ATE140411T1 - Methode und system zur kontrolle eines materialabtragprozesses; wobei man die spektralausstrahlung analysiert - Google Patents

Methode und system zur kontrolle eines materialabtragprozesses; wobei man die spektralausstrahlung analysiert

Info

Publication number
ATE140411T1
ATE140411T1 AT93901187T AT93901187T ATE140411T1 AT E140411 T1 ATE140411 T1 AT E140411T1 AT 93901187 T AT93901187 T AT 93901187T AT 93901187 T AT93901187 T AT 93901187T AT E140411 T1 ATE140411 T1 AT E140411T1
Authority
AT
Austria
Prior art keywords
spectral emission
scan speed
emission signals
light beam
intensity
Prior art date
Application number
AT93901187T
Other languages
English (en)
Inventor
Michael Christopher Cates
Richard Roy Hamm
John David Hoogerwerf
Original Assignee
Maxwell Lab Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maxwell Lab Inc filed Critical Maxwell Lab Inc
Application granted granted Critical
Publication of ATE140411T1 publication Critical patent/ATE140411T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B44—DECORATIVE ARTS
    • B44D—PAINTING OR ARTISTIC DRAWING, NOT OTHERWISE PROVIDED FOR; PRESERVING PAINTINGS; SURFACE TREATMENT TO OBTAIN SPECIAL ARTISTIC SURFACE EFFECTS OR FINISHES
    • B44D3/00—Accessories or implements for use in connection with painting or artistic drawing, not otherwise provided for; Methods or devices for colour determination, selection, or synthesis, e.g. use of colour tables
    • B44D3/16—Implements or apparatus for removing dry paint from surfaces, e.g. by scraping, by burning
    • B44D3/166—Implements or apparatus for removing dry paint from surfaces, e.g. by scraping, by burning by heating, e.g. by burning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/705—Beam measuring devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/16—Composite materials
    • B23K2103/166—Multilayered materials
    • B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic materials
    • B23K2103/42—Plastics other than composite materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic materials other than metals or composite materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Cleaning In General (AREA)
AT93901187T 1991-12-24 1992-12-17 Methode und system zur kontrolle eines materialabtragprozesses; wobei man die spektralausstrahlung analysiert ATE140411T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/813,865 US5204517A (en) 1991-12-24 1991-12-24 Method and system for control of a material removal process using spectral emission discrimination

Publications (1)

Publication Number Publication Date
ATE140411T1 true ATE140411T1 (de) 1996-08-15

Family

ID=25213613

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93901187T ATE140411T1 (de) 1991-12-24 1992-12-17 Methode und system zur kontrolle eines materialabtragprozesses; wobei man die spektralausstrahlung analysiert

Country Status (7)

Country Link
US (1) US5204517A (de)
EP (1) EP0618850B1 (de)
JP (1) JP3126145B2 (de)
AT (1) ATE140411T1 (de)
CA (1) CA2125677A1 (de)
DE (1) DE69212333T2 (de)
WO (1) WO1993012906A1 (de)

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Also Published As

Publication number Publication date
US5204517A (en) 1993-04-20
WO1993012906A1 (en) 1993-07-08
EP0618850A1 (de) 1994-10-12
DE69212333D1 (de) 1996-08-22
JPH07505091A (ja) 1995-06-08
JP3126145B2 (ja) 2001-01-22
EP0618850B1 (de) 1996-07-17
CA2125677A1 (en) 1993-07-08
DE69212333T2 (de) 1996-12-12

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