ATE135750T1 - Verfahren und vorrichtung zur verbesserung eines beschichtungsapparates mit plasmabeschleuniger für diamantbeschichtung - Google Patents

Verfahren und vorrichtung zur verbesserung eines beschichtungsapparates mit plasmabeschleuniger für diamantbeschichtung

Info

Publication number
ATE135750T1
ATE135750T1 AT93900217T AT93900217T ATE135750T1 AT E135750 T1 ATE135750 T1 AT E135750T1 AT 93900217 T AT93900217 T AT 93900217T AT 93900217 T AT93900217 T AT 93900217T AT E135750 T1 ATE135750 T1 AT E135750T1
Authority
AT
Austria
Prior art keywords
electrode
pct
plating
arc
released
Prior art date
Application number
AT93900217T
Other languages
English (en)
Inventor
Asko Anttila
Jari Koskinen
Original Assignee
Sitra Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sitra Foundation filed Critical Sitra Foundation
Application granted granted Critical
Publication of ATE135750T1 publication Critical patent/ATE135750T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C23C14/0611—Diamond
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Tone Control, Compression And Expansion, Limiting Amplitude (AREA)
  • Saccharide Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
AT93900217T 1992-01-10 1992-12-30 Verfahren und vorrichtung zur verbesserung eines beschichtungsapparates mit plasmabeschleuniger für diamantbeschichtung ATE135750T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI920122A FI89725C (fi) 1992-01-10 1992-01-10 Foerfarande och anordning foer anvaendning vid en ytbelaeggningsanordning

Publications (1)

Publication Number Publication Date
ATE135750T1 true ATE135750T1 (de) 1996-04-15

Family

ID=8533928

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93900217T ATE135750T1 (de) 1992-01-10 1992-12-30 Verfahren und vorrichtung zur verbesserung eines beschichtungsapparates mit plasmabeschleuniger für diamantbeschichtung

Country Status (8)

Country Link
US (1) US5518596A (de)
EP (1) EP0620867B1 (de)
JP (1) JPH07506624A (de)
AT (1) ATE135750T1 (de)
AU (1) AU3161493A (de)
DE (1) DE69209320T2 (de)
FI (1) FI89725C (de)
WO (1) WO1993014239A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPM365594A0 (en) * 1994-02-02 1994-02-24 Australian National University, The Method and apparatus for coating a substrate
US5711773A (en) * 1994-11-17 1998-01-27 Plasmoteg Engineering Center Abrasive material for precision surface treatment and a method for the manufacturing thereof
RU2153782C1 (ru) * 1999-06-02 2000-07-27 Закрытое акционерное общество "Патинор Коутингс Лимитед" Импульсный источник углеродной плазмы
WO2002062113A1 (fr) * 2001-02-01 2002-08-08 Zakrytoe Aktsionernoe Obschestvo 'patinor Coatings Limited' Source d'impulsions du plasma de carbone
GB0404436D0 (en) * 2004-02-27 2004-03-31 Nanofilm Technologies Int Continuous arc deposition apparatus and method with multiple available targets

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8700620A (nl) * 1987-03-16 1988-10-17 Hauzer Holding Kathode boogverdampingsinrichting alsmede werkwijze voor het bedrijven daarvan.
FI79351C (fi) * 1988-01-18 1989-12-11 Asko Anttila Foerfarande och anordning foer ytbelaeggning av material.

Also Published As

Publication number Publication date
FI89725C (fi) 1993-11-10
EP0620867B1 (de) 1996-03-20
FI920122A0 (fi) 1992-01-10
EP0620867A1 (de) 1994-10-26
DE69209320T2 (de) 1996-09-05
US5518596A (en) 1996-05-21
AU3161493A (en) 1993-08-03
WO1993014239A1 (en) 1993-07-22
FI89725B (fi) 1993-07-30
JPH07506624A (ja) 1995-07-20
DE69209320D1 (de) 1996-04-25

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee