AT521898A3 - Vorrichtung zur Messung einer Flüssigkeitsströmung bei Halbleiterherstellungsgeräten - Google Patents

Vorrichtung zur Messung einer Flüssigkeitsströmung bei Halbleiterherstellungsgeräten Download PDF

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Publication number
AT521898A3
AT521898A3 ATA51050/2019A AT510502019A AT521898A3 AT 521898 A3 AT521898 A3 AT 521898A3 AT 510502019 A AT510502019 A AT 510502019A AT 521898 A3 AT521898 A3 AT 521898A3
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Austria
Prior art keywords
measuring
sealing structure
semiconductor manufacturing
pipeline
chamber
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Application number
ATA51050/2019A
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English (en)
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AT521898B1 (de
AT521898A2 (de
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Suss Microtec Lithography Gmbh
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Publication of AT521898A2 publication Critical patent/AT521898A2/de
Publication of AT521898A3 publication Critical patent/AT521898A3/de
Application granted granted Critical
Publication of AT521898B1 publication Critical patent/AT521898B1/de

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/48—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by a capillary element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/44—Venturi tubes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Measuring Volume Flow (AREA)
  • Die Bonding (AREA)

Abstract

Die Erfindung betrifft ein Gerät (100) zur Messung eines Fluidstroms durch eine Rohrleitung (101) einer Halbleiterherstellungsvorrichtung (300), insbesondere einer Auftragmaschine oder eines Bonders, mit einer Abdichtstruktur (103), die in der Rohrleitung (101) angeordnet ist, einer Strömungsstruktur (105) mit einem stromaufwärts der Abdichtstruktur (103) angeordneten Fluideinlass (107) und einem stromabwärts der Abdichtstruktur (103) angeordneten Fluidauslass (109), einer ersten Kammer (123), die in der Rohrleitung (101) stromaufwärts der Abdichtstruktur (103) angeordnet ist, und einer zweiten Kammer (125), die in der Rohrleitung (101) stromabwärts der Abdichtstruktur (103) angeordnet ist, und einer Messvorrichtung (111), wobei die Messvorrichtung (111) zur Messung eines ersten Fluiddrucks in der ersten Kammer (123) und eines zweiten Fluiddrucks in der zweiten Kammer (125) geeignet ist, wobei die Messvorrichtung (111) zur Bestimmung des Fluidstroms auf der Grundlage des ersten und des zweiten Fluiddrucks ausgelegt ist, und wobei die Strömungsstruktur 105 mehrere Rohre (201a-201d) aufweist.
ATA51050/2019A 2018-12-03 2019-12-02 Vorrichtung zur Messung einer Flüssigkeitsströmung bei Halbleiterherstellungsgeräten AT521898B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2022125A NL2022125B1 (en) 2018-12-03 2018-12-03 Apparatus for measuring a fluid flow through a pipe of a semiconductor manufacturing device

Publications (3)

Publication Number Publication Date
AT521898A2 AT521898A2 (de) 2020-06-15
AT521898A3 true AT521898A3 (de) 2021-07-15
AT521898B1 AT521898B1 (de) 2021-10-15

Family

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Application Number Title Priority Date Filing Date
ATA51050/2019A AT521898B1 (de) 2018-12-03 2019-12-02 Vorrichtung zur Messung einer Flüssigkeitsströmung bei Halbleiterherstellungsgeräten

Country Status (8)

Country Link
US (1) US11499855B2 (de)
JP (1) JP7489770B2 (de)
KR (1) KR102871073B1 (de)
CN (1) CN111256766B (de)
AT (1) AT521898B1 (de)
DE (1) DE102019132686A1 (de)
NL (1) NL2022125B1 (de)
TW (1) TWI831881B (de)

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Publication number Priority date Publication date Assignee Title
US11448420B2 (en) 2018-01-17 2022-09-20 Johnson Controls, Inc. Air duct damper
US10768031B2 (en) * 2018-01-17 2020-09-08 Johnson Controls, Inc. Air duct airflow sensor
US12372270B2 (en) 2018-01-17 2025-07-29 Air Distribution Technologies Ip, Llc Air duct damper and installation components
US12038185B2 (en) 2018-01-17 2024-07-16 Tyco Fire & Security Gmbh Air duct assembly with field accessible ports in communication with a pressure source and pressure sensing ports in communication with a pressure sensor
CN110082027A (zh) * 2019-04-09 2019-08-02 苏州敏芯微电子技术股份有限公司 差压传感器封装结构及电子设备
NL1044073B1 (en) * 2020-07-22 2022-07-04 Van Putten Instr Bv Differential pressure flow cone meter
JP2023008823A (ja) * 2021-07-02 2023-01-19 オルガノ株式会社 純水製造装置およびその運転方法
CN115060333A (zh) * 2022-05-18 2022-09-16 浙江浙能技术研究院有限公司 一种角接取压的双多孔板平衡型流量计
US12385768B2 (en) 2022-08-31 2025-08-12 Tyco Fire & Security Gmbh Air duct airflow sensor

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US2942465A (en) * 1955-02-23 1960-06-28 Carbone Nettie Frishman Fluid flow meter
DE1773337B1 (de) * 1968-05-02 1971-04-22 Linde Ag Vorrichtung zur entnahme der druecke fuer eine different druck messeinrichtung fuer fluessigkeiten z b mit druckent nahmestellen beiderseits einer messblende
DE2723337A1 (de) * 1976-07-29 1978-02-02 Research Dev Corp Messkopf fuer gasdurchsatz-messgeraet
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EP3204734A1 (de) * 2014-10-08 2017-08-16 Dieterich Standard, Inc. Integrierte lochplattenanordnung

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Publication number Priority date Publication date Assignee Title
US2942465A (en) * 1955-02-23 1960-06-28 Carbone Nettie Frishman Fluid flow meter
DE1773337B1 (de) * 1968-05-02 1971-04-22 Linde Ag Vorrichtung zur entnahme der druecke fuer eine different druck messeinrichtung fuer fluessigkeiten z b mit druckent nahmestellen beiderseits einer messblende
DE2723337A1 (de) * 1976-07-29 1978-02-02 Research Dev Corp Messkopf fuer gasdurchsatz-messgeraet
US4884460A (en) * 1988-12-01 1989-12-05 Northgate Research, Inc. Device for sensing air flow
US5038621A (en) * 1989-11-06 1991-08-13 Bicore Monitoring Systems Variable area obstruction gas flow meter
US5979247A (en) * 1996-10-22 1999-11-09 Nihon Kohden Corporation Flow sensor having a fixed resistance and a variable resistance
US6164142A (en) * 1997-10-31 2000-12-26 Dimeff; John Air flow measurement device
US6324917B1 (en) * 1999-03-11 2001-12-04 Mark Products, Inc. Combination air pipe connector and flow measurement device
US20040083820A1 (en) * 2001-11-29 2004-05-06 Ciobanu Calin I. Multi-stage variable orifice flow obstruction sensor
DE102004019519A1 (de) * 2004-04-22 2005-11-10 Abb Patent Gmbh Durchflussmessgerät
US20070157738A1 (en) * 2006-01-09 2007-07-12 Nathaniel Hughes Flow meter with fluid lens
DE102009022742A1 (de) * 2008-05-28 2010-03-04 Smc K.K. Strömungssensor
CN203349877U (zh) * 2013-04-28 2013-12-18 张金鹏 一种用于差压式流量计的梭锥孔板节流装置
EP3204734A1 (de) * 2014-10-08 2017-08-16 Dieterich Standard, Inc. Integrierte lochplattenanordnung

Also Published As

Publication number Publication date
DE102019132686A1 (de) 2020-06-04
JP7489770B2 (ja) 2024-05-24
US11499855B2 (en) 2022-11-15
NL2022125B1 (en) 2020-06-30
AT521898B1 (de) 2021-10-15
US20200173825A1 (en) 2020-06-04
JP2020091289A (ja) 2020-06-11
TWI831881B (zh) 2024-02-11
AT521898A2 (de) 2020-06-15
CN111256766B (zh) 2024-08-02
KR20200067766A (ko) 2020-06-12
TW202107525A (zh) 2021-02-16
KR102871073B1 (ko) 2025-10-15
CN111256766A (zh) 2020-06-09

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