ATE132252T1 - Interferenzmikroskop - Google Patents

Interferenzmikroskop

Info

Publication number
ATE132252T1
ATE132252T1 AT91916427T AT91916427T ATE132252T1 AT E132252 T1 ATE132252 T1 AT E132252T1 AT 91916427 T AT91916427 T AT 91916427T AT 91916427 T AT91916427 T AT 91916427T AT E132252 T1 ATE132252 T1 AT E132252T1
Authority
AT
Austria
Prior art keywords
guided
interference
coherently
detector
pct
Prior art date
Application number
AT91916427T
Other languages
English (en)
Inventor
Timothy Peter Dabbs
Original Assignee
Commw Scient Ind Res Org
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commw Scient Ind Res Org filed Critical Commw Scient Ind Res Org
Application granted granted Critical
Publication of ATE132252T1 publication Critical patent/ATE132252T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02068—Auto-alignment of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AT91916427T 1990-08-31 1991-08-30 Interferenzmikroskop ATE132252T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPK208890 1990-08-31
AUPK471591 1991-02-21

Publications (1)

Publication Number Publication Date
ATE132252T1 true ATE132252T1 (de) 1996-01-15

Family

ID=25643932

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91916427T ATE132252T1 (de) 1990-08-31 1991-08-30 Interferenzmikroskop

Country Status (7)

Country Link
US (1) US5491550A (de)
EP (1) EP0546071B1 (de)
JP (1) JPH06500857A (de)
AT (1) ATE132252T1 (de)
CA (1) CA2090682A1 (de)
DE (1) DE69115914T2 (de)
WO (1) WO1992004594A1 (de)

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US7139080B2 (en) 1998-09-18 2006-11-21 Zygo Corporation Interferometry systems involving a dynamic beam-steering assembly
US6256102B1 (en) 1999-04-27 2001-07-03 University Of Central Florida Dual-beam low-coherence interferometer with improved signal-to-noise ratio
US6512588B1 (en) 1999-05-05 2003-01-28 Zygo Corporation Method and system for correcting an interferometric angle measurement for the effects of dispersion
US6888638B1 (en) 1999-05-05 2005-05-03 Zygo Corporation Interferometry system having a dynamic beam steering assembly for measuring angle and distance
RU2169347C1 (ru) * 1999-11-29 2001-06-20 Геликонов Валентин Михайлович Оптический интерферометр (варианты)
US6541759B1 (en) * 2000-06-20 2003-04-01 Zygo Corporation Interferometry system having a dynamic beam-steering assembly for measuring angle and distance and employing optical fibers for remote photoelectric detection
WO2002073122A2 (en) * 2001-03-13 2002-09-19 Zygo Corporation Cyclic error reduction in average interferometric position measurements
US20040166593A1 (en) * 2001-06-22 2004-08-26 Nolte David D. Adaptive interferometric multi-analyte high-speed biosensor
US6847452B2 (en) * 2001-08-02 2005-01-25 Zygo Corporation Passive zero shear interferometers
JP4030960B2 (ja) * 2001-08-23 2008-01-09 ザイゴ コーポレーション 入力ビームの方向の動的干渉分光制御
US6912054B2 (en) * 2001-08-28 2005-06-28 Zygo Corporation Interferometric stage system
WO2003048681A1 (en) * 2001-12-03 2003-06-12 Zygo Corporation Compensating for effects of non-isotropics gas mixtures in interferometers
AU2003209139A1 (en) * 2002-02-12 2003-09-04 Zygo Corporation Method and apparatus to measure fiber optic pickup errors in interferometry systems
US6856402B2 (en) * 2002-02-12 2005-02-15 Zygo Corporation Interferometer with dynamic beam steering element
US6906784B2 (en) * 2002-03-04 2005-06-14 Zygo Corporation Spatial filtering in interferometry
JP2005525548A (ja) * 2002-05-13 2005-08-25 ザイゴ　コーポレーション 平面ミラー干渉計におけるビーム・ミスアライメントの幾何学的影響の補償
US7428685B2 (en) * 2002-07-08 2008-09-23 Zygo Corporation Cyclic error compensation in interferometry systems
JP4547257B2 (ja) 2002-07-08 2010-09-22 ザイゴ コーポレーション 干渉計システムにおける周期誤差の補正
US7616322B2 (en) * 2002-07-08 2009-11-10 Zygo Corporation Cyclic error compensation in interferometry systems
US11243494B2 (en) 2002-07-31 2022-02-08 Abs Global, Inc. Multiple laminar flow-based particle and cellular separation with laser steering
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DE10393243T5 (de) * 2002-09-09 2005-09-01 Zygo Corp., Middlefield Messung und Fehlerausgleichung bei Interferometern
AU2003298613A1 (en) * 2002-11-04 2004-06-07 Zygo Corporation Compensation of refractivity perturbations in an intererometer path
JP4546255B2 (ja) * 2002-12-12 2010-09-15 ザイゴ コーポレーション フォトリソグラフィック露光サイクルの間のステージ・ミラー歪の工程内補正
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US7327465B2 (en) * 2003-06-19 2008-02-05 Zygo Corporation Compensation for effects of beam misalignments in interferometer metrology systems
US7286240B2 (en) * 2003-06-19 2007-10-23 Zygo Corporation Compensation for geometric effects of beam misalignments in plane mirror interferometer metrology systems
US7180603B2 (en) 2003-06-26 2007-02-20 Zygo Corporation Reduction of thermal non-cyclic error effects in interferometers
WO2005067579A2 (en) * 2004-01-06 2005-07-28 Zygo Corporation Multi-axis interferometers and methods and systems using multi-axis interferometers
US7375823B2 (en) * 2004-04-22 2008-05-20 Zygo Corporation Interferometry systems and methods of using interferometry systems
US7280223B2 (en) * 2004-04-22 2007-10-09 Zygo Corporation Interferometry systems and methods of using interferometry systems
ES2243129B1 (es) * 2004-04-23 2006-08-16 Universitat Politecnica De Catalunya Perfilometro optico de tecnologia dual (confocal e interferometrica) para la inspeccion y medicion tridimensional de superficies.
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WO2006041984A2 (en) * 2004-10-06 2006-04-20 Zygo Corporation Error correction in interferometry systems
US7910356B2 (en) * 2005-02-01 2011-03-22 Purdue Research Foundation Multiplexed biological analyzer planar array apparatus and methods
WO2006102234A2 (en) * 2005-03-18 2006-09-28 Zygo Corporation Multi-axis interferometer with procedure and data processing for mirror mapping
KR20080106262A (ko) * 2006-02-16 2008-12-04 펄듀 리서치 파운데이션 인라인 쿼드러처 및 반사 방지 향상 위상 쿼드러처 간섭측정 방식 검출
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US7576868B2 (en) * 2007-06-08 2009-08-18 Zygo Corporation Cyclic error compensation in interferometry systems
RU2372591C1 (ru) * 2008-06-19 2009-11-10 Государственное образовательное учреждение высшего профессионального образования "Российский университет дружбы народов" (РУДН) Способ определения показателя преломления поверхностной электромагнитной волны инфракрасной области спектра
US20120225475A1 (en) * 2010-11-16 2012-09-06 1087 Systems, Inc. Cytometry system with quantum cascade laser source, acoustic detector, and micro-fluidic cell handling system configured for inspection of individual cells
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DE102012203736A1 (de) * 2012-03-09 2013-09-12 Carl Zeiss Microscopy Gmbh Lichtrastermikroskop mit spektraler Detektion
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CN105890878B (zh) * 2016-05-20 2018-02-13 北京大学 利用飞秒激光实时测量反射镜损伤阈值的测量装置及方法
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CN113260848B (zh) 2018-12-21 2025-04-01 Abs全球公司 亚群识别的系统和方法
EP3955735B1 (de) 2019-04-18 2024-05-22 ABS Global, Inc. System und verfahren zur kontinuierlichen zugabe eines kryoprotektivums
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CN116368237A (zh) 2020-10-21 2023-06-30 Abs全球股份有限公司 用于处理遗传样本以确定特性或检测污染的方法及系统
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Also Published As

Publication number Publication date
DE69115914D1 (de) 1996-02-08
WO1992004594A1 (en) 1992-03-19
EP0546071A4 (en) 1993-08-04
EP0546071B1 (de) 1995-12-27
CA2090682A1 (en) 1992-03-01
DE69115914T2 (de) 1996-05-30
JPH06500857A (ja) 1994-01-27
US5491550A (en) 1996-02-13
EP0546071A1 (de) 1993-06-16

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