ATA323081A - Drehbare probenhalterung fuer probenbuehnen von oberflaechenanalysengeraeten - Google Patents

Drehbare probenhalterung fuer probenbuehnen von oberflaechenanalysengeraeten

Info

Publication number
ATA323081A
ATA323081A AT323081A AT323081A ATA323081A AT A323081 A ATA323081 A AT A323081A AT 323081 A AT323081 A AT 323081A AT 323081 A AT323081 A AT 323081A AT A323081 A ATA323081 A AT A323081A
Authority
AT
Austria
Prior art keywords
sample
surface analyzer
rotating
sample holder
sample stage
Prior art date
Application number
AT323081A
Other languages
English (en)
Other versions
AT375788B (de
Inventor
Gerhard Ing Groboth
Josef Kaspar
Original Assignee
Oesterr Forsch Seibersdorf
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterr Forsch Seibersdorf filed Critical Oesterr Forsch Seibersdorf
Priority to AT323081A priority Critical patent/AT375788B/de
Publication of ATA323081A publication Critical patent/ATA323081A/de
Application granted granted Critical
Publication of AT375788B publication Critical patent/AT375788B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
AT323081A 1981-07-22 1981-07-22 Drehbare probenhalterung fuer probenbuehnen von oberflaechenanalysengeraeten AT375788B (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT323081A AT375788B (de) 1981-07-22 1981-07-22 Drehbare probenhalterung fuer probenbuehnen von oberflaechenanalysengeraeten

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT323081A AT375788B (de) 1981-07-22 1981-07-22 Drehbare probenhalterung fuer probenbuehnen von oberflaechenanalysengeraeten

Publications (2)

Publication Number Publication Date
ATA323081A true ATA323081A (de) 1984-01-15
AT375788B AT375788B (de) 1984-09-10

Family

ID=3547399

Family Applications (1)

Application Number Title Priority Date Filing Date
AT323081A AT375788B (de) 1981-07-22 1981-07-22 Drehbare probenhalterung fuer probenbuehnen von oberflaechenanalysengeraeten

Country Status (1)

Country Link
AT (1) AT375788B (de)

Also Published As

Publication number Publication date
AT375788B (de) 1984-09-10

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee