AT279213B - Druckempfindliches elektrisches Widerstandselement für Druck- und Kraftmessung - Google Patents

Druckempfindliches elektrisches Widerstandselement für Druck- und Kraftmessung

Info

Publication number
AT279213B
AT279213B AT481568A AT481568A AT279213B AT 279213 B AT279213 B AT 279213B AT 481568 A AT481568 A AT 481568A AT 481568 A AT481568 A AT 481568A AT 279213 B AT279213 B AT 279213B
Authority
AT
Austria
Prior art keywords
pressure
electrical resistance
resistance element
force measurement
sensitive electrical
Prior art date
Application number
AT481568A
Other languages
English (en)
Original Assignee
Kistler Instrumente Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kistler Instrumente Ag filed Critical Kistler Instrumente Ag
Application granted granted Critical
Publication of AT279213B publication Critical patent/AT279213B/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
AT481568A 1967-06-01 1968-05-20 Druckempfindliches elektrisches Widerstandselement für Druck- und Kraftmessung AT279213B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH778467A CH455327A (de) 1967-06-01 1967-06-01 Piezoresistives Druck- und Kraftmesselement

Publications (1)

Publication Number Publication Date
AT279213B true AT279213B (de) 1970-02-25

Family

ID=4330410

Family Applications (1)

Application Number Title Priority Date Filing Date
AT481568A AT279213B (de) 1967-06-01 1968-05-20 Druckempfindliches elektrisches Widerstandselement für Druck- und Kraftmessung

Country Status (5)

Country Link
US (1) US3568124A (de)
AT (1) AT279213B (de)
CH (1) CH455327A (de)
DE (1) DE1773365B1 (de)
GB (1) GB1195502A (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1208382A (en) * 1968-03-23 1970-10-14 Ferranti Ltd Improvements relating to semiconductor strain transducers
US3697917A (en) * 1971-08-02 1972-10-10 Gen Electric Semiconductor strain gage pressure transducer
US3758830A (en) * 1972-04-10 1973-09-11 Hewlett Packard Co Transducer formed in peripherally supported thin semiconductor web
NL7415668A (nl) * 1974-12-02 1976-06-04 Philips Nv Drukopnemer.
US4063209A (en) * 1975-05-01 1977-12-13 Kulite Semiconductor Products, Inc. Integral transducer assemblies employing built-in pressure limiting
US4093933A (en) * 1976-05-14 1978-06-06 Becton, Dickinson Electronics Company Sculptured pressure diaphragm
US4064758A (en) * 1976-10-13 1977-12-27 Micron Instruments Pressure transducer structure
US4376929A (en) * 1976-12-27 1983-03-15 Myhre Kjell E Optimized stress and strain distribution diaphragms
US4216404A (en) * 1979-04-12 1980-08-05 Kulite Semiconductor Products Inc. Housing and lead arrangements for electromechanical transducers
US4412203A (en) * 1981-09-10 1983-10-25 Kulite Semiconductor Products, Inc. Housing and interconnection assembly for a pressure transducer
WO2000008417A2 (en) * 1998-07-22 2000-02-17 Ssi Technologies, Inc. Sensor assembly with floating connection
WO2005054777A1 (en) * 2003-12-05 2005-06-16 The Commonwealth Of Australia Strain gauge
WO2007128149A1 (de) * 2006-05-04 2007-11-15 Kistler Holding Ag Piezoelektrisches messelement mit transversaleffekt und sensor, umfassend ein solches messelement
CN102023065B (zh) * 2009-09-11 2016-04-13 北京京东方光电科技有限公司 用于检测液晶面板生产中毛刷压入量的接触力测量基板
FR3016038B1 (fr) * 2013-12-31 2016-11-04 Valeo Systemes De Controle Moteur Dispositif de mesure de pression
FR3032791B1 (fr) * 2015-02-18 2018-09-07 L'essor Francais Electronique Capteur de pression miniature a membrane metallique et procede de fabrication

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3389362A (en) * 1965-10-22 1968-06-18 Electro Optical Systems Inc Low pressure transducer
US3417361A (en) * 1966-03-07 1968-12-17 Conrac Corp Semiconductive pressure transducer
US3457536A (en) * 1967-04-28 1969-07-22 Us Navy Subminiature pressure transducer

Also Published As

Publication number Publication date
US3568124A (en) 1971-03-02
DE1773365B1 (de) 1972-03-16
GB1195502A (en) 1970-06-17
CH455327A (de) 1968-06-28

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee