ATE152528T1 - Maskenausrichtung für abstandslithographie unter verwendung eines gespeicherten videobildes - Google Patents

Maskenausrichtung für abstandslithographie unter verwendung eines gespeicherten videobildes

Info

Publication number
ATE152528T1
ATE152528T1 AT93101829T AT93101829T ATE152528T1 AT E152528 T1 ATE152528 T1 AT E152528T1 AT 93101829 T AT93101829 T AT 93101829T AT 93101829 T AT93101829 T AT 93101829T AT E152528 T1 ATE152528 T1 AT E152528T1
Authority
AT
Austria
Prior art keywords
image
stored
microscope
mask alignment
focal position
Prior art date
Application number
AT93101829T
Other languages
English (en)
Inventor
Peter L Domenicali
Original Assignee
Karl Suss America Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Karl Suss America Inc filed Critical Karl Suss America Inc
Application granted granted Critical
Publication of ATE152528T1 publication Critical patent/ATE152528T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7069—Alignment mark illumination, e.g. darkfield, dual focus
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • H04N7/181—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast for receiving images from a plurality of remote sources

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Microscoopes, Condenser (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Liquid Crystal (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AT93101829T 1992-02-07 1993-02-05 Maskenausrichtung für abstandslithographie unter verwendung eines gespeicherten videobildes ATE152528T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/832,413 US5204739A (en) 1992-02-07 1992-02-07 Proximity mask alignment using a stored video image

Publications (1)

Publication Number Publication Date
ATE152528T1 true ATE152528T1 (de) 1997-05-15

Family

ID=25261565

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93101829T ATE152528T1 (de) 1992-02-07 1993-02-05 Maskenausrichtung für abstandslithographie unter verwendung eines gespeicherten videobildes

Country Status (5)

Country Link
US (1) US5204739A (de)
EP (1) EP0556669B1 (de)
JP (1) JPH0629173A (de)
AT (1) ATE152528T1 (de)
DE (2) DE556669T1 (de)

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Also Published As

Publication number Publication date
DE556669T1 (de) 1996-11-28
JPH0629173A (ja) 1994-02-04
EP0556669B1 (de) 1997-05-02
DE69310231D1 (de) 1997-06-05
EP0556669A1 (de) 1993-08-25
US5204739A (en) 1993-04-20
DE69310231T2 (de) 1997-08-28

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UEP Publication of translation of european patent specification