ATA20192001A - DEVICE AND METHOD FOR MODIFYING A WORKPIECE SURFACE WITH THE AID OF PHOTON RADIATION - Google Patents

DEVICE AND METHOD FOR MODIFYING A WORKPIECE SURFACE WITH THE AID OF PHOTON RADIATION

Info

Publication number
ATA20192001A
ATA20192001A AT0201901A AT20192001A ATA20192001A AT A20192001 A ATA20192001 A AT A20192001A AT 0201901 A AT0201901 A AT 0201901A AT 20192001 A AT20192001 A AT 20192001A AT A20192001 A ATA20192001 A AT A20192001A
Authority
AT
Austria
Prior art keywords
modifying
aid
workpiece surface
photon radiation
photon
Prior art date
Application number
AT0201901A
Other languages
German (de)
Other versions
AT411755B (en
Original Assignee
Baeuerle Dieter Dr
Innovationsagentur Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Baeuerle Dieter Dr, Innovationsagentur Gmbh filed Critical Baeuerle Dieter Dr
Priority to AT0201901A priority Critical patent/AT411755B/en
Priority to AU2002361370A priority patent/AU2002361370A1/en
Priority to PCT/AT2002/000354 priority patent/WO2003054630A2/en
Publication of ATA20192001A publication Critical patent/ATA20192001A/en
Application granted granted Critical
Publication of AT411755B publication Critical patent/AT411755B/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
AT0201901A 2001-12-21 2001-12-21 DEVICE AND METHOD FOR MODIFYING A WORKPIECE SURFACE WITH THE AID OF PHOTON RADIATION AT411755B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AT0201901A AT411755B (en) 2001-12-21 2001-12-21 DEVICE AND METHOD FOR MODIFYING A WORKPIECE SURFACE WITH THE AID OF PHOTON RADIATION
AU2002361370A AU2002361370A1 (en) 2001-12-21 2002-12-18 Device and method for modifying the surface of a workpiece using photonic radiation
PCT/AT2002/000354 WO2003054630A2 (en) 2001-12-21 2002-12-18 Device and method for modifying the surface of a workpiece using photonic radiation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT0201901A AT411755B (en) 2001-12-21 2001-12-21 DEVICE AND METHOD FOR MODIFYING A WORKPIECE SURFACE WITH THE AID OF PHOTON RADIATION

Publications (2)

Publication Number Publication Date
ATA20192001A true ATA20192001A (en) 2003-10-15
AT411755B AT411755B (en) 2004-05-25

Family

ID=3689631

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0201901A AT411755B (en) 2001-12-21 2001-12-21 DEVICE AND METHOD FOR MODIFYING A WORKPIECE SURFACE WITH THE AID OF PHOTON RADIATION

Country Status (3)

Country Link
AT (1) AT411755B (en)
AU (1) AU2002361370A1 (en)
WO (1) WO2003054630A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2731126A1 (en) 2012-11-09 2014-05-14 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Method for bonding bare chip dies
FR3014177B1 (en) * 2013-12-04 2019-05-17 Commissariat A L'energie Atomique Et Aux Energies Alternatives SURFACE STRUCTURE FOR THERMAL SOLAR ABSORBERS AND METHOD FOR PRODUCING THE SAME.

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3321194B2 (en) * 1992-02-10 2002-09-03 株式会社クラレ Photo mask
US5723264A (en) * 1996-03-14 1998-03-03 Eastman Kodak Company Pattern transfer techniques for fabrication of lenslet arrays using specialized polyesters
EP0991959B1 (en) * 1996-02-28 2004-06-23 Kenneth C. Johnson Microlens scanner for microlithography and wide-field confocal microscopy
JP2000180605A (en) * 1998-12-17 2000-06-30 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for manufacturing refractive microlens
US6107011A (en) * 1999-01-06 2000-08-22 Creo Srl Method of high resolution optical scanning utilizing primary and secondary masks

Also Published As

Publication number Publication date
AU2002361370A8 (en) 2003-07-09
WO2003054630A3 (en) 2003-11-06
AT411755B (en) 2004-05-25
AU2002361370A1 (en) 2003-07-09
WO2003054630A2 (en) 2003-07-03
WO2003054630A8 (en) 2004-01-15

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee