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Priority claimed from US08/771,001external-prioritypatent/US6011120A/en
Application filed by Exxon Chemical Patents IncfiledCriticalExxon Chemical Patents Inc
Priority to AT212099ApriorityCriticalpatent/AT409963B/de
Publication of ATA212099ApublicationCriticalpatent/ATA212099A/de
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Publication of AT409963BpublicationCriticalpatent/AT409963B/de
AT212099A1996-12-231999-12-16Verfahren zur herstellung eines vernetzten polymers und dessen verwendung zur herstellung eines photoresists
AT409963B
(de)