ATA113685A - Mehrfach-haltevorrichtung fuer zu behandelnde, z.b. zu reinigende und nachfolgend durch vakuumaufdampfen oder kathodenzerstaeubung zu beschichtende substrate - Google Patents

Mehrfach-haltevorrichtung fuer zu behandelnde, z.b. zu reinigende und nachfolgend durch vakuumaufdampfen oder kathodenzerstaeubung zu beschichtende substrate

Info

Publication number
ATA113685A
ATA113685A AT113685A AT113685A ATA113685A AT A113685 A ATA113685 A AT A113685A AT 113685 A AT113685 A AT 113685A AT 113685 A AT113685 A AT 113685A AT A113685 A ATA113685 A AT A113685A
Authority
AT
Austria
Prior art keywords
vacuum
cleaned
substrates
subsequently
coated
Prior art date
Application number
AT113685A
Other languages
English (en)
Other versions
AT387589B (de
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH2652/84A external-priority patent/CH659485A5/de
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Priority to AT113685A priority Critical patent/AT387589B/de
Publication of ATA113685A publication Critical patent/ATA113685A/de
Application granted granted Critical
Publication of AT387589B publication Critical patent/AT387589B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
AT113685A 1984-05-30 1985-04-16 Mehrfach-haltevorrichtung fuer zu behandelnde, z.b. zu reinigende und nachfolgend durch vakuumaufdampfen oder kathodenzerstaeubung zu beschichtende substrate AT387589B (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT113685A AT387589B (de) 1984-05-30 1985-04-16 Mehrfach-haltevorrichtung fuer zu behandelnde, z.b. zu reinigende und nachfolgend durch vakuumaufdampfen oder kathodenzerstaeubung zu beschichtende substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH2652/84A CH659485A5 (de) 1984-05-30 1984-05-30 Mehrfach-haltevorrichtung fuer zu behandelnde substrate.
AT113685A AT387589B (de) 1984-05-30 1985-04-16 Mehrfach-haltevorrichtung fuer zu behandelnde, z.b. zu reinigende und nachfolgend durch vakuumaufdampfen oder kathodenzerstaeubung zu beschichtende substrate

Publications (2)

Publication Number Publication Date
ATA113685A true ATA113685A (de) 1988-07-15
AT387589B AT387589B (de) 1989-02-10

Family

ID=25595000

Family Applications (1)

Application Number Title Priority Date Filing Date
AT113685A AT387589B (de) 1984-05-30 1985-04-16 Mehrfach-haltevorrichtung fuer zu behandelnde, z.b. zu reinigende und nachfolgend durch vakuumaufdampfen oder kathodenzerstaeubung zu beschichtende substrate

Country Status (1)

Country Link
AT (1) AT387589B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106423652A (zh) * 2016-11-25 2017-02-22 遵义市美呈美居工贸有限公司 木门喷漆用自动装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE942835C (de) * 1939-11-18 1956-07-05 Leitz Ernst Gmbh Einrichtung zum Aufbringen von UEberzugsschichten auf optisch wirksame Flaechen, insbesondere Glasflaechen
US3486001A (en) * 1968-02-05 1969-12-23 Stanley R Czarnowski Vapor deposition material support

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106423652A (zh) * 2016-11-25 2017-02-22 遵义市美呈美居工贸有限公司 木门喷漆用自动装置

Also Published As

Publication number Publication date
AT387589B (de) 1989-02-10

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee
REN Ceased due to non-payment of the annual fee