ATE105423T1 - Halbleiter mikroskop. - Google Patents

Halbleiter mikroskop.

Info

Publication number: ATE105423T1
Authority: AT; Austria
Prior art keywords: microscope; semiconductor; semiconductor microscope
Prior art date: 1989-02-01

Application number

AT8989850028T

Other languages

English (en)

Inventor

Bruno Jaggi

Mohamed J Deen

Branko Palcic

Original Assignee

Xillix Technologies Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-02-01

Filing date

1989-02-01

Publication date

1994-05-15

1989-02-01 Application filed by Xillix Technologies Corp filed Critical Xillix Technologies Corp

1989-02-01 Priority claimed from EP89850028A external-priority patent/EP0380904B1/de

1994-05-15 Application granted granted Critical

1994-05-15 Publication of ATE105423T1 publication Critical patent/ATE105423T1/de

Links

239000004065 semiconductor Substances 0.000 title 1

AT8989850028T 1989-02-01 1989-02-01 Halbleiter mikroskop. ATE105423T1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
EP89850028A EP0380904B1 (de)	1987-08-20	1989-02-01	Halbleiter Mikroskop

Publications (1)

Publication Number	Publication Date
ATE105423T1 true ATE105423T1 (de)	1994-05-15

Family

ID=8203258

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT8989850028T ATE105423T1 (de)	1989-02-01	1989-02-01	Halbleiter mikroskop.

Country Status (2)

Country	Link
AT (1)	ATE105423T1 (de)
DE (1)	DE68915151T2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2001281554A (ja) *	2000-03-29	2001-10-10	Nikon Corp	顕微鏡用デジタルカメラ及び該カメラを備える顕微鏡システム
DE10134328B4 (de) *	2001-07-14	2012-10-04	Leica Microsystems Cms Gmbh	Verfahren und System zur Einstellung der Bilderfassung eines Mikroskops

1989
- 1989-02-01 AT AT8989850028T patent/ATE105423T1/de not_active IP Right Cessation
- 1989-02-01 DE DE1989615151 patent/DE68915151T2/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
DE68915151D1 (de)	1994-06-09
DE68915151T2 (de)	1994-12-01

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Legal Events

Date	Code	Title	Description
1994-11-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties