ATE152868T1 - Verfahren und vorrichtung zur herstellung von piezoelektrischen resonatoren - Google Patents

Verfahren und vorrichtung zur herstellung von piezoelektrischen resonatoren

Info

Publication number
ATE152868T1
ATE152868T1 AT93905717T AT93905717T ATE152868T1 AT E152868 T1 ATE152868 T1 AT E152868T1 AT 93905717 T AT93905717 T AT 93905717T AT 93905717 T AT93905717 T AT 93905717T AT E152868 T1 ATE152868 T1 AT E152868T1
Authority
AT
Austria
Prior art keywords
piezoelectric resonators
high vacuum
producing piezoelectric
resonator elements
producing
Prior art date
Application number
AT93905717T
Other languages
English (en)
Inventor
Lennart Lindberg
Lars-Goeran Goeransson
Bengt Kasemo
Bo Kristiansson
Guy Portnoff
Original Assignee
Quartz Pro Line Hb
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quartz Pro Line Hb filed Critical Quartz Pro Line Hb
Application granted granted Critical
Publication of ATE152868T1 publication Critical patent/ATE152868T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Physical Vapour Deposition (AREA)
AT93905717T 1992-03-02 1993-02-24 Verfahren und vorrichtung zur herstellung von piezoelektrischen resonatoren ATE152868T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9200630A SE469501B (sv) 1992-03-02 1992-03-02 Foerfarande och anlaeggning foer framstaellning av piezoelektriska resonatorer

Publications (1)

Publication Number Publication Date
ATE152868T1 true ATE152868T1 (de) 1997-05-15

Family

ID=20385482

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93905717T ATE152868T1 (de) 1992-03-02 1993-02-24 Verfahren und vorrichtung zur herstellung von piezoelektrischen resonatoren

Country Status (8)

Country Link
EP (1) EP0629320B1 (de)
JP (1) JPH07507185A (de)
AT (1) ATE152868T1 (de)
AU (1) AU3653693A (de)
DE (1) DE69310504T2 (de)
ES (1) ES2102020T3 (de)
SE (1) SE469501B (de)
WO (1) WO1993018584A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103459991A (zh) 2011-01-31 2013-12-18 维泰克实验室技术股份有限公司 具有数字的体积显示的瓶式分配器
US20140002642A1 (en) 2012-06-15 2014-01-02 Elmar SWIEGOT Absolute position detection

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5448190A (en) * 1977-09-22 1979-04-16 Matsushima Kogyo Kk Method of regulating frequency
US4166563A (en) * 1977-09-27 1979-09-04 Societe Suisse Pour L'industrie Horlogere Management Services, S.A. Transfer machine for sealing electronic or like components under vacuum
US4300272A (en) * 1979-12-10 1981-11-17 The United States Of America As Represented By The Secretary Of The Army High vacuum continuous cycle fabrication facility
US4392287A (en) * 1980-08-01 1983-07-12 The United States Of America As Represented By The Secretary Of The Army Quartz resonator processing system
US4422226A (en) * 1980-08-14 1983-12-27 Cts Corporation Process for producing crystal resonators
JPS57113607A (en) * 1980-12-30 1982-07-15 Nippon Dempa Kogyo Co Ltd Frequency adjuster for quartz oscillator
JP2602215B2 (ja) * 1986-12-15 1997-04-23 日本電波工業 株式会社 圧電振動子の周波数調整方法
JP2746668B2 (ja) * 1989-07-18 1998-05-06 松下電器産業株式会社 静電集塵装置

Also Published As

Publication number Publication date
SE9200630L (sv) 1993-07-12
JPH07507185A (ja) 1995-08-03
DE69310504T2 (de) 1997-09-11
ES2102020T3 (es) 1997-07-16
WO1993018584A1 (en) 1993-09-16
EP0629320A1 (de) 1994-12-21
SE9200630D0 (sv) 1992-03-02
EP0629320B1 (de) 1997-05-07
SE469501B (sv) 1993-07-12
DE69310504D1 (de) 1997-06-12
AU3653693A (en) 1993-10-05

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Legal Events

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