ATE135459T1 - Einrichtung zur kalibrierung eines durchflusssteuereinrichtung - Google Patents

Einrichtung zur kalibrierung eines durchflusssteuereinrichtung

Info

Publication number
ATE135459T1
ATE135459T1 AT92912577T AT92912577T ATE135459T1 AT E135459 T1 ATE135459 T1 AT E135459T1 AT 92912577 T AT92912577 T AT 92912577T AT 92912577 T AT92912577 T AT 92912577T AT E135459 T1 ATE135459 T1 AT E135459T1
Authority
AT
Austria
Prior art keywords
mass flow
command
signal
flow controller
analog
Prior art date
Application number
AT92912577T
Other languages
English (en)
Inventor
James Holohan Doyle
Michael Dean Upchurch
Richard Lee Donaldson
Original Assignee
Unit Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unit Instr Inc filed Critical Unit Instr Inc
Application granted granted Critical
Publication of ATE135459T1 publication Critical patent/ATE135459T1/de

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Details Of Flowmeters (AREA)
  • Measuring Volume Flow (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
AT92912577T 1991-05-17 1992-05-15 Einrichtung zur kalibrierung eines durchflusssteuereinrichtung ATE135459T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US70201791A 1991-05-17 1991-05-17

Publications (1)

Publication Number Publication Date
ATE135459T1 true ATE135459T1 (de) 1996-03-15

Family

ID=24819559

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92912577T ATE135459T1 (de) 1991-05-17 1992-05-15 Einrichtung zur kalibrierung eines durchflusssteuereinrichtung

Country Status (6)

Country Link
EP (2) EP0584242B1 (de)
JP (1) JPH06508207A (de)
AT (1) ATE135459T1 (de)
DE (1) DE69209066T2 (de)
DK (1) DK0584242T3 (de)
WO (1) WO1992021006A2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993025950A1 (en) * 1992-06-12 1993-12-23 Unit Instruments, Inc. Mass flow controller
JP3463757B2 (ja) * 1993-04-08 2003-11-05 株式会社日立製作所 エンジン制御装置及びこれに用いる空気流量計
US5944048A (en) * 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US5975747A (en) * 1997-05-29 1999-11-02 Micro Motion, Inc. Overfill compensation for a batch delivery system
US6443174B2 (en) 2000-07-08 2002-09-03 Daniel T. Mudd Fluid mass flow control valve and method of operation
WO2002008845A1 (en) 2000-07-25 2002-01-31 Fugasity Corporation Small internal volume fluid mass flow control apparatus
US6539968B1 (en) 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation
US6822731B1 (en) 2003-06-18 2004-11-23 Asml Holding N.V. Method and apparatus for a pellicle frame with heightened bonding surfaces
US7277802B1 (en) * 2006-05-18 2007-10-02 Honeywell International Inc. Method and system for providing a linear signal from a mass flow transducer
US7280927B1 (en) * 2006-10-11 2007-10-09 Honeywell International Inc. Method and system for providing a linear signal from a mass airflow and/or liquid flow transducer
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
US9690301B2 (en) 2012-09-10 2017-06-27 Reno Technologies, Inc. Pressure based mass flow controller
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
JP6526374B2 (ja) * 2013-04-25 2019-06-05 株式会社堀場エステック 流体制御装置
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
JP6940441B2 (ja) * 2018-03-27 2021-09-29 アズビル株式会社 熱式フローセンサ装置および流量補正方法
JP6940442B2 (ja) * 2018-03-27 2021-09-29 アズビル株式会社 熱式フローセンサ装置および流量補正方法
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly
CN113776571B (zh) * 2021-07-30 2023-06-27 华电电力科学研究院有限公司 一种电厂热工监测仪表在线校验方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4884215A (en) * 1987-02-27 1989-11-28 Jabil Circuit Company Airflow sensor and control circuit
US4860583A (en) * 1988-05-27 1989-08-29 Dwyer Instruments, Inc. Air velocity transmitter device
US5065695A (en) * 1989-06-16 1991-11-19 Nordson Corporation Apparatus for compensating for non-linear flow characteristics in dispensing a coating material

Also Published As

Publication number Publication date
EP0584242B1 (de) 1996-03-13
JPH06508207A (ja) 1994-09-14
EP0584242A1 (de) 1994-03-02
DK0584242T3 (da) 1996-07-22
DE69209066T2 (de) 1996-08-08
EP0689040A2 (de) 1995-12-27
DE69209066D1 (de) 1996-04-18
WO1992021006A3 (en) 1993-01-07
WO1992021006A2 (en) 1992-11-26
EP0689040A3 (de) 1996-06-05

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee