AT522509A3 - Verfahren zur ellipsometrischen Erfassung von Proben - Google Patents

Verfahren zur ellipsometrischen Erfassung von Proben Download PDF

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Publication number
AT522509A3
AT522509A3 ATA50390/2019A AT503902019A AT522509A3 AT 522509 A3 AT522509 A3 AT 522509A3 AT 503902019 A AT503902019 A AT 503902019A AT 522509 A3 AT522509 A3 AT 522509A3
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AT
Austria
Prior art keywords
samples
model structure
structures
ellipsometric
light beam
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ATA50390/2019A
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English (en)
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AT522509A2 (de
Inventor
Hingerl Kurt
Pierre Perin Jean
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Univ Linz
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Publication date
Application filed by Univ Linz filed Critical Univ Linz
Priority to ATA50390/2019A priority Critical patent/AT522509A3/de
Publication of AT522509A2 publication Critical patent/AT522509A2/de
Publication of AT522509A3 publication Critical patent/AT522509A3/de

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Es wird ein Verfahren zur ellipsometrischen Erfassung von Proben beschrieben, wobei die Polarisationsunterschiede zwischen dem polarisierten einfallenden Lichtstrahl und dem reflektierten oder transmittierten Lichtstrahl für örtliche Messstellen entlang einer Probenoberfläche gemessen und daraus ein Probenbild aufgrund physikalischer Zusammenhänge erstellt wird. Um räumliche Strukturen inhomogener Proben erfassen zu können, wird vorgeschlagen, dass unter Vorgabe einer räumlichen Modellstruktur aus den gemessenen Polarisationsunterschieden dieser Modellstruktur entsprechende Oberflächenstrukturen oder Strukturen von oberflächennahen Einschlüssen oder Ausscheidungen mithilfe der Maxwell- Gleichungen unter Berücksichtigung von aus der Modellstruktur abgeleiteten Randbedingungen errechnet werden.
ATA50390/2019A 2019-04-29 2019-04-29 Verfahren zur ellipsometrischen Erfassung von Proben AT522509A3 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ATA50390/2019A AT522509A3 (de) 2019-04-29 2019-04-29 Verfahren zur ellipsometrischen Erfassung von Proben

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ATA50390/2019A AT522509A3 (de) 2019-04-29 2019-04-29 Verfahren zur ellipsometrischen Erfassung von Proben

Publications (2)

Publication Number Publication Date
AT522509A2 AT522509A2 (de) 2020-11-15
AT522509A3 true AT522509A3 (de) 2022-08-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
ATA50390/2019A AT522509A3 (de) 2019-04-29 2019-04-29 Verfahren zur ellipsometrischen Erfassung von Proben

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050111006A1 (en) * 2003-07-07 2005-05-26 Zetetic Institute Apparatus and method for ellipsometric measurements with high spatial resolution
US20120176618A1 (en) * 2011-01-10 2012-07-12 Nanometrics Incorporated Mueller Matrix Spectroscopy Using Chiroptic

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050111006A1 (en) * 2003-07-07 2005-05-26 Zetetic Institute Apparatus and method for ellipsometric measurements with high spatial resolution
US20120176618A1 (en) * 2011-01-10 2012-07-12 Nanometrics Incorporated Mueller Matrix Spectroscopy Using Chiroptic

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Diebold Alain C. et al. „Perspective: Optical measurement of feature dimensions and shapes by scatterometry", APL Materials, Vol. 6, No. 5, (14.05.2018), <URL: dx.doi.org/10.1063/1.5018310> *

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Publication number Publication date
AT522509A2 (de) 2020-11-15

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