ATA16397A - METHOD FOR ALIGNING DISC-SHAPED SEMICONDUCTOR SUBSTRATES IN PARTICULAR AND DEVICE FOR IMPLEMENTING THE METHOD - Google Patents

METHOD FOR ALIGNING DISC-SHAPED SEMICONDUCTOR SUBSTRATES IN PARTICULAR AND DEVICE FOR IMPLEMENTING THE METHOD

Info

Publication number
ATA16397A
ATA16397A AT16397A AT16397A ATA16397A AT A16397 A ATA16397 A AT A16397A AT 16397 A AT16397 A AT 16397A AT 16397 A AT16397 A AT 16397A AT A16397 A ATA16397 A AT A16397A
Authority
AT
Austria
Prior art keywords
implementing
semiconductor substrates
shaped semiconductor
aligning disc
aligning
Prior art date
Application number
AT16397A
Other languages
German (de)
Other versions
AT404523B (en
Original Assignee
Thallner Erich
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thallner Erich filed Critical Thallner Erich
Priority to AT16397A priority Critical patent/AT404523B/en
Publication of ATA16397A publication Critical patent/ATA16397A/en
Application granted granted Critical
Publication of AT404523B publication Critical patent/AT404523B/en

Links

AT16397A 1997-02-03 1997-02-03 Method for aligning semiconductor substrates, especially disc-like semiconductor substrates, and apparatus for implementing the method AT404523B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT16397A AT404523B (en) 1997-02-03 1997-02-03 Method for aligning semiconductor substrates, especially disc-like semiconductor substrates, and apparatus for implementing the method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT16397A AT404523B (en) 1997-02-03 1997-02-03 Method for aligning semiconductor substrates, especially disc-like semiconductor substrates, and apparatus for implementing the method

Publications (2)

Publication Number Publication Date
ATA16397A true ATA16397A (en) 1998-04-15
AT404523B AT404523B (en) 1998-12-28

Family

ID=3483241

Family Applications (1)

Application Number Title Priority Date Filing Date
AT16397A AT404523B (en) 1997-02-03 1997-02-03 Method for aligning semiconductor substrates, especially disc-like semiconductor substrates, and apparatus for implementing the method

Country Status (1)

Country Link
AT (1) AT404523B (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2605940C3 (en) * 1976-02-14 1979-07-26 Karl Suess Kg, Praezisionsgeraete Fuer Wissenschaft Und Industrie, 8046 Garching Mask alignment and exposure device
US4198159A (en) * 1978-12-29 1980-04-15 International Business Machines Corporation Optical alignment system in projection printing
US4344160A (en) * 1980-05-02 1982-08-10 The Perkin-Elmer Corporation Automatic wafer focusing and flattening system
AT391773B (en) * 1987-10-12 1990-11-26 Thallner Erich Device for exposing a semiconductor substrate against a radiation pattern

Also Published As

Publication number Publication date
AT404523B (en) 1998-12-28

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Effective date: 20170203