AT399586B - Kapazitiver sensor sowie sensoranordnung für die erfassung und umwandlung mechanischer grössen in elektrische signale - Google Patents

Kapazitiver sensor sowie sensoranordnung für die erfassung und umwandlung mechanischer grössen in elektrische signale

Info

Publication number
AT399586B
AT399586B AT0194991A AT194991A AT399586B AT 399586 B AT399586 B AT 399586B AT 0194991 A AT0194991 A AT 0194991A AT 194991 A AT194991 A AT 194991A AT 399586 B AT399586 B AT 399586B
Authority
AT
Austria
Prior art keywords
detecting
electrical signals
sensor
converting mechanical
capacitive sensor
Prior art date
Application number
AT0194991A
Other languages
English (en)
Other versions
ATA194991A (de
Original Assignee
Austria Mikrosysteme Int
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Austria Mikrosysteme Int filed Critical Austria Mikrosysteme Int
Priority to AT0194991A priority Critical patent/AT399586B/de
Priority to DE4232258A priority patent/DE4232258C2/de
Publication of ATA194991A publication Critical patent/ATA194991A/de
Application granted granted Critical
Publication of AT399586B publication Critical patent/AT399586B/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
AT0194991A 1991-09-27 1991-09-27 Kapazitiver sensor sowie sensoranordnung für die erfassung und umwandlung mechanischer grössen in elektrische signale AT399586B (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AT0194991A AT399586B (de) 1991-09-27 1991-09-27 Kapazitiver sensor sowie sensoranordnung für die erfassung und umwandlung mechanischer grössen in elektrische signale
DE4232258A DE4232258C2 (de) 1991-09-27 1992-09-25 Kapazitiver Sensor sowie Sensoranordnung für die Erfassung und Umwandlung mechanischer Größen in elektrische Signale

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT0194991A AT399586B (de) 1991-09-27 1991-09-27 Kapazitiver sensor sowie sensoranordnung für die erfassung und umwandlung mechanischer grössen in elektrische signale

Publications (2)

Publication Number Publication Date
ATA194991A ATA194991A (de) 1994-10-15
AT399586B true AT399586B (de) 1995-06-26

Family

ID=3524530

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0194991A AT399586B (de) 1991-09-27 1991-09-27 Kapazitiver sensor sowie sensoranordnung für die erfassung und umwandlung mechanischer grössen in elektrische signale

Country Status (2)

Country Link
AT (1) AT399586B (de)
DE (1) DE4232258C2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19604983C2 (de) * 1996-02-12 2002-04-18 Johannes Josef Lappe Vorrichtung zur stereolithografischen schichtweisen Herstellung eines Objektes und Verwendung eines kapazitiven Abstandssensors zur Überwachung des Abstandes zu einer Oberfläche eines dielektrischen Gegenstandes
JPH1026532A (ja) * 1996-07-12 1998-01-27 Mitsubishi Electric Corp 半導体角速度検出装置
JP2003084008A (ja) 2001-09-10 2003-03-19 Mitsubishi Electric Corp 半導体デバイス
DE102019114996A1 (de) * 2019-06-04 2020-12-10 Northrop Grumman Litef Gmbh Beschleunigungsmessvorrichtung mit verbesserter Biasstabilität

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2365165B1 (de) * 1973-12-29 1975-03-13 C. Stiefenhofer Kg, 8000 Muenchen Vorrichtung zum kapazitiven Erfassen des Pegels einer Flüssigkeit oder eines Schüttgutes
GB2078967A (en) * 1980-06-30 1982-01-13 Bendix Corp Electrical differential pressure sensing capsule

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2717966C3 (de) * 1977-04-21 1980-07-17 Hans Ulrich Prilly Waadt Meyer (Schweiz) Längenmeßeinrichtung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2365165B1 (de) * 1973-12-29 1975-03-13 C. Stiefenhofer Kg, 8000 Muenchen Vorrichtung zum kapazitiven Erfassen des Pegels einer Flüssigkeit oder eines Schüttgutes
GB2078967A (en) * 1980-06-30 1982-01-13 Bendix Corp Electrical differential pressure sensing capsule

Also Published As

Publication number Publication date
ATA194991A (de) 1994-10-15
DE4232258C2 (de) 1996-10-31
DE4232258A1 (de) 1993-04-01

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
ELJ Ceased due to non-payment of the annual fee