AT258664B - Device for producing and / or breaking down layers by means of electrical gas discharges - Google Patents

Device for producing and / or breaking down layers by means of electrical gas discharges

Info

Publication number
AT258664B
AT258664B AT736264A AT736264A AT258664B AT 258664 B AT258664 B AT 258664B AT 736264 A AT736264 A AT 736264A AT 736264 A AT736264 A AT 736264A AT 258664 B AT258664 B AT 258664B
Authority
AT
Austria
Prior art keywords
producing
breaking down
gas discharges
electrical gas
down layers
Prior art date
Application number
AT736264A
Other languages
German (de)
Inventor
Fritz Dr Grasenick
Original Assignee
Fritz Dr Grasenick
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fritz Dr Grasenick filed Critical Fritz Dr Grasenick
Priority to AT736264A priority Critical patent/AT258664B/en
Priority to DE1515297A priority patent/DE1515297C3/en
Priority to SE11018/65A priority patent/SE317235B/xx
Priority to GB36586/65A priority patent/GB1125444A/en
Priority to NL6511079A priority patent/NL6511079A/xx
Application granted granted Critical
Publication of AT258664B publication Critical patent/AT258664B/en
Priority to US00195792A priority patent/US3736246A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Silicon Compounds (AREA)
AT736264A 1964-08-25 1964-08-25 Device for producing and / or breaking down layers by means of electrical gas discharges AT258664B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
AT736264A AT258664B (en) 1964-08-25 1964-08-25 Device for producing and / or breaking down layers by means of electrical gas discharges
DE1515297A DE1515297C3 (en) 1964-08-25 1965-01-09 Process for producing thin layers and apparatus for carrying out the process
SE11018/65A SE317235B (en) 1964-08-25 1965-08-24
GB36586/65A GB1125444A (en) 1964-08-25 1965-08-25 Method and apparatus for the preparation of thin layers
NL6511079A NL6511079A (en) 1964-08-25 1965-08-25
US00195792A US3736246A (en) 1964-08-25 1971-11-04 Apparatus for the preparation and treatment of thin layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT736264A AT258664B (en) 1964-08-25 1964-08-25 Device for producing and / or breaking down layers by means of electrical gas discharges

Publications (1)

Publication Number Publication Date
AT258664B true AT258664B (en) 1967-12-11

Family

ID=3595287

Family Applications (1)

Application Number Title Priority Date Filing Date
AT736264A AT258664B (en) 1964-08-25 1964-08-25 Device for producing and / or breaking down layers by means of electrical gas discharges

Country Status (6)

Country Link
US (1) US3736246A (en)
AT (1) AT258664B (en)
DE (1) DE1515297C3 (en)
GB (1) GB1125444A (en)
NL (1) NL6511079A (en)
SE (1) SE317235B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3894926A (en) * 1973-02-09 1975-07-15 Lee Jau Yien In-out transporter for an enclosed chamber
US3956093A (en) * 1974-12-16 1976-05-11 Airco, Inc. Planar magnetron sputtering method and apparatus
FR2371524A1 (en) * 1976-11-18 1978-06-16 Alsthom Atlantique PROCESS FOR DEPOSITING A THIN LAYER BY DECOMPOSITION OF A GAS IN A PLASMA
US4265991A (en) 1977-12-22 1981-05-05 Canon Kabushiki Kaisha Electrophotographic photosensitive member and process for production thereof
US4151064A (en) * 1977-12-27 1979-04-24 Coulter Stork U.S.A., Inc. Apparatus for sputtering cylinders
DE3331707A1 (en) * 1983-09-02 1985-03-21 Leybold-Heraeus GmbH, 5000 Köln METHOD AND DEVICE FOR REACTIVELY SPRAYING CONNECTIONS FROM METALS AND SEMICONDUCTORS
DE3347036C2 (en) * 1983-12-24 1986-04-24 Fr. Kammerer GmbH, 7530 Pforzheim Process for coating substrates with metals

Also Published As

Publication number Publication date
DE1515297A1 (en) 1969-06-12
SE317235B (en) 1969-11-10
DE1515297C3 (en) 1979-08-02
NL6511079A (en) 1966-02-28
GB1125444A (en) 1968-08-28
DE1515297B2 (en) 1978-12-07
US3736246A (en) 1973-05-29

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