ATE155611T1 - Formierung von einer schicht - Google Patents

Formierung von einer schicht

Info

Publication number
ATE155611T1
ATE155611T1 AT95907759T AT95907759T ATE155611T1 AT E155611 T1 ATE155611 T1 AT E155611T1 AT 95907759 T AT95907759 T AT 95907759T AT 95907759 T AT95907759 T AT 95907759T AT E155611 T1 ATE155611 T1 AT E155611T1
Authority
AT
Austria
Prior art keywords
workpiece
liquid
chamber
pulse
pressure
Prior art date
Application number
AT95907759T
Other languages
English (en)
Inventor
Christopher David Dobson
Original Assignee
Electrotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electrotech Ltd filed Critical Electrotech Ltd
Application granted granted Critical
Publication of ATE155611T1 publication Critical patent/ATE155611T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0404—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • B23K20/021—Isostatic pressure welding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/01—Manufacture or treatment
    • H10W20/031—Manufacture or treatment of conductive parts of the interconnections
    • H10W20/056—Manufacture or treatment of conductive parts of the interconnections by filling conductive material into holes, grooves or trenches

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Laminated Bodies (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Magnetic Heads (AREA)
  • Semiconductor Lasers (AREA)
  • Led Devices (AREA)
AT95907759T 1994-02-09 1995-02-09 Formierung von einer schicht ATE155611T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9402486A GB9402486D0 (en) 1994-02-09 1994-02-09 Forming a layer

Publications (1)

Publication Number Publication Date
ATE155611T1 true ATE155611T1 (de) 1997-08-15

Family

ID=10750112

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95907759T ATE155611T1 (de) 1994-02-09 1995-02-09 Formierung von einer schicht

Country Status (8)

Country Link
US (2) US5843535A (de)
EP (1) EP0693221B1 (de)
JP (1) JPH08508854A (de)
KR (1) KR100330376B1 (de)
AT (1) ATE155611T1 (de)
DE (1) DE69500438T2 (de)
GB (1) GB9402486D0 (de)
WO (1) WO1995022170A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9402486D0 (en) * 1994-02-09 1994-03-30 Electrotech Ltd Forming a layer
US6701941B1 (en) * 1997-05-09 2004-03-09 Semitool, Inc. Method for treating the surface of a workpiece
GB9714531D0 (en) * 1997-07-11 1997-09-17 Trikon Equip Ltd Forming a layer
US6413583B1 (en) 1998-02-11 2002-07-02 Applied Materials, Inc. Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound
US6340435B1 (en) 1998-02-11 2002-01-22 Applied Materials, Inc. Integrated low K dielectrics and etch stops
US6800571B2 (en) * 1998-09-29 2004-10-05 Applied Materials Inc. CVD plasma assisted low dielectric constant films
US7510625B2 (en) * 1999-03-23 2009-03-31 Dynawave Corporation Device and method of using explosive forces in a contained environment
US6176970B1 (en) 1999-03-23 2001-01-23 Dynawave Corporation Device and method of using explosive forces in a contained liquid environment
US6395647B1 (en) * 1999-09-02 2002-05-28 Micron Technology, Inc. Chemical treatment of semiconductor substrates
US20040006164A1 (en) * 2002-01-23 2004-01-08 Abu-Isa Ismat A. Intumescent fire retardant polymeric composition
TW587582U (en) * 2003-06-11 2004-05-11 Razor Usa Llc Driving structure for manpower vehicle
DE102006030364A1 (de) * 2006-06-27 2008-01-03 Siemens Ag Verfahren zum Entfernen einer Schutzbeschichtung von einem Bauteil

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3995581A (en) * 1974-08-27 1976-12-07 Smejda Richard K Patterning and blending with lateral distribution channels and crosswise feeder systems
GB2196566B (en) * 1986-06-27 1990-03-07 Ex Cell O Corp Method of forming articles
DE69233222T2 (de) * 1991-05-28 2004-08-26 Trikon Technologies Ltd., Thornbury Verfahren zum Füllen eines Hohlraumes in einem Substrat
EP0526889B1 (de) * 1991-08-06 1997-05-07 Nec Corporation Verfahren zum Aufbringen einer Metall- oder Passivierenschicht mit hoher Haftung über einem isolierten Halbleitersubstrat
US5474796A (en) * 1991-09-04 1995-12-12 Protogene Laboratories, Inc. Method and apparatus for conducting an array of chemical reactions on a support surface
US5279316A (en) * 1992-08-18 1994-01-18 P.C.T. Systems, Inc. Multiprocessing sonic bath system for semiconductor wafers
GB9402486D0 (en) * 1994-02-09 1994-03-30 Electrotech Ltd Forming a layer
US5620524A (en) * 1995-02-27 1997-04-15 Fan; Chiko Apparatus for fluid delivery in chemical vapor deposition systems

Also Published As

Publication number Publication date
GB9402486D0 (en) 1994-03-30
EP0693221B1 (de) 1997-07-16
WO1995022170A1 (en) 1995-08-17
EP0693221A1 (de) 1996-01-24
DE69500438D1 (de) 1997-08-21
US6019847A (en) 2000-02-01
US5843535A (en) 1998-12-01
DE69500438T2 (de) 1998-04-02
JPH08508854A (ja) 1996-09-17
KR100330376B1 (ko) 2002-11-21
KR960702170A (ko) 1996-03-28

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Legal Events

Date Code Title Description
EEFA Change of the company name
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee