ATA184697A - Opto-elektronisches messgerät - Google Patents

Opto-elektronisches messgerät

Info

Publication number
ATA184697A
ATA184697A AT184697A AT184697A ATA184697A AT A184697 A ATA184697 A AT A184697A AT 184697 A AT184697 A AT 184697A AT 184697 A AT184697 A AT 184697A AT A184697 A ATA184697 A AT A184697A
Authority
AT
Austria
Prior art keywords
opto
measuring device
electronic measuring
electronic
measuring
Prior art date
Application number
AT184697A
Other languages
English (en)
Other versions
AT409678B (de
Original Assignee
Riegl Laser Measurement Sys
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Riegl Laser Measurement Sys filed Critical Riegl Laser Measurement Sys
Priority to AT184697A priority Critical patent/AT409678B/de
Priority to DE59806071T priority patent/DE59806071D1/de
Priority to EP98939789A priority patent/EP1012627B1/de
Priority to AU88188/98A priority patent/AU8818898A/en
Priority to AT98939789T priority patent/ATE226734T1/de
Priority to PCT/IB1998/001372 priority patent/WO1999013356A2/de
Publication of ATA184697A publication Critical patent/ATA184697A/de
Application granted granted Critical
Publication of AT409678B publication Critical patent/AT409678B/de

Links

Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
    • G08C23/00—Non-electrical signal transmission systems, e.g. optical systems
    • G08C23/04—Non-electrical signal transmission systems, e.g. optical systems using light waves, e.g. infrared

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
AT184697A 1997-09-10 1997-10-31 Opto-elektronisches messgerät AT409678B (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
AT184697A AT409678B (de) 1997-10-31 1997-10-31 Opto-elektronisches messgerät
DE59806071T DE59806071D1 (de) 1997-09-10 1998-09-04 Opto-elektronisches messverfahren und opto-elektronische messeinrightung
EP98939789A EP1012627B1 (de) 1997-09-10 1998-09-04 Opto-elektronisches messverfahren und opto-elektronische messeinrightung
AU88188/98A AU8818898A (en) 1997-09-10 1998-09-04 Optoelectronic measuring method and an optoelectronic measuring device
AT98939789T ATE226734T1 (de) 1997-09-10 1998-09-04 Opto-elektronisches messverfahren und opto- elektronische messeinrightung
PCT/IB1998/001372 WO1999013356A2 (de) 1997-09-10 1998-09-04 Opto-elektronisches messverfahren und opto-elektronische messeinrightung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT184697A AT409678B (de) 1997-10-31 1997-10-31 Opto-elektronisches messgerät

Publications (2)

Publication Number Publication Date
ATA184697A true ATA184697A (de) 2002-02-15
AT409678B AT409678B (de) 2002-10-25

Family

ID=3522288

Family Applications (1)

Application Number Title Priority Date Filing Date
AT184697A AT409678B (de) 1997-09-10 1997-10-31 Opto-elektronisches messgerät

Country Status (1)

Country Link
AT (1) AT409678B (de)

Also Published As

Publication number Publication date
AT409678B (de) 2002-10-25

Similar Documents

Publication Publication Date Title
DK1029240T3 (da) Måleapparat
DE69830082D1 (de) Messvorrichtung
EP1042667A4 (de) Messgerät
DE59808815D1 (de) Sensoreinrichtung
DE69516896D1 (de) Messgerät
DE59810102D1 (de) Sensorvorrichtung
DE59913407D1 (de) Messeinrichtung
DE59811881D1 (de) Optoelektronische Sensoreinrichtung
DE59712893D1 (de) Messeinrichtung
DE69829091D1 (de) Messungsgerät
DE59610542D1 (de) Messeinrichtung
DE59813578D1 (de) Winkelmesseinrichtung
DE69826745D1 (de) Neigungsmessvorrichtung
DE69512781D1 (de) Kraftmessvorrichtung
DE59809683D1 (de) Opto-elektronischer Sensor
DE59811015D1 (de) Ellipsometer-messvorrichtung
ITMI981928A0 (it) Dispositivo indicatore
DE59810137D1 (de) Sensoreinrichtung
NO981026D0 (no) Måleanordning
DE69730501D1 (de) Messvorrichtung
DE59804512D1 (de) Messliefergerät
DE59811913D1 (de) Wegmessvorrichtung
DE59812575D1 (de) Opto-elektronischer Sensor
DE59707977D1 (de) Sensoreinrichtung
DE59807988D1 (de) Opto-elektronische messeinrichtung

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties
MM01 Lapse because of not paying annual fees

Effective date: 20140215