ATE100219T1 - Hochkontrastreicher positiv-photolack-entwickler mit alkanolamin. - Google Patents

Hochkontrastreicher positiv-photolack-entwickler mit alkanolamin.

Info

Publication number: ATE100219T1
Authority: AT; Austria
Prior art keywords: photocoat; alkanolamine; developer; high contrast; contrast positive
Prior art date: 1987-04-06

Application number

AT88302542T

Other languages

English (en)

Inventor

Richard M Lazarus

Kenneth L Bell

Carla M Bauer

Original Assignee

Hoechst Celanese Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-04-06

Filing date

1988-03-23

Publication date

1994-01-15

1987-04-06 Priority claimed from US07/035,413 external-priority patent/US4808513A/en

1988-03-23 Application filed by Hoechst Celanese Corp filed Critical Hoechst Celanese Corp

1988-03-23 Priority claimed from EP19880302542 external-priority patent/EP0286272B1/de

1994-01-15 Application granted granted Critical

1994-01-15 Publication of ATE100219T1 publication Critical patent/ATE100219T1/de

Links

AT88302542T 1987-04-06 1988-03-23 Hochkontrastreicher positiv-photolack-entwickler mit alkanolamin. ATE100219T1 (de)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US07/035,413 US4808513A (en)	1987-04-06	1987-04-06	Method of developing a high contrast, positive photoresist using a developer containing alkanolamine
US16063988A	1988-03-10	1988-03-10
EP19880302542 EP0286272B1 (de)	1987-04-06	1988-03-23	Hochkontrastreicher Positiv-Photolack-Entwickler mit Alkanolamin

Publications (1)

Publication Number	Publication Date
ATE100219T1 true ATE100219T1 (de)	1994-01-15

Family

ID=27231517

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT88302542T ATE100219T1 (de)	1987-04-06	1988-03-23	Hochkontrastreicher positiv-photolack-entwickler mit alkanolamin.

Country Status (1)

Country	Link
AT (1)	ATE100219T1 (de)

1988
- 1988-03-23 AT AT88302542T patent/ATE100219T1/de not_active IP Right Cessation

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Legal Events

Date	Code	Title	Description
1994-07-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties