ATE156895T1 - Mikroventil - Google Patents

Mikroventil

Info

Publication number
ATE156895T1
ATE156895T1 AT94916136T AT94916136T ATE156895T1 AT E156895 T1 ATE156895 T1 AT E156895T1 AT 94916136 T AT94916136 T AT 94916136T AT 94916136 T AT94916136 T AT 94916136T AT E156895 T1 ATE156895 T1 AT E156895T1
Authority
AT
Austria
Prior art keywords
microvalve
way
heating elements
diaphragm
diaphragm structure
Prior art date
Application number
AT94916136T
Other languages
English (en)
Inventor
Thomas Lisec
Hans-Joachim Quenzer
Bernd Wagner
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Application granted granted Critical
Publication of ATE156895T1 publication Critical patent/ATE156895T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F15C3/04—Circuit elements having moving parts using diaphragms

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Temperature-Responsive Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Lift Valve (AREA)
  • Drying Of Semiconductors (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Micromachines (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Forging (AREA)
AT94916136T 1993-05-27 1994-05-21 Mikroventil ATE156895T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4317676 1993-05-27

Publications (1)

Publication Number Publication Date
ATE156895T1 true ATE156895T1 (de) 1997-08-15

Family

ID=6489068

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94916136T ATE156895T1 (de) 1993-05-27 1994-05-21 Mikroventil

Country Status (6)

Country Link
US (1) US5681024A (de)
EP (1) EP0700485B1 (de)
JP (1) JP3418741B2 (de)
AT (1) ATE156895T1 (de)
DE (2) DE59403742D1 (de)
WO (1) WO1994028318A1 (de)

Families Citing this family (96)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6230501B1 (en) 1994-04-14 2001-05-15 Promxd Technology, Inc. Ergonomic systems and methods providing intelligent adaptive surfaces and temperature control
DE4445686C2 (de) * 1994-12-21 1999-06-24 Fraunhofer Ges Forschung Mikroventilanordnung, insbesondere für pneumatische Steuerungen
DE19511022C1 (de) * 1995-03-28 1996-06-20 Hahn Schickard Ges Mikromechanisches Ventil für Mikrodosiereinrichtungen
US6141497A (en) * 1995-06-09 2000-10-31 Marotta Scientific Controls, Inc. Multilayer micro-gas rheostat with electrical-heater control of gas flow
US6068010A (en) * 1995-06-09 2000-05-30 Marotta Scientific Controls, Inc. Microvalve and microthruster for satellites and methods of making and using the same
DE19522806C2 (de) * 1995-06-23 1997-06-12 Karlsruhe Forschzent Verfahren zur Herstellung eines Mikromembranventils
US5967163A (en) 1996-01-30 1999-10-19 Abbott Laboratories Actuator and method
DE19637928C2 (de) * 1996-02-10 1999-01-14 Fraunhofer Ges Forschung Bistabile Membran-Aktivierungseinrichtung und Membran
US5880752A (en) * 1996-05-09 1999-03-09 Hewlett-Packard Company Print system for ink-jet pens
DE19749011A1 (de) * 1996-11-19 1998-05-20 Lang Volker Mikroventil
WO1998032616A1 (en) * 1997-01-24 1998-07-30 California Institute Of Technology Mems valve
US6087638A (en) * 1997-07-15 2000-07-11 Silverbrook Research Pty Ltd Corrugated MEMS heater structure
US7214298B2 (en) * 1997-09-23 2007-05-08 California Institute Of Technology Microfabricated cell sorter
FR2772512B1 (fr) * 1997-12-16 2004-04-16 Commissariat Energie Atomique Microsysteme a element deformable sous l'effet d'un actionneur thermique
DE19816283A1 (de) * 1998-04-11 1999-10-14 Festo Ag & Co Mengenverstärkereinrichtung für Fluidströme
KR100414513B1 (ko) * 1999-02-23 2004-01-13 마츠시다 덴코 가부시키가이샤 반도체 장치 및 이를 이용한 반도체 마이크로 액튜에이터및 반도체 마이크로 밸브 및 반도체 마이크로 릴레이 및반도체 장치의 제조 방법 및 반도체 마이크로액튜에이터의 제조 방법
US6540203B1 (en) * 1999-03-22 2003-04-01 Kelsey-Hayes Company Pilot operated microvalve device
US7244396B2 (en) * 1999-04-06 2007-07-17 Uab Research Foundation Method for preparation of microarrays for screening of crystal growth conditions
US7214540B2 (en) 1999-04-06 2007-05-08 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US7247490B2 (en) 1999-04-06 2007-07-24 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US7250305B2 (en) * 2001-07-30 2007-07-31 Uab Research Foundation Use of dye to distinguish salt and protein crystals under microcrystallization conditions
US7219449B1 (en) 1999-05-03 2007-05-22 Promdx Technology, Inc. Adaptively controlled footwear
US8550119B2 (en) * 1999-06-28 2013-10-08 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8709153B2 (en) 1999-06-28 2014-04-29 California Institute Of Technology Microfludic protein crystallography techniques
CN100402850C (zh) * 1999-06-28 2008-07-16 加利福尼亚技术学院 微型制造的弹性体的阀和泵系统
US6929030B2 (en) * 1999-06-28 2005-08-16 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7217321B2 (en) * 2001-04-06 2007-05-15 California Institute Of Technology Microfluidic protein crystallography techniques
US6899137B2 (en) * 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7052545B2 (en) * 2001-04-06 2006-05-30 California Institute Of Technology High throughput screening of crystallization of materials
US8052792B2 (en) 2001-04-06 2011-11-08 California Institute Of Technology Microfluidic protein crystallography techniques
US7144616B1 (en) 1999-06-28 2006-12-05 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7244402B2 (en) * 2001-04-06 2007-07-17 California Institute Of Technology Microfluidic protein crystallography
US7306672B2 (en) * 2001-04-06 2007-12-11 California Institute Of Technology Microfluidic free interface diffusion techniques
US7195670B2 (en) * 2000-06-27 2007-03-27 California Institute Of Technology High throughput screening of crystallization of materials
US7459022B2 (en) * 2001-04-06 2008-12-02 California Institute Of Technology Microfluidic protein crystallography
US20080277007A1 (en) * 1999-06-28 2008-11-13 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US20050148018A1 (en) * 1999-10-07 2005-07-07 David Weiner Methods of identifying inverse agonists of the serotonin 2A receptor
US7763345B2 (en) 1999-12-14 2010-07-27 Mannington Mills, Inc. Thermoplastic planks and methods for making the same
WO2001067369A2 (en) * 2000-03-03 2001-09-13 California Institute Of Technology Combinatorial array for nucleic acid analysis
US7867763B2 (en) 2004-01-25 2011-01-11 Fluidigm Corporation Integrated chip carriers with thermocycler interfaces and methods of using the same
US20050118073A1 (en) * 2003-11-26 2005-06-02 Fluidigm Corporation Devices and methods for holding microfluidic devices
US7351376B1 (en) 2000-06-05 2008-04-01 California Institute Of Technology Integrated active flux microfluidic devices and methods
US6494804B1 (en) * 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission
US7062418B2 (en) 2000-06-27 2006-06-13 Fluidigm Corporation Computer aided design method and system for developing a microfluidic system
US7294503B2 (en) 2000-09-15 2007-11-13 California Institute Of Technology Microfabricated crossflow devices and methods
EP1322936A2 (de) * 2000-10-03 2003-07-02 California Institute Of Technology Mikrofluidvorrichtungen und verwendungsverfahren
US7678547B2 (en) * 2000-10-03 2010-03-16 California Institute Of Technology Velocity independent analyte characterization
US7097809B2 (en) * 2000-10-03 2006-08-29 California Institute Of Technology Combinatorial synthesis system
AU1189702A (en) 2000-10-13 2002-04-22 Fluidigm Corp Microfluidic device based sample injection system for analytical devices
WO2002033268A2 (en) 2000-10-18 2002-04-25 Research Foundation Of State University Of New York Microvalve
EP1334279A1 (de) * 2000-11-06 2003-08-13 Nanostream, Inc. Unidirektional-durchfluss-mikrofluidkomponenten
US7232109B2 (en) * 2000-11-06 2007-06-19 California Institute Of Technology Electrostatic valves for microfluidic devices
EP1345698A4 (de) * 2000-11-16 2006-05-17 Fluidigm Corp Mikrofluidvorrichtungen zur einleitung und abgabe von fluiden aus mikrofluidsystemen
AU2002230524A1 (en) 2000-11-16 2002-05-27 California Institute Of Technology Apparatus and methods for conducting assays and high throughput screening
US6626417B2 (en) 2001-02-23 2003-09-30 Becton, Dickinson And Company Microfluidic valve and microactuator for a microvalve
US20050196785A1 (en) * 2001-03-05 2005-09-08 California Institute Of Technology Combinational array for nucleic acid analysis
US7670429B2 (en) 2001-04-05 2010-03-02 The California Institute Of Technology High throughput screening of crystallization of materials
US20020164816A1 (en) * 2001-04-06 2002-11-07 California Institute Of Technology Microfluidic sample separation device
JP5162074B2 (ja) 2001-04-06 2013-03-13 フルイディグム コーポレイション ポリマー表面修飾
US6752922B2 (en) * 2001-04-06 2004-06-22 Fluidigm Corporation Microfluidic chromatography
AU2002307152A1 (en) 2001-04-06 2002-10-21 California Institute Of Technology Nucleic acid amplification utilizing microfluidic devices
US20050149304A1 (en) * 2001-06-27 2005-07-07 Fluidigm Corporation Object oriented microfluidic design method and system
WO2003017301A1 (en) * 2001-08-20 2003-02-27 Honeywell International Inc. Snap action thermal switch
JP2003062798A (ja) * 2001-08-21 2003-03-05 Advantest Corp アクチュエータ及びスイッチ
US7075162B2 (en) * 2001-08-30 2006-07-11 Fluidigm Corporation Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
US7025323B2 (en) 2001-09-21 2006-04-11 The Regents Of The University Of California Low power integrated pumping and valving arrays for microfluidic systems
WO2003031066A1 (en) 2001-10-11 2003-04-17 California Institute Of Technology Devices utilizing self-assembled gel and method of manufacture
US8440093B1 (en) 2001-10-26 2013-05-14 Fuidigm Corporation Methods and devices for electronic and magnetic sensing of the contents of microfluidic flow channels
US7691333B2 (en) 2001-11-30 2010-04-06 Fluidigm Corporation Microfluidic device and methods of using same
EP1463796B1 (de) 2001-11-30 2013-01-09 Fluidigm Corporation Mikrofluidische vorrichtung und verfahren zu ihrer verwendung
US7025324B1 (en) 2002-01-04 2006-04-11 Massachusetts Institute Of Technology Gating apparatus and method of manufacture
EP1499706A4 (de) 2002-04-01 2010-11-03 Fluidigm Corp Mikrofluidische partikelanalysesysteme
US7312085B2 (en) 2002-04-01 2007-12-25 Fluidigm Corporation Microfluidic particle-analysis systems
US8220494B2 (en) 2002-09-25 2012-07-17 California Institute Of Technology Microfluidic large scale integration
CA2500283A1 (en) 2002-09-25 2004-04-08 California Institute Of Technology Microfluidic large scale integration
JP5695287B2 (ja) 2002-10-02 2015-04-01 カリフォルニア インスティテュート オブ テクノロジー 微小流体の核酸解析
CN100363669C (zh) * 2002-12-30 2008-01-23 中国科学院理化技术研究所 用于启、闭微/纳米流体通道的冰阀
US8828663B2 (en) 2005-03-18 2014-09-09 Fluidigm Corporation Thermal reaction device and method for using the same
US7604965B2 (en) 2003-04-03 2009-10-20 Fluidigm Corporation Thermal reaction device and method for using the same
US7476363B2 (en) 2003-04-03 2009-01-13 Fluidigm Corporation Microfluidic devices and methods of using same
US20050145496A1 (en) 2003-04-03 2005-07-07 Federico Goodsaid Thermal reaction device and method for using the same
EP1615721B1 (de) 2003-04-03 2014-06-18 Fluidigm Corporation Mikrofluidvorrichtungen und verwendungsverfahren dafür
WO2004094020A2 (en) * 2003-04-17 2004-11-04 Fluidigm Corporation Crystal growth devices and systems, and methods for using same
CA2526368A1 (en) * 2003-05-20 2004-12-02 Fluidigm Corporation Method and system for microfluidic device and imaging thereof
EP1667829A4 (de) * 2003-07-28 2008-12-10 Fluidigm Corp Bildverarbeitungsverfahren und system für mikrofluidvorrichtungen
US7413712B2 (en) * 2003-08-11 2008-08-19 California Institute Of Technology Microfluidic rotary flow reactor matrix
US7100889B2 (en) * 2003-12-18 2006-09-05 Delaware Capital Formation, Inc. Miniature electrically operated solenoid valve
US7407799B2 (en) * 2004-01-16 2008-08-05 California Institute Of Technology Microfluidic chemostat
CA2554240A1 (en) 2004-01-25 2005-08-11 Fluidigm Corporation Crystal forming devices and systems and methods for making and using the same
US7309056B2 (en) * 2004-03-26 2007-12-18 Smc Kabushiki Kaisha Dual pedestal shut-off valve
US20060024751A1 (en) * 2004-06-03 2006-02-02 Fluidigm Corporation Scale-up methods and systems for performing the same
US7815868B1 (en) 2006-02-28 2010-10-19 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US7958906B2 (en) * 2006-04-11 2011-06-14 University Of South Florida Thermally induced single-use valves and method of use
US10752492B2 (en) 2014-04-01 2020-08-25 Agiltron, Inc. Microelectromechanical displacement structure and method for controlling displacement
JP7611892B2 (ja) 2019-07-26 2025-01-10 ラム リサーチ コーポレーション 半導体処理装置のための非エラストマ性、非ポリマ性、かつ非金属性の膜弁
DE102020115510A1 (de) 2020-06-10 2021-12-16 Bürkert Werke GmbH & Co. KG Ventil und Baugruppe mit einem Ventil

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59110967A (ja) * 1982-12-16 1984-06-27 Nec Corp 弁素子の製造方法
US4628576A (en) * 1985-02-21 1986-12-16 Ford Motor Company Method for fabricating a silicon valve
US4756508A (en) * 1985-02-21 1988-07-12 Ford Motor Company Silicon valve
US4647013A (en) * 1985-02-21 1987-03-03 Ford Motor Company Silicon valve
US5065978A (en) * 1988-04-27 1991-11-19 Dragerwerk Aktiengesellschaft Valve arrangement of microstructured components
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
DE3919876A1 (de) * 1989-06-19 1990-12-20 Bosch Gmbh Robert Mikroventil
US5069419A (en) * 1989-06-23 1991-12-03 Ic Sensors Inc. Semiconductor microactuator
WO1991001464A1 (fr) * 1989-07-19 1991-02-07 Westonbridge International Limited Clapet anti-retour, notamment pour micropompe et micropompe munie d'un tel clapet
US5238223A (en) * 1989-08-11 1993-08-24 Robert Bosch Gmbh Method of making a microvalve
DE3926647A1 (de) * 1989-08-11 1991-02-14 Bosch Gmbh Robert Verfahren zur herstellung eines mikroventils
US5058856A (en) * 1991-05-08 1991-10-22 Hewlett-Packard Company Thermally-actuated microminiature valve
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
US5333831A (en) * 1993-02-19 1994-08-02 Hewlett-Packard Company High performance micromachined valve orifice and seat

Also Published As

Publication number Publication date
DE59403742D1 (de) 1997-09-18
EP0700485A1 (de) 1996-03-13
US5681024A (en) 1997-10-28
JP3418741B2 (ja) 2003-06-23
DE4418450C2 (de) 1996-07-25
EP0700485B1 (de) 1997-08-13
JPH09501265A (ja) 1997-02-04
DE4418450A1 (de) 1994-12-01
WO1994028318A1 (de) 1994-12-08

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Legal Events

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