ATE125392T1 - Gerät zur plasmabehandlung eines durchgehenden materials. - Google Patents
Gerät zur plasmabehandlung eines durchgehenden materials.Info
- Publication number
- ATE125392T1 ATE125392T1 AT91909165T AT91909165T ATE125392T1 AT E125392 T1 ATE125392 T1 AT E125392T1 AT 91909165 T AT91909165 T AT 91909165T AT 91909165 T AT91909165 T AT 91909165T AT E125392 T1 ATE125392 T1 AT E125392T1
- Authority
- AT
- Austria
- Prior art keywords
- entrance
- exit
- chamber
- pct
- plasma
- Prior art date
Links
- 239000000463 material Substances 0.000 title abstract 2
- 230000001052 transient effect Effects 0.000 title 1
- 239000000109 continuous material Substances 0.000 abstract 4
- 238000007789 sealing Methods 0.000 abstract 3
- 238000007599 discharging Methods 0.000 abstract 1
- 238000009832 plasma treatment Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C1/00—Photosensitive materials
- G03C1/76—Photosensitive materials characterised by the base or auxiliary layers
- G03C1/91—Photosensitive materials characterised by the base or auxiliary layers characterised by subbing layers or subbing means
- G03C1/915—Photosensitive materials characterised by the base or auxiliary layers characterised by subbing layers or subbing means using mechanical or physical means therefor, e.g. corona
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Mechanical Engineering (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AUPK006690 | 1990-05-10 | ||
| AUPK283190 | 1990-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE125392T1 true ATE125392T1 (de) | 1995-08-15 |
Family
ID=25643865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT91909165T ATE125392T1 (de) | 1990-05-10 | 1991-05-09 | Gerät zur plasmabehandlung eines durchgehenden materials. |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US5314539A (de) |
| EP (1) | EP0527859B1 (de) |
| JP (1) | JPH05507383A (de) |
| AT (1) | ATE125392T1 (de) |
| WO (1) | WO1991017561A1 (de) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5224441A (en) * | 1991-09-27 | 1993-07-06 | The Boc Group, Inc. | Apparatus for rapid plasma treatments and method |
| DE4308632B4 (de) * | 1993-03-18 | 2007-10-04 | Applied Materials Gmbh & Co. Kg | Verfahren und Vorrichtung zum Nachbehandeln von Aluminium-beschichteten Kunststoff-Folien |
| US5526546A (en) * | 1993-04-23 | 1996-06-18 | Revlon Consumer Products Corporation | Surface treated applicators having bristles coated with an etched layer ions produced by an ion-producing gas plasma |
| FR2704558B1 (fr) * | 1993-04-29 | 1995-06-23 | Air Liquide | Procede et dispositif pour creer un depot d'oxyde de silicium sur un substrat solide en defilement. |
| JP3315238B2 (ja) * | 1994-02-10 | 2002-08-19 | 富士写真フイルム株式会社 | 感光材料用支持体の真空処理用シール方法及び装置 |
| US6116185A (en) * | 1996-05-01 | 2000-09-12 | Rietzel; James G. | Gas injector for plasma enhanced chemical vapor deposition |
| EP0884641A1 (de) * | 1997-06-12 | 1998-12-16 | Agfa-Gevaert N.V. | Apparat zur Nassbehandlung von photographischem Blattmaterial |
| EP0995218A1 (de) * | 1997-07-14 | 2000-04-26 | The University Of Tennessee Research Corporation | Vorrichtungen und verfahren zur plasmabehandlung |
| US6083355A (en) * | 1997-07-14 | 2000-07-04 | The University Of Tennessee Research Corporation | Electrodes for plasma treater systems |
| US6106659A (en) * | 1997-07-14 | 2000-08-22 | The University Of Tennessee Research Corporation | Treater systems and methods for generating moderate-to-high-pressure plasma discharges for treating materials and related treated materials |
| US6054018A (en) * | 1998-08-28 | 2000-04-25 | Wisconsin Alumni Research Foundation | Outside chamber sealing roller system for surface treatment gas reactors |
| EP0989455A1 (de) * | 1998-09-22 | 2000-03-29 | Agfa-Gevaert N.V. | Gerät zur kontinuierlichen Vakuumbehandlung von Blattmaterial |
| US6250222B1 (en) * | 1998-09-22 | 2001-06-26 | Agfa-Gevaert | Apparatus for the continuous treatment of sheet material under reduced pressure |
| DK1004369T4 (da) † | 1998-11-26 | 2009-03-09 | Cockerill Rech & Dev | Forseglingssluse til et vakuumkammer |
| US6082292A (en) * | 1999-01-05 | 2000-07-04 | Wisconsin Alumni Research Foundation | Sealing roller system for surface treatment gas reactors |
| US6528947B1 (en) | 1999-12-06 | 2003-03-04 | E. I. Du Pont De Nemours And Company | Hollow cathode array for plasma generation |
| JP4841023B2 (ja) * | 2000-02-10 | 2011-12-21 | 株式会社半導体エネルギー研究所 | 成膜装置及び太陽電池の作製方法 |
| US6603121B2 (en) * | 2000-05-19 | 2003-08-05 | Eastman Kodak Company | High-efficiency plasma treatment of paper |
| US6476342B1 (en) | 2000-11-24 | 2002-11-05 | Creo Srl | Method of surface preparation using plasma in air |
| US20040055698A1 (en) * | 2002-09-24 | 2004-03-25 | Tran Hai Q. | Method of improving lamination quality by treating media with plasma |
| US20050008919A1 (en) * | 2003-05-05 | 2005-01-13 | Extrand Charles W. | Lyophilic fuel cell component |
| AU2003234058A1 (en) * | 2003-05-13 | 2004-12-03 | Stazione Sperimentale Carta Cartoni E Paste Per Carte | Method for plasma treating paper and cardboards |
| SE0401834D0 (sv) * | 2004-07-09 | 2004-07-09 | Gambro Lundia Ab | A continuous method for production of a regioselective porous hollow fibre membrane |
| JP4977754B2 (ja) | 2006-05-02 | 2012-07-18 | ダウ・コーニング・アイルランド・リミテッド | ウェブシール装置 |
| US20100139557A1 (en) * | 2006-10-13 | 2010-06-10 | Solopower, Inc. | Reactor to form solar cell absorbers in roll-to-roll fashion |
| DK2210321T3 (en) * | 2007-11-08 | 2015-08-31 | Enercon Ind Corp | Atmospheric processing unit with rolling limited discharge chamber |
| JP5315228B2 (ja) * | 2009-12-25 | 2013-10-16 | 株式会社半導体エネルギー研究所 | 成膜装置及び太陽電池の作製方法 |
| TWI477646B (zh) * | 2010-08-09 | 2015-03-21 | Hon Hai Prec Ind Co Ltd | 化學氣相沉積設備 |
| CN102390069B (zh) * | 2011-10-28 | 2014-06-04 | 南京林业大学 | 木质薄板常压低温等离子体连续处理装置 |
| JP6451129B2 (ja) * | 2013-09-17 | 2019-01-16 | 株式会社リコー | プラズマ処理装置、印刷装置、印刷システムおよび印刷物の製造方法 |
| BR112019008332B1 (pt) * | 2016-10-27 | 2023-10-10 | Coating Plasma Innovation | Instalação de tratamento de superfície de um substrato móvel em uma atmosfera controlada e método para definição da dimensão da mesma |
| CN116445880B (zh) * | 2022-01-10 | 2025-09-05 | 友威科技股份有限公司 | 一种独立式连续工艺系统 |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL245939A (de) * | 1957-12-21 | |||
| BE599444A (de) * | 1960-02-03 | |||
| US3205086A (en) * | 1960-02-04 | 1965-09-07 | Continental Can Co | Method and apparatus for continuous vacuum metal coating of metal strip |
| DE1164643B (de) * | 1962-03-02 | 1964-03-05 | Dornbusch & Co | Verfahren und Vorrichtung zum Heisspraegen von Warenbahnen, insbesondere von thermoplastischen Kunststoffolien |
| US3288638A (en) * | 1962-10-09 | 1966-11-29 | Martin Marietta Corp | Method and apparatus for the treatment of plastic materials |
| US3334908A (en) * | 1964-04-13 | 1967-08-08 | Pennsalt Chemicals Corp | Rotary seal |
| US3475307A (en) * | 1965-02-04 | 1969-10-28 | Continental Can Co | Condensation of monomer vapors to increase polymerization rates in a glow discharge |
| US3384900A (en) * | 1967-01-03 | 1968-05-21 | Gen Electric | Electron beam recording system with recording medium and pressure wheel as continuous vacuum seal |
| US3526583A (en) * | 1967-03-24 | 1970-09-01 | Eastman Kodak Co | Treatment for increasing the hydrophilicity of materials |
| US3502499A (en) * | 1967-05-22 | 1970-03-24 | Texas Instruments Inc | Cladding method and apparatus |
| US3761299A (en) * | 1970-10-13 | 1973-09-25 | Eastman Kodak Co | Treating polymeric surfaces |
| US3870610A (en) * | 1972-03-09 | 1975-03-11 | Grace W R & Co | Cold plasma treatment of materials |
| US3837866A (en) * | 1972-04-24 | 1974-09-24 | Corning Glass Works | Low melting vanadate glasses |
| GB1444096A (en) * | 1973-03-02 | 1976-07-28 | Ici Ltd | Seal |
| US4026787A (en) * | 1974-01-25 | 1977-05-31 | Coulter Information Systems, Inc. | Thin film deposition apparatus using segmented target means |
| US3944709A (en) * | 1974-05-13 | 1976-03-16 | Polaroid Corporation | Surface modification by electrical discharge in a mixture of gases |
| US4048953A (en) * | 1974-06-19 | 1977-09-20 | Pfizer Inc. | Apparatus for vapor depositing pyrolytic carbon on porous sheets of carbon material |
| US3952568A (en) * | 1974-09-04 | 1976-04-27 | The Electricity Council | Vacuum processing of rod, wire or strip material |
| US4065137A (en) * | 1976-08-24 | 1977-12-27 | Armstrong Cork Company | Plasma-process vacuum seal |
| US4179820A (en) * | 1977-04-14 | 1979-12-25 | Georgia-Pacific Corporation | Apparatus for drying veneer |
| JPS6016614B2 (ja) * | 1977-04-18 | 1985-04-26 | 富士写真フイルム株式会社 | 写真感光材料支持体用ポリエステルフィルムの表面処理方法 |
| JPS5718737A (en) * | 1980-06-21 | 1982-01-30 | Shin Etsu Chem Co Ltd | Apparatus for continuous plasma treatment |
| GB2084264B (en) * | 1980-07-30 | 1984-04-26 | Hitachi Ltd | Continuous vacuum treating apparatus |
| JPS5730733A (en) * | 1980-07-30 | 1982-02-19 | Shin Etsu Chem Co Ltd | Device for continuous plasma treatment |
| DE3134615A1 (de) * | 1981-09-01 | 1983-03-10 | Agfa-Gevaert Ag, 5090 Leverkusen | Verfahren und vorrichtung zur vorbehandlung von fotografischen traegermaterialien |
| JPS58111127A (ja) * | 1981-12-24 | 1983-07-02 | Ulvac Corp | 耐摩耗性磁気記録体の製造法 |
| JPS6011150B2 (ja) * | 1982-01-06 | 1985-03-23 | 株式会社山東鉄工所 | 布帛の低温プラズマ連続処理装置 |
| US4457145A (en) * | 1983-03-29 | 1984-07-03 | Sando Iron Works Co., Ltd. | Apparatus for treating a textile product continuously with the use of low-temperature plasma |
| US5192585A (en) * | 1987-05-20 | 1993-03-09 | Kawasaki Steel Corp. | Differential pressure sealing apparatus and method |
| KR910005158B1 (ko) * | 1987-06-05 | 1991-07-23 | 가부시기가이샤 히다찌세이사꾸쇼 | 진공연속 처리장치 |
| US4763601A (en) * | 1987-09-02 | 1988-08-16 | Nippon Steel Corporation | Continuous composite coating apparatus for coating strip |
| KR920003591B1 (ko) * | 1988-04-11 | 1992-05-04 | 미쯔비시주우고오교오 가부시기가이샤 | 연속진공증착장치 |
-
1991
- 1991-05-09 US US07/946,490 patent/US5314539A/en not_active Expired - Fee Related
- 1991-05-09 JP JP91509039A patent/JPH05507383A/ja active Pending
- 1991-05-09 EP EP91909165A patent/EP0527859B1/de not_active Expired - Lifetime
- 1991-05-09 WO PCT/US1991/003229 patent/WO1991017561A1/en not_active Ceased
- 1991-05-09 AT AT91909165T patent/ATE125392T1/de active
Also Published As
| Publication number | Publication date |
|---|---|
| EP0527859B1 (de) | 1995-07-19 |
| JPH05507383A (ja) | 1993-10-21 |
| EP0527859A1 (de) | 1993-02-24 |
| US5314539A (en) | 1994-05-24 |
| WO1991017561A1 (en) | 1991-11-14 |
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