ATE144042T1 - Interferometrie - Google Patents

Interferometrie

Info

Publication number
ATE144042T1
ATE144042T1 AT90903881T AT90903881T ATE144042T1 AT E144042 T1 ATE144042 T1 AT E144042T1 AT 90903881 T AT90903881 T AT 90903881T AT 90903881 T AT90903881 T AT 90903881T AT E144042 T1 ATE144042 T1 AT E144042T1
Authority
AT
Austria
Prior art keywords
pct
measurand
visibility
sec
date
Prior art date
Application number
AT90903881T
Other languages
English (en)
Inventor
Robert Jones
Robert James Welford
Michael Stuart Hazell
Original Assignee
Cambridge Consultants
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cambridge Consultants filed Critical Cambridge Consultants
Application granted granted Critical
Publication of ATE144042T1 publication Critical patent/ATE144042T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G01B9/02028—Two or more reference or object arms in one interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G01B9/02065—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry using a second interferometer before or after measuring interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/30—Grating as beam-splitter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Glass Compositions (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Radio Relay Systems (AREA)
AT90903881T 1989-02-18 1990-02-19 Interferometrie ATE144042T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB898903725A GB8903725D0 (en) 1989-02-18 1989-02-18 Coherent tracking sensor

Publications (1)

Publication Number Publication Date
ATE144042T1 true ATE144042T1 (de) 1996-10-15

Family

ID=10651924

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90903881T ATE144042T1 (de) 1989-02-18 1990-02-19 Interferometrie

Country Status (8)

Country Link
US (1) US5301010A (de)
EP (1) EP0458888B1 (de)
JP (1) JPH04505050A (de)
AT (1) ATE144042T1 (de)
CA (1) CA2046902A1 (de)
DE (1) DE69028846T2 (de)
GB (1) GB8903725D0 (de)
WO (1) WO1990009557A1 (de)

Families Citing this family (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9026622D0 (en) * 1990-12-07 1991-01-23 Ometron Limited Apparatus for the measurement of surface shape
US5218423A (en) * 1991-09-27 1993-06-08 Hughes Aircraft Company Method and apparatus for generating a plurality of radiation beams from incident radiation in a multiple wavelength interferometer
JP3054494B2 (ja) * 1992-05-20 2000-06-19 株式会社トプコン 波長安定化光源装置
DE4306756A1 (de) * 1993-03-04 1994-09-08 Sios Mestechnik Gmbh Lichtwellenleitergekoppelte Temperaturmeßvorrichtung
DE4314486C2 (de) * 1993-05-03 1998-08-27 Heidenhain Gmbh Dr Johannes Absolutinterferometrisches Meßverfahren sowie dafür geeignete Laserinterferometeranordnung
DE4314488C2 (de) * 1993-05-03 1997-11-20 Heidenhain Gmbh Dr Johannes Interferometrisches Meßverfahren für Absolutmessungen sowie dafür geeignete Laserinterferometeranordnung
GB9324926D0 (en) * 1993-12-04 1994-01-26 Renishaw Plc Combined interferometer and refractometer
JP2805045B2 (ja) * 1996-08-27 1998-09-30 工業技術院長 空間位置決め方法
US5949740A (en) * 1997-06-06 1999-09-07 Litton Systems, Inc. Unbalanced fiber optic Michelson interferometer as an optical pick-off
US6525824B1 (en) * 1999-06-29 2003-02-25 California Institute Of Technology Dual beam optical interferometer
US6693743B2 (en) * 2000-06-07 2004-02-17 Cirvine Corporation Birefringent devices
DE10041041A1 (de) * 2000-08-22 2002-03-07 Zeiss Carl Interferometeranordnung und Interferometrisches Verfahren
EP1460781A1 (de) * 2001-12-27 2004-09-22 Sumitomo Electric Industries, Ltd. Optisches filter, verschachteler und optisches kommunikationssystem
US20050140981A1 (en) * 2002-04-18 2005-06-30 Rudolf Waelti Measurement of optical properties
WO2003086180A2 (de) * 2002-04-18 2003-10-23 Haag-Streit Ag Messung optischer eigenschaften
US7154659B1 (en) * 2002-04-18 2006-12-26 General Photonics Corporation Optical depolarizers and DGD generators based on optical delay
US7139081B2 (en) * 2002-09-09 2006-11-21 Zygo Corporation Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
US7869057B2 (en) * 2002-09-09 2011-01-11 Zygo Corporation Multiple-angle multiple-wavelength interferometer using high-NA imaging and spectral analysis
US6842254B2 (en) * 2002-10-16 2005-01-11 Fiso Technologies Inc. System and method for measuring an optical path difference in a sensing interferometer
US7106454B2 (en) 2003-03-06 2006-09-12 Zygo Corporation Profiling complex surface structures using scanning interferometry
US7271918B2 (en) * 2003-03-06 2007-09-18 Zygo Corporation Profiling complex surface structures using scanning interferometry
US7324214B2 (en) * 2003-03-06 2008-01-29 Zygo Corporation Interferometer and method for measuring characteristics of optically unresolved surface features
EP1664932B1 (de) 2003-09-15 2015-01-28 Zygo Corporation Interferometrische analyse von oberflächen
TWI335417B (en) * 2003-10-27 2011-01-01 Zygo Corp Method and apparatus for thin film measurement
TWI245926B (en) * 2004-05-10 2005-12-21 Chroma Ate Inc Device and method of an interference scanner
US20060012582A1 (en) * 2004-07-15 2006-01-19 De Lega Xavier C Transparent film measurements
JP2006162366A (ja) * 2004-12-06 2006-06-22 Fujinon Corp 光断層映像装置
US7884947B2 (en) * 2005-01-20 2011-02-08 Zygo Corporation Interferometry for determining characteristics of an object surface, with spatially coherent illumination
US7428057B2 (en) * 2005-01-20 2008-09-23 Zygo Corporation Interferometer for determining characteristics of an object surface, including processing and calibration
US7518731B2 (en) * 2005-02-01 2009-04-14 Chian Chiu Li Interferometric MOEMS sensor
WO2006102997A1 (en) * 2005-03-30 2006-10-05 Carl Zeiss Smt Ag Method of manufacturing an optical element
WO2006125131A2 (en) * 2005-05-19 2006-11-23 Zygo Corporation Analyzing low-coherence interferometry signals for thin film structures
US7636168B2 (en) * 2005-10-11 2009-12-22 Zygo Corporation Interferometry method and system including spectral decomposition
EP1785690A1 (de) * 2005-11-10 2007-05-16 Haag-Streit Ag Verfahren und Vorrichtung zur Ermittlung geometrischer Werte an einem Gegenstand
WO2008011510A2 (en) * 2006-07-21 2008-01-24 Zygo Corporation Compensation of systematic effects in low coherence interferometry
WO2008080127A2 (en) * 2006-12-22 2008-07-03 Zygo Corporation Apparatus and method for measuring characteristics of surface features
US7889355B2 (en) 2007-01-31 2011-02-15 Zygo Corporation Interferometry for lateral metrology
WO2008154349A2 (en) * 2007-06-06 2008-12-18 Oregon Health & Science University Method and apparatus for localized polarization sensitive imaging
US7619746B2 (en) * 2007-07-19 2009-11-17 Zygo Corporation Generating model signals for interferometry
US7920269B2 (en) * 2007-08-03 2011-04-05 Chung Yuan Christian University System and method for measuring interferences
US8072611B2 (en) * 2007-10-12 2011-12-06 Zygo Corporation Interferometric analysis of under-resolved features
WO2009064670A2 (en) * 2007-11-13 2009-05-22 Zygo Corporation Interferometer utilizing polarization scanning
US8126677B2 (en) * 2007-12-14 2012-02-28 Zygo Corporation Analyzing surface structure using scanning interferometry
WO2009085690A1 (en) * 2007-12-21 2009-07-09 Bausch & Lomb Incorporated Ophthalmic instrument alignment apparatus and method of using same
DE602008002580D1 (de) * 2008-07-11 2010-10-28 Optopol Technology Spolka Z O Spektrumstomographie mit optischer Kohärenz
TW201034626A (en) * 2008-07-21 2010-10-01 Optovue Inc Extended range imaging
US8120781B2 (en) * 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US8294971B2 (en) * 2008-12-18 2012-10-23 Bausch • Lomb Incorporated Apparatus comprising an optical path delay scanner
EP2495522A1 (de) * 2009-03-30 2012-09-05 National University Corporation Nagaoka University Interferometer
DE102009022958A1 (de) * 2009-05-28 2010-12-02 Carl Zeiss Meditec Ag Vorrichtung und Verfahren zur optischen Messung von Relativabständen
US8675205B2 (en) * 2009-06-15 2014-03-18 Artur G. Olszak Optical coherence tomography using spectrally controlled interferometry
WO2011076503A1 (de) * 2009-12-23 2011-06-30 Endress+Hauser Gmbh+Co.Kg Interferometer und drucksensoranordnung mit einem solchen interferometer
TWI417534B (zh) * 2010-01-27 2013-12-01 私立中原大學 Surface and internal interface of the contrast and measurement device
JP2011220912A (ja) * 2010-04-13 2011-11-04 Mitsutoyo Corp 干渉対物レンズ及び当該干渉対物レンズを備えた光干渉測定装置
WO2012162809A1 (en) * 2011-05-31 2012-12-06 Tornado Medical Systems, Inc. Interferometery on a planar substrate
US9482511B2 (en) * 2011-07-22 2016-11-01 Insight Photonic Solutions, Inc. System and method for interlacing differing coherence length sweeps to improve OCT image quality
EP3108212B1 (de) 2014-02-21 2017-12-13 ABB Schweiz AG Interferometrischer sensor
WO2016145393A1 (en) 2015-03-12 2016-09-15 Purdue Research Foundation Biodynamic microscopes and methods of use thereof
RU173567U1 (ru) * 2016-12-26 2017-08-30 Федеральное государственное автономное образовательное учреждение высшего образования "Дальневосточный федеральный университет" (ДВФУ) Оптический измеритель давления
IT201900023229A1 (it) * 2019-12-06 2021-06-06 Adige Spa Procedimento e sistema per la determinazione della posizione di un elemento di un sistema ottico in un complesso di lavorazione o misura di un oggetto tramite misure interferometriche parallele

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE320201B (de) * 1968-07-26 1970-02-02 B Colding
DE3044183A1 (de) * 1980-11-24 1982-06-24 Reinhard Dipl.-Phys. Dr. 7250 Leonberg Ulrich Verfahren zur optischen messung von laengen und laengenaenderungen und anordnung zur durchfuehrung des verfahrens
GB8320629D0 (en) * 1983-07-30 1983-09-01 Pa Consulting Services Displacement measuring apparatus
DE3623265C2 (de) * 1986-07-10 1994-11-03 Siemens Ag Verfahren und Anordnung zur faseroptischen Messung einer Weglänge oder einer Weglängenänderung
DE3825475A1 (de) * 1988-07-27 1990-02-01 Bodenseewerk Geraetetech Optischer lagegeber

Also Published As

Publication number Publication date
GB8903725D0 (en) 1989-04-05
DE69028846D1 (de) 1996-11-14
EP0458888A1 (de) 1991-12-04
EP0458888B1 (de) 1996-10-09
JPH04505050A (ja) 1992-09-03
WO1990009557A1 (en) 1990-08-23
CA2046902A1 (en) 1990-08-19
DE69028846T2 (de) 1997-04-30
US5301010A (en) 1994-04-05

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee