ATE152868T1 - Verfahren und vorrichtung zur herstellung von piezoelektrischen resonatoren - Google Patents

Verfahren und vorrichtung zur herstellung von piezoelektrischen resonatoren

Info

Publication number
ATE152868T1
ATE152868T1 AT93905717T AT93905717T ATE152868T1 AT E152868 T1 ATE152868 T1 AT E152868T1 AT 93905717 T AT93905717 T AT 93905717T AT 93905717 T AT93905717 T AT 93905717T AT E152868 T1 ATE152868 T1 AT E152868T1
Authority
AT
Austria
Prior art keywords
piezoelectric resonators
high vacuum
producing piezoelectric
resonator elements
producing
Prior art date
Application number
AT93905717T
Other languages
English (en)
Inventor
Lennart Lindberg
Lars-Goeran Goeransson
Bengt Kasemo
Bo Kristiansson
Guy Portnoff
Original Assignee
Quartz Pro Line Hb
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quartz Pro Line Hb filed Critical Quartz Pro Line Hb
Application granted granted Critical
Publication of ATE152868T1 publication Critical patent/ATE152868T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Physical Vapour Deposition (AREA)
AT93905717T 1992-03-02 1993-02-24 Verfahren und vorrichtung zur herstellung von piezoelektrischen resonatoren ATE152868T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9200630A SE9200630L (sv) 1992-03-02 1992-03-02 Foerfarande och anlaeggning foer framstaellning av piezoelektriska resonatorer

Publications (1)

Publication Number Publication Date
ATE152868T1 true ATE152868T1 (de) 1997-05-15

Family

ID=20385482

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93905717T ATE152868T1 (de) 1992-03-02 1993-02-24 Verfahren und vorrichtung zur herstellung von piezoelektrischen resonatoren

Country Status (8)

Country Link
EP (1) EP0629320B1 (de)
JP (1) JPH07507185A (de)
AT (1) ATE152868T1 (de)
AU (1) AU3653693A (de)
DE (1) DE69310504T2 (de)
ES (1) ES2102020T3 (de)
SE (1) SE9200630L (de)
WO (1) WO1993018584A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103459991A (zh) 2011-01-31 2013-12-18 维泰克实验室技术股份有限公司 具有数字的体积显示的瓶式分配器
US20140002642A1 (en) 2012-06-15 2014-01-02 Elmar SWIEGOT Absolute position detection

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5448190A (en) * 1977-09-22 1979-04-16 Matsushima Kogyo Kk Method of regulating frequency
US4166563A (en) * 1977-09-27 1979-09-04 Societe Suisse Pour L'industrie Horlogere Management Services, S.A. Transfer machine for sealing electronic or like components under vacuum
US4300272A (en) * 1979-12-10 1981-11-17 The United States Of America As Represented By The Secretary Of The Army High vacuum continuous cycle fabrication facility
US4392287A (en) * 1980-08-01 1983-07-12 The United States Of America As Represented By The Secretary Of The Army Quartz resonator processing system
US4422226A (en) * 1980-08-14 1983-12-27 Cts Corporation Process for producing crystal resonators
JPS57113607A (en) * 1980-12-30 1982-07-15 Nippon Dempa Kogyo Co Ltd Frequency adjuster for quartz oscillator
JP2602215B2 (ja) * 1986-12-15 1997-04-23 日本電波工業 株式会社 圧電振動子の周波数調整方法
JP2746668B2 (ja) * 1989-07-18 1998-05-06 松下電器産業株式会社 静電集塵装置

Also Published As

Publication number Publication date
SE469501B (sv) 1993-07-12
WO1993018584A1 (en) 1993-09-16
SE9200630L (sv) 1993-07-12
DE69310504D1 (de) 1997-06-12
AU3653693A (en) 1993-10-05
ES2102020T3 (es) 1997-07-16
DE69310504T2 (de) 1997-09-11
JPH07507185A (ja) 1995-08-03
EP0629320A1 (de) 1994-12-21
EP0629320B1 (de) 1997-05-07
SE9200630D0 (sv) 1992-03-02

Similar Documents

Publication Publication Date Title
DE69535334D1 (de) Verfahren zur Herstellung von amperometrischen Elektroden
DE69512942D1 (de) Verfahren zur Herstellung von Silber-Palladium Pulver durch Aerosol Zersetzung
DE69915477D1 (de) Verfahren zur qualitativen Verbesserung der Produkte aus Tabakpflanzen
ES2058124T3 (es) Aerosoles que contienen liposomas y metodo para su preparacion.
DE69427636D1 (de) Verfahren zur Herstellung von hermetisch abgedichteten Filtereinheiten
DE3852799D1 (de) Verfahren zur trockenen sterilisierung ärztlicher geräte und materialien.
DE3485922D1 (de) Stickstoff-generator-verfahren zur herstellung von kleinen volumina hochreinen stickstoffs aus pressluft.
FI885928L (fi) Menetelmä keraamisten sekarakennekappaleiden muuntamiseksi karburointiprosessin avulla ja menetelmällä tuotetut kappaleet
DE69116070D1 (de) Verfahren zur Behandlung von Fruchtsaft unter hohem Druck
DE3375265D1 (en) High-frequency piezoelectric resonator and process for its production
DE69005664D1 (de) Verfahren zur Erzeugung keramischer Verbundwerkstoffe.
DE3583043D1 (de) Verfahren zur reinigung von podophyllotoxin.
MX7708E (es) Procedimiento mejorado para estimular el crecimiento de plantas
DE3854307D1 (de) Hohlkathodenkanone und Vorrichtung zur Materialablagerung durch Ionenbeschichtung.
DE68916086D1 (de) Verfahren zur Herstellung von Kohlenstoff/Kohlenstoff-Verbundstoffen.
DE69310504D1 (de) Verfahren und vorrichtung zur herstellung von piezoelektrischen resonatoren
DE3854626D1 (de) Verfahren zur Herstellung von Komponenten aus supraleitenden oxidkeramischen Materialien.
FR2650822B1 (fr) Procede de depot de couches minces
ES2063974T3 (es) Una nueva forma estable de cefradina, un proceso para su produccion y compuestos intermedios usados en tal proceso.
FI962549A0 (fi) Metallinen siirrännäinen ja menetelmä metallisen siirrännäisen käsittelemiseksi
DE3461514D1 (en) Method of manufacturing highly porous bodies from inorganic material which may be used for preparing hygroscopic, inflammable or radioactive articles
DE69100200D1 (de) Verfahren zur industriellen herstellung von 3-sulfamoyl-4-chlor-n-(2,3-dihydro-2-methyl-1h-indol-1-yl)-benzamide ausgehend von 2,3-dihydro-2-methyl-1h-indol und hydroxylamine-o-sulfonsaeure.
JPS526441A (en) Manufacturing method of parallelelectric field excitation piezo-electr ic filters
FR2530178B1 (fr) Procede de fabrication par injection de pieces creuses en ceramique
DE69012488D1 (de) Verfahren zur Herstellung von Diamant-Einkristallen durch chemische Dampfabscheidung.

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties