ATA159194A - Reinstraum, insbesondere für soi-bondungen - Google Patents

Reinstraum, insbesondere für soi-bondungen

Info

Publication number
ATA159194A
ATA159194A AT159194A AT159194A ATA159194A AT A159194 A ATA159194 A AT A159194A AT 159194 A AT159194 A AT 159194A AT 159194 A AT159194 A AT 159194A AT A159194 A ATA159194 A AT A159194A
Authority
AT
Austria
Prior art keywords
soi bonding
dream
clean
clean dream
soi
Prior art date
Application number
AT159194A
Other languages
English (en)
Other versions
AT403859B (de
Original Assignee
Thallner Aya Maria
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thallner Aya Maria filed Critical Thallner Aya Maria
Priority to AT159194A priority Critical patent/AT403859B/de
Publication of ATA159194A publication Critical patent/ATA159194A/de
Application granted granted Critical
Publication of AT403859B publication Critical patent/AT403859B/de

Links

AT159194A 1994-08-17 1994-08-17 Reinstraum, insbesondere für soi-bondungen AT403859B (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT159194A AT403859B (de) 1994-08-17 1994-08-17 Reinstraum, insbesondere für soi-bondungen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT159194A AT403859B (de) 1994-08-17 1994-08-17 Reinstraum, insbesondere für soi-bondungen

Publications (2)

Publication Number Publication Date
ATA159194A true ATA159194A (de) 1997-10-15
AT403859B AT403859B (de) 1998-06-25

Family

ID=3516737

Family Applications (1)

Application Number Title Priority Date Filing Date
AT159194A AT403859B (de) 1994-08-17 1994-08-17 Reinstraum, insbesondere für soi-bondungen

Country Status (1)

Country Link
AT (1) AT403859B (de)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4883215A (en) * 1988-12-19 1989-11-28 Duke University Method for bubble-free bonding of silicon wafers
US4962879A (en) * 1988-12-19 1990-10-16 Duke University Method for bubble-free bonding of silicon wafers
DE3931617A1 (de) * 1989-09-22 1991-04-04 Ieg Ind Engineering Gmbh Anordnung zur reinigung und belueftung von offenen gewaessern
JPH06244389A (ja) * 1992-12-25 1994-09-02 Canon Inc 半導体基板の作製方法及び該方法により作製された半導体基板

Also Published As

Publication number Publication date
AT403859B (de) 1998-06-25

Similar Documents

Publication Publication Date Title
TR199501546A2 (tr) Yapistirilmis camlarin cikartilmasi.
KR960016829A (ko) 초음파 세정기
DE59502728D1 (de) Passagierflugzeug
DE69517232D1 (de) Ultraschallmotor
DE69710248D1 (de) Bondverfahren für integrierte Schaltung
DK0783559T3 (da) Termoplastforligeligt skyllehjælpemiddel
NO971904D0 (no) Talestyrte tjenester
EP0681806A3 (de) Staubsauger.
DE59503710D1 (de) Reinigungsgerät
TR199501118A2 (tr) Emme-sogutucu motor.
DE69838129D1 (de) Herstellungsverfahren für gewebe
DE59507757D1 (de) Sauggerät für reinigungszwecke
DE69521035D1 (de) Reinigungsverfahren
FI950388L (fi) Puhdistusväline
TR199501665A2 (tr) Temizleme bilesimleri.
NO950741D0 (no) Kartong
DE69521419D1 (de) Handsäge
DE69524859D1 (de) Handgriff für kinderwagen
DE69525094D1 (de) Mehrzweck-integrierter Zusammenbau für Geschirrspülmaschine
DE59505696D1 (de) Ultraschallmotor
ATA159194A (de) Reinstraum, insbesondere für soi-bondungen
IT237025Y1 (it) Attrezzo per disaccoppiare
FI972124L (fi) Puhdistusmenetelmä
TR199500960A1 (tr) Nesredici matlar.
DE69510086D1 (de) Cyclohex(en)yl-propionitrile

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties
ELJ Ceased due to non-payment of the annual fee