ATE158234T1 - Tintenstrahlaufzeichnungskopf, substrat dafür und tintenstrahlaufzeichnungsgerät - Google Patents

Tintenstrahlaufzeichnungskopf, substrat dafür und tintenstrahlaufzeichnungsgerät

Info

Publication number
ATE158234T1
ATE158234T1 AT93202570T AT93202570T ATE158234T1 AT E158234 T1 ATE158234 T1 AT E158234T1 AT 93202570 T AT93202570 T AT 93202570T AT 93202570 T AT93202570 T AT 93202570T AT E158234 T1 ATE158234 T1 AT E158234T1
Authority
AT
Austria
Prior art keywords
electrothermal transducers
inkjet recording
image
functional devices
electrode wiring
Prior art date
Application number
AT93202570T
Other languages
English (en)
Inventor
Hiroyuki Ishinaga
Asao Saito
Toshihiro Mori
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE158234T1 publication Critical patent/ATE158234T1/de

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14072Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/14129Layer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1604Production of bubble jet print heads of the edge shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1629Manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14379Edge shooter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/13Heads having an integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
  • Recording Measured Values (AREA)
AT93202570T 1990-01-25 1991-01-24 Tintenstrahlaufzeichnungskopf, substrat dafür und tintenstrahlaufzeichnungsgerät ATE158234T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1349090 1990-01-25
JP1348990 1990-01-25

Publications (1)

Publication Number Publication Date
ATE158234T1 true ATE158234T1 (de) 1997-10-15

Family

ID=26349304

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93202570T ATE158234T1 (de) 1990-01-25 1991-01-24 Tintenstrahlaufzeichnungskopf, substrat dafür und tintenstrahlaufzeichnungsgerät

Country Status (6)

Country Link
US (2) US5182577A (de)
EP (2) EP0441503B1 (de)
JP (1) JP2916006B2 (de)
AT (1) ATE158234T1 (de)
DE (2) DE69101648T2 (de)
ES (1) ES2051560T3 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE158234T1 (de) * 1990-01-25 1997-10-15 Canon Kk Tintenstrahlaufzeichnungskopf, substrat dafür und tintenstrahlaufzeichnungsgerät
CA2075097C (en) * 1991-08-02 2000-03-28 Hiroyuki Ishinaga Recording apparatus, recording head and substrate therefor
US5598189A (en) * 1993-09-07 1997-01-28 Hewlett-Packard Company Bipolar integrated ink jet printhead driver
US5660739A (en) * 1994-08-26 1997-08-26 Canon Kabushiki Kaisha Method of producing substrate for ink jet recording head, ink jet recording head and ink jet recording apparatus
JPH08118641A (ja) 1994-10-20 1996-05-14 Canon Inc インクジェットヘッド、インクジェットヘッドカートリッジ、インクジェット装置およびインクが再注入されたインクジェットヘッドカートリッジ用インク容器
JP3397473B2 (ja) * 1994-10-21 2003-04-14 キヤノン株式会社 液体噴射ヘッド用素子基板を用いた液体噴射ヘッド、該ヘッドを用いた液体噴射装置
JP3413063B2 (ja) 1996-07-09 2003-06-03 キヤノン株式会社 液体吐出方法及び液体吐出ヘッド
JP3652016B2 (ja) 1996-07-12 2005-05-25 キヤノン株式会社 液体吐出ヘッドおよび液体吐出方法
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
JPH11129483A (ja) 1997-07-03 1999-05-18 Canon Inc 液体吐出ヘッド用オリフィスプレートの製造方法、オリフィスプレート、該オリフィスプレートを有する液体吐出ヘッド及び液体吐出ヘッドの製造方法
US6494563B2 (en) 1997-12-25 2002-12-17 Canon Kabushiki Kaisha Ink jet element substrate and ink jet head that employs the substrate, and ink jet apparatus on which the head is mounted
US6286927B1 (en) 1997-12-25 2001-09-11 Canon Kabushiki Kaisha Ink jet element substrate and ink jet head that employs the substrate, and ink jet apparatus on which the head is mounted
US6213587B1 (en) 1999-07-19 2001-04-10 Lexmark International, Inc. Ink jet printhead having improved reliability
JP2001038908A (ja) 1999-07-27 2001-02-13 Canon Inc 液体吐出ヘッド、ヘッドカートリッジおよび液体吐出装置
JP2001138521A (ja) 1999-11-11 2001-05-22 Canon Inc インクジェット記録ヘッドおよび該記録ヘッドを用いたインクジェット記録装置
US6309053B1 (en) * 2000-07-24 2001-10-30 Hewlett-Packard Company Ink jet printhead having a ground bus that overlaps transistor active regions
AT412314B (de) * 2001-03-21 2004-12-27 Siemens Ag Oesterreich Verfahren und vorrichtung zum verbinden eines nach dem bluetooth standard arbeitenden gerätes mit einem datennetz
US6543883B1 (en) 2001-09-29 2003-04-08 Hewlett-Packard Company Fluid ejection device with drive circuitry proximate to heating element
US7152957B2 (en) * 2002-12-18 2006-12-26 Canon Kabushiki Kaisha Recording device board having a plurality of bumps for connecting an electrode pad and an electrode lead, liquid ejection head, and manufacturing method for the same
JP5679665B2 (ja) * 2009-02-06 2015-03-04 キヤノン株式会社 インクジェット記録ヘッド
JP5762104B2 (ja) 2011-04-15 2015-08-12 キヤノン株式会社 インクジェット記録ヘッド基板、インクジェット記録ヘッドおよびインクジェット記録装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099046A (en) * 1977-04-11 1978-07-04 Northern Telecom Limited Thermal printing device
AU531269B2 (en) * 1979-03-06 1983-08-18 Canon Kabushiki Kaisha Ink jet printer
JPS5772867A (en) * 1980-10-23 1982-05-07 Canon Inc Liquid injecting recording apparatus
US4429321A (en) * 1980-10-23 1984-01-31 Canon Kabushiki Kaisha Liquid jet recording device
FR2501443B1 (fr) * 1981-03-06 1985-06-28 Cit Alcatel Tete d'impression d'image
JPS6074644A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd Cmosゲ−トアレ−
JPH0679853B2 (ja) * 1983-12-09 1994-10-12 キヤノン株式会社 液体噴射装置
US4719477A (en) * 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
US4791440A (en) * 1987-05-01 1988-12-13 International Business Machine Corporation Thermal drop-on-demand ink jet print head
US5081474A (en) * 1988-07-04 1992-01-14 Canon Kabushiki Kaisha Recording head having multi-layer matrix wiring
US5212503A (en) * 1988-07-26 1993-05-18 Canon Kabushiki Kaisha Liquid jet recording head having a substrate with minimized electrode overlap
US5175565A (en) * 1988-07-26 1992-12-29 Canon Kabushiki Kaisha Ink jet substrate including plural temperature sensors and heaters
DE68925897T2 (de) * 1989-04-28 1996-10-02 Ibm Gate-Array-Zelle, bestehend aus FET's von verschiedener und optimierter Grösse
ATE158234T1 (de) * 1990-01-25 1997-10-15 Canon Kk Tintenstrahlaufzeichnungskopf, substrat dafür und tintenstrahlaufzeichnungsgerät

Also Published As

Publication number Publication date
JP2916006B2 (ja) 1999-07-05
EP0579338B1 (de) 1997-09-17
US6113220A (en) 2000-09-05
US5182577A (en) 1993-01-26
EP0441503A2 (de) 1991-08-14
DE69127707D1 (de) 1997-10-23
EP0441503B1 (de) 1994-04-13
DE69101648T2 (de) 1994-08-04
DE69101648D1 (de) 1994-05-19
ES2051560T3 (es) 1994-06-16
DE69127707T2 (de) 1998-01-29
EP0579338A1 (de) 1994-01-19
JPH04211953A (ja) 1992-08-03
EP0441503A3 (en) 1992-01-08

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties