ATE13116T1 - Isolations- und temperaturkompensationssystem fuer kristallresonatoren. - Google Patents

Isolations- und temperaturkompensationssystem fuer kristallresonatoren.

Info

Publication number
ATE13116T1
ATE13116T1 AT81100277T AT81100277T ATE13116T1 AT E13116 T1 ATE13116 T1 AT E13116T1 AT 81100277 T AT81100277 T AT 81100277T AT 81100277 T AT81100277 T AT 81100277T AT E13116 T1 ATE13116 T1 AT E13116T1
Authority
AT
Austria
Prior art keywords
crystal resonators
stress
conjunction
isolation
crystals
Prior art date
Application number
AT81100277T
Other languages
English (en)
Inventor
Jerome M Paros
Original Assignee
Paroscientific Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Paroscientific Inc filed Critical Paroscientific Inc
Application granted granted Critical
Publication of ATE13116T1 publication Critical patent/ATE13116T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/08—Holders with means for regulating temperature

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT81100277T 1980-01-28 1981-01-15 Isolations- und temperaturkompensationssystem fuer kristallresonatoren. ATE13116T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/115,731 US4406966A (en) 1980-01-28 1980-01-28 Isolating and temperature compensating system for resonators
EP81100277A EP0033097B1 (de) 1980-01-28 1981-01-15 Isolations- und Temperaturkompensationssystem für Kristallresonatoren

Publications (1)

Publication Number Publication Date
ATE13116T1 true ATE13116T1 (de) 1985-05-15

Family

ID=22363096

Family Applications (1)

Application Number Title Priority Date Filing Date
AT81100277T ATE13116T1 (de) 1980-01-28 1981-01-15 Isolations- und temperaturkompensationssystem fuer kristallresonatoren.

Country Status (6)

Country Link
US (1) US4406966A (de)
EP (1) EP0033097B1 (de)
JP (1) JPS56119519A (de)
AT (1) ATE13116T1 (de)
CA (1) CA1148643A (de)
DE (1) DE3170224D1 (de)

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JPS6010122A (ja) * 1983-06-30 1985-01-19 Shinko Denshi Kk 荷重変換機構
GB8325861D0 (en) * 1983-09-28 1983-11-02 Syrinx Presicion Instr Ltd Force transducer
JPS60225037A (ja) * 1984-04-24 1985-11-09 Toyo Baldwin:Kk 鼓形状の受歪体を用いた密封型ロードセル
US4622484A (en) * 1984-06-21 1986-11-11 Nec Corporation Piezoelectric relay with a piezoelectric longitudinal effect actuator
CH670310A5 (de) * 1985-04-17 1989-05-31 Kristal Instr Ag
US4651569A (en) * 1985-05-01 1987-03-24 Paroscientific, Inc. Torque tube digital differential pressure sensor
DE3776911D1 (de) * 1986-07-01 1992-04-02 Sensor Int Vibrationskraftsensor.
GB2196120A (en) * 1986-10-10 1988-04-20 Gen Electric Co Plc A resonant element force sensor in a housing affording temperature and pressure compensation
EP0381712B1 (de) * 1988-07-18 1992-03-04 Wirth Gallo Messtechnik Ag Massen- und kraftmesser mit elastischer untersetzung
US5113108A (en) * 1988-11-04 1992-05-12 Nec Corporation Hermetically sealed electrostrictive actuator
JP2864554B2 (ja) * 1989-09-05 1999-03-03 ブラザー工業株式会社 圧電素子の運動変換装置における圧電素子の組付方法
FR2674627B1 (fr) * 1991-03-27 1994-04-29 Commissariat Energie Atomique Capteur de pression resonant.
US5313023A (en) * 1992-04-03 1994-05-17 Weigh-Tronix, Inc. Load cell
US5391844A (en) * 1992-04-03 1995-02-21 Weigh-Tronix Inc Load cell
US5336854A (en) * 1992-04-03 1994-08-09 Weigh-Tronix, Inc. Electronic force sensing load cell
US5442146A (en) * 1992-04-03 1995-08-15 Weigh-Tronix, Inc. Counting scale and load cell assembly therefor
US5604336A (en) * 1995-03-08 1997-02-18 Weigh-Tronix, Inc. Load cell with composite end beams having portions with different elastic modulus
US6450032B1 (en) 2000-03-14 2002-09-17 Pressure Systems, Inc. Vibrating beam force sensor having improved producibility
US6497152B2 (en) 2001-02-23 2002-12-24 Paroscientific, Inc. Method for eliminating output discontinuities in digital pressure transducers and digital pressure transducer employing same
US6595054B2 (en) 2001-05-14 2003-07-22 Paroscientific, Inc. Digital angular rate and acceleration sensor
US6984925B2 (en) * 2002-05-28 2006-01-10 Delaware Capital Formation, Inc Low acceleration sensitivity mounting structures for crystal resonators
US20040000844A1 (en) * 2002-06-28 2004-01-01 Morley Peter E. Low profile temperature-compensated low-stress crystal mount structure
US20040016307A1 (en) * 2002-07-24 2004-01-29 Albert William C. Vibration isolation mechanism for a vibrating beam force sensor
US7226277B2 (en) * 2004-12-22 2007-06-05 Pratt & Whitney Canada Corp. Pump and method
JP2007057395A (ja) * 2005-08-24 2007-03-08 Epson Toyocom Corp 圧力センサ
JP3969442B2 (ja) * 2005-09-26 2007-09-05 エプソントヨコム株式会社 圧力センサ
DE102008007774A1 (de) * 2008-02-06 2009-08-13 Robert Bosch Gmbh Biegewandler zum Erzeugen von elektrischer Energie aus mechanischen Verformungen
JP2010019826A (ja) * 2008-03-25 2010-01-28 Epson Toyocom Corp 圧力センサ
JP2009258085A (ja) * 2008-03-25 2009-11-05 Epson Toyocom Corp 圧力センサおよびその製造方法
JP2010019828A (ja) * 2008-06-11 2010-01-28 Epson Toyocom Corp 圧力センサー用ダイアフラムおよび圧力センサー
JP2010019827A (ja) * 2008-06-11 2010-01-28 Epson Toyocom Corp 圧力センサー
JP2010019829A (ja) * 2008-06-11 2010-01-28 Epson Toyocom Corp 圧力センサー
JP5187529B2 (ja) * 2008-07-22 2013-04-24 セイコーエプソン株式会社 圧力センサー
US8616054B2 (en) * 2008-08-06 2013-12-31 Quartz Seismic Sensors, Inc. High-resolution digital seismic and gravity sensor and method
JP4756394B2 (ja) * 2009-03-04 2011-08-24 セイコーエプソン株式会社 圧力センサー
JP2012073163A (ja) 2010-09-29 2012-04-12 Seiko Epson Corp 圧力センサー
JP6188020B2 (ja) * 2013-06-21 2017-08-30 国立大学法人名古屋大学 水晶振動子を用いた荷重センサ
CN112311352B (zh) * 2020-11-09 2024-05-03 中国电子科技集团公司第二十六研究所 一种多自由度缓冲石英芯片
CN117232694A (zh) * 2023-08-02 2023-12-15 嘉庚创新实验室 一种石英谐振压力传感器
CN118409108B (zh) * 2024-05-09 2024-11-22 西安交通大学 应力自隔离的石英谐振加速度计芯片及石英谐振加速度计

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US3045491A (en) * 1958-12-16 1962-07-24 Robert W Hart Dynamic pressure sensitive detector
US3020423A (en) * 1959-07-08 1962-02-06 Eduard A Gerber Crystal frequency stabilization
US3247711A (en) * 1963-06-10 1966-04-26 Gulton Ind Inc Digital force measuring apparatus
CH445921A (de) * 1965-11-05 1967-10-31 Centre Electron Horloger Vorrichtung zum Regulieren der Frequenz von mechanischen Oszillatoren ausserhalb des Gebietes der Zeitmesstechnik
US3437849A (en) * 1966-11-21 1969-04-08 Motorola Inc Temperature compensation of electrical devices
US3505880A (en) * 1967-01-20 1970-04-14 Singer General Precision Pneumatic vibratory digital sensors
US3470400A (en) * 1967-12-21 1969-09-30 Singer General Precision Single beam force transducer with integral mounting isolation
JPS5331635B2 (de) * 1972-11-01 1978-09-04
US4020448A (en) * 1973-09-17 1977-04-26 James Patrick Corbett Oscillating crystal transducer systems
US4067241A (en) * 1974-08-22 1978-01-10 James Patrick Corbett Improvements in or relating to oscillating crystal transducer systems
JPS52129574A (en) * 1976-04-23 1977-10-31 Toyo Boorudouin Kk Sealed load cell
JPS5420780A (en) * 1977-07-15 1979-02-16 Tomio Kotaki Crystal oscillation type force detector
US4190782A (en) * 1978-07-24 1980-02-26 Telex Communications, Inc. Piezoelectric ceramic resonant transducer with stable frequency
US4215570A (en) * 1979-04-20 1980-08-05 The United States Of America As Represented By The United States Department Of Energy Miniature quartz resonator force transducer

Also Published As

Publication number Publication date
EP0033097B1 (de) 1985-05-02
CA1148643A (en) 1983-06-21
JPS56119519A (en) 1981-09-19
EP0033097A3 (en) 1982-01-13
EP0033097A2 (de) 1981-08-05
US4406966A (en) 1983-09-27
DE3170224D1 (en) 1985-06-05

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