ATA317485A - Vorrichtung fuer beschickungseinrichtungen von trockenaetzanlagen - Google Patents

Vorrichtung fuer beschickungseinrichtungen von trockenaetzanlagen

Info

Publication number
ATA317485A
ATA317485A AT0317485A AT317485A ATA317485A AT A317485 A ATA317485 A AT A317485A AT 0317485 A AT0317485 A AT 0317485A AT 317485 A AT317485 A AT 317485A AT A317485 A ATA317485 A AT A317485A
Authority
AT
Austria
Prior art keywords
loading devices
drying machines
machines
drying
loading
Prior art date
Application number
AT0317485A
Other languages
English (en)
Other versions
AT383439B (de
Inventor
Rolf Dipl Ing Dr Ing Krull
Arnulf Dipl Ing Dr Ing Dehoff
Wolfgang Dipl Ing Dr In Mattke
Original Assignee
Akad Wissenschaften Ddr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akad Wissenschaften Ddr filed Critical Akad Wissenschaften Ddr
Priority to AT0317485A priority Critical patent/AT383439B/de
Publication of ATA317485A publication Critical patent/ATA317485A/de
Application granted granted Critical
Publication of AT383439B publication Critical patent/AT383439B/de

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING, OR HOLDING
    • B25B11/00Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/002Magnetic work holders
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/04Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of grippers
    • B23Q7/043Construction of the grippers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/14Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines
    • B23Q7/1426Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices
    • B23Q7/1494Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting co-ordinated in production lines with work holders not rigidly fixed to the transport devices using grippers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3408Docking arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AT0317485A 1985-11-04 1985-11-04 Vorrichtung fuer beschickungseinrichtungen von trockenaetzanlagen AT383439B (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT0317485A AT383439B (de) 1985-11-04 1985-11-04 Vorrichtung fuer beschickungseinrichtungen von trockenaetzanlagen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT0317485A AT383439B (de) 1985-11-04 1985-11-04 Vorrichtung fuer beschickungseinrichtungen von trockenaetzanlagen

Publications (2)

Publication Number Publication Date
ATA317485A true ATA317485A (de) 1986-11-15
AT383439B AT383439B (de) 1987-07-10

Family

ID=3546488

Family Applications (1)

Application Number Title Priority Date Filing Date
AT0317485A AT383439B (de) 1985-11-04 1985-11-04 Vorrichtung fuer beschickungseinrichtungen von trockenaetzanlagen

Country Status (1)

Country Link
AT (1) AT383439B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112266988B (zh) * 2020-11-04 2024-03-12 南京工业职业技术大学 一种带磁吸夹持式随行夹靴的工作台及其加工中心

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3920233A (en) * 1974-06-11 1975-11-18 Ibm Spherical support and translation device for wafers
US3918146A (en) * 1974-08-30 1975-11-11 Gen Motors Corp Magnetic semiconductor device bonding apparatus with vacuum-biased probes
GB1559361A (en) * 1978-02-10 1980-01-16 Philips Electronic Associated Methods for manufacturing microminiature solid state devices devices manufactured by such methods and apparatus for use in such methods
DD143131A1 (de) * 1979-04-26 1980-07-30 Ute Bergner Vorrichtung zum elektrostatischen halten von werkstuecken,insbesondere halbleiterscheiben
DE3020703A1 (de) * 1980-05-31 1981-12-10 Fa. Carl Zeiss, 7920 Heidenheim Korpuskularstrahlgeraet mit einem in zwei koordinaten verstellbaren objekthalter
DE3002648A1 (de) * 1980-12-01 1981-07-30 Veb Elektromat, Ddr 8080 Dresden Vorrichtung zum positionieren und speichern von halbleiterchips

Also Published As

Publication number Publication date
AT383439B (de) 1987-07-10

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee
ELJ Ceased due to non-payment of the annual fee