ATE122404T1 - Verfahren zum verbinden eines diamantenfilms mit einem substrat. - Google Patents
Verfahren zum verbinden eines diamantenfilms mit einem substrat.Info
- Publication number
- ATE122404T1 ATE122404T1 AT91300582T AT91300582T ATE122404T1 AT E122404 T1 ATE122404 T1 AT E122404T1 AT 91300582 T AT91300582 T AT 91300582T AT 91300582 T AT91300582 T AT 91300582T AT E122404 T1 ATE122404 T1 AT E122404T1
- Authority
- AT
- Austria
- Prior art keywords
- substrate
- diamond film
- bonding
- metal layer
- cvd diamond
- Prior art date
Links
- 229910003460 diamond Inorganic materials 0.000 title abstract 4
- 239000010432 diamond Substances 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 title abstract 4
- 239000002184 metal Substances 0.000 abstract 5
- 229910052751 metal Inorganic materials 0.000 abstract 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 2
- 239000002131 composite material Substances 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 2
- 229910001316 Ag alloy Inorganic materials 0.000 abstract 1
- 229910000881 Cu alloy Inorganic materials 0.000 abstract 1
- 229910000990 Ni alloy Inorganic materials 0.000 abstract 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/0281—Deposition of sub-layers, e.g. to promote the adhesion of the main coating of metallic sub-layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB909001833A GB9001833D0 (en) | 1990-01-26 | 1990-01-26 | Method of bonding a diamond film to a substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE122404T1 true ATE122404T1 (de) | 1995-05-15 |
Family
ID=10669965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT91300582T ATE122404T1 (de) | 1990-01-26 | 1991-01-25 | Verfahren zum verbinden eines diamantenfilms mit einem substrat. |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0440384B1 (de) |
| AT (1) | ATE122404T1 (de) |
| DE (1) | DE69109503T2 (de) |
| GB (1) | GB9001833D0 (de) |
| ZA (1) | ZA91487B (de) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2076086A1 (en) * | 1991-09-27 | 1993-03-28 | Randall J. Kehl | Method for obtaining thick, adherent diamond coatings using metal interface screens |
| EP0589641A3 (en) * | 1992-09-24 | 1995-09-27 | Gen Electric | Method of producing wear resistant articles |
| JP3728467B2 (ja) * | 1995-08-04 | 2005-12-21 | 株式会社神戸製鋼所 | 単結晶ダイヤモンド膜の形成方法 |
| JPH0948694A (ja) * | 1995-08-04 | 1997-02-18 | Kobe Steel Ltd | 単結晶ダイヤモンド膜の形成方法 |
| US6962000B2 (en) * | 2001-07-11 | 2005-11-08 | Koninklijke Philips Electronics N.V. | Cutting member with dual profile tip |
| US7419702B2 (en) * | 2004-03-31 | 2008-09-02 | Tokyo Electron Limited | Method for processing a substrate |
| EP1802947A1 (de) | 2004-10-01 | 2007-07-04 | BAE Systems PLC | Radiator mit hoher emissivität |
| DE602006009646D1 (de) | 2006-04-20 | 2009-11-19 | Capital Formation Inc | Beschichtung für raue umgebungen und sensoren unter verwendung derselben |
| WO2015023356A1 (en) * | 2013-08-12 | 2015-02-19 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Thin diamond film bonding providing low vapor pressure at high temperature |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE453474B (sv) * | 1984-06-27 | 1988-02-08 | Santrade Ltd | Kompoundkropp belagd med skikt av polykristallin diamant |
| JPS622133A (ja) * | 1985-06-28 | 1987-01-08 | Shin Etsu Chem Co Ltd | ミクロト−ム用ダイヤモンドコ−テイング刃およびその製造方法 |
| JPH01153228A (ja) * | 1987-12-10 | 1989-06-15 | Asahi Daiyamondo Kogyo Kk | 気相合成ダイヤモンド工具の製造法 |
-
1990
- 1990-01-26 GB GB909001833A patent/GB9001833D0/en active Pending
-
1991
- 1991-01-23 ZA ZA91487A patent/ZA91487B/xx unknown
- 1991-01-25 AT AT91300582T patent/ATE122404T1/de not_active IP Right Cessation
- 1991-01-25 EP EP91300582A patent/EP0440384B1/de not_active Expired - Lifetime
- 1991-01-25 DE DE69109503T patent/DE69109503T2/de not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| ZA91487B (en) | 1991-11-27 |
| DE69109503D1 (de) | 1995-06-14 |
| GB9001833D0 (en) | 1990-03-28 |
| EP0440384A1 (de) | 1991-08-07 |
| DE69109503T2 (de) | 1995-11-09 |
| EP0440384B1 (de) | 1995-05-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |