ATA211991A - Aus metall bestehende dichtvorrichtung an einem hochvakuumverschluss - Google Patents

Aus metall bestehende dichtvorrichtung an einem hochvakuumverschluss

Info

Publication number
ATA211991A
ATA211991A AT211991A AT211991A ATA211991A AT A211991 A ATA211991 A AT A211991A AT 211991 A AT211991 A AT 211991A AT 211991 A AT211991 A AT 211991A AT A211991 A ATA211991 A AT A211991A
Authority
AT
Austria
Prior art keywords
sealing device
high vacuum
metal sealing
vacuum cap
cap
Prior art date
Application number
AT211991A
Other languages
English (en)
Other versions
AT396285B (de
Original Assignee
Vat Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vat Holding Ag filed Critical Vat Holding Ag
Publication of ATA211991A publication Critical patent/ATA211991A/de
Application granted granted Critical
Publication of AT396285B publication Critical patent/AT396285B/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Check Valves (AREA)
  • Details Of Valves (AREA)
AT211991A 1990-07-27 1991-10-24 Aus metall bestehende dichtvorrichtung an einem hochvakuumverschluss AT396285B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19904023845 DE4023845C1 (en) 1990-07-27 1990-07-27 Shut-off valve for semiconductor producinvacuum equipment - has valve disc pressed against valve seal by actuator and seal between disc and seat

Publications (2)

Publication Number Publication Date
ATA211991A true ATA211991A (de) 1992-11-15
AT396285B AT396285B (de) 1993-07-26

Family

ID=6411101

Family Applications (1)

Application Number Title Priority Date Filing Date
AT211991A AT396285B (de) 1990-07-27 1991-10-24 Aus metall bestehende dichtvorrichtung an einem hochvakuumverschluss

Country Status (3)

Country Link
JP (1) JPH04236866A (de)
AT (1) AT396285B (de)
DE (1) DE4023845C1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29621747U1 (de) * 1996-12-14 1997-06-12 Brendel, Richard, 91278 Pottenstein Absperrkörper
RU2184298C2 (ru) * 2000-03-27 2002-06-27 Открытое акционерное общество "Ракетно-космическая корпорация "Энергия" им. С.П. Королева" Клапан
US6609697B2 (en) 2001-09-06 2003-08-26 Robert Andreas Gsteu Vacuum control valve
DE102005004987B8 (de) 2005-02-02 2017-12-14 Vat Holding Ag Vakuumventil
EP1994319B1 (de) * 2006-03-06 2016-07-13 Pmc Polarteknik Oy Ab Saugventil
DE102007034927A1 (de) * 2007-07-24 2009-02-05 Vat Holding Ag Verfahren zur Steuerung oder Regelung eines Vakuumventils
DE102007034926A1 (de) * 2007-07-24 2009-02-05 Vat Holding Ag Verfahren zur Steuerung oder Regelung eines Vakuumventils
DE102009053814B4 (de) * 2009-11-18 2013-11-14 Knorr-Bremse Systeme für Schienenfahrzeuge GmbH Mehrstufig schaltbare vorgesteuerte Ventilanordnung
EP2420708B1 (de) * 2010-08-16 2013-06-19 Leinemann GmbH & Co. KG Schaltventil
KR101029967B1 (ko) * 2011-01-03 2011-04-19 한국뉴매틱(주) 퀵-릴리즈 진공펌프
KR101066212B1 (ko) * 2011-03-10 2011-09-20 한국뉴매틱(주) 퀵-릴리즈 진공펌프
KR102270597B1 (ko) 2014-04-02 2021-06-29 배트 홀딩 아게 진공밸브
KR102259116B1 (ko) 2014-04-02 2021-06-01 배트 홀딩 아게 진공밸브
CN106641274B (zh) * 2016-10-29 2019-09-20 上海交通大学 可抽真空的自紧密封阀门
US20200173580A1 (en) * 2017-08-16 2020-06-04 Vat Holding Ag Seal arrangement
AT16152U1 (de) * 2018-03-01 2019-02-15 Ing Andreas Zieger Dipl Dichtsystem für Ventil
JP7036756B2 (ja) * 2019-02-04 2022-03-15 Ckd株式会社 真空圧力比例制御弁
CN112728171A (zh) * 2020-12-24 2021-04-30 江苏凯奥机械制造有限公司 一种带有防回流功能的石油控制阀
CN118793623B (zh) * 2024-09-13 2024-12-10 珠海凌达压缩机有限公司 一种排气止回结构、泵体组件及压缩机

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2523152C3 (de) * 1975-05-24 1982-01-07 Leybold-Heraeus GmbH, 5000 Köln Hochvakuumventil, insbesondere für Ultrahochvakuumzwecke
CH600223A5 (de) * 1975-07-01 1978-06-15 Vat Ag
DE2947585C2 (de) * 1979-11-26 1986-01-16 VAT Aktiengesellschaft für Vakuum-Apparate-Technik, Haag Dichtvorrichtung für den Verschluß eines aus Metall bestehenden Hochvakuumventils
DE2951150C2 (de) * 1979-12-19 1984-10-18 VAT Aktiengesellschaft für Vakuum-Apparate-Technik, Haag Aus Metall bestehende Dichtvorrichtung an einem Hochvakuumverschluß
DE3126584A1 (de) * 1981-07-06 1983-03-17 Gruner, Heiko, Dr., 5712 Beinwil am See Vakuumventil mit variablem sangquerschnitt
DE3445236C1 (de) * 1984-12-12 1986-03-06 Schertler, Siegfried, Haag Dichtvorrichtung fuer den Verschluss eines aus Metall bestehenden Hochvakuumventils
DE3834913A1 (de) * 1988-10-13 1990-04-19 Hubert Boesch Dichtung fuer ventile oder flansche, insbesondere fuer die vakuumtechnik

Also Published As

Publication number Publication date
AT396285B (de) 1993-07-26
JPH04236866A (ja) 1992-08-25
DE4023845C1 (en) 1992-04-02

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee