AT372805B - METHOD FOR PRODUCING THE EMITTER ZONE OF A PLANAR TRANSISTOR - Google Patents

METHOD FOR PRODUCING THE EMITTER ZONE OF A PLANAR TRANSISTOR

Info

Publication number
AT372805B
AT372805B AT0546075A AT546075A AT372805B AT 372805 B AT372805 B AT 372805B AT 0546075 A AT0546075 A AT 0546075A AT 546075 A AT546075 A AT 546075A AT 372805 B AT372805 B AT 372805B
Authority
AT
Austria
Prior art keywords
producing
planar transistor
emitter zone
emitter
zone
Prior art date
Application number
AT0546075A
Other languages
German (de)
Other versions
ATA546075A (en
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of ATA546075A publication Critical patent/ATA546075A/en
Application granted granted Critical
Publication of AT372805B publication Critical patent/AT372805B/en

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/0112Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/01Manufacture or treatment
    • H10D64/011Manufacture or treatment of electrodes ohmically coupled to a semiconductor
    • H10D64/0111Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group IV semiconductors
    • H10D64/0113Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group IV semiconductors the conductive layers comprising highly doped semiconductor materials, e.g. polysilicon layers or amorphous silicon layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
AT0546075A 1974-08-16 1975-07-15 METHOD FOR PRODUCING THE EMITTER ZONE OF A PLANAR TRANSISTOR AT372805B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2439408A DE2439408A1 (en) 1974-08-16 1974-08-16 SEMICONDUCTOR COMPONENT

Publications (2)

Publication Number Publication Date
ATA546075A ATA546075A (en) 1983-03-15
AT372805B true AT372805B (en) 1983-11-25

Family

ID=5923395

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0546075A AT372805B (en) 1974-08-16 1975-07-15 METHOD FOR PRODUCING THE EMITTER ZONE OF A PLANAR TRANSISTOR

Country Status (9)

Country Link
JP (1) JPS5164370A (en)
AT (1) AT372805B (en)
BR (1) BR7505197A (en)
CA (1) CA1041673A (en)
DE (1) DE2439408A1 (en)
FR (1) FR2282166A1 (en)
GB (1) GB1494802A (en)
IT (1) IT1040480B (en)
ZA (1) ZA754328B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61224448A (en) * 1985-03-29 1986-10-06 Toshiba Corp Manufacture of semiconductor device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4855663A (en) * 1971-11-10 1973-08-04
JPS499186A (en) * 1972-05-11 1974-01-26

Also Published As

Publication number Publication date
BR7505197A (en) 1976-08-03
IT1040480B (en) 1979-12-20
ZA754328B (en) 1976-06-30
FR2282166B1 (en) 1980-10-17
GB1494802A (en) 1977-12-14
ATA546075A (en) 1983-03-15
DE2439408A1 (en) 1976-02-26
JPS5164370A (en) 1976-06-03
CA1041673A (en) 1978-10-31
FR2282166A1 (en) 1976-03-12

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee