AT199904B - - Google Patents

Info

Publication number: AT199904B
Authority: AT; Austria

Application number

Other languages

Original Assignee

Geraetebau-Anstalt

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1956-04-28

Filing date

1957-04-19

Publication date

1958-10-10

1957-04-19 Application filed by Geraetebau-Anstalt filed Critical Geraetebau-Anstalt

1958-10-10 Application granted granted Critical

1958-10-10 Publication of AT199904B publication Critical patent/AT199904B/de

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)

AT199904D 1956-04-28 1957-04-19 AT199904B ( )

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE199904T		1956-04-28

Publications (1)

Publication Number	Publication Date
AT199904B true AT199904B ( )	1958-10-10

Family

ID=29556316

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT199904D AT199904B ( )	1956-04-28	1957-04-19

Country Status (1)

Country	Link
AT (1)	AT199904B ( )

1957
- 1957-04-19 AT AT199904D patent/AT199904B/de active

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