ATA122193A - METHOD AND DEVICE FOR TESTING TRANSPARENT OBJECTS - Google Patents

METHOD AND DEVICE FOR TESTING TRANSPARENT OBJECTS

Info

Publication number
ATA122193A
ATA122193A AT122193A AT122193A ATA122193A AT A122193 A ATA122193 A AT A122193A AT 122193 A AT122193 A AT 122193A AT 122193 A AT122193 A AT 122193A AT A122193 A ATA122193 A AT A122193A
Authority
AT
Austria
Prior art keywords
transparent objects
testing transparent
testing
objects
transparent
Prior art date
Application number
AT122193A
Other languages
German (de)
Other versions
AT402860B (en
Inventor
Michael Ing Indra
Karl Wallisch
Original Assignee
Oesterr Forsch Seibersdorf
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterr Forsch Seibersdorf filed Critical Oesterr Forsch Seibersdorf
Priority to AT122193A priority Critical patent/AT402860B/en
Priority to EP94890108A priority patent/EP0631129A1/en
Publication of ATA122193A publication Critical patent/ATA122193A/en
Application granted granted Critical
Publication of AT402860B publication Critical patent/AT402860B/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0242Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0278Detecting defects of the object to be tested, e.g. scratches or dust
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95623Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Geometry (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
AT122193A 1993-06-22 1993-06-22 METHOD AND DEVICE FOR TESTING TRANSPARENT OBJECTS AT402860B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AT122193A AT402860B (en) 1993-06-22 1993-06-22 METHOD AND DEVICE FOR TESTING TRANSPARENT OBJECTS
EP94890108A EP0631129A1 (en) 1993-06-22 1994-06-21 Method and device for inspecting transparent objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT122193A AT402860B (en) 1993-06-22 1993-06-22 METHOD AND DEVICE FOR TESTING TRANSPARENT OBJECTS

Publications (2)

Publication Number Publication Date
ATA122193A true ATA122193A (en) 1997-01-15
AT402860B AT402860B (en) 1997-09-25

Family

ID=3509229

Family Applications (1)

Application Number Title Priority Date Filing Date
AT122193A AT402860B (en) 1993-06-22 1993-06-22 METHOD AND DEVICE FOR TESTING TRANSPARENT OBJECTS

Country Status (2)

Country Link
EP (1) EP0631129A1 (en)
AT (1) AT402860B (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPQ262299A0 (en) * 1999-09-02 1999-09-23 Resolve Engineering Pty Ltd Detection of inclusions in glass
EP1605241A1 (en) * 2004-06-09 2005-12-14 Automation & Robotics Device for the optical test of transparent or reflective samples
FR2878973B1 (en) 2004-12-03 2007-04-20 Essilor Int DEVICE FOR AUTOMATICALLY MEASURING THE CHARACTERISTICS OF AN OPHTHALMIC LENS
DE102015002301B4 (en) 2015-02-24 2022-11-10 Johann Biener Devices for optical observation of astronomical processes and images, replacing concave mirrors with pixel digital technology
WO2016184571A2 (en) * 2015-05-20 2016-11-24 Carl Zeiss Smt Gmbh Measuring method and measuring arrangement for an imaging optical system
CN106198399B (en) * 2016-08-17 2023-10-27 远方谱色科技有限公司 Definition measuring device
DE102018213601B3 (en) 2018-08-13 2019-09-05 Eidecon Vision Solutions Gmbh Imaging device with passive transmitted light
CN112129772B (en) * 2019-06-24 2024-10-22 杭州元色科技有限公司 Defect detection system and method
CN110967314A (en) * 2019-11-19 2020-04-07 太原理工大学 A kind of liquor impurity spectral diffraction visual identification device and method
CN117214186B (en) * 2023-11-08 2024-01-26 合肥晶合集成电路股份有限公司 Sample failure analysis method, device and medium
CN118425190B (en) * 2024-06-06 2024-11-29 江苏智谨创新能源科技有限公司 BIPV photovoltaic glass film coating defect detection method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS569717A (en) * 1979-07-06 1981-01-31 Toshiba Corp Optical filter device using liquid crystal
DE3208040C2 (en) * 1982-03-05 1984-02-16 Feldmühle AG, 4000 Düsseldorf Device for testing flat glass sheets
GB2159271B (en) * 1984-04-27 1988-05-18 Nissan Motor Surface flaw detecting method and apparatus
US4772127A (en) * 1984-12-18 1988-09-20 Qc Optics, Inc. Surface inspection apparatus
JPS6211133A (en) * 1985-06-24 1987-01-20 Hitachi Electronics Eng Co Ltd Surface inspection apparatus
DE3620108A1 (en) * 1986-06-14 1987-12-17 Zeiss Carl Fa DEVICE FOR LIGHTING COMPONENT MATERIAL COMPONENTS IN THE ERROR TESTING
US4952058A (en) * 1987-04-27 1990-08-28 Hitach, Ltd. Method and apparatus for detecting abnormal patterns
JPH01257248A (en) * 1988-04-07 1989-10-13 Fujitsu Ltd Checking method of foreign substance on surface
US5083035A (en) * 1990-07-17 1992-01-21 Tencor Instruments Position location in surface scanning using interval timing between scan marks on test wafers

Also Published As

Publication number Publication date
AT402860B (en) 1997-09-25
EP0631129A1 (en) 1994-12-28

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties
ELJ Ceased due to non-payment of the annual fee