AT287429B - Process for the production of a support for the evaporation of substances - Google Patents

Process for the production of a support for the evaporation of substances

Info

Publication number
AT287429B
AT287429B AT572269A AT572269A AT287429B AT 287429 B AT287429 B AT 287429B AT 572269 A AT572269 A AT 572269A AT 572269 A AT572269 A AT 572269A AT 287429 B AT287429 B AT 287429B
Authority
AT
Austria
Prior art keywords
evaporation
substances
production
support
Prior art date
Application number
AT572269A
Other languages
German (de)
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Application granted granted Critical
Publication of AT287429B publication Critical patent/AT287429B/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/26Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
AT572269A 1968-07-29 1969-06-17 Process for the production of a support for the evaporation of substances AT287429B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1144468A CH495432A (en) 1968-07-29 1968-07-29 Process for the production of a support for the evaporation of substances

Publications (1)

Publication Number Publication Date
AT287429B true AT287429B (en) 1971-01-25

Family

ID=4373551

Family Applications (1)

Application Number Title Priority Date Filing Date
AT572269A AT287429B (en) 1968-07-29 1969-06-17 Process for the production of a support for the evaporation of substances

Country Status (6)

Country Link
AT (1) AT287429B (en)
CH (1) CH495432A (en)
DE (1) DE1928348A1 (en)
FR (1) FR2016830B1 (en)
GB (1) GB1215905A (en)
NL (1) NL6812072A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118941A (en) * 1974-08-08 1976-02-14 Denki Kagaku Kogyo Kk KINZOKUJOHATSUYOYOKI

Also Published As

Publication number Publication date
CH495432A (en) 1970-08-31
GB1215905A (en) 1970-12-16
NL6812072A (en) 1970-02-02
FR2016830B1 (en) 1973-03-16
FR2016830A1 (en) 1970-05-15
DE1928348A1 (en) 1970-02-12

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