AT314861B - Object table for microscopes - in particular for testing semiconductor components - Google Patents

Object table for microscopes - in particular for testing semiconductor components

Info

Publication number
AT314861B
AT314861B AT923971A AT923971A AT314861B AT 314861 B AT314861 B AT 314861B AT 923971 A AT923971 A AT 923971A AT 923971 A AT923971 A AT 923971A AT 314861 B AT314861 B AT 314861B
Authority
AT
Austria
Prior art keywords
microscopes
semiconductor components
object table
testing semiconductor
testing
Prior art date
Application number
AT923971A
Other languages
German (de)
Inventor
Reinheimer Guenter
Lisfeld Robert
Original Assignee
Leitz Ernst Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leitz Ernst Gmbh filed Critical Leitz Ernst Gmbh
Application granted granted Critical
Publication of AT314861B publication Critical patent/AT314861B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Screen Printers (AREA)
AT923971A 1970-11-10 1971-10-25 Object table for microscopes - in particular for testing semiconductor components AT314861B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE7041450 1970-11-10

Publications (1)

Publication Number Publication Date
AT314861B true AT314861B (en) 1974-04-25

Family

ID=6615596

Family Applications (1)

Application Number Title Priority Date Filing Date
AT923971A AT314861B (en) 1970-11-10 1971-10-25 Object table for microscopes - in particular for testing semiconductor components

Country Status (3)

Country Link
AT (1) AT314861B (en)
CH (1) CH532260A (en)
GB (1) GB1297880A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3508094A1 (en) * 1985-03-07 1986-09-11 Fa. Carl Zeiss, 7920 Heidenheim CROSS TABLE FOR MICROSCOPE

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2638240B1 (en) * 1988-10-21 1991-10-18 Biocom Sa PLATE FOR FAST AND MICROSCOPED INDEXED ANALYSIS OF FILTERS AND OTHER MULTI-SAMPLE CARRIERS AND METHOD OF ANALYSIS OF SUCH SAMPLES USING THE SAME

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3508094A1 (en) * 1985-03-07 1986-09-11 Fa. Carl Zeiss, 7920 Heidenheim CROSS TABLE FOR MICROSCOPE
US4702565A (en) * 1985-03-07 1987-10-27 Carl-Zeiss-Stiftung Cross-slide stage for a microscope

Also Published As

Publication number Publication date
CH532260A (en) 1972-12-31
GB1297880A (en) 1972-11-29

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee