ATE112652T1 - Verfahren zur einkapselung von vorrichtungen. - Google Patents
Verfahren zur einkapselung von vorrichtungen.Info
- Publication number
- ATE112652T1 ATE112652T1 AT90305044T AT90305044T ATE112652T1 AT E112652 T1 ATE112652 T1 AT E112652T1 AT 90305044 T AT90305044 T AT 90305044T AT 90305044 T AT90305044 T AT 90305044T AT E112652 T1 ATE112652 T1 AT E112652T1
- Authority
- AT
- Austria
- Prior art keywords
- encapsulation
- devices
- encapsulated
- regions
- uncovered
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/01—Manufacture or treatment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
- H10W70/68—Shapes or dispositions thereof
- H10W70/682—Shapes or dispositions thereof comprising holes having chips therein
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
- H10W70/68—Shapes or dispositions thereof
- H10W70/685—Shapes or dispositions thereof comprising multiple insulating layers
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Containers And Plastic Fillers For Packaging (AREA)
- Glass Compositions (AREA)
- Executing Machine-Instructions (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB898911607A GB8911607D0 (en) | 1989-05-19 | 1989-05-19 | A method of encapsulation for electronic devices and devices so encapsulated |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE112652T1 true ATE112652T1 (de) | 1994-10-15 |
Family
ID=10657067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT90305044T ATE112652T1 (de) | 1989-05-19 | 1990-05-10 | Verfahren zur einkapselung von vorrichtungen. |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5037779A (de) |
| EP (1) | EP0398587B1 (de) |
| AT (1) | ATE112652T1 (de) |
| DE (1) | DE69013056T2 (de) |
| GB (1) | GB8911607D0 (de) |
Families Citing this family (59)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5243756A (en) * | 1991-06-28 | 1993-09-14 | Digital Equipment Corporation | Integrated circuit protection by liquid encapsulation |
| FI913357A7 (fi) * | 1991-07-10 | 1993-01-11 | Valtion Teknillinen Tutkimuskeskus | Menetelmä ja muotti ruiskupuristetun elektroniikkamodulin valmistamiseksi |
| US5441918A (en) * | 1993-01-29 | 1995-08-15 | Lsi Logic Corporation | Method of making integrated circuit die package |
| US5477008A (en) * | 1993-03-19 | 1995-12-19 | Olin Corporation | Polymer plug for electronic packages |
| WO1994028833A1 (en) * | 1993-06-16 | 1994-12-22 | Strozer Robert Philip | Loose prophylactic sack device having improved closure |
| US5508888A (en) * | 1994-05-09 | 1996-04-16 | At&T Global Information Solutions Company | Electronic component lead protector |
| US6232152B1 (en) | 1994-05-19 | 2001-05-15 | Tessera, Inc. | Method of manufacturing a plurality of semiconductor packages and the resulting semiconductor package structures |
| US5834339A (en) | 1996-03-07 | 1998-11-10 | Tessera, Inc. | Methods for providing void-free layers for semiconductor assemblies |
| US5663106A (en) * | 1994-05-19 | 1997-09-02 | Tessera, Inc. | Method of encapsulating die and chip carrier |
| US5776796A (en) * | 1994-05-19 | 1998-07-07 | Tessera, Inc. | Method of encapsulating a semiconductor package |
| US6359335B1 (en) | 1994-05-19 | 2002-03-19 | Tessera, Inc. | Method of manufacturing a plurality of semiconductor packages and the resulting semiconductor package structures |
| US5929517A (en) | 1994-12-29 | 1999-07-27 | Tessera, Inc. | Compliant integrated circuit package and method of fabricating the same |
| US5530278A (en) * | 1995-04-24 | 1996-06-25 | Xerox Corporation | Semiconductor chip having a dam to prevent contamination of photosensitive structures thereon |
| US5627112A (en) * | 1995-11-13 | 1997-05-06 | Rockwell International Corporation | Method of making suspended microstructures |
| US5798556A (en) * | 1996-03-25 | 1998-08-25 | Motorola, Inc. | Sensor and method of fabrication |
| US6355881B1 (en) * | 1997-05-05 | 2002-03-12 | Brant P. Braeges | Means for sealing an electronic or optical component within an enclosure housing |
| US6111323A (en) * | 1997-12-30 | 2000-08-29 | International Business Machines Corporation | Reworkable thermoplastic encapsulant |
| US5998876A (en) * | 1997-12-30 | 1999-12-07 | International Business Machines Corporation | Reworkable thermoplastic hyper-branched encapsulant |
| IL123207A0 (en) * | 1998-02-06 | 1998-09-24 | Shellcase Ltd | Integrated circuit device |
| US6329224B1 (en) | 1998-04-28 | 2001-12-11 | Tessera, Inc. | Encapsulation of microelectronic assemblies |
| US6395584B2 (en) | 1998-12-22 | 2002-05-28 | Ficta Technology Inc. | Method for improving the liquid dispensing of IC packages |
| US6214640B1 (en) | 1999-02-10 | 2001-04-10 | Tessera, Inc. | Method of manufacturing a plurality of semiconductor packages |
| US6602740B1 (en) * | 1999-11-24 | 2003-08-05 | Tessera, Inc. | Encapsulation of microelectronic assemblies |
| DE19959345C1 (de) | 1999-12-09 | 2001-04-05 | Micronas Gmbh | Verfahren zum Einkapseln eines Sensors |
| IL133453A0 (en) * | 1999-12-10 | 2001-04-30 | Shellcase Ltd | Methods for producing packaged integrated circuit devices and packaged integrated circuit devices produced thereby |
| US6384472B1 (en) * | 2000-03-24 | 2002-05-07 | Siliconware Precision Industries Co., Ltd | Leadless image sensor package structure and method for making the same |
| DE10016135A1 (de) | 2000-03-31 | 2001-10-18 | Infineon Technologies Ag | Gehäusebaugruppe für ein elektronisches Bauteil |
| AU2002216352A1 (en) * | 2000-12-21 | 2002-07-01 | Shellcase Ltd. | Packaged integrated circuits and methods of producing thereof |
| US6420201B1 (en) * | 2001-01-03 | 2002-07-16 | Amkor Technology, Inc. | Method for forming a bond wire pressure sensor die package |
| US6432737B1 (en) | 2001-01-03 | 2002-08-13 | Amkor Technology, Inc. | Method for forming a flip chip pressure sensor die package |
| US6441503B1 (en) | 2001-01-03 | 2002-08-27 | Amkor Technology, Inc. | Bond wire pressure sensor die package |
| DE10109327A1 (de) * | 2001-02-27 | 2002-09-12 | Infineon Technologies Ag | Halbleiterchip und Herstellungsverfahren für ein Gehäuse |
| US6661080B1 (en) | 2001-06-28 | 2003-12-09 | Amkor Technology, Inc. | Structure for backside saw cavity protection |
| US6586824B1 (en) | 2001-07-26 | 2003-07-01 | Amkor Technology, Inc. | Reduced thickness packaged electronic device |
| US7518223B2 (en) * | 2001-08-24 | 2009-04-14 | Micron Technology, Inc. | Semiconductor devices and semiconductor device assemblies including a nonconfluent spacer layer |
| US6977440B2 (en) * | 2001-10-09 | 2005-12-20 | Tessera, Inc. | Stacked packages |
| US7335995B2 (en) * | 2001-10-09 | 2008-02-26 | Tessera, Inc. | Microelectronic assembly having array including passive elements and interconnects |
| WO2003032370A2 (en) * | 2001-10-09 | 2003-04-17 | Tessera, Inc. | Stacked packages |
| US6906403B2 (en) * | 2002-06-04 | 2005-06-14 | Micron Technology, Inc. | Sealed electronic device packages with transparent coverings |
| US7033664B2 (en) * | 2002-10-22 | 2006-04-25 | Tessera Technologies Hungary Kft | Methods for producing packaged integrated circuit devices and packaged integrated circuit devices produced thereby |
| DE10260961A1 (de) | 2002-12-20 | 2004-07-01 | Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG | Halbleitersensor mit frontseitiger Kontaktierung |
| GB0306163D0 (en) * | 2003-03-18 | 2003-04-23 | Univ Cambridge Tech | Embossing microfluidic sensors |
| US7721590B2 (en) * | 2003-03-21 | 2010-05-25 | MEAS France | Resonator sensor assembly |
| WO2005004195A2 (en) | 2003-07-03 | 2005-01-13 | Shellcase Ltd. | Method and apparatus for packaging integrated circuit devices |
| US7053425B2 (en) * | 2003-11-12 | 2006-05-30 | General Electric Company | Gas sensor device |
| TWI244174B (en) * | 2003-12-31 | 2005-11-21 | Siliconware Precision Industries Co Ltd | Photosensitive semiconductor package and method for fabricating the same |
| TWI310595B (en) * | 2004-11-03 | 2009-06-01 | Advanced Semiconductor Eng | Chip package having flat transmission surface of transparent molding compound and method for manufacturing the same |
| US7344915B2 (en) * | 2005-03-14 | 2008-03-18 | Advanced Semiconductor Engineering, Inc. | Method for manufacturing a semiconductor package with a laminated chip cavity |
| DE102005014427B4 (de) * | 2005-03-24 | 2008-05-15 | Infineon Technologies Ag | Verfahren zum Verkapseln eines Halbleiterbauelements |
| US7566853B2 (en) * | 2005-08-12 | 2009-07-28 | Tessera, Inc. | Image sensor employing a plurality of photodetector arrays and/or rear-illuminated architecture |
| US7691675B2 (en) * | 2005-10-24 | 2010-04-06 | Hewlett-Packard Development Company, L.P. | Encapsulating electrical connections |
| JP3940423B1 (ja) * | 2006-03-02 | 2007-07-04 | ソニーケミカル&インフォメーションデバイス株式会社 | 機能素子実装モジュール及びその製造方法 |
| US9142695B2 (en) * | 2013-06-03 | 2015-09-22 | Optiz, Inc. | Sensor package with exposed sensor array and method of making same |
| US9996725B2 (en) | 2016-11-03 | 2018-06-12 | Optiz, Inc. | Under screen sensor assembly |
| US11525967B1 (en) | 2018-09-28 | 2022-12-13 | Apple Inc. | Photonics integrated circuit architecture |
| US11276806B2 (en) * | 2020-01-03 | 2022-03-15 | Advanced Semiconductor Engineering, Inc. | Semiconductor device package and method for manufacturing the same |
| CN116134356A (zh) * | 2020-07-20 | 2023-05-16 | 苹果公司 | 具有受控塌陷芯片连接的光子集成电路 |
| US12111210B2 (en) | 2021-07-08 | 2024-10-08 | Apple Inc. | Light source modules for noise mitigation |
| US12111207B2 (en) | 2022-09-23 | 2024-10-08 | Apple Inc. | Despeckling in optical measurement systems |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5582455A (en) * | 1978-12-18 | 1980-06-21 | Toshiba Corp | Resin sealing type semiconductor device |
| GB2096825A (en) * | 1981-04-09 | 1982-10-20 | Sibbald Alastair | Chemical sensitive semiconductor field effect transducer |
| JPS5821358A (ja) * | 1981-07-29 | 1983-02-08 | Seiko Keiyo Kogyo Kk | 半導体装置の封止方法 |
| JPS5984448A (ja) * | 1982-11-08 | 1984-05-16 | Oki Electric Ind Co Ltd | 樹脂封止型半導体装置およびその製造方法 |
| JPS60257546A (ja) * | 1984-06-04 | 1985-12-19 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
| JPS6132535A (ja) * | 1984-07-25 | 1986-02-15 | Sanyo Electric Co Ltd | センサの製造方法 |
| JPS61271859A (ja) * | 1985-05-27 | 1986-12-02 | Oki Electric Ind Co Ltd | Eprom半導体装置 |
| JPH0724287B2 (ja) * | 1987-02-12 | 1995-03-15 | 三菱電機株式会社 | 光透過用窓を有する半導体装置とその製造方法 |
| GB8717036D0 (en) * | 1987-07-18 | 1987-08-26 | Emi Plc Thorn | Sensor arrangements |
-
1989
- 1989-05-19 GB GB898911607A patent/GB8911607D0/en active Pending
-
1990
- 1990-05-10 DE DE69013056T patent/DE69013056T2/de not_active Expired - Fee Related
- 1990-05-10 AT AT90305044T patent/ATE112652T1/de not_active IP Right Cessation
- 1990-05-10 EP EP90305044A patent/EP0398587B1/de not_active Expired - Lifetime
- 1990-05-16 US US07/524,005 patent/US5037779A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE69013056D1 (de) | 1994-11-10 |
| US5037779A (en) | 1991-08-06 |
| EP0398587A3 (de) | 1991-01-02 |
| GB8911607D0 (en) | 1989-07-05 |
| DE69013056T2 (de) | 1995-05-11 |
| EP0398587B1 (de) | 1994-10-05 |
| EP0398587A2 (de) | 1990-11-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |