AT502341A3 - Strömungssteuersystem - Google Patents

Strömungssteuersystem Download PDF

Info

Publication number
AT502341A3
AT502341A3 AT14852006A AT14852006A AT502341A3 AT 502341 A3 AT502341 A3 AT 502341A3 AT 14852006 A AT14852006 A AT 14852006A AT 14852006 A AT14852006 A AT 14852006A AT 502341 A3 AT502341 A3 AT 502341A3
Authority
AT
Austria
Prior art keywords
control system
flow control
flow
control
Prior art date
Application number
AT14852006A
Other languages
English (en)
Other versions
AT502341A2 (de
AT502341B1 (de
Original Assignee
Advance Denki Kogyo Kabushiki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advance Denki Kogyo Kabushiki filed Critical Advance Denki Kogyo Kabushiki
Publication of AT502341A2 publication Critical patent/AT502341A2/de
Publication of AT502341A3 publication Critical patent/AT502341A3/de
Application granted granted Critical
Publication of AT502341B1 publication Critical patent/AT502341B1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • F16K31/1268—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like with a plurality of the diaphragms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F16K17/04—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded
    • F16K17/06—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded with special arrangements for adjusting the opening pressure
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/01—Control of flow without auxiliary power
    • G05D7/0106—Control of flow without auxiliary power the sensing element being a flexible member, e.g. bellows, diaphragm, capsule
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/03—Control of flow with auxiliary non-electric power
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87917—Flow path with serial valves and/or closures

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Power Engineering (AREA)
  • Control Of Fluid Pressure (AREA)
  • Flow Control (AREA)
  • Fluid-Driven Valves (AREA)
AT0148506A 2005-09-09 2006-09-06 Strömungssteuersystem AT502341B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005262392 2005-09-09
JP2006187516A JP2007102754A (ja) 2005-09-09 2006-07-07 流量制御装置

Publications (3)

Publication Number Publication Date
AT502341A2 AT502341A2 (de) 2007-03-15
AT502341A3 true AT502341A3 (de) 2007-10-15
AT502341B1 AT502341B1 (de) 2009-01-15

Family

ID=37763231

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0148506A AT502341B1 (de) 2005-09-09 2006-09-06 Strömungssteuersystem

Country Status (6)

Country Link
US (1) US20070056640A1 (de)
JP (1) JP2007102754A (de)
KR (1) KR20070029552A (de)
AT (1) AT502341B1 (de)
DE (1) DE102006000451A1 (de)
TW (1) TW200723384A (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080029170A1 (en) * 2006-08-02 2008-02-07 O'reilly Edward Three-in-one valve and control system
JP5039604B2 (ja) * 2008-02-22 2012-10-03 アドバンス電気工業株式会社 流体の切換制御方法及び切換制御装置
JP5195527B2 (ja) * 2009-03-03 2013-05-08 株式会社明電舎 流量制御装置及びプロセス装置
JP2010247075A (ja) * 2009-04-16 2010-11-04 Seiko Epson Corp 圧力調整弁、液滴吐出装置
JP3168588U (ja) * 2011-04-08 2011-06-16 アドバンス電気工業株式会社 流体供給量調節装置
JP6166618B2 (ja) * 2013-08-12 2017-07-19 アドバンス電気工業株式会社 定流量弁
US9442493B2 (en) * 2013-09-16 2016-09-13 Imi Hydronic Engineering, Inc. System for regulating pressure differentials on a fluid
JP6254815B2 (ja) * 2013-10-11 2017-12-27 アドバンス電気工業株式会社 流量制御弁及びこれを用いた流量制御装置
JP2015114966A (ja) * 2013-12-13 2015-06-22 アドバンス電気工業株式会社 流量制御弁及びこれを用いた流量制御装置
JP6254863B2 (ja) * 2014-02-04 2017-12-27 アドバンス電気工業株式会社 流量制御弁及びこれを用いた流量制御装置
JP2015172813A (ja) * 2014-03-11 2015-10-01 アドバンス電気工業株式会社 流量制御弁及びこれを用いた流量制御装置
KR102874974B1 (ko) * 2020-07-13 2025-10-21 도쿄엘렉트론가부시키가이샤 액처리 장치, 액공급 기구, 액처리 방법, 및 컴퓨터 기억 매체

Family Cites Families (35)

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US1731519A (en) * 1926-07-23 1929-10-15 Bastian Blessing Co Two-stage fluid-pressure regulator
US1664909A (en) * 1926-10-21 1928-04-03 Joseph Mercadante Valve manifold
US1821189A (en) * 1927-06-03 1931-09-01 Meinken John Relief valve
US1883690A (en) * 1930-02-25 1932-10-18 Gilgenberg Paul Device for withdrawing low pressure gases from high pressure vessels
DE548650C (de) * 1930-02-26 1932-04-19 Paul Gilgenberg Vorrichtung zur Entnahme von niedrig gespanntem Gas aus Hochdruckflaschen
US2067335A (en) * 1933-06-30 1937-01-12 Howard J Pardee Gas control and feeding unit
US2067229A (en) * 1935-03-04 1937-01-12 William T Birch Relief valve
US3028877A (en) * 1957-05-02 1962-04-10 John W Thieme Pressure and flow control valve
US3194254A (en) * 1962-10-26 1965-07-13 Everson Mfg Corp Water chlorinator
US3323535A (en) * 1964-03-27 1967-06-06 Henry B Peter Adjustable flow control for metered flow of fluid
US3324922A (en) * 1964-06-10 1967-06-13 Exxon Research Engineering Co Liquid fuel flow control and metering apparatus
FR1481934A (fr) * 1965-10-22 1967-05-26 Regulateurs Francel Poste de détente et de comptage pour plusieurs lignes de gaz en parallèle
US3744751A (en) * 1971-10-21 1973-07-10 Milwaukee Valve Co Inc Check valve
US3885590A (en) * 1974-05-10 1975-05-27 Serefor Ind Inc Gas transmission and monitoring device
US4799511A (en) * 1981-10-02 1989-01-24 Naum Azimov Flow system of static parameters
US4958658A (en) * 1987-06-25 1990-09-25 Tegal Corporation Mass flow stabilized
JPH03240809A (ja) * 1990-02-19 1991-10-28 Fuji Electric Co Ltd 定流量装置
US5205322A (en) * 1992-06-17 1993-04-27 Puritan-Bennett Corporation Method and apparatus for flow control for sensor calibration
JP2794366B2 (ja) * 1992-09-14 1998-09-03 株式会社テイエルブイ 流量計
JP3291161B2 (ja) * 1995-06-12 2002-06-10 株式会社フジキン 圧力式流量制御装置
US5732744A (en) * 1996-03-08 1998-03-31 Control Systems, Inc. Method and apparatus for aligning and supporting semiconductor process gas delivery and regulation components
US5992463A (en) * 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
JP4022696B2 (ja) * 1996-11-20 2007-12-19 忠弘 大見 遮断開放器
JP3780096B2 (ja) * 1998-04-27 2006-05-31 シーケーディ株式会社 プロセスガス供給ユニット
JP3830670B2 (ja) * 1998-09-03 2006-10-04 三菱電機株式会社 半導体製造装置
JP3276936B2 (ja) * 1998-12-25 2002-04-22 アドバンス電気工業株式会社 流量コントロールバルブ
WO2000063756A1 (en) * 1999-04-16 2000-10-26 Fujikin Incorporated Parallel bypass type fluid feeding device, and method and device for controlling fluid variable type pressure system flow rate used for the device
WO2000068753A1 (en) * 1999-05-10 2000-11-16 Parker-Hannifin Corporation Fluid pressure regulator with differential pressure setting control
US6186177B1 (en) * 1999-06-23 2001-02-13 Mks Instruments, Inc. Integrated gas delivery system
JP3467438B2 (ja) * 1999-09-29 2003-11-17 アドバンス電気工業株式会社 背圧制御弁
JP4156184B2 (ja) * 2000-08-01 2008-09-24 株式会社キッツエスシーティー 集積化ガス制御装置
JP4536268B2 (ja) * 2001-01-10 2010-09-01 アドバンス電気工業株式会社 圧力制御弁
JP4022438B2 (ja) * 2001-12-20 2007-12-19 アドバンス電気工業株式会社 定流量弁及び定流量混合方法
JP2003280745A (ja) * 2002-03-25 2003-10-02 Stec Inc マスフローコントローラ
GB2423348B (en) * 2003-03-03 2007-02-14 Tokai Corp Pressure regulator

Also Published As

Publication number Publication date
KR20070029552A (ko) 2007-03-14
AT502341A2 (de) 2007-03-15
JP2007102754A (ja) 2007-04-19
TW200723384A (en) 2007-06-16
US20070056640A1 (en) 2007-03-15
DE102006000451A1 (de) 2007-03-15
AT502341B1 (de) 2009-01-15

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Legal Events

Date Code Title Description
MM01 Lapse because of not paying annual fees

Effective date: 20200906