ATA2092000A - Vorrichtung zur fixierung von halbleitersubstraten in einer zueinander ausgerichteten sollage - Google Patents
Vorrichtung zur fixierung von halbleitersubstraten in einer zueinander ausgerichteten sollageInfo
- Publication number
- ATA2092000A ATA2092000A AT0020900A AT2092000A ATA2092000A AT A2092000 A ATA2092000 A AT A2092000A AT 0020900 A AT0020900 A AT 0020900A AT 2092000 A AT2092000 A AT 2092000A AT A2092000 A ATA2092000 A AT A2092000A
- Authority
- AT
- Austria
- Prior art keywords
- signaled
- alignment
- semiconductor substrates
- fixing semiconductor
- fixing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
- H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
- H10P72/7606—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge clamping, e.g. clamping ring
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
- H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
- H10P72/7608—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT0020900A AT409681B (de) | 2000-02-11 | 2000-02-11 | Vorrichtung zur fixierung von halbleitersubstraten in einer zueinander ausgerichteten sollage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT0020900A AT409681B (de) | 2000-02-11 | 2000-02-11 | Vorrichtung zur fixierung von halbleitersubstraten in einer zueinander ausgerichteten sollage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ATA2092000A true ATA2092000A (de) | 2002-02-15 |
| AT409681B AT409681B (de) | 2002-10-25 |
Family
ID=3669664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT0020900A AT409681B (de) | 2000-02-11 | 2000-02-11 | Vorrichtung zur fixierung von halbleitersubstraten in einer zueinander ausgerichteten sollage |
Country Status (1)
| Country | Link |
|---|---|
| AT (1) | AT409681B (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10139586C2 (de) * | 2001-08-11 | 2003-11-27 | Erich Thallner | Plattenförmiges Justierelement |
| DE10230373B3 (de) * | 2002-07-05 | 2004-03-04 | Süss Microtec Lithography Gmbh | Vorrichtung und Verfahren zum Bonden eines Stapels aus drei oder mehr scheibenförmigen Substraten, insbesondere eines 3-Wafer-Stacks |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2567324B1 (fr) * | 1984-07-06 | 1986-11-28 | Telemecanique Electrique | Dispositif de montage, pour composant hybride a couche epaisse notamment pour module electronique |
| JPH046849A (ja) * | 1990-04-24 | 1992-01-10 | Kokusai Electric Co Ltd | ウェーハ把持装置 |
| JPH04177856A (ja) * | 1990-11-13 | 1992-06-25 | Hitachi Ltd | 試料固定装置 |
| JPH0555342A (ja) * | 1991-08-26 | 1993-03-05 | Hitachi Ltd | ウエーハチヤツクおよびウエーハ搬送装置 |
| IL102120A (en) * | 1992-06-05 | 1994-08-26 | Persys Technology Ltd | Mask, assembly and method for facilitating equipment quality control for semiconductor wafer production |
| AT405224B (de) * | 1992-06-05 | 1999-06-25 | Thallner Erich | Vorrichtung zum ausrichten, zusammenführen und festhalten von scheibenförmigen bauteilen |
| JPH07102371A (ja) * | 1993-10-01 | 1995-04-18 | Nissin Electric Co Ltd | 被処理物の真空処理方法及び装置 |
| US5513594A (en) * | 1993-10-20 | 1996-05-07 | Mcclanahan; Adolphus E. | Clamp with wafer release for semiconductor wafer processing equipment |
| JPH0963531A (ja) * | 1995-08-23 | 1997-03-07 | Nippon Steel Corp | イオン注入装置の被イオン注入部材固定装置 |
| JP3282787B2 (ja) * | 1996-07-29 | 2002-05-20 | 東京エレクトロン株式会社 | ウエハ搬送機構 |
| JP3492859B2 (ja) * | 1996-07-31 | 2004-02-03 | 京セラ株式会社 | ウエハー形状測定装置 |
| JPH10335287A (ja) * | 1997-06-05 | 1998-12-18 | Toshiba Corp | 基板処理装置 |
| JPH11116046A (ja) * | 1997-10-20 | 1999-04-27 | Mecs Corp | ウェハ搬送ロボットにおけるロボットハンド |
-
2000
- 2000-02-11 AT AT0020900A patent/AT409681B/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| AT409681B (de) | 2002-10-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE60117629D1 (de) | Vorrichtung zur Erhitzung einer Flüssigkeit | |
| DE60215517D1 (de) | Vorrichtung zum austausch von gas in einer flüssigkeit | |
| DE60211841D1 (de) | Vorrichtung zur Aktualisierung und zum Entzug der Gültigkeit einer Marke in einer Infrastruktur mit öffentlichen Schlüsseln | |
| DE60214060D1 (de) | Vorrichtung zur Bereitstellung von Wegbeschreibung | |
| DE60133474D1 (de) | Vorrichtung zur durchführung von endoluminaler fundoplication | |
| DE60112613D1 (de) | Haartrockner mit einer vorrichtung zur bereitstellung von minusionen | |
| DE60232686D1 (de) | Verfahren zur Verkleinerung des Musters in einer Photoresistschicht | |
| DE60206536D1 (de) | Vorrichtung zum Halten von Schrauben | |
| DE60213710D1 (de) | Vorrichtung zur Planarisierung von Wafern | |
| DE50100568D1 (de) | Vorrichtung zur Verstellung einer nockenwelle | |
| DE60212054D1 (de) | Generator zur Verwendung in einer mikroelektromechanischen Vorrichtung | |
| DE60211802D1 (de) | System und Vorrichtung zum Empfangen einer Reservierung | |
| DE50115174D1 (de) | Vorrichtung zur aufbereitung von transformatoren | |
| DE50114136D1 (de) | Optoelektronische Vorrichtung | |
| DE60219711D1 (de) | Beleuchtungsvorrichtung und -verfahren zur Beleuchtung einer gekrümmten Oberfläche | |
| DE10196856T1 (de) | System zum Kommunizieren mit einer synchronen Vorrichtung | |
| DE50114296D1 (de) | Optoelektronische Vorrichtung | |
| DE50110732D1 (de) | Vorrichtung zur Positionierung von Objekten | |
| DE50202623D1 (de) | Vorrichtung zur entgegennahme von banknoten | |
| DE69936679D1 (de) | Vorrichtung zur Transaktionsleitweglenkung in einer Busbrücke | |
| DE50212009D1 (de) | Vorrichtung zum Erhitzen einer Flüssigkeit | |
| DE60222765D1 (de) | Verriegelung von quellregistern in einer datenverarbeitungsvorrichtung | |
| ATA2092000A (de) | Vorrichtung zur fixierung von halbleitersubstraten in einer zueinander ausgerichteten sollage | |
| DE50303447D1 (de) | Vorrichtung zur Halterung von Klemmschellen in einer vorbestimmten Lage | |
| DE69923238D1 (de) | Tragbare vorrichtung zur handhabung einer karte |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK07 | Expiry |
Effective date: 20200211 |