ATE135099T1 - Methode und gerät zur koordinatenmessung mit einer kapazitätssonde - Google Patents

Methode und gerät zur koordinatenmessung mit einer kapazitätssonde

Info

Publication number
ATE135099T1
ATE135099T1 AT91916649T AT91916649T ATE135099T1 AT E135099 T1 ATE135099 T1 AT E135099T1 AT 91916649 T AT91916649 T AT 91916649T AT 91916649 T AT91916649 T AT 91916649T AT E135099 T1 ATE135099 T1 AT E135099T1
Authority
AT
Austria
Prior art keywords
workpiece
probe
capacitance
function
surface parameters
Prior art date
Application number
AT91916649T
Other languages
English (en)
Inventor
Lawrence J Rhoades
Ralph L Resnick
John R Rose
Original Assignee
Extrude Hone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Extrude Hone Corp filed Critical Extrude Hone Corp
Application granted granted Critical
Publication of ATE135099T1 publication Critical patent/ATE135099T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
AT91916649T 1990-09-04 1991-09-04 Methode und gerät zur koordinatenmessung mit einer kapazitätssonde ATE135099T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/577,021 US5189377A (en) 1990-09-04 1990-09-04 Method and apparatus for co-ordinate measuring using a capacitance probe

Publications (1)

Publication Number Publication Date
ATE135099T1 true ATE135099T1 (de) 1996-03-15

Family

ID=24306957

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91916649T ATE135099T1 (de) 1990-09-04 1991-09-04 Methode und gerät zur koordinatenmessung mit einer kapazitätssonde

Country Status (8)

Country Link
US (1) US5189377A (de)
EP (1) EP0547143B1 (de)
JP (1) JPH06503878A (de)
AT (1) ATE135099T1 (de)
AU (1) AU645951B2 (de)
CA (1) CA2090978A1 (de)
DE (1) DE69117764T2 (de)
WO (1) WO1992004593A1 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5517124A (en) * 1989-07-26 1996-05-14 Extrude Hone Corporation Stylus probe for measuring workpiece surface characteristics
GB9021448D0 (en) * 1990-10-03 1990-11-14 Renishaw Plc Capacitance sensing probe
GB9021447D0 (en) * 1990-10-03 1990-11-14 Renishaw Plc Capacitance probes
US5272443A (en) * 1992-04-22 1993-12-21 Aluminum Company Of America Chatter and profile measuring using capacitor sensors
US5315259A (en) * 1992-05-26 1994-05-24 Universities Research Association, Inc. Omnidirectional capacitive probe for gauge of having a sensing tip formed as a substantially complete sphere
US5621290A (en) * 1993-10-18 1997-04-15 Draftex Industries Limited Movable-window safety device
US5914610A (en) * 1994-02-03 1999-06-22 Massachusetts Institute Of Technology Apparatus and method for characterizing movement of a mass within a defined space
US5517190A (en) * 1994-02-03 1996-05-14 Gunn; Colin N. Physical measurement from changes in reactance
EP0850385B1 (de) * 1995-09-25 2002-10-02 Jorn Sorensen Verfahren und vorrichtung zur erfassung der distanz zwischen einem ersten objekt und einem zweiten objekt
US5708368A (en) * 1996-03-07 1998-01-13 Ade Corporation Method and apparatus for emulation of a linear variable differential transducer by a capacitive gaging system
US6139759A (en) 1997-07-08 2000-10-31 International Business Machines Corporation Method of manufacturing silicided silicon microtips for scanning probe microscopy
RU2156983C1 (ru) * 1999-05-24 2000-09-27 Воронежский государственный университет Способ измерения изменений поверхностного потенциала
US6337218B1 (en) * 1999-05-28 2002-01-08 International Business Machines Corporation Method to test devices on high performance ULSI wafers
US6618505B2 (en) * 2000-03-09 2003-09-09 The Boeing Company Method, apparatus and computer program product for determining shim shape
US20020112547A1 (en) * 2000-11-22 2002-08-22 Eltaib Mohamed Elsayed Hossney Tactile probe
US6865040B2 (en) * 2001-05-22 2005-03-08 Seagate Technology, Llc Method and system for measuring fly height
US6891382B2 (en) * 2002-10-15 2005-05-10 Massachusetts Instiute Of Technology Three-dimensional characterization using a one-dimensional electrode array
US7869184B2 (en) * 2005-11-30 2011-01-11 Lam Research Corporation Method of determining a target mesa configuration of an electrostatic chuck
KR20090106641A (ko) * 2007-01-29 2009-10-09 토소우 에스엠디, 인크 극도로 매끄러운 면의 스퍼터 타겟 및 그 제조 방법
TWI414766B (zh) * 2007-07-19 2013-11-11 Generalplus Technology Inc 導體按壓電容式傳感器的力道之測量方法
CN101561240B (zh) * 2009-05-31 2010-10-20 哈尔滨工业大学 基于球形电容极板的超精密非接触式三维瞄准与测量传感器
US9199351B2 (en) * 2011-05-09 2015-12-01 The Boeing Company Drilling machine having hole measurement capability
JP6017096B1 (ja) * 2015-10-30 2016-10-26 三菱電機株式会社 ワイヤ放電加工機、ワイヤ放電加工機の制御装置の制御方法及び位置決め方法
DE102016209547A1 (de) * 2016-06-01 2017-12-07 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Vorrichtung zur Vermessung von Messobjekten
DE102018206232A1 (de) * 2018-04-23 2019-10-24 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Detektieren einer Fehlstellung einer Schneidoptik einer Laserschneidmaschine, Auswerteeinrichtung und Laserschneidmaschine
CN115752221B (zh) * 2023-01-07 2023-04-11 山东省三鼎汽车配件有限公司 一种刹车盘圆度检测装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2935681A (en) * 1956-08-31 1960-05-03 Gen Electric Contour measuring method and probe
US3263167A (en) * 1962-10-04 1966-07-26 Reliance Electric & Eng Co Apparatus for measuring the non-linear dimension of a workpiece
FR2037341A6 (de) * 1970-02-02 1970-12-31 Muntzer Emile
US3805150A (en) * 1970-08-17 1974-04-16 Ade Corp Environment immune high precision capacitive gauging system
US3805252A (en) * 1972-07-21 1974-04-16 Ultronic Systems Corp Full message erase apparatus for a data processing printout system
DE3039309A1 (de) * 1979-10-23 1981-05-14 Renishaw Electrical Ltd., Wotton-Under-Edge, Gloucestershire Messverfahren fuer ein werkstueck in einer numerisch gesteuerten werkzeugmaschine und dafuer geeignete werkzeugmaschine und dafuer geeignete vorrichtung
GB2100441A (en) * 1981-06-12 1982-12-22 Automatic Systems Lab Ltd Method for determining dimensions and/or form of surfaces
GB2101325B (en) * 1981-06-23 1984-10-17 Rank Organisation Ltd Contact sensitive probes using capacitative sensors
USRE32457E (en) * 1981-09-30 1987-07-07 Rca Corporation Scanning capacitance microscope
US4814691A (en) * 1985-08-09 1989-03-21 Washington Research Foundation Fringe field capacitive sensor for measuring profile of a surface
US4764722A (en) * 1985-10-28 1988-08-16 International Business Machines Corporation Coaxial probe
US4806848A (en) * 1987-03-11 1989-02-21 The United States Of America As Represented By The Secretary Of The Air Force Compressor blade clearance measurement system
US4816744A (en) * 1987-05-18 1989-03-28 Laser Metric Systems, Inc. Method and device for measuring inside diameters using a laser interferometer and capacitance measurements
US4931887A (en) * 1988-02-01 1990-06-05 International Business Machines Corporation Capacitive measurement and control of the fly height of a recording slider
US5065103A (en) * 1990-03-27 1991-11-12 International Business Machines Corporation Scanning capacitance - voltage microscopy

Also Published As

Publication number Publication date
JPH06503878A (ja) 1994-04-28
EP0547143A4 (en) 1994-09-21
US5189377A (en) 1993-02-23
EP0547143B1 (de) 1996-03-06
DE69117764T2 (de) 1996-09-19
WO1992004593A1 (en) 1992-03-19
CA2090978A1 (en) 1992-03-05
EP0547143A1 (de) 1993-06-23
AU8635491A (en) 1992-03-30
DE69117764D1 (de) 1996-04-11
AU645951B2 (en) 1994-01-27

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