中，第一压电层12212a的厚度hp1、第二压电层12212b的厚度hp2可以相同或不同。
在一些实施例中，当加强层的材质为PI、PEEK、PET、PEI、硅胶、硅凝胶等高分子材料时，第一加强层1223a的厚度hj1、第二加强层1223b的厚度hj2可以为5μm-40μm。在一些实施例中，根 据公式(7)，为了调节驱动梁122的厚度h，设计参数α的取值，调节驱动梁122的刚度，当加强层的材质为PI、PEEK、PET、PEI、硅胶、硅凝胶等高分子材料时，第一加强层1223a的厚度hj1、第二加强层1223b的厚度hj2可以为5μm-25μm。其中，第一加强层1223a的厚度hj1、第二加强层1223b的厚度hj2可以相同或不同。
在一些实施例中，当加强层具有由半导体材料(例如Si、SiO2、SiNx、SiC等)制成的单层结构或多层结构时，第一加强层1223a的厚度hj1、第二加强层1223b的厚度hj2可以为2μm-15μm。在一些实施例中，根据公式(7)，为了调节驱动梁122的厚度h，设计参数α的取值，调节驱动梁122的刚度，当加强层具有由半导体材料(例如Si、SiO2、SiNx、SiC等)制成的单层结构或多层结构时，第一加强层1223a的厚度hj1、第二加强层1223b的厚度hj2可以为3μm-10μm。其中，第一加强层1223a的厚度hj1、第二加强层1223b的厚度hj2可以相同或不同。
在一些实施例中，通过对驱动梁122的结构及尺寸进行设计，可以调节驱动梁122输出的驱动力与位移，从而提升扬声器100的输出性能。
请参照图14B，在一些实施例中，驱动梁122可以包括三个压电结构(即第一压电结构1221a、第二压电结构1221b以及第三压电结构1221c)与两个加强层(即第一加强层1223a和第二加强层1223b)。在驱动梁122的厚度方向上，由下至上，第一压电结构1221a、第二压电结构1221b、第三压电结构1221c、第一加强层1223a以及第二加强层1223b依次连接。且对于任意相邻的两个压电结构，可以共用位于两者之间的电极层，如图14B所示，第一压电结构1221a和第二压电结构1221b可以共用第二电极层12213，第二压电结构1221b和第三压电结构1221c可以共用第三电极层12214。即，在驱动梁122的厚度方向上，由下至上，第一电极层12211、第一压电层12212a、第二电极层12213、第二压电层12212b、第三电极层12214、第三压电层1221c、第四电极层12215、第一加强层1223a、第二加强层1223b依次分布。其中，两个加强层(即第一加强层1223a和第二加强层1223b)的材质可以相同或不同。在一些实施例中，在驱动梁122的厚度方向上，在第一电极层12211的下方，也可以设置有压电种子层、缓冲层等。
请参照图14C，在一些实施例中，驱动梁122可以包括一个压电结构1221、两个加强层(即第一加强层1223a和第二加强层1223b)与一个衬底层1225。在驱动梁122的厚度方向上，由下至上，衬底层1225、压电结构1221、第一加强层1223a以及第二加强层1223b依次连接。即，在驱动梁122的厚度方向上，由下至上，衬底层1225、第一电极层12211、压电层12212、第二电极层12213、第一加强层1223a以及第二加强层1223b依次分布。其中，两个加强层的材质可以相同或不同。在一些实施例中，在驱动梁122的厚度方向上，在第一电极层12211与衬底层1225之间(即第一电极层12211的下方，衬底层1225的上方)也可以设置有压电种子层、缓冲层等。在一些实施例中，衬底层1225的厚度hc的取值可以为100nm-5000nm。在一些实施例中，根据公式(7)，为了调节驱动梁122的厚度h，设计参数α的取值，调节驱动梁122的刚度，衬底层1225的厚度hc的取值可以为200nm-2000nm。
请参照图14D，在一些实施例中，驱动梁122可以包括一个压电结构1221与两个加强层(即第一加强层1223a和第二加强层1223b)。在驱动梁122的厚度方向上，由下至上，压电结构1221、第一加强层1223a以及第二加强层1223b依次连接。即，在驱动梁122的厚度方向上，由下至上，衬底层1225、第一电极层12211、压电层12212、第二电极层12213、第一加强层1223a以及第二加强层1223b依次分布。其中，两个加强层的材质可以相同或不同。在一些实施例中，在驱动梁122的厚度方向上，在第一电极层12211的下方也可以设置有压电种子层、缓冲层等。
在一些实施例中，驱动梁122的加强层1223的数量可以为一个、两个或其它数量的多个。如图11所示，在一些实施例中，驱动梁122可以包括一个压电结构1221、一个加强层1223与一个衬底层1225。在驱动梁122的厚度方向上，由下至上，衬底层1225、压电结构1221、加强层1223依次连接。即，在驱动梁122的厚度方向上，由下至上，衬底层1225、第一电极层12211、压电层12212、第二电极层12213、加强层1223依次分布。在一些实施例中，在驱动梁122的厚度方向上，在第一电极层12211与衬底层1225之间(即第一电极层12211的下方，衬底层1225的上方)也可以设置有压电种子层、缓冲层等。如图14E所示，在一些实施例中，驱动梁122可以包括一个压电结构1221与一个加强层1223。在驱动梁122的厚度方向上，由下至上，压电结构1221与加强层1223依次连接。即，在驱动梁122的厚度方向上，由下至上，衬底层1225、第一电极层12211、压电层12212、第二电极层12213、加强层1223依次分布。在一些实施例中，在驱动梁122的厚度方向上，在第一电极层12211的下方也可以设置有压电种子层、缓冲层等。
在一些实施例中，可以通过直接增加衬底层1225的厚度和/或加强层1223的厚度，从而调节 驱动单元120的刚度，但是增加衬底层1225的厚度和/或加强层1223的厚度，会使得压电层12212的负载也增加，导致驱动单元120的输出减小。为了解决上述问题，在一些实施例中，驱动梁122包括沿振动单元130的振动方向(即z方向)堆叠的压电结构及一个或多个加强层，距压电结构最远的加强层(例如，图14A～图14D中所示的第二加强层1223b)上可以设有凹槽结构。
在一些实施例中，从固定区域122-1延伸至悬空区域122-2的方向上，凹槽结构包括多个间隔设置的增强部件，任意相邻的两个增强部件之间设有凹槽。
图15A是根据本说明书一些实施例所示的示例性扬声器的局部结构示意图。图15B是图15A中扬声器的驱动单元的内部结构示意图。图15C是根据本说明书一些实施例所示的示例性扬声器的局部结构示意图。图15D是图15C中扬声器的驱动单元的内部结构示意图。
如图15A与图15B所示，加强层1223可以包括沿驱动梁122的长度方向(即图15A中所示的x方向)间隔布置的多个增强部件。通过将多个增强部件沿驱动梁122的长度方向间隔布置，一方面能够在继续增加加强层1223的厚度(例如，各个增强部件的厚度)的情况下，增大驱动单元120的中性面与压电层12212的几何中间面之间的距离，同时保持负载(即，衬底层1225与加强层1223的总质量)不变或减小；另一方面通过间隔布置增强部件的方式还能够对驱动单元120的刚度进行调节，实现驱动单元120与其负载之间的阻抗匹配，从而综合提升驱动单元120的输出性能。
在一些实施例中，多个增强部件以及相邻增强部件之间的间隔共同组成凹槽结构。
在一些实施例中，从固定区域122-1延伸至悬空区域122-2的方向(即图15A所示的x方向)上，凹槽结构包括多个凹槽，靠近固定区域122-1的凹槽的尺寸大于远离固定区域122-1的凹槽的尺寸，以减小靠近驱动梁122的固定区域122-1的增强部件对梁状结构弯曲变形时的约束。
在一些实施例中，参见图15A与图15B，增强部件1223-1可以作为第一增强部件布置在驱动梁122靠近固定区域122-1的位置，增强部件1223-4可以作为第二增强部件布置在驱动梁122靠近悬空区域122-2的位置。其他增强部件(例如，增强部件1223-2、1223-3等)可以沿着驱动梁122的梁状结构的延伸方向间隔布置在第一增强部件与第二增强部件之间。在一些实施例中，多个增强部件在驱动梁122的振动方向上的厚度可以相同或不同。例如，多个增强部件在驱动梁122的振动方向上的厚度可以相同，以便于制备加强层1223(或驱动单元120)。又例如，多个增强部件在驱动梁122的振动方向上的厚度可以不同。具体地，由于靠近驱动梁122的悬空区域122-2的增强部件对梁状结构弯曲变形时的约束较小，而位于驱动梁122梁状结构中间区域的增强部件对梁状结构弯曲变形时的约束较大，因此，靠近驱动梁122的悬空区域122-2的增强部件的厚度可以大于位于驱动梁122梁状结构中间区域的增强部件的厚度。
在一些实施例中，如图15A所示，相邻增强部件之间的间隔组成了凹槽结构的多个凹槽(如凹槽1223-7、凹槽1223-8等)，可以通过调节凹槽的尺寸(即每两个相邻的增强部件之间的间隔在驱动梁122梁状结构延伸方向上的尺寸)大小来调节驱动单元120的刚度。在一些实施例中，每个凹槽在驱动梁122梁状结构延伸方向上的尺寸可以相同或不同。例如，如图15B所示，增强部件1223-1与增强部件1223-2之间的凹槽1223-7的尺寸wj1与增强部件1223-3与增强部件1223-4之间的凹槽1223-8尺寸wj2可以不同。
在一些实施例中，靠近固定区域122-1的凹槽的尺寸大于远离固定区域122-1的凹槽的尺寸。例如，凹槽1223-7的尺寸wj1大于凹槽1223-8尺寸wj2。
在本说明书的一些实施例中，靠近固定区域122-1的振动对驱动梁122的振动影响更大，通过使靠近固定区域122-1的凹槽的尺寸大于远离固定区域122-1的凹槽的尺寸，可以提高靠近固定区域122-1的振动效果。
在一些实施例中，多个增强部件沿驱动梁122梁状结构延伸方向上(x方向)的尺寸可以相同或不同。例如，如15D所示，增强部件1223-5沿驱动梁122梁状结构延伸方向上(x方向)的尺寸wp1与增强部件1223-6沿驱动梁122梁状结构延伸方向上(x方向)的尺寸wp2可以不同。
在一些实施例中，驱动梁122不同位置对于弯曲变形的贡献不同，通常靠近驱动单元120固定区域122-1的驱动梁变形对于驱动梁整体变形贡献比驱动梁122悬空区域122-2的贡献大。因此，在一些实施例中，可以根据压电层12212沿驱动梁122梁状结构延伸方向上的不同位置在实际工作时贡献的变形量，并结合压电层12212沿驱动梁122梁状结构延伸方向上的平均应力分布，在梁状结构的延伸方向的不同位置布置不同尺寸的增强部件，在有效调节驱动单元120的中性面的位置的同时对压电层12212的负载以及驱动单元120的整体刚度进行调节，从而使得驱动单元120输出较大的位移，同时使驱动单元120与其负载(例如，扬声器的振动部分)实现阻抗匹配或基本上匹配，使得扬声器100产生的位移可以被有效传递。
在一些实施例中，远离固定区域122-1的增强部件的宽度大于靠近固定区域122-1的增强部件的宽度。例如，如图15C和15D所示，增强部件1223-6沿驱动梁122梁状结构延伸方向上(x方向)的尺寸wp2大于靠近固定区域122-1的增强部件1223-5沿驱动梁122梁状结构延伸方向上(x方向)的尺寸wp1。
在本说明书的一些实施例中，靠近固定区域122-1的振动对驱动梁122的振动影响更大，通过使远离固定区域122-1的增强部件的宽度大于靠近固定区域122-1的增强部件的宽度，可以提高靠近固定区域122-1的振动效果。
在一些实施例中，为了在提升驱动单元120的输出能力的同时兼顾驱动梁122的可靠性，多个增强部件可以沿驱动梁122梁状结构延伸方向按照尺寸先减小、后增大的方式布置。换句话说，可以在驱动梁122自由端或固定区域122-1布置较大尺寸的增强部件，而在梁状结构中间部分布置较小尺寸的增强部件。具体地，通过在靠近驱动梁122自由端(即驱动梁122远离固定区域122-1的一端)的位置布置尺寸较大的增强部件，可以在应变较小区域通过较大尺寸的增强部件来调节增强部件的厚度，同时减少对驱动梁122梁状结构变形时的约束；通过在靠近固定区域122-1的位置布置尺寸较大的增强部件，可以在应变较大区域通过较大尺寸的增强部件增强驱动梁122梁状结构的刚度，从而使驱动梁122梁状结构在弯曲振动时不易断裂，增强驱动梁122梁状结构的可靠性；通过在驱动梁122梁状结构中间区域布置较小尺寸的增强部件，可以在增大梁状结构刚度的同时，尽可能地减小增强部件对梁状结构的变形约束，从而减小驱动梁122梁状结构的变形阻力，使梁状结构变形能力更强。
在一些实施例中，驱动单元120包括位于壳体110相对侧的两组驱动梁，两组驱动梁中的每一组均包括一个或多个驱动梁，驱动梁的形状包括矩形、梯形或圆弧倒角。
图16A～图16G是根据本说明书一些实施例所示的不同结构的驱动单元的示意图。
请参照图10、图16A与图16B，在一些实施例中，通过对驱动单元120的驱动梁122的形状进行设计，从而调节扬声器100的输出性能、谐振频率f、可靠性以及制造工艺。
在一些实施例中，如图10所示，驱动单元120可以包括两个驱动梁122，且两个驱动梁122均为矩形结构，固定区域122-1与悬空区域122-2分别设置在矩形结构的两条对边所在端部。两个驱动梁122的固定区域122-1分别设置于矩形环结构的基体126的两条长边处。两个驱动梁122的悬空区域122-2分别通过一个或多个耦合弹性结构124与振动传递单元140传动连接，通过振动传递单元140将振动信号传递至振动单元130。
在一些实施例中，如图16A所示，驱动单元120可以包括两个驱动梁122，且两个驱动梁122均为梯形结构，固定区域122-1设置在梯形结构较长的下底所在的一端，悬空区域122-2设置在梯形结构较短的上底所在的一端。两个驱动梁122的固定区域122-1分别设置于矩形环结构的基体126的两条长边处。两个驱动梁122的悬空区域122-2分别通过一个或多个耦合弹性结构124与振动传递单元140传动连接，通过振动传递单元140将振动信号传递至振动单元130。与图10所示的矩形结构的驱动梁122相比，图16A所示的梯形结构的驱动梁122的设计，可以减小驱动梁122的局部区域的应力，提高可靠性；同时对驱动梁122的刚度进行了调整，从而影响了扬声器100的输出性能与谐振频率f。
在一些实施例中，如图16B所示，驱动单元120可以包括两个驱动梁122，且两个驱动梁122均为带圆角结构。具体地，驱动梁122的悬空区域所在的一端设置有圆滑过渡的圆角，如图16B所示。在一些实施例中，圆角对应的圆弧半径不大于悬空区域122-2的长度l。两个驱动梁122的固定区域122-1分别设置于矩形环结构的基体126的两条长边处。两个驱动梁122的悬空区域122-2分别通过一个或多个耦合弹性结构124与振动传递单元140传动连接，通过振动传递单元140将振动信号传递至振动单元130。与图16A所示的梯形结构的驱动梁122相比，图16B所示的带圆角结构的驱动梁122的设计，可以进一步减小驱动梁122的局部区域的应力，提高可靠性；同时对驱动梁122的刚度进行了调整，从而影响了扬声器100的输出性能与谐振频率f。
在一些实施例中，通过对驱动单元120的驱动梁122的数量进行设计，也可以调节扬声器100的输出性能、谐振频率f、可靠性以及制造工艺。
在一些实施例中，如图16C所示，驱动单元120可以包括多个矩形结构(或多个梯形结构，或多个带圆角结构等)的驱动梁122，多个驱动梁122可以分别设置于矩形环结构的基体126的两条长边，且两条长边设置的驱动梁122的数量可以相同或不同。各个驱动梁122的固定区域122-1分别与基体126的长边相连。各个驱动梁122的悬空区域122-2分别通过对应的耦合弹性结构124将振动信号通过振动传递单元140传递至振动单元130。在一些实施例中，各个驱动梁122的悬空区域122-2之间可以连接，也可以不连接彼此独立。在一些实施例中，多个驱动梁122的谐振频率的数量可以为至少一个，即多个驱动梁122的谐振频率可以全部相同，也可以至少一个不同，从而提升扬声器100的谐振 峰数量，提升扬声器100的输出性能。
在一些实施例中，驱动单元120还包括位于壳体110另一相对侧的两组驱动梁122。
在一些实施例中，如图16D所示，驱动单元120可以包括四个驱动梁122，四个驱动梁122均为梯形结构，且固定区域122-1设置在梯形结构较长的下底所在的一端，悬空区域122-2设置在梯形结构较短的上底所在的一端。四个驱动梁122中的一对，其对应的固定区域122-1分别设置于矩形环结构的基体126的两条长边。在本说明书中，可以将这对驱动梁122定义为长边驱动梁122A。四个驱动梁122中的另一对，其对应的固定区域122-1分别设置于矩形环结构的基体126的两条短边。在本说明书中，可以将这对驱动梁122定义为短边驱动梁122B。四个驱动梁122对应的悬空区域122-2分别通过一个或多个耦合弹性结构124与振动传递单元140传动连接，通过振动传递单元140将振动信号传递至振动单元130。在一些实施例中，通过基体126四边均设置驱动梁122的设计，可以减少扬声器100的倾斜、翻转模态，提升扬声器100的输出性能。在一些实施例中，通过调节长边驱动梁122A与短边驱动梁122B的尺寸，可以实现对驱动单元120的驱动力与位移的提升，从而使得扬声器100的输出声压级增加。在一些实施例中，通过长边驱动梁122A与短边驱动梁122B的尺寸设计，使长边驱动梁122A的谐振频率与短边驱动梁122B的谐振频率位于不同的频率段，可以使得扬声器100有多个谐振频率，增加扬声器100的覆盖频段范围，增强扬声器100的输出性能。需要说明的是，在本说明书中，在一对对应的驱动梁122中(例如图10所示的矩形对开驱动梁、图16A所示的梯形对开驱动梁、图16B所示的带圆角对开驱动梁、图16D所示的两个长边驱动梁122A与两个短边驱动梁122B等)，所包含的两个驱动梁122的谐振频率也可以相同或不同，以提升扬声器100的谐振峰数量和输出性能。
在一些实施例中，如图16E所示，驱动单元120可以包括四个矩形结构(或四个带圆角结构等)的驱动梁122，四个驱动梁122中的一对可以设置于矩形环结构的基体126的两条长边，四个驱动梁122中的另一对可以设置于矩形环结构的基体126的两条短边。在本说明书一些实施例，可以将设置于基体126的长边的一对驱动梁122定义为长边驱动梁122A，将设置于基体126的短边的一对驱动梁122定义为短边驱动梁122B。各个驱动梁122的固定区域122-1分别与基体126的长边相连。各个驱动梁122的悬空区域122-2分别通过对应的耦合弹性结构124将振动信号通过振动传递单元140传递至振动单元130。与图16C所示的驱动单元120相比，图16E所示的通过基体126四边均设置驱动梁122的设计，可以减少扬声器100的倾斜、翻转模态，同时进一步提升扬声器100的输出。
在一些实施例中，通过对振动传递单元140的结构进行设计，可以改善驱动单元120与振动单元130之间的力与位移的传动效果，从而提升扬声器100的输出性能。
在一些实施例中，如图16F所示，相较于图16E所示的振动传递单元140的结构，图16F所示的振动传递单元140可以包括工字型结构。工字型结构的设计，使得短边驱动梁122B所产生的力与位移能够有效地传递至振动单元130，从而提升驱动单元120至振动单元130的能量传递效率，进而提升扬声器100的输出性能。
在一些实施例中，通过对驱动单元120的耦合弹性结构124进行设计，可以调节驱动单元120的振动特性，从而影响扬声器100的振动特性，改善扬声器100的输出性能。
在一些实施例中，如图16G所示，相较于图16E所示的驱动单元120的结构，在图16G所示的驱动单元120中，驱动梁122并不直接与基体126连接，而是通过耦合弹性结构124实现驱动梁122与基体126的间接连接。此时，驱动梁122的悬空区域122-2可以为，与基体126连接的耦合弹性结构124和与振动传递单元140连接的耦合弹性结构124之间的驱动梁122部分。基体126可以视为驱动梁122的固定区域122-1。驱动梁122通过耦合弹性结构122与基体126间接连接的设置，可以使得驱动梁122自身即可作为一个弹簧质量系统，其具有自身的谐振频率，从而影响驱动单元120整体的振动特性，进而调节扬声器100的振动特性。
在一些实施例中，还可以通过对驱动梁122与振动传递单元140的结构进行设计，以调节驱动单元120的质量和/或阻抗，调节驱动单元120的振动特性，从而调节扬声器100的振动特性，提升扬声器100的输出性能。
在一些实施例中，振动传递单元140包括环形结构，任意一组驱动梁122均连接到振动传递单元140的不同区域。
图17A～图17K是根据本说明书一些实施例所示的不同结构的驱动单元的示意图。
请参照图17A，在一些实施例中，相较于图16D所示的驱动单元120的结构，图17A所示的驱动单元120中，振动传递单元140为一个环形结构，驱动梁122的悬空区域122-2直接与环形结构的振动传递单元140的外侧连接，并将驱动梁122的力与位移传递至振动单元130。通过对振动传递单元140的结构进行设计，可以将长边驱动梁122A与短边驱动梁122B产生的力与位移有效地传递至振动 单元130，从而提升驱动单元120的驱动性能，进而提升扬声器100的输出性能。在一些实施例中，四个驱动梁122与环形结构的振动传递单元140之间也可以设置一个或多个耦合弹性结构124进行连接，从而实现驱动单元120的阻抗调节，改善扬声器100的输出性能。
在一些实施例中，振动传递单元140上连接第二驱动梁，第二驱动梁与壳体110间接连接。
请参照图17B，在一些实施例中，相较于图17A所示的驱动单元120的结构，图17B所示的驱动单元120中，还可以包括第二驱动梁，第二驱动梁设置于环形结构的振动传递单元140内，且第二驱动梁与环形结构的振动传递单元140的内侧连接，第二驱动梁也可以为振动单元130提供驱动力与位移，从而提升扬声器100的输出性能。在一些实施例中，第二驱动梁可以包括两个矩形的驱动梁122，两个矩形的驱动梁122分别与环形结构的振动传递单元140的两条长边连接。在本说明书一些实施例，如图17B所示，上述分别与环形结构的振动传递单元140的内侧的两条长边连接的两个矩形驱动梁122可以称为长边第二驱动梁122C。
在一些实施例中，振动单元还包括质量元件，第二驱动梁远离振动传递单元的一端直接与质量元件相连；或者，第二驱动梁远离振动传递单元的一端通过耦合弹性结构与质量元件相连。
如图17B所示，第二驱动梁122C可以连接有质量元件M2。例如，两个长边第二驱动梁122C各自远离振动传递单元140的一端分别与质量元件M2连接。质量元件M2与长边第二驱动梁122C可以构成一个弹簧质量阻尼系统，该系统可以影响驱动单元120的振动特性，从而影响扬声器100的振动特性，改善扬声器100的输出性能。
请参照图17C，在一些实施例中，相较于图17B所示的驱动单元120，在图17C所示的驱动单元120中，第二驱动梁除了包括两个长边第二驱动梁122C之外，还可以包括两个分别与环形结构的振动传递单元140的短边内侧连接的梯形的驱动梁122。在本说明书一些实施例中，上述分别与环形结构的振动传递单元140的两条短边连接的两个梯形驱动梁122可以定义为短边第二驱动梁122D，如图17C所示。在一些实施例中，第二驱动梁(例如长边第二驱动梁122C与短边第二驱动梁122D)可以为振动单元130提供驱动力与位移，从而提升扬声器100的输出性能。
在一些实施例中，第二驱动梁(例如长边第二驱动梁122C与短边第二驱动梁122D)可以通过耦合弹性结构124连接有质量元件M2。例如，两个长边第二驱动梁122C各自远离振动传递单元140的一端、两个短边第二驱动梁122D各自远离振动传递单元140的一端分别通过一个或多个耦合弹性结构124与质量元件M2连接。质量元件M2、耦合弹性结构124与第二驱动梁可以构成一个弹簧质量阻尼系统，该系统可以影响驱动单元120的振动特性，从而影响扬声器100的振动特性，改善扬声器100的输出性能。
在一些实施例中，振动单元还包括质量元件，振动传递单元通过耦合弹性结构与质量元件相连。
请参照图17D，在一些实施例中，相较于图17A所示的驱动单元120，在图17D所示的驱动单元120中，环形结构的振动传递单元140的内侧可以通过耦合弹性结构124连接有质量元件M2。质量元件M2与耦合弹性结构124可以构成一个弹簧质量阻尼系统，该系统可以影响驱动单元120的振动特性，从而影响扬声器100的振动特性，改善扬声器100的输出性能。
请参照图17E，在一些实施例中，相较于图17C所示的驱动单元120，在图17E所示的驱动单元120中，长边驱动梁122A的悬空区域122-2、短边驱动梁122B的悬空区域分别通过一个或多个耦合弹性结构124与矩形结构的振动传递单元140的外侧连接，从而将长边驱动梁122A与短边驱动梁122B产生的力与位移传递至振动单元130。通过在长边驱动梁122A与振动传递单元140之间、短边驱动梁122B与振动传递单元140之间设置耦合弹性结构124，实现驱动单元120的阻抗调节，改善扬声器100的输出性能。同时，质量元件M2、耦合弹性结构124与第二驱动梁结构(例如长边第二驱动梁122C与短边第二驱动梁122D)可以构成一个弹簧质量阻尼系统，该系统可以影响振动单元130的振动特性，从而影响扬声器100的振动特性，改善扬声器100的输出性能。
请参照图17F，在一些实施例中，相较于图17D所示的驱动单元120，在图17F所示的驱动单元120中，长边驱动梁122A的悬空区域122-2、短边驱动梁122B的悬空区域分别通过一个或多个耦合弹性结构124与矩形结构的振动传递单元140的外侧连接，从而将长边驱动梁122A与短边驱动梁122B产生的力与位移传递至振动单元130。通过在长边驱动梁122A与振动传递单元140之间、短边驱动梁122B与振动传递单元140之间设置耦合弹性结构124，实现驱动单元120的阻抗调节，改善扬声器100的输出性能。同时，质量元件M2与耦合弹性结构124可以构成一个弹簧质量阻尼系统，该系统可以影响驱动单元120的振动特性，从而影响扬声器100的振动特性，改善扬声器100的输出性能。
需要说明的是，对于上述图17A-图17F所示的一个或多个包括质量元件M2的驱动单元120， 其包括的驱动梁122(例如长边驱动梁122A、短边驱动梁122B、长边第二驱动梁122C、短边第二驱动梁122D)的形状结构可以包括但不限于矩形结构、梯形结构、带圆角结构等，本说明书对此不作限制。
在一些实施例中，相对设置的两组驱动梁122可以交错延伸，对应的振动传递单元140可以包括折型结构，任意一组驱动梁122均连接到振动传递单元140的不同区域。在一些实施例中，任意驱动梁122可以直接与振动传递单元140相连；或者，任意驱动梁122通过耦合弹性结构124与振动传递单元140相连。
在一些实施例中，通过将两组驱动梁中的每一组包括的一个或多个驱动梁之间交错延伸的设计，使得驱动梁122的尺寸可以在较大范围进行调节，从而可以在较大范围内调节扬声器100的谐振频率，提升扬声器100的输出性能。另一方面，可以对多个驱动梁122进行单独设计，以使多个驱动梁122可以具有一个或以上的谐振频率f，以实现对扬声器100的振动模态的调节。在一些实施例中，每个驱动梁122之间可以相互独立，使得各个驱动梁122可以单独产生形变输出驱动力与位移，从而实现对扬声器100的振动模态的调节。
请参照图17G，在一些实施例中，驱动单元120可以包括位于壳体110相对侧的两组驱动梁，两组驱动梁中的每一组均包括一个或多个驱动梁122(例如，驱动梁122的数量可以为三个、五个、六个等)，多个驱动梁122依次间隔设置。在一些实施例中，多个驱动梁122之间可以彼此独立，也可以将不少于一个驱动梁122通过结构进行连接，例如覆盖柔性膜、设计弹性连接结构等。在一些实施例中，任意相邻的两个驱动梁122之间交错延伸设置(即相互错位设置)。示例性地，对于任意相邻的两个驱动梁122，其中一个驱动梁122的固定区域122-1设置在基体126的其中一条长边，另一个驱动梁122的固定区域122-1设置在基体126的另一条长边，两个驱动梁122的悬空区域122-2分别通过一个或多个耦合弹性结构124与振动传递单元140连接，实现驱动梁122与振动传递单元140之间的弹性连接，以将驱动梁122输出的力与位移传递至振动单元130。在一些实施例中，由于多个驱动梁122相互之间错位设置，使得多个驱动梁122的悬空区域122-2所在的一端也错位设置。为了便于振动传递单元140与驱动梁122的连接，在一些实施例中，振动传递单元140可以为折型结构，如图17G所示。通过上述设置，相较于图16A～图17F所示的结构，可以增大驱动梁122的尺寸的调节范围，使得驱动梁122的悬空区域122-2的长度l可以接近基体126的矩形结构的长度或宽度，从而使得扬声器100的谐振频率可以相应地在较大范围内进行调节，提升扬声器100的输出性能。在一些实施例中，每个驱动梁122及对应的耦合弹性结构124、振动传递单元140可以相互独立设置。因此，可以通过对不同的驱动梁122进行单独的结构设计以实现不同的谐振频率f，以实现对扬声器100的振动模态的调节；也通过对各个驱动梁122单独进行激励，各个驱动梁122可以单独产生形变输出驱动力与位移，从而实现对扬声器100的振动模态的调节。
请参照图17H，在一些实施例中，相较于图17G所示的驱动单元120，在图17H所示的驱动单元120中，驱动梁122的悬空区域122-2可以直接与振动传递单元140连接，从而提升驱动梁122与振动单元130之间的力与位移的传递效率，提升振动单元130的输出，从而提升扬声器100的输出性能。
在一些实施例中，驱动梁122在形变时的挠度(最大形变量)可以影响驱动梁122输出的驱动力与位移，从而影响振动单元130的振膜131振动时最大位移，影响振膜131的推动空气量，进而影响扬声器100的输出性能。而驱动梁122的挠度受到驱动梁122的长度的显著影响。在一些实施例中，可以通过增加驱动梁122的悬空区域122-2的等效长度，增大驱动单元120输出的驱动力与位移，增加振动单元130的振膜131的振动位移，进而提升扬声器100的输出性能。
在一些实施例中，相对设置的两组驱动梁122中的每组驱动梁包括一个具有弯折结构的驱动梁122，两组驱动梁122中两个具有弯折结构的驱动梁122各自远离对应的固定区域122-1的一端耦合连接至同一振动传递单元140。
请参照图17I，在一些实施例中，驱动单元120可以包括两个驱动梁122，两个驱动梁122的固定区域122-1分别固定于基体126相对的两条长边。在一些实施例中，每个驱动梁122均可以为折型结构，每个驱动梁122可以分别包括一个或多个弯折结构，驱动梁122的多个弯折结构整体沿基体126的长边的延伸方向延伸。在一些实施例中，弯折结构的数量越多，对应驱动梁122的悬空区域122-2的等效长度越长，驱动梁122变形时的挠度越大，扬声器100的输出性能越好。示例性地，当驱动梁122包括三个弯折结构时，由于驱动梁122的固定区域122-1设置于基体126的长边上，因此，从驱动梁122的固定区域122-1至悬空区域122-2的延伸方向可以为垂直于基体126两条长边的方向(即基体126的短边的延伸方向)。此时，在驱动梁122变形过程中，对于驱动梁122上沿基体126长边延伸方向 的部分，其变形较小，主要为驱动梁122沿基体126短边延伸方向的部分产生形变。即，驱动梁122的等效长度l可以为图17I中沿基体126的短边的延伸方向上，三个弯折结构的等效长度(长度l1、长度l2与长度l3)之和，且每个弯折结构的等效长度均不大于基体126的短边尺寸。在一些实施例中，弯折结构指的是驱动梁122上主要产生形变的结构。例如，如图17I所示，驱动梁122的悬空区域122-2上沿基体126短边延伸方向的部分，为驱动梁122的主要形变部分，作为弯折结构，在振动单元130的振动方向(即垂直于纸面的方向)上产生弯曲变形。驱动梁122的悬空区域122-2上沿基体126长边延伸的部分，主要起到连接作用，用于将三个弯折结构连接。在一些实施例中，驱动梁122的悬空区域122-2的末端(即驱动梁122远离固定区域122-1的一端)可以与振动传递单元140传动连接，通过振动传递单元140将驱动梁122形变产生的驱动力与位移传递至振动单元130。
请参照图17J，在一些实施例中，相较于图17I所示的驱动单元120，在图17J所示的驱动单元120中，两个驱动梁122的悬空区域122-2可以分别通过一个或多个耦合弹性结构124与振动传递单元140连接。耦合弹性结构124的设置，可以实现驱动单元120的阻抗调节，改善扬声器100的输出性能。
请参照图17K，在一些实施例中，相较于图17J所示的驱动单元120，在图17K所示的驱动单元120中，两个驱动梁122的固定区域122-1分别固定于基体126相对的两条短边。此时，从驱动梁122的固定区域122-1至悬空区域122-2的延伸方向可以为垂直于基体126两条短边的方向(即基体126的长边的延伸方向)。在驱动梁122变形过程中，对于驱动梁122上沿基体126短边延伸方向的部分，其变形较小，主要为驱动梁122沿基体126长边延伸方向的部分产生形变。对应地，驱动梁122的等效长度l可以为图17K中沿基体126的长边的延伸方向上，多个弯折结构的等效长度之和，且每个弯折结构的等效长度均不大于基体126的长边尺寸。示例性地，如图17K所示，驱动梁122可以包括两个弯折结构，驱动梁122的等效长度l可以为图17K中沿基体126的长边的延伸方向上，两个弯折结构的等效长度(长度l1、长度l2)之和。相较于图17J所示的驱动单元120，在图17K所示的驱动单元120中，驱动梁122的弯折结构的等效长度的设计范围更大，因此在驱动梁122的等效长度相同的情况下，图17K所示的驱动单元120的驱动梁122可以具有更少的弯折结构数量，减小驱动梁122的应力集中，增加驱动梁122的工作可靠性。
需要说明的是，在本说明书一些实施例中，由于驱动梁122主要由悬空区域122-2产生形变，因此上述的等效长度主要为悬空区域122-2的等效长度l。
图17L是图17K所对应的驱动单元的内部结构示意图，图17M是图17L所示的驱动梁的变形示意图，图17N是图17L所示的包括折型结构驱动梁的扬声器与包括非折型结构驱动梁的扬声器的频响曲线示意图。请参照图17L，图17L中仅示出了驱动单元120包括一个驱动梁122的部分内部结构。在一些实施例中，驱动梁122上设置有第一电极覆盖区域T1与第二电极覆盖区域T2，第一电极覆盖区域T1可以位于驱动梁122上悬空区域122-2靠近固定区域122-1的一端，第二电极覆盖区域T2可以位于驱动梁122上悬空区域122-2靠近振动传递单元140的一端。处于第一电极覆盖区域T1与第二电极覆盖区域T2内的电极层12211可以导电。根据对应的压电层12212的极化方向，对第一电极覆盖区域T1与第二电极覆盖区域T2施加相同的极性电压，从而使得第一电极覆盖区域T1与第二电极覆盖区域T2各自对应的驱动梁122的部分同时产生同向的弯曲变形，以提升驱动梁122的输出位移，增强扬声器100的输出性能。示例性地，驱动梁122上悬空区域122-2靠近固定区域122-1的部分以及驱动梁122上悬空区域122-2靠近振动传递单元140的部分同时产生向上或向下的弯曲变形。如图17M所示，变形后的驱动梁122的A1A2段朝上弯曲，A2A3段朝上弯曲。
请参照图17M，其中，实线结构表示变形前的驱动梁122，虚线结构表示变形后的驱动梁122。在一些实施例中，通过设置折型结构的驱动梁122，靠近固定区域122-1的驱动梁122部分(A1A2段)的弯曲变形形成竖直方向位移(挠度值)y1，靠近振动传递单元140的驱动梁122部分(A2A3段)的弯曲形成竖直方向位移(挠度值)y2，最终获得驱动梁122整体竖直方向位移为y1+y2，从而可以增加驱动梁122的输出位移，有效的增加扬声器100的位移量，从而提升扬声器100的输出性能。
请参照图17N，其中，折线L1711表示包括如图17L所示的驱动梁122为折型结构的扬声器100的频响曲线图，折线L1712表示驱动梁122为非折型结构的扬声器100的频响曲线图。如图17N所示，在虚线框N1对应的低频范围内(例如200Hz-450Hz)，折线L1711明显位于折线L1712上方，驱动梁122为折型结构的扬声器100在低频范围内(例如200Hz-450Hz)的输出得到了明显提升。
图17O是图17K所对应的驱动单元的另一内部结构示意图，图17P是图17O所示的驱动梁的变形示意图，图17Q是图17O所示的包括折型结构驱动梁的扬声器与包括非折型结构驱动梁的扬声器的频响曲线示意图。请参照图17O，在一些实施例中，相较于图17L所示的驱动单元120，在图17O 所示的驱动单元120中，通过对第一电极覆盖区域T1、第二电极覆盖区域T2、第三电极覆盖区域T3的内部进行分区，根据对应压电层12212的极化方向施加相同的极性电压，对第一电极覆盖区域T1与第二电极覆盖区域T2施加相同的极性电压，从而使得第一电极覆盖区域T1与第二电极覆盖区域T2各自对应的驱动梁122的部分同时产生同向的弯曲变形，对第一电极覆盖区域T1与第三电极覆盖区域T3施加相反的极性电压，使得第一电极覆盖区域T1、第三电极覆盖区域T3对应的驱动梁122部分(即悬空区域122-2靠近固定区域122-1的部分，如图17P所示的A1A2段)为二阶弯曲，第二电极覆盖区域T2对应的驱动梁122部分(即悬空区域122-2靠近振动传递单元140的部分，如图17P所示的A2A3段)为一阶弯曲(整体朝一个方向弯曲)。其中，一阶弯曲是指整体朝一个方向弯曲，如图17P所示，变形后的驱动梁122的A2A3段整体朝上弯曲。二阶弯曲是指靠近固定区域122-1的悬空区域122-2在长度方向的两侧朝两个方向弯曲，如图17P所示，变形后的驱动梁122的A1A2段，其长度方向的两侧(A1与A2)分别朝向两个方向弯曲，A1朝上弯曲，A2朝下弯曲。
请参照图17P，其中，实线结构表示变形前的驱动梁122，虚线结构表示变形后的驱动梁122。在一些实施例中，通过设置折型结构的驱动梁122，靠近固定区域122-1的驱动梁122部分(A1A2段)的弯曲变形形成竖直方向位移(挠度值)y1，靠近振动传递单元140的驱动梁122部分(A2A3段)的弯曲形成竖直方向位移(挠度值)y2，最终获得驱动梁122整体竖直方向位移为y1+y2，从而可以增加驱动梁122的输出位移，有效的增加扬声器100的位移量，从而提升扬声器100的输出性能。
请参照图17Q，其中，折线L1721表示包括如图17O所示的驱动梁122为折型结构的扬声器100的频响曲线图，折线L1722表示驱动梁122为非折型结构的扬声器100的频响曲线图。如图17Q所示，在虚线框N2对应的低频范围内(例如200Hz-1000Hz)，折线L1721明显位于折线L1722上方，驱动梁122为折型结构的扬声器100在低频范围内(例如200Hz-1000Hz)的输出得到了明显提升。
图17R是图17K所对应的驱动单元的另一内部结构示意图。请参照图17R，在一些实施例中，相较于图17L或图17O所示的驱动单元120，在图17R所示的驱动单元120中，还包括第二振动传递单元140'，振动传递单元140与第二振动传递单元140'分别设置在驱动梁122的悬空区域122-2的折型结构的延伸方向的两端，如图17R所示。通过第二振动传递单元140'的设置，可以将驱动梁122振动产生的驱动力与位移进一步有效地传递至振动单元130，提升扬声器100的输出声压级；同时还可以有效地调节驱动梁122的振动模态，从而调节扬声器100的振动模态，提升扬声器100的输出性能。
图17S是根据本说明书一些实施例所示的驱动单元的另一结构示意图。如图17S所示，在一些实施例中，驱动单元120可以包括四个驱动梁122，四个驱动梁122可以均为矩形结构。四个驱动梁122的中其中两个可以间隔设置在基体126的其中一条短边，另外两个可以间隔设置在基体126的另一条短边。四个驱动梁122可以分别通过一个或多个耦合弹性结构124与振动传递单元140连接，从而将驱动梁122输出的力与位移传递至振动单元130。在一些实施例中，四个驱动梁122的延伸方向(即从固定区域122-1向悬空区域122-2的方向)均平行于基体126的长边方向。通过上述设置，使得驱动梁122的尺寸调节范围较大，使得扬声器100的谐振频率可以相应地在较大范围内进行调节，提升扬声器100的输出性能。同时，相较于折型结构，矩形结构的驱动梁122，可以有效减小驱动梁122出现应力集中的可能性，提升驱动梁122的工作可靠性。
图17T是根据本说明书一些实施例所示的驱动单元的另一结构示意图。请参照图17T，在一些实施例中，扬声器100可以包括多个(例如2个、3个、4个或更多个)驱动单元120，每个驱动单元120可以分别包括对应的驱动梁122、耦合弹性结构124、振动传递单元140。在一些实施例中，多个驱动单元120之间可以相互连接，例如多个驱动单元120可以通过各自对应的基体126实现连接。在一些实施例中，多个驱动单元120中的至少一个也可以单独设置，不与其他驱动单元120连接。在一些实施例中，多个驱动单元120可以呈任意形状分布，例如一字型、矩形、T字型等，本说明书不对此做过多限制。在一些实施例中，多个驱动单元120相互之间独立运行，互不影响。通过上述设置，可以对不同的驱动单元120进行单独设计，以使多个驱动单元120可以具有不同的谐振频率，同时还可以通过对各个驱动单元120单独进行激励，从而实现扬声器100的振动模态的调节，提升扬声器100的输出性能。
在一些实施例中，任意一个驱动梁122可以分别通过耦合弹性结构124与振动传递单元140连接。
在一些实施例中，驱动梁122包括沿振动单元130的振动方向(即z方向)堆叠的压电结构1221以及一个或多个加强层1223，距压电结构1221最远的加强层1223与耦合弹性结构124相连。
图18A与图18B是根据本说明书一些实施例所示的不同结构的驱动单元的内部结构示意图。
参照图18A，在一些实施例中，在振动单元130的振动方向上，驱动梁122包括相互连接的 压电结构1221与加强层1223，加强层1223与耦合弹性结构124相连。压电结构1221可以响应于电信号而使驱动单元120从悬空区域122-2输出振动。在从固定区域122-1到悬空区域122-2的延伸方向上，压电结构1221可以部分或完全覆盖悬空区域122。
压电结构1221可以在驱动电压的作用下发生变形，从而产生振动。在一些实施例中，压电结构1221可以包括两层电极层(例如，第一电极层12211和第二电极层12213)以及一层压电层12212，两层电极层分别位于压电层12212相反的两侧，如图18A所示。有关驱动梁122的结构的更多内容，请参照图11、图14A～图14E及其相关描述，在此不再赘述。
图18B所示的驱动梁122与图18A所示的驱动梁122的区别在于，图18B所示的驱动梁122包括两个加强层(即第一加强层1223a和第二加强层1223b)，距压电结构1221最远的加强层1223B与耦合弹性结构124相连。
在一些实施例中，压电层12212自身产生的力和位移由驱动梁122尺寸与压电层12212的材料确定，当驱动梁122尺寸与压电层12212材料确定后，压电层12212距离驱动单元120的中性面的距离越大，可使得驱动梁122(或驱动单元120)的形变量越大。
在一些实施例中，在振动单元130的振动方向上，耦合弹性结构124的厚度尺寸与驱动梁122的厚度尺寸的比值为0.65-1。
在一些实施例中，可以定义参数κ为在振动单元130的振动方向(即z方向)上，耦合弹性结构124的厚度h0与驱动梁122的厚度h之间的比值：
κ较小时，耦合弹性结构124自身结构的阻抗过小；κ较大时，耦合弹性结构124自身结构的阻抗过大。
图18C是根据本说明书一些实施例所示的不同的κ对应的扬声器的频响曲线示意图。如图18C所示，曲线L181表示κ＝0.55时，对应扬声器100的频响曲线；曲线L182表示κ＝0.65时，对应扬声器100的频响曲线；曲线L183表示κ＝0.82时，对应扬声器100的频响曲线；曲线L184表示κ＝0.88时，对应扬声器100的频响曲线；曲线L185表示κ＝0.9时，对应扬声器100的频响曲线；曲线L186表示κ＝1时，对应扬声器100的频响曲线。
从图18C中可以看出，随着κ的取值从0.55逐渐增大至1，对应的曲线整体逐渐上移，扬声器100在两个谐振峰之间的频段范围内的输出声压级逐渐增大。当参数κ过小时，例如κ＝0.55时，相比κ＝0.65时，扬声器100在大部分频段范围内的输出声压级明显降低，不利于扬声器100的应用。当κ＝1时，虽然第一个谐振峰的频率增加会导致其之前频率范围内的输出声压降低，但中高频段SPL增加，对于提高中高频段声音效果具有优势。在一些实施例中，为了使扬声器100在500Hz-20kHz范围内具有较大的输出声压级，κ的取值范围可以为0.65-1。在一些实施例中，为了使扬声器100在800Hz-20kHz范围内具有较大的输出声压级且具有较为平坦的声压曲线，κ的取值范围可以为0.82-1。在一些实施例中，为了使扬声器100在1kHz-20kHz范围内具有较大的输出声压级且具有较为平坦的声压曲线，κ的取值范围可以为0.88-1。在一些实施例中，为了使扬声器100在1.5kHz-20kHz范围内具有较大的输出声压级且具有较为平坦的声压曲线，κ的取值范围可以为0.9-1。
在一些实施例中，可以通过改变耦合弹性结构124的结构来调节耦合弹性结构124的刚度。例如，如图10所示，在一些实施例中，耦合弹性结构124可以包括条形结构，基体126、驱动梁122、耦合弹性结构124以及振动传递单元140可以构成一个连续的片状结构，从而高效地将驱动梁122的力与位移传递至振动单元130。
在一些实施例中，耦合弹性结构124上可以设有镂空结构，以调节耦合弹性结构124的刚度。
图19A和图19B是根据本说明书一些实施例所示的不同结构的驱动单元的示意图。请参照图19A，在一些实施例中，相较于图10所示的驱动单元120，在图19A所示的驱动单元120中，条形结构的耦合弹性结构124上可以设置有镂空结构。通过镂空结构的设计，可以有效的调节耦合弹性结构124的刚度，从而实现耦合弹性结构124的阻抗与驱动梁122的阻抗、振动单元130的阻抗的匹配。在一些实施例中，镂空结构可包括圆形(如图19A所示)、三角形、四边形或其他多边形、以及其他任意形状，本说明书不对此作过多限制。
在一些实施例中，耦合弹性结构124包括弯折结构，以调节耦合弹性结构124的刚度。
请参照图19B，在一些实施例中，耦合弹性结构124可以包括折型结构。在一些实施例中，折型结构的耦合弹性结构124可以包括至少一个弯折结构。通过折型结构的设计，可以使得耦合弹性结构124在较小的空间内具有较大的柔度，从而使得耦合弹性结构124的阻抗可以在较大的范围内实 现与驱动梁122的阻抗、振动单元130的阻抗的匹配。
在一些实施例中，扬声器100可以不包括振动传递单元140，此时，驱动单元120可以直接与振动单元130连接。在一些实施例中，任意一个驱动梁122分别堆叠在振动单元130的不同区域。例如，如图1B所示，驱动单元120可以包括驱动梁122，振动单元130可以包括振膜131，振膜131可以不包括如图1A所示的中心加强件132。驱动梁122的一端(靠近固定区域122-1的一端)与壳体110固定连接，另一端(靠近悬空区域122-2的一端)悬空设置。振膜131可以直接覆盖在驱动梁122上，振膜131可以随驱动梁122的振动而振动，从而推动前腔111内的空气并产生声音。在一些实施例中，振膜131可以部分或全部覆盖驱动梁122。例如，如图1B所示，振膜131可以全部覆盖驱动梁122，并在驱动梁122形成的间隙位置形成振动悬空区域1314。又例如，为了进一步减小驱动梁122的负载，振膜131可以只覆盖靠近驱动梁122自由端(即靠近悬空区域122-2的一端)的驱动梁122的长度的一半以内的区域，并同时覆盖驱动梁122形成的间隙位置，以在该间隙位置形成振动悬空区域1314。
相对于图1A所示的扬声器，在图1B所示的扬声器中，由于不存在振动传递单元140、中心加强件132等负载，因而在相同驱动单元结构下可将更大比例驱动力用于推动空气负载产生声音信号，因而提升扬声器100的输出SPL。进一步的，省去振动传递单元140以及中心加强件132等结构，可使得扬声器100整体厚度明显降低，对于微型扬声器具有极大的意义。
图20A是根据本说明书图1B所示的扬声器的第一视图。图20B是图20A所示的扬声器的截面图。图20C是根据本说明书图1B所示的扬声器的第二视图。图20D是图20C所示的扬声器的截面图。
参见图1B以及图20A～20D，振动单元130可以与驱动梁122连接，并覆盖驱动梁122形成的间隙位置，以将声学腔体分隔为位于振动单元130相反两侧的前腔111和后腔112。振动单元130可以用于接收驱动梁122的形变或位移并产生向外传递的振动。由于振动单元130与驱动梁122之间无冗余的结构设计，振动单元130直接响应驱动梁122的形变或位移产生振动，因而在相同驱动单元120的基础上，相较于在驱动梁122与振动单元130之间设置有额外的振动传递单元，本实施例中的扬声器100可将更大比例的振动驱动力用于产生声音信号，使得输出的声压级获得提升，同时使得扬声器100的整体厚度明显降低，对微型扬声器100的设计及研发具有重大的启发意义。
在一些实施例中，振动单元130可以包括振膜131，振膜131与驱动梁122连接并覆盖驱动梁122与基体126或壳体110之间的空置区域。振膜131直接响应驱动梁122的形变或位移产生振动，可以以更大比例的振动驱动力推动声学腔体内的空气产生波动，即声波(声音信号)，声波可以经由声学腔体与外部连通的孔洞(例如，壳体110上设置的出声孔，或基体126的敞口等)向外传递。在一些实施例中，振膜131可以是具有弹性的薄膜结构。在一些实施例中，振膜131的材料可以包括但不限于聚酰亚胺(PI)、聚对苯二甲酸乙二醇酯(PET)、聚乙烯亚胺(PEI)、聚醚醚酮(PEEK)、硅胶、聚碳酸酯(PC)、乙烯基聚合物(PVC)、丙烯腈-丁二烯-苯乙烯共聚物(ABS)、聚乙烯(PE)、聚对二甲苯(PPX)中的一种或多种等，也可以是由上述材料复合而成的多层复合材料。
在一些实施例中，如图1B以及图20A～20D所示，振膜131靠近后腔112的一侧与驱动梁122靠近前腔111的一侧连接，这时振膜131推动前腔111内的空气产生声波，声波可以经由前腔111与外部连通的孔洞向外传递。在另一些实施例中，振膜131靠近前腔111的一侧与驱动梁122靠近后腔112的一侧连接，振膜131推动后腔112内的空气产生声波，声波可以经由后腔112与外部连通的孔洞向外传递。在一些实施例中，如图20A～20D所示，驱动梁122设置于振膜131位于后腔112内的一侧，或者驱动梁122设置于振膜131位于前腔111内的一侧，振膜131推动后腔112内的空气产生声波，声波可以经由后腔112与外部连通的孔洞向外传递。在又一些实施例中，如图1B以及图20A～20D所示，振膜131与驱动梁122连接的同时，其周侧可以与壳体110或基体126的内壁连接。在一些实施例中，振膜131还可以通过其周侧与驱动梁122上靠近其自由端的侧面连接的方式实现与驱动梁122的连接。在一些实施例中，驱动梁122靠近前腔111和靠近后腔112的两侧均设置有振膜131，这时两侧的振膜131可以分别推动前腔111及后腔112内的空气产生声波，声波可以分别经由前腔111及后腔112与外部连通的孔洞向外传递。
图20E是根据本说明书一些实施例所示的扬声器的结构示意图。图20F是图20E所示的扬声器的截面图。
图20E～图20F所示的扬声器100与图1B以及图20A～20D所示的扬声器100类似，其区别在于：扬声器100还包括质量元件M2。如图20E～图20F所示，质量元件M2为类长方体结构，质量元件M2连接于振膜131靠近前腔111的一侧上，且质量元件M2位于振膜131的中心区域，以使得振膜131承载质量元件M2时，振膜131的受力和振动状态是均衡的。在一些实施例中，质量元件M2也可以偏 移振膜131的中心区域设置。在一些实施例中，为保证振膜131的柔性及振动位移，质量元件M2不与其它部件(例如壳体110)连接。
图20G是根据本说明书另一些实施例所示的扬声器的结构示意图。图20H是图20G所示的扬声器的截面图。
图20G～图20H所示的扬声器100与图20E～图20F所示的扬声器100类似，其区别在于：质量元件M2连接于振膜131靠近后腔112的一侧上。在一些实施例中，为保证振膜131的柔性及振动位移，质量元件M2不与其它部件(例如驱动梁122)连接。在一些实施例中，驱动梁122靠近后腔112的一侧还可以设置有第二振膜131，第二振膜131的设置方式与振膜131的设置方式类似，例如，第二振膜131靠近前腔111的一侧与驱动梁122靠近后腔112的一侧连接。这时质量元件M2靠近前腔111的一侧与振膜131连接，且其靠近后腔112的一侧与第二振膜131连接，这样扬声器100的声波可以经由前腔111及后腔112输出。在一些实施例中，第二振膜131也可以设置于后腔112内，例如，第二振膜131通过其周侧或边缘区域与壳体110(或基体126)连接，这时质量元件M2凸出于驱动梁122设置，其靠近前腔111的一侧与振膜131连接，且其靠近后腔112的一侧与第二振膜131连接。
图20I是根据本说明书又一些实施例所示的扬声器的结构示意图。图20J是图20I所示的扬声器的截面图。
图20I～20J所示的扬声器100与图20G～图20H所示的扬声器100类似，其区别在于：振膜131靠近前腔111及后腔112的一侧上均连接有质量元件M2。在一些实施例中，当振膜131位于驱动梁122靠近前腔111的一侧时，第二振膜131可以通过与位于后腔112内的质量元件M2连接实现设置；当振膜131位于驱动梁122靠近后腔112的一侧时，第二振膜131可以通过与位于前腔111内的质量元件M2连接实现设置。关于驱动梁122、质量元件M2、振膜131等的更多说明可以参见前文相关部分，如图1A～图17K等。
在一些实施例中，驱动单元120包括位于壳体110相对侧的两组驱动梁122，两组驱动梁122中的每一组均包括一个或多个驱动梁122，驱动梁122的形状包括矩形、梯形或圆弧倒角。
图21A是本说明书一些实施例所示的驱动梁沿振动单元的振动方向的投影图。其中，振动单元130的振动方向是指图10、图11等中的z方向。
在一些实施例中，如图21A所示，驱动梁122包括固定区域122-1和悬空区域122-2。
在一些实施例中，每组驱动梁122包括一个或多个驱动梁122。
图21B～图21M是本说明书一些实施例所示的驱动梁及振膜沿振动单元的振动方向的投影图。
如图21B所示，基体126沿y方向延伸的两个侧边上均间隔分布多个驱动梁122，两侧的多个驱动梁122对应设置，驱动梁122的固定端(靠近固定区域122-1的一端)与基体126连接，振膜131覆盖各个驱动梁。在一些实施例中，多个驱动梁在y方向上分布的宽度与声学腔体y方向上的宽度一致。在一些实施例中，驱动梁122与驱动梁122之间可以通过上述耦合弹性结构124连接，也可以彼此独立设置。在一些实施例中，多个驱动梁122的谐振频率可以均相同，也可以多个驱动梁122中的至少一个驱动梁122的谐振频率不同。在一些实施例中，多个驱动梁122的谐振频率不同可以通过调整其尺寸实现，例如，多个驱动梁122的自由端(靠近悬空区域122-2的一端)不在沿y方向的同一条直线上。
在一些实施例中，驱动单元120还包括位于壳体110另一相对侧的两组驱动梁122。
如图21C所示，沿x方向相对设置的两个驱动梁122相同，驱动梁122的悬空区域122-2均为梯形形状，其沿y方向的长边靠近驱动梁122的固定区域122-1设置，振膜131覆盖于梯形驱动梁122，振膜131的四周与扬声器100的基体126(或壳体110)连接固定。在一些实施例中，为了减小驱动梁122的应力集中，梯形驱动梁122上位于其自由端(靠近悬空区域122-2的一端)的折角可以设置为圆角(图21C未示出)。
图21D的驱动梁122与图21C所示的驱动梁122类似，其区别在于：基体126在y方向的两侧还设置有驱动梁122，将y方向两侧的驱动梁122定义为短边驱动梁122，短边驱动梁122可以为三角形梁，基体126的四侧均设置驱动梁122，结构的平衡能够减少扬声器100的倾斜、翻转模态。在一些实施例中，短边驱动梁122可以为梯形梁或其它形状梁。在一些实施例中，将x方向两侧的驱动梁122定义为长边驱动梁122，可以通过调节长边驱动梁122及短边驱动梁122的尺寸，实现驱动梁122驱动力的提升，以增加扬声器100的输出声压级。在一些实施例中，还可以通过调节长边驱动梁122及短边驱动梁122的尺寸，使其谐振频率位于不同的频率段，即长边驱动梁122与短边驱动梁122的谐振频率不同，从而实现扬声器100有多个谐振频率。在一些实施例中，长边驱动梁122或短边驱动梁122也可以通过尺寸设计使其谐振频率位于不同的频率段，即两长边驱动梁122或两短边驱动梁122 的谐振频率不同，使扬声器100能够产生更多的谐振峰，提升声压级输出，这也适用于其它形状结构的驱动梁122。
在一些实施例中，振动单元130还包括质量元件M2，任意一组驱动梁122均连接到质量元件M2的不同区域。
如图21E所示，图21E的驱动梁122与图21D所示的驱动梁122类似，其区别在于：扬声器100还包括质量元件M2。质量元件M2连接于振膜131的中心区域，且对应位于沿x方向相对设置的两个驱动梁122之间。
图21F的驱动梁122与图21E所示的驱动梁122类似，其区别在于：驱动梁122上位于其自由端的折角为圆角，相较于图21D的驱动梁122，自由端的圆角可以减小驱动梁122局部区域的应力，提高可靠性。在一些实施例中，圆角的半径不超过驱动梁122悬空区域122-2长度尺寸l。
在一些实施例中，质量元件M2包括环形结构。
图21G的驱动梁122与图21D所示的驱动梁122类似，其区别在于：扬声器100还包括质量元件M2，质量元件M2为环形结构。环形结构的质量元件M2连接于振膜131的中心区域，且对应位于长边驱动梁122与短边驱动梁122之间。环形结构的质量元件M2可以使基体126四侧的驱动梁122均有一定的对应质量分布。
在一些实施例中，振动单元130还包括第二驱动梁122E，第二驱动梁122E与壳体110间接连接。
在一些实施例中，振动单元130还包括质量元件M2，第二驱动梁122E与质量元件M2相连。
图21H的驱动梁122与图21D所示的驱动梁122类似，其区别在于：扬声器100还包括第二驱动梁122E和质量元件M2，质量元件M2连接于振膜131的中心区域。在一些实施例中，第二驱动梁122E位于声学腔体内，可以与扬声器100的基体126连接，使扬声器100能够产生更多的谐振峰，提升声压级输出。在一些实施例中，第二驱动梁122E可以连接在振膜131上。在一些实施例中，第二驱动梁122E连接于振膜131的中心区域，在一些实施例中，质量元件M2可以与第二驱动梁122E连接，在一些实施例中，第二驱动梁122E与质量元件M2分别连接于振膜131的两相反侧面上，振膜131的两侧面分别位于前腔111内及后腔112内。
在一些实施例中，扬声器100可以包括多个驱动单元120。多个驱动单元120的设置可以如图21I所示，多个驱动单元120并列设置，驱动单元120包括基体126和驱动梁122，基体126的四周均连接有驱动梁122。多个驱动单元120的排布方式并不限制于图21I所示的并列排布，还可以为阵列、斜线、环形、扇形等规则或不规则的排布方式。
在一些实施例中，如图21I所示，驱动单元120还包括第二驱动梁122E，第二驱动梁122E通过耦合弹性结构124与基体126四周的驱动梁122连接，多个驱动梁122及第二驱动梁122E的设置可以使扬声器100能够产生更多的谐振峰，提升声压级输出。关于耦合弹性结构124的更多说明可以参见图7～图10及其相关说明。
在一些实施例中，相对设置的两组驱动梁122可以交错延伸设置。
图21J的驱动梁122与图21B所示的驱动梁122类似，其区别在于：基体126沿y方向的两侧分布的多个驱动梁122交错设置，即驱动梁122的自由端(靠近悬空区域122-2的一端)向基体126的相对侧延伸，如此设置可以在扬声器100沿x方向的长度一定的基础上较大范围地调节驱动梁122的长度尺寸，以在更大范围内调节扬声器100的谐振频率。此外，可以通过对各个驱动梁122进行单独的结构设计以实现不同的谐振频率，还可以通过对各个驱动梁122单独进行激励，实现扬声器100振膜131模态的调节。对各个驱动梁122单独进行激励的机制也可以适用于其他包括多个独立驱动梁122的实施例，例如，图21B、图21D等所示的实施例。
在一些实施例中，每组驱动梁122可以包括一个具有弯折结构的驱动梁122。
如图21K所示，两个驱动梁122设置于基体126沿y方向的两侧，驱动梁122为具有多个折弯的形状，其固定端(靠近固定区域122-1的一端)与基体126长边连接且靠近基体126短边(沿x方向延伸)设置，其自由端(靠近悬空区域122-2的一端)向y方向延伸，且两个驱动梁122的自由端相互靠拢，驱动梁122沿x方向的长度略小于声学腔体沿x方向的长度，振膜131覆盖两个驱动梁122。如此设计，能够在有限声学腔体内增大驱动梁122的长度。在一些实施例中，可以对驱动梁122上的不同区段进行单独电压激励，实现振膜131上不同区域的模态调节。
如图21L所示，两个驱动梁122设置于基体126沿x方向的两侧，驱动梁122为具有多个折弯的形状，其固定端与基体126短边连接且靠近基体126长边设置，其自由端向x方向延伸，且两个驱动梁122的自由端相互靠拢，驱动梁122沿y方向的宽度略小于声学腔体沿y方向的宽度，振膜131 覆盖两个驱动梁122。如此设计，能够有效增加驱动梁122的振动位移，从而有效增加振膜131的振幅，从而提升输出声压级。具体而言，以其中一个驱动梁122的第一梁531和第二梁532为例，第一梁531与基体126连接，第一梁531和第二梁532均沿y方向布置，且通过另一梁连接。
在一些实施例中，不同的驱动梁122之间可以通过耦合弹性结构124连接。
图21M所示的驱动梁122与图21C所示的驱动梁122类似，其区别在于：沿x方向相对设置的两个驱动梁122之间通过耦合弹性结构124弹性连接。在一些实施例中，两个驱动梁122之间可以通过一个或多个耦合弹性结构124连接。在一些实施例中，两个驱动梁122之间的多个耦合弹性结构124可以均匀间隔分布。在一些实施例中，耦合弹性结构124的形状可以为折型、矩形、梯形、其他多边形等规则形状以及不规则形状。在一些实施例中，耦合弹性结构124沿z方向(即振动单元130的振动方向)的厚度可以等于驱动梁122各层的总厚度，在一些实施例中，耦合弹性结构124的材料及材料分布与驱动梁122各层材料及分布一致。在一些实施例中，耦合弹性结构124的厚度也可以为驱动梁122各层中的至少一层的厚度，在一些实施例中，耦合弹性结构124的材料及材料分布也可以为驱动梁122各层中的至少一层的材料及其分布。在一些实施例中，耦合弹性结构124的厚度可以与驱动梁122的总厚度不一致，在一些实施例中，耦合弹性结构124的材料可以为驱动梁122各层材料之外的具有一定弹性的材料。
在一些实施例中，振动单元130包括未被驱动梁122覆盖的中空区域，从固定区域122-1延伸至悬空区域122-2的方向上，悬空区域122-2具有长度尺寸，驱动梁122的长度与中空区域的长度的一半之和的定义为第一参数，悬空区域122-2的长度尺寸与第一参数的比值为0.7-1。
图22是本说明书另一些实施例所示的驱动梁及振膜沿z方向的投影图。
如图22所示，驱动梁122沿长度方向x靠近其周侧的边缘区域为与壳体110(或基体126)连接的固定区域122-1，驱动梁122上在声学腔体内悬空的区域为悬空区域122-2，悬空区域122-2与壳体110(或基体126)之间的区域为空置区域。驱动梁122的悬空区域122-2的运动为扬声器100提供驱动力。在一些实施例中，驱动梁122的长边为固定边，短边为悬空边，驱动梁122的长边沿驱动梁122的宽度方向y(参见图22)延伸，短边沿驱动梁122的长度方向x(参见图22)延伸。
在一些实施例中，继续参见图22，振膜131的振动区域的部分被驱动梁122覆盖，另一部分未被驱动梁122覆盖，将振膜131的振动区域未被驱动梁122覆盖的部分定义为中空区域131-1，中空区域131-1的大小能够影响振膜131的振动模态。沿x方向，驱动梁122的长度与中空区域131-1的长度的一半之和的定义为第一参数lt，由于扬声器100沿x方向间隔分布的两块的驱动梁122是对称设置的，图22中将lt标注为驱动梁122靠近固定区域122-1的长边与扬声器100与y方向平行的对称线之间的距离，驱动梁122的悬空区域122-2长度l与lt的关系决定了振膜131的长度尺寸占比。振膜131的中空区域131-1沿y方向的宽度定义为wt，驱动梁122的宽度w与wt的关系决定了振膜中空区域131-1的宽度尺寸占比。当振膜中空区域131-1的长度尺寸占比和/或宽度尺寸占比较大时，例如，l与lt的比值和/或w与wt的比值较小时，振膜131的中空区域131-1较大，进而导致中空区域131-1在较低频产生局部模态，与驱动梁122的模态不一致，甚至出现相反方向的模态，会使得声音频响具有较多峰谷，同时输出声压级较低；当中空区域131-1的长度尺寸占比、宽度尺寸占比较小时，例如，l与lt的比值、w与wt的比值较大时，振膜131覆盖驱动梁122的区域较大，使得驱动梁122的刚度减小，谐振频率降低，进而使得扬声器100的中高频输出较差，因此需要合理设计l与lt的关系及w与wt的关系。
在一些实施例中，定义物理量μ：
图23是根据本说明书一些实施例所示的μ不同取值对应的扬声器的频响曲线图。
如图23所示，当μ＝0.6时，中空区域131-1的长度尺寸占比较大，在较低的频率范围内(例如，小于1kHz的频率范围内)形成中空区域131-1局部的谐振，产生频响曲线的第一谐振峰F221，此时悬空区域122-2的长度尺寸l较小，因而驱动梁122刚度较大，在较高频率产生频响曲线的第二谐振峰F222，如此中低频段(例如，小于6kHz的频率范围内)出现2个谐振峰，影响扬声器100频响曲线的平坦度。同时由于在较低频形成中空区域131-1局部的谐振，在其谐振频率之后，会出现振动方向反向以及高阶模态与驱动梁122的模态不一致的问题，甚至出现与驱动梁122的模态相反方向的模态，导致输出声压级明显降低。
图24是根据本说明书一些实施例所示的μ＝0.6时驱动梁及振膜沿x方向及y方向对称线划分四分之一部分的振动变形云图。如图24所示，当中空区域131-1的长度尺寸占比较大时，中空区域 131-1在较低频率范围内产生局部模态，表现为与驱动梁122的模态不一致，还表现为与驱动梁122的模态相反。其中，区域131-2是指振膜131的振动区域。
随着μ增加，例如μ＝0.8时，悬空区域122-2的长度尺寸l增加，中空区域131-1的长度尺寸占比减小，不易在较低频率出现中空区域131-1局部的谐振，使得在中低频较宽频带内中空区域131-1局部模态均能跟随悬空区域122-2的模态，呈现一致的运动方向，进而使得扬声器100在中低频较宽频带获得相对比较平坦的频响曲线。进一步增加μ，例如使μ＝1，此时悬空区域122-2的长度方向完全覆盖，即中空区域131-1长度为0，由于驱动梁122的尺寸较大，使得驱动梁122刚度减小，谐振频率较低，进而使得扬声器100中高频性能较差，相比μ为0.7-0.8，中频性能明显降低。
故可以通过调节悬空区域122-2长度尺寸l与第一参数lt的比值关系，以调整扬声器100的频响平坦度以及输出声压级。在一些实施例中，μ的取值范围可以为0.7-1。在一些实施例中，μ的取值范围可以为0.75-1。在一些实施例中，μ的取值范围可以为0.7-0.95，使得扬声器100在较宽频带内均有一定的声压级输出，且在较宽频带内频响曲线相对平坦，以提升扬声器100的音质表现。
在一些实施例中，还可以通过合理设计驱动梁122宽度w与中空区域131-1的宽度wt的关系来调整扬声器100的音质表现。这里以μ＝0.6为例，设计w与wt之间的关系。在一些实施例中，在从固定区域122-1延伸至悬空区域122-2的方向的垂直方向上(即图22中的y方向)，悬空区域122-2的宽度尺寸w与中空区域131-1的宽度尺寸wt的比值为0.5-0.95。
在一些实施例中，定义物理量δ：
图25是根据本说明书一些实施例所示的δ不同取值对应的扬声器的频响曲线图。
如图25所示，当δ＝0.5时，中空区域131-1的宽度尺寸占比较大，在较低的频率范围内(例如，小于1kHz的频率范围内)形成中空区域131-1局部的谐振，产生频响曲线的第一谐振峰F241，由于驱动梁122谐振频率主要取决于其厚度、材料与长度，相较图23所示的μ＝0.6时的频响曲线第二谐振峰位置基本不变。但是由于存在第一谐振峰F241，导致在中低频段出现2个谐振峰，影响扬声器100频响曲线的平坦度。同时由于在较低频形成中空区域131-1局部的谐振，在其谐振频率之后，会出现振动方向反向以及高阶模态与驱动梁122的模态不一致的问题，甚至出现与驱动梁122的模态相反方向的模态，导致输出声压级明显降低。图26是根据本说明书一些实施例所示的δ＝0.5时驱动梁及振膜沿x方向及y方向对称线划分四分之一部分的振动变形云图。如图26所示，当中空区域131-1的宽度尺寸占比较大时，中空区域131-1在较低频率范围内产生局部模态，表现为与驱动梁122的模态不一致，还表现为与驱动梁122的模态相反。
随着δ增加，例如δ＝0.65时，悬空区域122-2的宽度尺寸增加，中空区域131-1的宽度尺寸占比减小，不易在较低频率出现中空区域131-1局部的谐振，使得在中低频较宽频带内中空区域131-1局部模态均能跟随悬空区域122-2的模态，呈现一致的运动方向，进而使得扬声器100在中低频较宽频带获得相对比较平坦的频响曲线。且随驱动梁122的宽度w增加，驱动梁122运动提供驱动力，会使得扬声器100在较宽频带内输出声压级增加，因此驱动梁122宽度w可以优先选择较大值。但进一步增加δ，例如使δ＝0.95，驱动梁122宽度w会使得中空区域131-1的宽度方向面积太小，从而使得局部刚度较大，进而使得扬声器100谐振频率较大，反而会降低输出，因此驱动梁122宽度w不能取过大值。
故可以通过调节驱动梁122宽度w与中空区域131-1的宽度wt的比值关系，以调整扬声器100的频响平坦度以及输出声压级。在一些实施例中，δ的取值范围可以为0.5-0.95。在一些实施例中，δ的取值范围可以为0.65-0.95，使得扬声器100在较宽频带内均有一定的声压级输出，且在较宽频带内频响曲线相对平坦，以提升扬声器100的音质表现。
在一些实施例中，扬声器100的任意一个驱动梁122的悬空区域122-2包括电极覆盖区域。
在一些实施例中，扬声器100的任意一个驱动梁122的悬空区域122-2包括非电极覆盖区域，非电极覆盖区域至少部分位于驱动梁122上远离固定区域122-1的端部。
驱动梁122中的电极用于向驱动梁122传递电信号(例如施加电压)。在一些实施例中，当驱动单元120通过振动传递单元140与振动单元130传动连接时，电极可以设置在驱动梁122远离振动传递单元140的一侧。在一些实施例中，当驱动单元120直接与振动单元130传动连接时，例如振膜131直接覆盖于驱动梁122表面时，电极可以连接在驱动梁122远离振膜131的侧面上。在一些实施例中，电极可以为矩形、圆形、多边形等规则形状以及任何不规则形状。在一些实施例中，驱动梁122的一层电极层可以包括一块电极或多块电极，多块电极可以任意分布，例如，多块电极可以阵列分布。在一些实施例中，电极可以覆盖驱动梁122的整个侧面，也可以覆盖驱动梁122的侧面上的局部区域。 在一些实施例中，电极可以在驱动梁122的侧面上均匀分布，也可以不均匀分布。
图27是本说明书一些实施例所示的具有电极的驱动梁沿y方向的侧视图。如图27所示，驱动梁122的一侧为固定区域122-1，固定区域122-1与壳体110或基体126连接，固定区域122-1沿x方向相对一侧为悬空区域122-2，电极覆盖驱动梁122整个长度方向x上的区域，当驱动梁122响应电信号产生形变时，驱动梁122整个长度方向x上的位置均发生形变。
图28是本说明书一些实施例所示的具有电极的驱动梁沿y方向的侧视图。如图28所示，驱动梁122的一侧为固定区域122-1，固定区域122-1与壳体110或基体126连接，固定区域122-1沿x方向相对一侧为悬空区域122-2，电极覆盖沿长度方向x上距离固定区域122-1部分范围内的区域，将驱动梁122表面有电极覆盖的区域定义为电极覆盖区域1215。当驱动梁122响应电信号产生形变时，驱动梁122仅在电极覆盖区域1215发生形变，因而可以通过调控电极的分布有效调控驱动梁122振动形态，从而调节扬声器100的输出声压级。
结合图27～图28所示，相比电极覆盖驱动梁122整个长度方向x上的区域，电极覆盖驱动梁122的悬空区域122-2包括非电极覆盖区域，非电极覆盖区域至少部分位于驱动梁122上远离固定区域122-1的端部，便于控制驱动梁122的振动形态。在一些实施例中，可以通过调控电极在驱动梁122长度方向x上的覆盖区域，有效调控驱动梁122的振动形态，从而调节驱动梁122的振动位移，以调节扬声器100的输出声压级。
图29是本说明书一些实施例所示的驱动梁沿z方向的投影图。
在一些实施例中，如图29所示，电极覆盖区域1215可以为矩形形状，电极覆盖区域1215设置于驱动梁122的悬空区域122-2内，电极覆盖区域1215的宽度与驱动梁122的悬空区域122-2的宽度一致。在一些实施例中，为便于控制驱动梁122的振动形态，电极覆盖区域1215可以靠近驱动梁122的固定区域122-1设置。在一些实施例中，电极覆盖区域1215也可以靠近驱动梁122的悬空区域122-2设置，电极覆盖区域1215还可以位于驱动梁122的固定区域122-1与悬空区域122-2之间的中部。在一些实施例中，由于固定区域122-1与基体126或壳体110固定，不参与驱动梁122的振动，故电极可以只设置于悬空区域122-2内，当然固定区域122-1内也可以按需求设置电极。在一些实施例中，可以通过合理设计电极覆盖区域1215沿长度方向x上的长度尺寸与驱动梁122的长度尺寸之间的关系，来调整对于驱动梁122的振动模态。这里以电极覆盖区域1215可以为矩形形状为例进行说明，需要知道的是，电极覆盖区域1215还可以为其它形状(例如，梯形、圆角矩形等)。
在一些实施例中，在从固定区域122-1延伸至悬空区域122-2的方向上，电极覆盖区域1215的长度尺寸与悬空区域122-2的长度尺寸的比值为0.3-1。
在一些实施例中，定义物理量γ：
其中，la为驱动梁122上电极覆盖区域1215沿长度方向x上的长度，l为悬空区域122-2沿长度方向x上的长度，γ为la与l的比值。
图30是根据本说明书一些实施例所示的不同的γ对应的扬声器的频响曲线示意图。如图30所示，曲线L301表示γ＝0.3时，对应扬声器100的频响曲线；曲线L302表示γ＝0.6时，对应扬声器100的频响曲线；曲线L303表示γ＝0.9时，对应扬声器100的频响曲线；曲线L304表示γ＝1时，对应扬声器100的频响曲线。由图30可知，当γ＝1时，对应的曲线L304整体位置最高，对应的扬声器100的输出声压级最大。随着γ逐渐从1减小至0.6，对应的曲线逐渐下移，扬声器100的输出声压级逐渐减小。当γ从0.6减小至0.3，对应的曲线下移明显，扬声器100的输出声压级明显减小。这是因为当γ的取值过小时，驱动梁122上的电极覆盖区域1215的长度占据的悬空区域122-2的长度的比例过小，驱动梁122的悬空区域122-2中发生形变产生驱动力的区域长度过小，导致驱动梁122产生的驱动梁过小，从而使得扬声器100的输出声压级降低。
图31是根据本说明书一些实施例所示的γ＝1时驱动梁及振膜沿x方向及y方向对称线划分四分之一部分的振动变形云图。图32是根据本说明书一些实施例所示的γ＝0.75时驱动梁及振膜沿x方向及y方向对称线划分四分之一部分的振动变形云图。如图31所示，电极覆盖区域1215的长度过大，会使驱动梁122振动发生形变时，驱动梁122靠近其固定区域122-1及悬空区域122-2的区域(例如，图31中示出的变形反向区301)会在某些频率出现形变方向相反的模态。如图32所示，当适当减小电极覆盖区域1215的长度，悬空区域122-2未覆盖电极的部分仅作为力学结构传递振动，而不发生变形，使得靠近扬声器100其固定区域122-1及悬空区域122-2的区域(例如，图32中示出的变形反向区311a)在某些频率出现的形变方向相反的模态的变形量减小，能够推动更多空气，相应输出更大的声 压级。
在一些实施例中，为了使驱动梁122产生较大的驱动力，扬声器100可以具有较大的输出声压级，电极覆盖区域1215的长度la与悬空区域122-2的长度l的比值γ的取值范围可以为0.3-1。在一些实施例中，为了进一步增大扬声器100的输出声压级，电极覆盖区域1215的长度la与悬空区域122-2的长度l的比值γ的取值范围可以为0.5-0.1。在一些实施例中，为了进一步增大扬声器100的输出声压级，电极覆盖区域1215的长度la与悬空区域122-2的长度l的比值γ的取值范围可以为0.5-0.75。在一些实施例中，电极覆盖区域1215的长度la与悬空区域122-2的长度l的比值γ的取值范围可以为0.5-0.8，以增大驱动梁122的振动位移，从而提升扬声器100的输出声压级。
在一些实施例中，由于在驱动梁122上，仅有电极覆盖区域1215的悬空区域122-2才能发生形变提供驱动力，未覆盖电极的悬空区域122-2仅作为机械力学结构，进行力与位移的传递。因此，在一些实施例中，可以通过设计电极在驱动梁122上的覆盖面积(即电极覆盖区域1215的面积与悬空区域122-2的面积的关系)，增强驱动梁122的驱动力，提升扬声器100的输出声压级。
在一些实施例中，可以定义悬空区域122-2的总面积为Sk，电极覆盖区域1215的面积为Sd，定义参数τ为电极覆盖区域1215的面积Sd与悬空区域122-2的总面积Sk之比：
参数τ可以表示驱动梁122上发生形变的部分的面积(即电极覆盖区域122-21对应的面积)占据悬空区域122-2的总面积的比例。
图33是根据本说明书一些实施例所示的不同的τ对应的扬声器的频响曲线示意图。如图33所示，曲线L331表示τ＝0.1时，对应扬声器100的频响曲线；曲线L332表示τ＝0.28时，对应扬声器100的频响曲线；曲线L333表示τ＝0.6时，对应扬声器100的频响曲线；曲线L334表示τ＝1时，对应扬声器100的频响曲线。如图33所示，随着τ的取值从0.1逐渐增大至1，对应的曲线逐渐上移，扬声器100的输出声压级逐渐增大。在一些实施例中，为了使扬声器100具有较大的输出声压级，τ的取值范围可以为0.28-1。需要说明的是，τ的取值越大，驱动梁122上发生形变的区域越多，驱动梁122的驱动力越大，但是由于实际样品加工工艺与电极走线以及振型调控的需求，有些情况下无法保证电极覆盖区域1215的面积Sd可以与悬空区域122-2的总面积Sk相同，因此τ的取值有时候无法取到最大值1。在一些实施例中，为了使扬声器100具有较大的输出声压级，电极覆盖区域1215的面积与悬空区域122-2的面积的比值τ的取值范围可以为0.3-1。在一些实施例中，为了使扬声器100具有较大的输出声压级，电极覆盖区域1215的面积与悬空区域122-2的面积的比值τ的取值范围可以为0.5-1。
在一些实施例中，还可以通过对电极覆盖区域1215的形状进行设计，影响驱动梁122的驱动力，从而影响扬声器100的输出声压级，以及对驱动梁122及扬声器100的振动模态进行调节。以下列举几种电极覆盖区域1215为不同形状的实施例，并不旨在限制。需要说明的是，上述通过调整比值γ来调控扬声器100的输出声压级的方法同样适用于电极覆盖区域1215为不同形状(如矩形、梯形或圆弧倒角)的情况。
图34A～图34F是根据本说明书一些实施例所示的驱动梁沿z方向的投影图。
在一些实施例中，如图34A所示，电极覆盖区域1215设置于悬空区域122-2内，电极覆盖区域1215可以为梯形形状，电极覆盖区域1215的第一边12151(即靠近固定区域122-1设置的边)沿y方向的宽度与悬空区域122-2在y方向上的宽度一致，电极覆盖区域1215与第一边相对的第二边12152与悬空区域122-2远离固定区域122-1的一边间隔一定距离b(参见图34A)。
图34B所示的电极覆盖区域1215与图34A所示的电极覆盖区域1215类似，其区别在于：电极覆盖区域1215上，靠近悬空区域122-2远离固定区域122-1的一边的长边与沿x方向的短边之间为圆弧倒角，即可以认为电极覆盖区域1215上，远离固定区域122-1的长边沿y方向的宽度尺寸小于靠近固定区域122-1的长边沿y方向的宽度尺寸。
图34C所示的电极覆盖区域1215与图29所示的电极覆盖区域1215类似，其区别在于：原矩形电极覆盖区域1215沿x方向又延伸出一块小矩形区域，小矩形区域沿y方向的宽度尺寸小于原矩形区域的宽度尺寸。在一些实施例中，小矩形区域可以位于电极覆盖区域1215沿y方向的中部。
图34D所示的电极覆盖区域1215与图34C所示的电极覆盖区域1215类似，其区别在于：延伸出一块小区域为梯形形状，其沿y方向的长边靠近原矩形区域设置。
在一些实施例中，扬声器100的基体126也可以覆盖有电极，用于电信号的引线。在一些实施例中，基体126上的电极可以覆盖在与驱动梁122连接的端面上。在一些实施例中，基体126上的电极可以为一块或电极，多块电极可以任意分布，例如，多块电极可以阵列分布。在一些实施例中， 电极可以覆盖基体126与驱动梁122连接的整个端面，也可以覆盖端面上的局部区域。在一些实施例中，电极可以在基体126与驱动梁122连接的端面上均匀分布，也可以不均匀分布。以下列举几种电极在基体126端面上的分布方式，并不旨在限制。
在图29所示的电极覆盖区域1215的基础上，图34E所示的电极覆盖区域1215还包括基体126端面上的第二覆盖区域1216，第二覆盖区域1216为矩形形状，第二覆盖区域1216方向上的宽度与驱动梁122在y方向上的宽度一致。在一些实施例中，第二覆盖区域1216可以靠近驱动梁悬置区域设置。
在图29所示的电极覆盖区域1215的基础上，图34F所示的电极覆盖区域1215还包括基体126端面上的第二覆盖区域1216，第二覆盖区域1216包括多块第二电极区域12161，多块第二电极区域12161沿y方向间隔分布，多块第二电极区域12161在y方向上分布的宽度与驱动梁122在y方向上的宽度一致。在一些实施例中，第二覆盖区域1216可以靠近驱动梁悬置区域设置。
在一些实施例中，振动单元130包括可动区域，可动区域设有加强部，加强部至少部分覆盖可动区域，且加强部的中心与可动区域的中心在振动单元的振动方向上的投影重合。加强部可以调节振动单元130的刚度，从而调节振动单元130的振动模态，从而改善扬声器100的振动模态，提升扬声器100的输出性能。
图35是根据本说明书一些实施例所示的振动单元的局部示意图。图36是根据本说明书一些实施例所示的振膜的结构示意图。图37是根据本说明书一些实施例所示的振动单元的示意图。
如图35所示，在一些实施例中，振动单元130作为扬声器100的负载端，可以包括振膜131和中心加强件132。在一些实施例中，结合图1A和图35，振膜131可以包括边缘固定部1311、折环部1312、中心部1313，其中边缘固定部1311可以与扬声器100的壳体110固定连接，中心部1313可以设置有中心加强件132。驱动单元120可连接至中心加强件132，或者，驱动单元120也可以直接连接至振膜131的中心部1313，实现驱动端(驱动单元120)到负载端(振动单元130)的机械能传递。
参见图36，在一些实施例中，可动区域1314是振膜131中除去振膜131与壳体110连接部分以外的区域。即，可动区域1314是振膜131中除去边缘固定部1311后的区域。在一些实施例中，可动区域1314可以由折环部1312和中心部1313组成。
在一些实施例中，可动区域1314设有加强部1321。在一些实施例中，加强部1321可以由中心加强件132以及与中心加强件132对应的中心部1313组成。在一些实施例中，加强部1321至少部分覆盖可动区域1314，且加强部1321的中心与可动区域1314的中心在振动单元130的振动方向上的投影重合。
在一些实施例中，可动区域1314中未被加强部1321覆盖的区域为振膜的振动悬空区域1322。即，振膜131的振动悬空区域1322是指可动区域1314中除加强部1321以外的区域。
在一些实施例中，如图37所示，振动单元130包括振膜131，定义振膜131上被加强部1321覆盖的区域的面积为加强部面积Sq，定义振膜131的可动区域1322的面积为Sm。在一些实施例中，加强部面积Sq与可动区域的面积Sm的比值为0.5-0.85。
在一些实施例中，可以定义参数ζ为加强部1321面积Sq与振膜可动区域1322面积Sm之间的比值：
通过设计比值ζ可以确定振动悬空区域1322的面积在可动区域1314中的占比，从而确定扬声器100的中高频的高阶谐振频率，并调节振膜131的局部模态。
在一些实施例中，在中高频段范围内，驱动梁122可以产生2阶模态，导致扬声器100的驱动单元120与振动传递单元140的运动位移很小，从而导致振膜组件(即振动单元130，包括振膜131和/或中心加强件132)产生位移小，进一步的，导致扬声器100的频响在该中高频段范围内产生低谷。在一些实施例中，通过设计振动悬空区域1322的大小，使振动悬空区域1322在驱动梁122产生2阶模态的频段内产生局部模态，进而可以抵消由于驱动梁122产生2阶模态导致振膜131位移小而导致的扬声器100输出频响在该中高频段范围内产生低谷的问题。
图38A是根据本说明书一些实施例所示的当参数ζ＝0.5时对应的扬声器的变形云图。图38B为图38A对应的扬声器的另一视角的变形云图。图39A是根据本说明书一些实施例所示的当参数ζ＝0.4时对应的扬声器的变形云图。图39B为图39A对应的扬声器的另一视角的变形云图。图40为ζ＝0.9时对应的扬声器的变形云图。图41是根据本说明书一些实施例所示的不同的ζ对应的扬声器的频响曲线示意图。
从如图38A和图38B所示的ζ＝0.5时扬声器的变形云图可知，在驱动梁122产生2阶模态的频段内，振动悬空区域1322可以产生局部模态，进而为振膜组件推动空气做贡献，对应在频响曲线图(如图41所示曲线L412)中在该频段内没有低谷或者低谷有所改善。但如图39A和图39B所示，当ζ＝0.4时，由于振动悬空区域1322面积占比过大，导致在该频段范围内振动悬空区域1322不同位置已经产生不同方向的运动模态，对应在频响曲线图(如图41所示曲线L411)中仍然在该频段内具有低谷。如图40所示，当ζ＝0.9时，振动悬空区域1322面积占比过小，导致在该频段内振动悬空区域1322基本不产生局部模态，对应在频响曲线图(如图41所示曲线L414)中仍然在该频段具有低谷。
在一些实施例中，通过设置振动悬空区域1322的大小，可以调节振膜131的刚度，进而可以在低频段调节扬声器100的低频谐振频率f0。在一些实施例中，通过设置振动悬空区域1322的大小，还可以在中高频段调节振膜131局部刚度进而实现对局部模态的调节，进一步的配合扬声器100的驱动单元120实现中高频频响曲线的峰谷调节。
如图41所示，曲线L411表示ζ＝0.4时，对应扬声器100的频响曲线；曲线L412表示ζ＝0.5时，对应扬声器100的频响曲线；曲线L413表示ζ＝0.85时，对应扬声器100的频响曲线；曲线L414表示ζ＝0.9时，对应扬声器100的频响曲线。
从图41中可以看出，当ζ＝0.4或ζ＝0.9时，扬声器100的频响曲线(对应曲线L411和L414)在中高频段具有明显低谷(即虚线圈P中的低谷)。当ζ＝0.5至ζ＝0.85范围时，扬声器100的频响曲线(例如，曲线L412和L413)在中高频段没有明显低谷。因此，在一些实施例中，为了使扬声器100的频响曲线在中高频段较为平坦，ζ的取值范围可以为0.5-0.85。
在一些实施例中，振膜131的边缘包括边缘圆角，从固定区域122-1向悬空区域122-2延伸的方向上，可动区域1314具有长度尺寸。在一些实施例中，边缘圆角的半径与可动区域1314的长度尺寸的一半的比值为0-0.7。
在一些实施例中，振膜131的边缘与扬声器壳体110连接。当扬声器壳体110存在拐角(例如，直角、锐角)时，振膜边缘在该拐角与壳体110连接，此时，在振膜振动过程中，容易导致应力集中，从而使得振膜131产生褶皱甚至破坏，同时也会导致扬声器100谐波失真增加，影响扬声器100可靠性。因此，在一些实施例中，可以在该拐角位置设计振膜边缘圆角，但振膜边缘圆角会使得扬声器在该特定位置附近的振动悬空区域1322的面积发生改变，进而会影响振动悬空区域1322在中高频的局部模态，因而需要设计振膜边缘圆角尺寸，从而保证振动悬空区域1322在中高频仍可以有效形成局部模态，进而抵消由于驱动梁122产生2阶模态导致振膜位移小而导致的扬声器输出频响在该频段产生低谷问题。
图42是根据本说明书一些实施例所示的振膜的示意图。在一些实施例中，可以定义参数λ为振膜边缘圆角的半径lR与振膜可动区域沿驱动梁长度方向(如图42中所示的x方向)长度一半lm之间的比值：
通过设计参数λ可以确定在扬声器拐角位置附近的振动悬空区域1322的面积占比，从而确定扬声器100的中高频的谐振频率，并调节振膜131的局部模态。
图43是根据本说明书一些实施例所示的不同的λ对应的扬声器的频响曲线示意图。如图43所示，曲线L431表示λ＝0时，对应扬声器100的频响曲线；曲线L432表示λ＝0.17时，对应扬声器100的频响曲线；曲线L433表示λ＝0.33时，对应扬声器100的频响曲线；曲线L434表示λ＝0.7时，对应扬声器100的频响曲线；曲线L435表示λ＝0.8时，对应扬声器100的频响曲线。
从图43中可以看出，当λ较小，例如λ＝0(对应于方形扬声器)时，扬声器频响曲线上在驱动梁产生2阶模态的频率附近无低谷。随着λ的逐渐增加，在扬声器四个角位置附近的振动悬空区域1322的面积占比逐渐减小，振膜组件在中高频段(例如，7kHz-8kHz)产生的局部变形量减小，从而会导致扬声器在中高频段会产生相应的低谷。例如，当λ增加至0.8时，对应曲线L435上产生明显低谷。此外，随着λ的逐渐增加，振膜刚度逐渐增大，扬声器的低频谐振峰逐渐向高频移动。
在一些实施例中，为了使扬声器100在中高频段内具有较平坦的频响曲线，λ的取值范围可以为0-0.7。在一些实施例中，λ的取值范围可以为0.2-0.6。在一些实施例中，λ的取值范围可以为0.3-0.5。
在一些实施例中，可以设计加强部1321的结构来调控扬声器驱动单元120与振膜组件连接区域的刚度，从而调节振膜组件的模态。
在一些实施例中，加强部1321上设有镂空；或者，加强部1321的周侧设有缺口。
图44A、图44B和图44C是根据本说明书一些实施例所示的扬声器的局部示意图。
如图44A和图44B所示，在一些实施例中，中心加强件132在驱动单元120与振膜组件的连接区域可以具有缺口1323，以有效调控扬声器驱动单元120与振膜组件连接区域的刚度，从而调节振膜组件的模态。在一些实施例中，缺口1323可以位于驱动单元120与振膜组件的连接区域的中间位置。在一些实施例中，缺口1323可以位于驱动单元120与振膜组件的连接区域的边缘位置(如图44A所示)。
在一些实施例中，当缺口1323位于驱动单元120与振膜组件的连接区域的中间区域时，缺口1323的形状可以为圆形、椭圆形、四边形(包括但不限于正方形、长方形、菱形等)、五边形、六边形、八边形以及其他多边形等。在一些实施例中，当缺口1323位于驱动单元120与振膜组件的连接区域的边缘位置时，缺口1323的轮廓可以是由直线构成(如图44A所示)或由弧线构成(如图44C所示)。
在一些实施例中，扬声器100的驱动单元120与振动单元130可以为一体结构。例如，驱动单元120与振动单元130可以为均采用微机电系统(Microelectromechanical systems，MEMS)工艺制备的一体结构。在一些实施例中，振动单元130可以由半导体材料、高分子材料等制成。示例性半导体材料可以包括硅(Si)、二氧化硅(SiO2)、氮化硅(SiNx)、碳化硅(SiC)等。示例性高分子材料可以包括聚酰亚胺(Polyimide、PI)、聚对二甲苯(Parylene)、聚二甲基硅氧烷(Polydimethylsiloxane，PDMS)、水凝胶、光刻胶、硅胶、硅凝胶、硅密封胶等。在一些实施例中，驱动单元120、振动单元130与壳体110之间采用装配连接的方式。
在一些实施例中，扬声器100的驱动单元120与振动单元130可以为分体结构。例如，驱动单元120可以采用MEMS工艺制备，振动单元130可以采用压铸、真空吸塑、热压成型或注塑成型等传统工艺制备。在一些实施例中，振动单元130可以由刚性材料制成。示例性的刚性材料可以包括铝合金、碳纤维、镁锂合金、不锈钢、塑料等。在一些实施例中，驱动单元120与振动单元130可以采用粘接等方式装配。
图45是根据本说明书一些实施例所示的具有狭缝结构的扬声器的内部结构示意图。
在一些实施例中，如图45所示，振动单元130与壳体110之间不直接连接，振动单元130与壳体110的内壁之间具有狭缝结构150。在一些实施例中，狭缝结构150为360°的环形结构。通过在振动单元130与壳体110之间设置狭缝结构150，可以减小振动单元130在运动过程中的约束力，进而增加振动单元130的运动行程(振动幅度)，从而提升扬声器100的输出声压级。
同时，通过设置狭缝宽度，在一些实施例中，为了防止当振动单元130运动时，前腔111、后腔112声泄露，导致声短路降低扬声器100输出，狭缝结构150的宽度可以为5μm-30μm。在一些实施例中，为了进一步避免声短路导致扬声器100的输出降低，狭缝结构150的宽度可以为10μm-20μm。
在一些实施例中，为了保证振动单元130(例如振膜131)在运动过程中的振动方向保持不变，不发生偏转，可以对振动传递单元140的形状结构进行设计，以增加振动传递单元140与振动单元130的接触面积。
图46A～46B是根据本说明书一些实施例所示的扬声器的部分结构的示意图。在一些实施例中，图46A所示的扬声器与图1A中所示的扬声器类似，其区别在于：图46A所示的扬声器的振动传递单元为梯形结构。在一些实施例中，图46B所示的扬声器与图1A中所示的扬声器类似，其区别在于：图46B所示的扬声器的振动传递单元为工字型结构。
在一些实施例中，为了避免扬声器100的振动单元130局部变形模态，可以增加振动单元130刚度/质量比。
图47是根据本说明书又一些实施例所示的扬声器的部分结构的示意图。
在一些实施例中，图47所示的扬声器与图1A中所示的扬声器类似，其区别在于：图47所示的扬声器的振动单元130为阶梯结构。例如，如图47所示，阶梯结构的振动单元130可以是在振膜131的中心部增加一层振膜(图中未标出)。其中，新增加的振膜面积小于原振膜131的面积。
图48是根据本说明书一些实施例所示的振动单元沿振膜振动方向的投影图。
在一些实施例中，图48所示的扬声器与图1A中所示的扬声器类似，其区别在于：图48所示的振动单元130的振膜131带有加强部1321。如图48所示，加强部1321可以沿振膜131长度、宽度方向布置，且加强部1321所形成的投影图案上具有一个或多个镂空结构。关于加强部的更多说明可以参加前文相关部分，如图35～图37等。
在本说明书的一些实施例中，通过设计阶梯结构的振动单元130、设计带有加强部的振动单元130可以进一步增加振动单元130刚度/质量比，保证振膜在运动过程中，始终沿振动方向(即z方向)，避免出现振动单元130局部变形模态。
在一些实施例中，驱动梁122具有驱动梁加强层。
图49A是根据本说明书一些实施例所示的扬声器的示意图。
在一些实施例中，图49A所示的扬声器与图1A中所示的扬声器类似，其区别在于：图49A所示的扬声器的驱动梁122带有驱动梁加强层122-3。驱动梁加强层122-3可以设置于驱动梁122远离振动单元130的一侧，对驱动梁122进行加强。驱动梁加强层122-3可以连接不同的驱动梁122的悬空区域122-2，多个驱动梁122通过驱动梁加强层122-3与振动传递单元140或振动单元130传动相连。在一些实施例中，驱动梁加强层122-3可以由高分子材料或半导体材料组成。示例性的高分子材料包括聚酰亚胺、光刻胶、派瑞林、水凝胶等。示例性的半导体材料包括硅、氮化硅、氧化硅、碳化硅等中的一种或者多种复合材料。
在一些实施例中，为了使驱动梁122具有更大的位移，驱动梁122与扬声器的驱动单元120的基体126之间、或者不同驱动梁122之间可以设计有狭缝结构150。
图49B是根据本说明书一些实施例所示的驱动梁及振膜沿振动单元的振动方向的投影图。
在一些实施例中，图49B所示的扬声器与图49A中所示的扬声器类似，其区别在于：图49B所示的扬声器的驱动梁122与基体126之间存在狭缝结构150。
在一些实施例中，相邻驱动梁之间也存在狭缝结构，参见图21I，相邻驱动梁122之间存在狭缝结构150。
在一些实施例中，扬声器100可以包括多个并列的驱动单元120。
图50A～50B是根据本说明书一些实施例所示的包括多个并列的驱动单元的扬声器的示意图。
如图50A所示，扬声器100可以包括多个并列的驱动单元(如驱动单元120-1、120-2、120-n等)。多个驱动单元分别通过对应的振动传递单元140与一个振动单元130传动连接，多个驱动单元共同为振动单元130的振动提供足够大的动力，以增大振动单元130的振动幅度，提升扬声器100的输出。多个驱动单元各自的驱动梁可以分别通过基体126与壳体110的底壁连接，相邻基体126之间的部分即可作为一个驱动单元，对应的壳体110部分相应设置有用于出音的声学孔。
图50B所示扬声器与图50A中所示的扬声器类似，其区别在于：图50B中所示的扬声器100不包括振动传递单元140，多个并列的驱动单元(如驱动单元120-1、120-2、120-n等)直接与振动单元130(如振膜131)连接。
在本说明书的一些实施例中，在扬声器中设置多个并列的驱动单元可以增加扬声器输出声音的分布范围，增强音量；此外，不同的驱动单元还可以分别适应不同频率的电信号和声音信号的转化，使音频表现更全面。
上文已对基本概念做了描述，显然，对于本领域技术人员来说，上述详细披露仅仅作为示例，而并不构成对本申请的限定。虽然此处并没有明确说明，本领域技术人员可能会对本申请进行各种修改、改进和修正。该类修改、改进和修正在本申请中被建议，所以该类修改、改进、修正仍属于本申请示范实施例的精神和范围。
同时，本申请使用了特定词语来描述本申请的实施例。如“一个实施例”、“一实施例”、和/或“一些实施例”意指与本申请至少一个实施例相关的某一特征、结构或特点。因此，应强调并注意的是，本说明书中在不同位置两次或多次提及的“一实施例”或“一个实施例”或“一个替代性实施例”并不一定是指同一实施例。此外，本申请的一个或多个实施例中的某些特征、结构或特点可以进行适当的组合。
同理，应当注意的是，为了简化本申请披露的表述，从而帮助对一个或多个发明实施例的理解，前文对本申请实施例的描述中，有时会将多种特征归并至一个实施例、附图或对其的描述中。但是，这种披露方法并不意味着本申请对象所需要的特征比权利要求中提及的特征多。实际上，实施例的特征要少于上述披露的单个实施例的全部特征。
一些实施例中使用了描述成分、属性数量的数字，应当理解的是，此类用于实施例描述的数字，在一些示例中使用了修饰词“大约”、“近似”或“大体上”来修饰。除非另外说明，“大约”、“近似”或“大体上”表明所述数字允许有±20％的变化。相应地，在一些实施例中，说明书和权利要求中使用的数值参数均为近似值，该近似值根据个别实施例所需特点可以发生改变。在一些实施例中，数值参数应考虑规定的有效数位并采用一般位数保留的方法。尽管本申请一些实施例中用于确认其范围广度的数值域和参数为近似值，在具体实施例中，此类数值的设定在可行范围内尽可能精确。
针对本申请引用的每个专利、专利申请、专利申请公开物和其他材料，如文章、书籍、说明书、出版物、文档等，特此将其全部内容并入本申请作为参考。与本申请内容不一致或产生冲突的申请历史文件除外，对本申请权利要求最广范围有限制的文件(当前或之后附加于本申请中的)也除外。需要说明的是，如果本申请附属材料中的描述、定义、和/或术语的使用与本申请所述内容有不一致或冲突的地方，以本申请的描述、定义和/或术语的使用为准。
最后，应当理解的是，本申请中所述实施例仅用以说明本申请实施例的原则。其他的变形也可能属于本申请的范围。因此，作为示例而非限制，本申请实施例的替代配置可视为与本申请的教导一致。相应地，本申请的实施例不仅限于本申请明确介绍和描述的实施例。

Claims (41)

  1. 一种扬声器，包括：壳体、驱动单元与振动单元，所述驱动单元固定于所述壳体，所述驱动单元与所述振动单元传动连接；其中，
    所述驱动单元包括多个驱动梁，任意一个驱动梁包括固定区域以及悬空区域，所述任意一个驱动梁通过所述固定区域与所述壳体连接，所述任意一个驱动梁通过所述悬空区域与所述振动单元传动连接。
  2. 如权利要求1所述的扬声器，其中，对于所述任意一个驱动梁，从所述固定区域延伸至所述悬空区域的方向上，所述悬空区域具有长度尺寸；在所述振动单元的振动方向上，所述悬空区域具有厚度尺寸；所述悬空区域的厚度尺寸与所述悬空区域的长度尺寸的平方的比值的二分之一次幂的取值范围为0.01-0.3。
  3. 如权利要求1或2所述的扬声器，其中，所述驱动梁包括沿所述振动单元的振动方向堆叠的衬底层、第一电极层、压电层、第二电极层以及加强层，所述衬底层的厚度与所述压电层的厚度之比为0-2。
  4. 如权利要求1所述的扬声器，其中，所述驱动梁包括沿所述振动单元的振动方向堆叠的压电结构及一个或多个加强层，距所述压电结构最远的加强层上设有凹槽结构。
  5. 如权利要求4所述的扬声器，其中，从所述固定区域延伸至所述悬空区域的方向上，所述凹槽结构包括多个凹槽，靠近所述固定区域的凹槽的尺寸大于远离所述固定区域的凹槽的尺寸。
  6. 如权利要求4所述的扬声器，其中，从所述固定区域延伸至所述悬空区域的方向上，所述凹槽结构包括多个间隔设置的增强部件，任意相邻的两个所述增强部件之间设有凹槽，远离所述固定区域的所述增强部件的宽度大于靠近所述固定区域的所述增强部件的宽度。
  7. 如权利要求1-4任一项所述的扬声器，其中，所述任意一个驱动梁分别与振动传递单元连接，所述振动传递单元与所述振动单元连接，所述任意一个驱动梁通过所述振动传递单元将振动传递至所述振动单元。
  8. 如权利要求7所述的扬声器，其中，所述驱动单元包括位于所述壳体相对侧的两组驱动梁，所述两组驱动梁中的每一组均包括一个或多个所述驱动梁，所述驱动梁的形状包括矩形、梯形或圆弧倒角。
  9. 如权利要求8所述的扬声器，其中，所述驱动单元还包括位于所述壳体另一相对侧的两组驱动梁。
  10. 如权利要求9所述的扬声器，其中，所述振动传递单元包括环形结构，任意一组驱动梁均连接到所述振动传递单元的不同区域。
  11. 如权利要求10所述的扬声器，其中，所述振动传递单元上连接第二驱动梁，所述第二驱动梁与所述壳体间接连接。
  12. 如权利要求11所述的扬声器，其中，所述振动单元还包括质量元件，所述第二驱动梁远离所述振动传递单元的一端直接与所述质量元件相连；或者，所述第二驱动梁远离所述振动传递单元的一端通过耦合弹性结构与所述质量元件相连。
  13. 如权利要求10所述的扬声器，其中，所述振动单元还包括质量元件，所述振动传递单元通过耦合弹性结构与所述质量元件相连。
  14. 如权利要求8所述的扬声器，其中，所述两组驱动梁交错延伸，所述振动传递单元包括折型结构，任意一组驱动梁均连接到所述振动传递单元的不同区域。
  15. 如权利要求14所述的扬声器，其中，所述任意一组驱动梁直接与所述振动传递单元相连；或者，所述任意一组驱动梁通过耦合弹性结构与所述振动传递单元相连。
  16. 如权利要求8所述的扬声器，其中，每组驱动梁包括一个具有弯折结构的驱动梁，所述两组驱动梁中两个所述具有弯折结构的驱动梁各自远离对应的固定区域的一端耦合连接至同一振动传递单元。
  17. 如权利要求1-4任一项所述的扬声器，其中，所述任意一个驱动梁分别堆叠在所述振动单元的不同区域。
  18. 如权利要求17所述的扬声器，其中，所述驱动单元包括位于所述壳体相对侧的两组驱动梁，所述两组驱动梁中的每一组均包括一个或多个所述驱动梁，所述驱动梁的形状包括矩形、梯形或圆弧倒角。
  19. 如权利要求17所述的扬声器，其中，所述驱动单元还包括位于所述壳体另一相对侧的两组驱动梁。
  20. 如权利要求17所述的扬声器，其中，所述振动单元还包括质量元件，所述质量元件包括环形结构，任意一组驱动梁均连接到所述质量元件的不同区域。
  21. 如权利要求17所述的扬声器，其中，所述振动单元还包括第二驱动梁，所述第二驱动梁与所述壳体间接连接。
  22. 如权利要求21所述的扬声器，其中，所述振动单元还包括质量元件，所述第二驱动梁与所述质量元件相连。
  23. 如权利要求21所述的扬声器，其中，所述任意一个驱动梁分别通过耦合弹性结构连接至所述第二驱动梁的不同区域。
  24. 如权利要求18所述的扬声器，其中，所述两组驱动梁交错延伸。
  25. 如权利要求18所述的扬声器，其中，每组驱动梁包括一个具有弯折结构的驱动梁。
  26. 如权利要求17所述的扬声器，其中，所述振动单元包括未被所述驱动梁覆盖的中空区域，从所述固定区域延伸至所述悬空区域的方向上，所述悬空区域具有长度尺寸，所述驱动梁的长度与所述中空区域的长度的一半之和的定义为第一参数，所述悬空区域的长度尺寸与所述第一参数的比值为0.7-1。
  27. 如权利要求17所述的扬声器，其中，所述振动单元包括未被所述驱动梁覆盖的中空区域，在从所述固定区域延伸至所述悬空区域的方向的垂直方向上，所述悬空区域的宽度尺寸与所述中空区域的宽度尺寸的比值为0.5-0.95。
  28. 如权利要求17所述的扬声器，其中，不同的所述驱动梁之间通过耦合弹性结构连接。
  29. 如权利要求1-28任一项所述的扬声器，其中，任意一个所述驱动梁的所述悬空区域包括非电极覆盖区域，所述非电极覆盖区域至少部分位于所述驱动梁上远离所述固定区域的端部。
  30. 如权利要求29所述的扬声器，其中，任意一个所述驱动梁的所述悬空区域包括电极覆盖区域，在从所述固定区域延伸至所述悬空区域的方向上，所述电极覆盖区域的长度尺寸与所述悬空区域的长度尺寸的比值为0.3-1。
  31. 如权利要求29或30所述的扬声器，其中，所述电极覆盖区域的面积与所述悬空区域的面积的比值为0.3-1。
  32. 如权利要求29-31任一项所述的扬声器，其中，所述电极覆盖区域的形状包括矩形、梯形或圆弧倒角。
  33. 如权利要求7所述的扬声器，其中，所述任意一个驱动梁分别通过耦合弹性结构与所述振动传递单元连接。
  34. 如权利要求33所述的扬声器，其中，在所述振动单元的振动方向上，所述耦合弹性结构的厚度尺寸与所述驱动梁的厚度尺寸的比值为0.65-1。
  35. 如权利要求33或34所述的扬声器，其中，所述驱动梁包括沿所述振动单元的振动方向堆叠的压电结构以及一个或多个加强层，距所述压电结构最远的加强层与所述耦合弹性结构相连。
  36. 如权利要求33所述的扬声器，其中，所述耦合弹性结构上设有镂空结构。
  37. 如权利要求33所述的扬声器，其中，所述耦合弹性结构包括弯折结构。
  38. 如权利要求1-37任一项所述的扬声器，其中，所述振动单元包括可动区域，所述可动区域设有加强部，所述加强部至少部分覆盖所述可动区域，且所述加强部的中心与所述可动区域的中心在所述振动单元的振动方向上的投影重合。
  39. 如权利要求38所述的扬声器，其中，所述振动单元包括振膜，定义所述振膜上被所述加强部覆盖的区域的面积为加强部面积，所述加强部面积与所述可动区域的面积的比值为0.5-0.85。
  40. 如权利要求38所述的扬声器，其中，所述振膜的边缘包括边缘圆角，从所述固定区域向所述悬空区域延伸的方向上，所述可动区域具有长度尺寸，所述边缘圆角的半径与所述可动区域的长度尺寸的一半的比值为0-0.7。
  41. 如权利要求38所述的扬声器，其中，所述加强部上设有镂空；或者，所述加强部的周侧设有缺口。
PCT/CN2024/087645 2023-04-14 2024-04-14 一种扬声器 Ceased WO2024213152A1 (zh)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4156801A (en) * 1977-02-18 1979-05-29 Strathern Audio Limited Pattern voice coil loudspeaker with baffles touching diaphragm
CN211744726U (zh) * 2019-12-31 2020-10-23 瑞声科技(新加坡)有限公司 一种mems扬声器
CN217693709U (zh) * 2022-06-20 2022-10-28 瑞声开泰科技(武汉)有限公司 Mems扬声器
CN217935867U (zh) * 2022-06-21 2022-11-29 深圳市韶音科技有限公司 一种扬声器
CN115914951A (zh) * 2021-09-30 2023-04-04 华为技术有限公司 扬声器及电子设备

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3512379B2 (ja) * 2000-09-20 2004-03-29 日本碍子株式会社 圧電体素子、及びその製造方法
DE102015116707A1 (de) * 2015-10-01 2017-04-06 USound GmbH Flexible MEMS-Leiterplatteneinheit sowie Schallwandleranordnung
CN118018922A (zh) * 2022-11-08 2024-05-10 深圳市韶音科技有限公司 一种扬声器

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4156801A (en) * 1977-02-18 1979-05-29 Strathern Audio Limited Pattern voice coil loudspeaker with baffles touching diaphragm
CN211744726U (zh) * 2019-12-31 2020-10-23 瑞声科技(新加坡)有限公司 一种mems扬声器
CN115914951A (zh) * 2021-09-30 2023-04-04 华为技术有限公司 扬声器及电子设备
WO2023051372A1 (zh) * 2021-09-30 2023-04-06 华为技术有限公司 扬声器及电子设备
CN217693709U (zh) * 2022-06-20 2022-10-28 瑞声开泰科技(武汉)有限公司 Mems扬声器
CN217935867U (zh) * 2022-06-21 2022-11-29 深圳市韶音科技有限公司 一种扬声器

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP4496345A4 *

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