ATA139489A - Interferometeranordnung - Google Patents

Interferometeranordnung

Info

Publication number
ATA139489A
ATA139489A AT139489A AT139489A ATA139489A AT A139489 A ATA139489 A AT A139489A AT 139489 A AT139489 A AT 139489A AT 139489 A AT139489 A AT 139489A AT A139489 A ATA139489 A AT A139489A
Authority
AT
Austria
Prior art keywords
interferometer arrangement
interferometer
arrangement
Prior art date
Application number
AT139489A
Other languages
English (en)
Other versions
AT396180B (de
Original Assignee
Tabarelli Werner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tabarelli Werner filed Critical Tabarelli Werner
Priority to AT139489A priority Critical patent/AT396180B/de
Priority to DE9090109506T priority patent/DE59001953D1/de
Priority to EP90109506A priority patent/EP0401576B1/de
Priority to US07/533,295 priority patent/US5177566A/en
Priority to JP2147508A priority patent/JPH0329802A/ja
Publication of ATA139489A publication Critical patent/ATA139489A/de
Application granted granted Critical
Publication of AT396180B publication Critical patent/AT396180B/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
AT139489A 1989-06-07 1989-06-07 Interferometeranordnung AT396180B (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AT139489A AT396180B (de) 1989-06-07 1989-06-07 Interferometeranordnung
DE9090109506T DE59001953D1 (en) 1989-06-07 1990-05-18 Interferometeranordnung.
EP90109506A EP0401576B1 (de) 1989-06-07 1990-05-18 Interferometeranordnung
US07/533,295 US5177566A (en) 1989-06-07 1990-06-05 Interferometer with environment sensitive static etalon
JP2147508A JPH0329802A (ja) 1989-06-07 1990-06-07 干渉計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT139489A AT396180B (de) 1989-06-07 1989-06-07 Interferometeranordnung

Publications (2)

Publication Number Publication Date
ATA139489A true ATA139489A (de) 1992-10-15
AT396180B AT396180B (de) 1993-06-25

Family

ID=3512924

Family Applications (1)

Application Number Title Priority Date Filing Date
AT139489A AT396180B (de) 1989-06-07 1989-06-07 Interferometeranordnung

Country Status (1)

Country Link
AT (1) AT396180B (de)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1138312B (it) * 1981-05-06 1986-09-17 Cise Spa Interferometro con trasmissione in fibra ottica dell'informazione di fase utile
DE3715627A1 (de) * 1987-05-11 1988-12-08 Hommelwerke Gmbh Vorrichtung zur messung des abstandes zwischen der vorrichtung und einer messflaeche

Also Published As

Publication number Publication date
AT396180B (de) 1993-06-25

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee