ATA82892A - Interferometer - Google Patents

Interferometer

Info

Publication number
ATA82892A
ATA82892A AT82892A AT82892A ATA82892A AT A82892 A ATA82892 A AT A82892A AT 82892 A AT82892 A AT 82892A AT 82892 A AT82892 A AT 82892A AT A82892 A ATA82892 A AT A82892A
Authority
AT
Austria
Prior art keywords
interferometer
Prior art date
Application number
AT82892A
Other languages
English (en)
Other versions
AT396526B (de
Original Assignee
Tabarelli Werner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tabarelli Werner filed Critical Tabarelli Werner
Priority to AT82892A priority Critical patent/AT396526B/de
Publication of ATA82892A publication Critical patent/ATA82892A/de
Priority to DE19934313076 priority patent/DE4313076C2/de
Application granted granted Critical
Publication of AT396526B publication Critical patent/AT396526B/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G01D18/002—Automatic recalibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J2001/4242—Modulated light, e.g. for synchronizing source and detector circuit

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
AT82892A 1992-04-23 1992-04-23 Interferometer AT396526B (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AT82892A AT396526B (de) 1992-04-23 1992-04-23 Interferometer
DE19934313076 DE4313076C2 (de) 1992-04-23 1993-04-21 Interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT82892A AT396526B (de) 1992-04-23 1992-04-23 Interferometer

Publications (2)

Publication Number Publication Date
ATA82892A true ATA82892A (de) 1993-01-15
AT396526B AT396526B (de) 1993-10-25

Family

ID=3500710

Family Applications (1)

Application Number Title Priority Date Filing Date
AT82892A AT396526B (de) 1992-04-23 1992-04-23 Interferometer

Country Status (2)

Country Link
AT (1) AT396526B (de)
DE (1) DE4313076C2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59406961D1 (de) * 1993-07-20 1998-10-29 Raff Helmut Dipl Betriebsw Messeinrichtung
DE10118392A1 (de) * 2001-04-13 2002-11-07 Zeiss Carl System und Verfahren zum Bestimmen einer Position oder/und Orientierung zweier Objekte relativ zueinander sowie Strahlführungsanordnung, Interferometeranordnung und Vorrichtung zum Ändern einer optischen Weglänge zum Einsatz in einem solchen System und Verfahren
EP1813962A1 (de) * 2006-01-27 2007-08-01 Polytec GmbH Messvorrichtung und Verfahren zur optischen Vermessung eines Objektes

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD126836A5 (de) * 1976-08-04 1977-08-17
US5071253A (en) * 1985-12-26 1991-12-10 Omega Tech, Inc. Optical light beam position control system
US5071251A (en) * 1989-06-12 1991-12-10 California Institute Of Technology Wavelength independent interferometer

Also Published As

Publication number Publication date
AT396526B (de) 1993-10-25
DE4313076A1 (de) 1993-10-28
DE4313076C2 (de) 1998-02-26

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Legal Events

Date Code Title Description
EIH Change in the person of patent owner
ELJ Ceased due to non-payment of the annual fee