ATA159194A - Reinstraum, insbesondere für soi-bondungen - Google Patents

Reinstraum, insbesondere für soi-bondungen

Info

Publication number
ATA159194A
ATA159194A AT159194A AT159194A ATA159194A AT A159194 A ATA159194 A AT A159194A AT 159194 A AT159194 A AT 159194A AT 159194 A AT159194 A AT 159194A AT A159194 A ATA159194 A AT A159194A
Authority
AT
Austria
Prior art keywords
soi bonding
dream
clean
clean dream
soi
Prior art date
Application number
AT159194A
Other languages
English (en)
Other versions
AT403859B (de
Original Assignee
Thallner Aya Maria
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thallner Aya Maria filed Critical Thallner Aya Maria
Priority to AT159194A priority Critical patent/AT403859B/de
Publication of ATA159194A publication Critical patent/ATA159194A/de
Application granted granted Critical
Publication of AT403859B publication Critical patent/AT403859B/de

Links

AT159194A 1994-08-17 1994-08-17 Reinstraum, insbesondere für soi-bondungen AT403859B (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT159194A AT403859B (de) 1994-08-17 1994-08-17 Reinstraum, insbesondere für soi-bondungen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT159194A AT403859B (de) 1994-08-17 1994-08-17 Reinstraum, insbesondere für soi-bondungen

Publications (2)

Publication Number Publication Date
ATA159194A true ATA159194A (de) 1997-10-15
AT403859B AT403859B (de) 1998-06-25

Family

ID=3516737

Family Applications (1)

Application Number Title Priority Date Filing Date
AT159194A AT403859B (de) 1994-08-17 1994-08-17 Reinstraum, insbesondere für soi-bondungen

Country Status (1)

Country Link
AT (1) AT403859B (de)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4883215A (en) * 1988-12-19 1989-11-28 Duke University Method for bubble-free bonding of silicon wafers
US4962879A (en) * 1988-12-19 1990-10-16 Duke University Method for bubble-free bonding of silicon wafers
DE3931617A1 (de) * 1989-09-22 1991-04-04 Ieg Ind Engineering Gmbh Anordnung zur reinigung und belueftung von offenen gewaessern
JPH06244389A (ja) * 1992-12-25 1994-09-02 Canon Inc 半導体基板の作製方法及び該方法により作製された半導体基板

Also Published As

Publication number Publication date
AT403859B (de) 1998-06-25

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties
ELJ Ceased due to non-payment of the annual fee