ATE132252T1 - Interferenzmikroskop - Google Patents

Interferenzmikroskop

Info

Publication number
ATE132252T1
ATE132252T1 AT91916427T AT91916427T ATE132252T1 AT E132252 T1 ATE132252 T1 AT E132252T1 AT 91916427 T AT91916427 T AT 91916427T AT 91916427 T AT91916427 T AT 91916427T AT E132252 T1 ATE132252 T1 AT E132252T1
Authority
AT
Austria
Prior art keywords
guided
interference
coherently
detector
pct
Prior art date
Application number
AT91916427T
Other languages
English (en)
Inventor
Timothy Peter Dabbs
Original Assignee
Commw Scient Ind Res Org
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commw Scient Ind Res Org filed Critical Commw Scient Ind Res Org
Application granted granted Critical
Publication of ATE132252T1 publication Critical patent/ATE132252T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02068—Auto-alignment of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AT91916427T 1990-08-31 1991-08-30 Interferenzmikroskop ATE132252T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPK208890 1990-08-31
AUPK471591 1991-02-21

Publications (1)

Publication Number Publication Date
ATE132252T1 true ATE132252T1 (de) 1996-01-15

Family

ID=25643932

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91916427T ATE132252T1 (de) 1990-08-31 1991-08-30 Interferenzmikroskop

Country Status (7)

Country Link
US (1) US5491550A (de)
EP (1) EP0546071B1 (de)
JP (1) JPH06500857A (de)
AT (1) ATE132252T1 (de)
CA (1) CA2090682A1 (de)
DE (1) DE69115914T2 (de)
WO (1) WO1992004594A1 (de)

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US6313918B1 (en) 1998-09-18 2001-11-06 Zygo Corporation Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion
US6256102B1 (en) 1999-04-27 2001-07-03 University Of Central Florida Dual-beam low-coherence interferometer with improved signal-to-noise ratio
US6512588B1 (en) 1999-05-05 2003-01-28 Zygo Corporation Method and system for correcting an interferometric angle measurement for the effects of dispersion
US6888638B1 (en) 1999-05-05 2005-05-03 Zygo Corporation Interferometry system having a dynamic beam steering assembly for measuring angle and distance
RU2169347C1 (ru) * 1999-11-29 2001-06-20 Геликонов Валентин Михайлович Оптический интерферометр (варианты)
US6541759B1 (en) * 2000-06-20 2003-04-01 Zygo Corporation Interferometry system having a dynamic beam-steering assembly for measuring angle and distance and employing optical fibers for remote photoelectric detection
US6891624B2 (en) * 2001-03-13 2005-05-10 Zygo Corporation Cyclic error reduction in average interferometric position measurements
US20040166593A1 (en) * 2001-06-22 2004-08-26 Nolte David D. Adaptive interferometric multi-analyte high-speed biosensor
US6847452B2 (en) * 2001-08-02 2005-01-25 Zygo Corporation Passive zero shear interferometers
EP1419361A1 (de) * 2001-08-23 2004-05-19 Zygo Corporation Dynamische interferometrische steuerung der richtung eines eingangsstrahls
US6912054B2 (en) * 2001-08-28 2005-06-28 Zygo Corporation Interferometric stage system
WO2003048681A1 (en) * 2001-12-03 2003-06-12 Zygo Corporation Compensating for effects of non-isotropics gas mixtures in interferometers
WO2003069286A2 (en) * 2002-02-12 2003-08-21 Zygo Corporation Method and apparatus to measure fiber optic pickup errors in interferometry systems
US6856402B2 (en) * 2002-02-12 2005-02-15 Zygo Corporation Interferometer with dynamic beam steering element
US6906784B2 (en) * 2002-03-04 2005-06-14 Zygo Corporation Spatial filtering in interferometry
AU2003234413A1 (en) * 2002-05-13 2003-11-11 Zygo Corporation Compensation for geometric effects of beam misalignments in plane mirror interferometers
US7428685B2 (en) * 2002-07-08 2008-09-23 Zygo Corporation Cyclic error compensation in interferometry systems
EP1520151B1 (de) 2002-07-08 2018-10-10 Zygo Corporation Kompensation periodischer fehler in interferometriesystemen
US7616322B2 (en) * 2002-07-08 2009-11-10 Zygo Corporation Cyclic error compensation in interferometry systems
US11243494B2 (en) 2002-07-31 2022-02-08 Abs Global, Inc. Multiple laminar flow-based particle and cellular separation with laser steering
US7321432B2 (en) * 2002-09-09 2008-01-22 Zygo Corporation Measurement and compensation of errors in interferometers
US7274462B2 (en) * 2002-09-09 2007-09-25 Zygo Corporation In SITU measurement and compensation of errors due to imperfections in interferometer optics in displacement measuring interferometry systems
AU2003298613A1 (en) * 2002-11-04 2004-06-07 Zygo Corporation Compensation of refractivity perturbations in an intererometer path
EP1583934A1 (de) * 2002-12-12 2005-10-12 Zygo Corporation Korrektur von spiegel deformationen während einer photolithographischen belichtung
EP1595106A4 (de) * 2003-02-13 2007-01-17 Zetetic Inst Interferometrische transvers-differential-konfokalmikroskopie
US7327465B2 (en) * 2003-06-19 2008-02-05 Zygo Corporation Compensation for effects of beam misalignments in interferometer metrology systems
US7286240B2 (en) * 2003-06-19 2007-10-23 Zygo Corporation Compensation for geometric effects of beam misalignments in plane mirror interferometer metrology systems
US7180603B2 (en) 2003-06-26 2007-02-20 Zygo Corporation Reduction of thermal non-cyclic error effects in interferometers
US7283248B2 (en) * 2004-01-06 2007-10-16 Zygo Corporation Multi-axis interferometers and methods and systems using multi-axis interferometers
JP2007534941A (ja) * 2004-04-22 2007-11-29 ザイゴ　コーポレーション 光学干渉計システムおよび光学干渉計システムを用いる方法
US7375823B2 (en) * 2004-04-22 2008-05-20 Zygo Corporation Interferometry systems and methods of using interferometry systems
ES2243129B1 (es) * 2004-04-23 2006-08-16 Universitat Politecnica De Catalunya Perfilometro optico de tecnologia dual (confocal e interferometrica) para la inspeccion y medicion tridimensional de superficies.
WO2006010253A1 (en) * 2004-07-30 2006-02-02 University Of Victoria Innovation And Development Corporation Confocal scanning holography microscope
US7489407B2 (en) * 2004-10-06 2009-02-10 Zygo Corporation Error correction in interferometry systems
US7910356B2 (en) * 2005-02-01 2011-03-22 Purdue Research Foundation Multiplexed biological analyzer planar array apparatus and methods
US7433049B2 (en) * 2005-03-18 2008-10-07 Zygo Corporation Multi-axis interferometer with procedure and data processing for mirror mapping
WO2007098365A1 (en) * 2006-02-16 2007-08-30 Purdue Research Foundation In-line quadrature and anti-reflection enhanced phase quadrature interferometric detection
US7787126B2 (en) 2007-03-26 2010-08-31 Purdue Research Foundation Method and apparatus for conjugate quadrature interferometric detection of an immunoassay
US7576868B2 (en) * 2007-06-08 2009-08-18 Zygo Corporation Cyclic error compensation in interferometry systems
RU2372591C1 (ru) * 2008-06-19 2009-11-10 Государственное образовательное учреждение высшего профессионального образования "Российский университет дружбы народов" (РУДН) Способ определения показателя преломления поверхностной электромагнитной волны инфракрасной области спектра
US20120225475A1 (en) * 2010-11-16 2012-09-06 1087 Systems, Inc. Cytometry system with quantum cascade laser source, acoustic detector, and micro-fluidic cell handling system configured for inspection of individual cells
US10908066B2 (en) 2010-11-16 2021-02-02 1087 Systems, Inc. Use of vibrational spectroscopy for microfluidic liquid measurement
DE102012203736A1 (de) * 2012-03-09 2013-09-12 Carl Zeiss Microscopy Gmbh Lichtrastermikroskop mit spektraler Detektion
DE102013106895B4 (de) 2013-07-01 2015-09-17 Leica Microsystems Cms Gmbh Lichtmikroskopisches Verfahren zur Lokalisierung von Punktobjekten
US8961904B2 (en) 2013-07-16 2015-02-24 Premium Genetics (Uk) Ltd. Microfluidic chip
US11796449B2 (en) 2013-10-30 2023-10-24 Abs Global, Inc. Microfluidic system and method with focused energy apparatus
US9818021B2 (en) * 2014-10-21 2017-11-14 Isra Surface Vision Gmbh Method for determining a local refractive power and device therefor
US10180388B2 (en) 2015-02-19 2019-01-15 1087 Systems, Inc. Scanning infrared measurement system
CN105890878B (zh) * 2016-05-20 2018-02-13 北京大学 利用飞秒激光实时测量反射镜损伤阈值的测量装置及方法
US11331670B2 (en) 2018-05-23 2022-05-17 Abs Global, Inc. Systems and methods for particle focusing in microchannels
EP3899489B1 (de) 2018-12-21 2025-04-09 ABS Global, Inc. System und verfahren zur identifizierung einer subpopulation
EP3955735B1 (de) 2019-04-18 2024-05-22 ABS Global, Inc. System und verfahren zur kontinuierlichen zugabe eines kryoprotektivums
US11628439B2 (en) 2020-01-13 2023-04-18 Abs Global, Inc. Single-sheath microfluidic chip
WO2022087299A1 (en) 2020-10-21 2022-04-28 Abs Global, Inc. Methods and systems for processing genetic samples to determine identity or detect contamination
US12135270B2 (en) 2020-11-23 2024-11-05 Abs Global, Inc. Modular flow cytometry systems and methods of processing samples
USD1118965S1 (en) 2021-11-12 2026-03-17 Abs Global, Inc. Flow cytometry device

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CA1163797A (en) * 1982-01-14 1984-03-20 Queen's University At Kingston Laser interferometer
JPS6141941A (ja) * 1984-08-06 1986-02-28 Agency Of Ind Science & Technol 軸外し放物面鏡の表面形状測定用ホログラム干渉計
US4627731A (en) * 1985-09-03 1986-12-09 United Technologies Corporation Common optical path interferometric gauge
US4732483A (en) * 1987-03-19 1988-03-22 Zygo Corporation Interferometric surface profiler
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US4928527A (en) * 1988-04-29 1990-05-29 At&T Bell Laboratories Method and device for nondestructive evaluation
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JPH0287005A (ja) * 1988-09-26 1990-03-27 Brother Ind Ltd 光ヘテロダイン干渉表面形状測定装置
DE3906118A1 (de) * 1989-02-28 1990-08-30 Bosch Gmbh Robert Vorrichtung zur interferometrischen erfassung von oberflaechenstrukturen
AT392537B (de) * 1989-03-21 1991-04-25 Tabarelli Werner Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles
DE59001953D1 (en) * 1989-06-07 1993-08-19 Tabarelli Werner Interferometeranordnung.
ATA282989A (de) * 1989-12-13 1993-12-15 Tabarelli Werner Interferometerkopf und interferometeranordnung mit einem solchen interferometerkopf

Also Published As

Publication number Publication date
EP0546071A4 (en) 1993-08-04
CA2090682A1 (en) 1992-03-01
JPH06500857A (ja) 1994-01-27
WO1992004594A1 (en) 1992-03-19
DE69115914T2 (de) 1996-05-30
DE69115914D1 (de) 1996-02-08
US5491550A (en) 1996-02-13
EP0546071B1 (de) 1995-12-27
EP0546071A1 (de) 1993-06-16

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Legal Events

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