ATE131597T1 - Interferometrisches system und verfahren - Google Patents

Interferometrisches system und verfahren

Info

Publication number: ATE131597T1
Authority: AT; Austria
Prior art keywords: energy; energy beam; emanating; interferometer; collector
Prior art date: 1990-04-23

Application number

AT91908735T

Other languages

English (en)

Inventor

Monty Glass

Timothy Peter Dabbs

Original Assignee

Commw Scient Ind Res Org

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1990-04-23

Filing date

1991-04-23

Publication date

1995-12-15

1991-04-23 Application filed by Commw Scient Ind Res Org filed Critical Commw Scient Ind Res Org

1995-12-15 Application granted granted Critical

1995-12-15 Publication of ATE131597T1 publication Critical patent/ATE131597T1/de

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Length Measuring Devices By Optical Means (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)
Diaphragms For Electromechanical Transducers (AREA)
Paper (AREA)
Absorbent Articles And Supports Therefor (AREA)

AT91908735T 1990-04-23 1991-04-23 Interferometrisches system und verfahren ATE131597T1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
AUPJ977790		1990-04-23
AUPK471691		1991-02-21

Publications (1)

Publication Number	Publication Date
ATE131597T1 true ATE131597T1 (de)	1995-12-15

Family

ID=25643854

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT91908735T ATE131597T1 (de)	1990-04-23	1991-04-23	Interferometrisches system und verfahren

Country Status (7)

Country	Link
US (1)	US5617207A (de)
EP (1)	EP0526547B1 (de)
JP (1)	JPH05508707A (de)
AT (1)	ATE131597T1 (de)
CA (1)	CA2080023A1 (de)
DE (1)	DE69115477T2 (de)
WO (1)	WO1991016597A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB9820493D0 (en)	1998-09-22	1998-11-11	Secr Defence	Optical phase detector
DE10035835C2 (de) *	2000-07-21	2002-05-29	Med Laserzentrum Luebeck Gmbh	Interferometrische Messanordnung zum Überlagern von mindestens zwei Lichtwellen
GB0112079D0 (en) *	2001-05-18	2001-07-11	Farfield Sensors Ltd	Sensor Assembly
US7916985B2 (en) *	2007-02-19	2011-03-29	Kla-Tencor Corporation	Integrated visible pilot beam for non-visible optical waveguide devices
US8830476B2 (en) *	2012-03-19	2014-09-09	The United States Of America As Represented By The Secretary Of The Army	Methods and apparatuses for contact-free holographic imaging of aerosol particles

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3647275A (en) *	1970-09-09	1972-03-07	Optronics International	Identification system using reference beam coded holograms
US4313185A (en) *	1979-12-31	1982-01-26	General Electric Company	Acoustic vibration sensor and sensing system
DE3175909D1 (en) *	1980-12-17	1987-03-12	Ici Plc	Measuring apparatus using optical interference techniques
SE447601B (sv) *	1985-04-04	1986-11-24	Ericsson Telefon Ab L M	Fiberoptisk interferometer
DE3623265C2 (de) *	1986-07-10	1994-11-03	Siemens Ag	Verfahren und Anordnung zur faseroptischen Messung einer Weglänge oder einer Weglängenänderung
DE3709253A1 (de) *	1987-03-20	1988-09-29	Fraunhofer Ges Forschung	Fabry-perot-sensor
JPS6412204A (en) *	1987-07-07	1989-01-17	Topcon Corp	Optical ic interferometer
CA1325537C (en) *	1988-08-01	1993-12-28	Timothy Peter Dabbs	Confocal microscope
AT392537B (de) *	1989-03-21	1991-04-25	Tabarelli Werner	Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles
JP2808136B2 (ja) *	1989-06-07	1998-10-08	キヤノン株式会社	測長方法及び装置
AT397307B (de) *	1990-03-02	1994-03-25	Tabarelli Werner	Interferometer insbesondere zur längenmessung

1991
- 1991-04-23 AT AT91908735T patent/ATE131597T1/de not_active IP Right Cessation
- 1991-04-23 CA CA002080023A patent/CA2080023A1/en not_active Abandoned
- 1991-04-23 WO PCT/AU1991/000154 patent/WO1991016597A1/en not_active Ceased
- 1991-04-23 JP JP91508085A patent/JPH05508707A/ja active Pending
- 1991-04-23 US US07/938,165 patent/US5617207A/en not_active Expired - Fee Related
- 1991-04-23 EP EP91908735A patent/EP0526547B1/de not_active Expired - Lifetime
- 1991-04-23 DE DE69115477T patent/DE69115477T2/de not_active Expired - Fee Related

Also Published As

Publication number	Publication date
EP0526547B1 (de)	1995-12-13
EP0526547A4 (en)	1993-06-09
DE69115477T2 (de)	1996-05-30
US5617207A (en)	1997-04-01
WO1991016597A1 (en)	1991-10-31
DE69115477D1 (de)	1996-01-25
CA2080023A1 (en)	1991-10-24
EP0526547A1 (de)	1993-02-10
JPH05508707A (ja)	1993-12-02

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Legal Events

Date	Code	Title	Description
1996-06-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties