ATE159587T1 - Verfahren und vorrichtung zur interferometrischen inspektion einer oberfläche eines objektes - Google Patents

Verfahren und vorrichtung zur interferometrischen inspektion einer oberfläche eines objektes

Info

Publication number
ATE159587T1
ATE159587T1 AT93913400T AT93913400T ATE159587T1 AT E159587 T1 ATE159587 T1 AT E159587T1 AT 93913400 T AT93913400 T AT 93913400T AT 93913400 T AT93913400 T AT 93913400T AT E159587 T1 ATE159587 T1 AT E159587T1
Authority
AT
Austria
Prior art keywords
image
obtains
inspecting
data
derived
Prior art date
Application number
AT93913400T
Other languages
English (en)
Inventor
Paul Christopher Montgomery
Jean-Pierre Fillard
Original Assignee
British Tech Group
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Tech Group filed Critical British Tech Group
Application granted granted Critical
Publication of ATE159587T1 publication Critical patent/ATE159587T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N2021/551—Retroreflectance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
AT93913400T 1992-06-22 1993-06-18 Verfahren und vorrichtung zur interferometrischen inspektion einer oberfläche eines objektes ATE159587T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929213159A GB9213159D0 (en) 1992-06-22 1992-06-22 Method of and apparatus for interferometrically inspecting a surface of an object

Publications (1)

Publication Number Publication Date
ATE159587T1 true ATE159587T1 (de) 1997-11-15

Family

ID=10717478

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93913400T ATE159587T1 (de) 1992-06-22 1993-06-18 Verfahren und vorrichtung zur interferometrischen inspektion einer oberfläche eines objektes

Country Status (8)

Country Link
EP (1) EP0647310B1 (de)
JP (1) JPH07508345A (de)
KR (1) KR950702304A (de)
AT (1) ATE159587T1 (de)
DE (1) DE69314795T2 (de)
GB (1) GB9213159D0 (de)
SG (1) SG48331A1 (de)
WO (1) WO1994000733A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5636020A (en) * 1995-04-27 1997-06-03 Lucent Technologies Inc. Zone analysis system and method for optimizing the performance of an inspection system for determining disparity between two surfaces
US5543915A (en) * 1995-04-27 1996-08-06 At&T Corp. Autofocusing system and method for positioning an interferometric fringe over a target in an image
US5898494A (en) * 1995-04-27 1999-04-27 Lucent Technologies Inc. Automatic inspection system and method for contactlessly measuring the disparity between two surfaces
US5535002A (en) * 1995-04-27 1996-07-09 At&T Corp. Band matching system and method for enabling accurate determination of a disparity between two surfaces using an interferometer
US5600439A (en) * 1995-04-27 1997-02-04 Lucent Technologies Inc. Self-calibration system and method for determining the adequacy of an interferometer angle and surface curvatures in an inspection system for determining disparity between two surfaces
US6724489B2 (en) * 2000-09-22 2004-04-20 Daniel Freifeld Three dimensional scanning camera
US7158235B2 (en) 2001-12-05 2007-01-02 Rudolph Technologies, Inc. System and method for inspection using white light interferometry
WO2004079294A2 (en) * 2003-03-06 2004-09-16 Zygo Corporation Characterizing and profiling complex surface structures using scanning interferometry
EP1604168B1 (de) * 2003-03-06 2011-07-27 Zygo Corporation Profilaufnahme von komplexen oberflächenstrukturen unter verwendung von abtastinterferometrie
GB0415766D0 (en) * 2004-07-14 2004-08-18 Taylor Hobson Ltd Apparatus for and a method of determining a characteristic of a layer or layers
DE102007018951B3 (de) * 2007-04-21 2009-01-02 Carl Mahr Holding Gmbh Modulares Messkopfsystem
KR100927865B1 (ko) * 2008-01-03 2009-11-23 서강대학교산학협력단 Ｉ／ｑ 간섭계와 스캐닝 방법을 이용한 복합 기능 현미경
US8248617B2 (en) 2008-04-22 2012-08-21 Zygo Corporation Interferometer for overlay measurements
US8120781B2 (en) 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
US8189202B2 (en) 2009-08-04 2012-05-29 Zygo Corporation Interferometer for determining overlay errors
EP2314982B1 (de) * 2009-10-20 2020-12-02 Mitutoyo Corporation Verfahren und Vorrichtung zur Bestimmung der Höhe einer Reihe räumlicher Positionen auf einer Probe, die ein Profil einer Oberfläche mithilfe der Weißlicht-Interferometrie definieren
JP5607392B2 (ja) 2010-03-12 2014-10-15 株式会社ミツトヨ 光干渉測定装置
CN119043192B (zh) * 2024-10-29 2025-01-28 温州东泰树脂有限责任公司 一种水性聚氨酯薄膜厚度检测方法及系统

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4387994A (en) * 1980-02-04 1983-06-14 Balasubramanian N Optical system for surface topography measurement
GB2191855A (en) * 1986-05-07 1987-12-23 Univ London Method and apparatus for detecting reflection sites
US4791584A (en) * 1986-10-15 1988-12-13 Eastman Kodak Company Sub-nyquist interferometry

Also Published As

Publication number Publication date
SG48331A1 (en) 1998-04-17
DE69314795D1 (de) 1997-11-27
EP0647310B1 (de) 1997-10-22
GB9213159D0 (en) 1992-08-05
WO1994000733A1 (en) 1994-01-06
EP0647310A1 (de) 1995-04-12
KR950702304A (ko) 1995-06-19
JPH07508345A (ja) 1995-09-14
DE69314795T2 (de) 1998-02-19

Similar Documents

Publication Publication Date Title
ATE159587T1 (de) Verfahren und vorrichtung zur interferometrischen inspektion einer oberfläche eines objektes
DE3781197D1 (de) Verfahren und vorrichtung mit einem zweistrahleninterferenzmikroskop zur untersuchung von integrierten schaltungen und dergleichen.
DE50211146D1 (de) Verfahren und vorrichtung zum messen einer probe mit hilfe eines rastersondenmikroskops
DE59710311D1 (de) Verfahren und vorrichtung zum messen des verlaufs reflektierender oberflächen
HUP9901704A2 (hu) Berendezés és eljárás tartályok vizsgálatára
WO2002029886A3 (en) Method and apparatus for substrate surface inspection using spectral profiling techniques
Ahadi et al. Windowed Fourier transform as an essential digital interferometry tool to study coupled heat and mass transfer
Ma et al. Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry
JP3934490B2 (ja) 低コヒーレント干渉縞解析方法
ATE219239T1 (de) Verfahren und vorrichtung zum messen der deformation eines mechanischen prüfstücks
Li et al. Vibration-insensitive low coherence interferometer (LCI) for the measurement of technical surfaces
ATE78917T1 (de) Verfahren und vorrichtung zum detektieren und messen einer physikalischen groesse.
JP6031697B1 (ja) 検査装置、検査方法及び半導体装置の製造方法
JP2000002514A (ja) 膜厚測定装置及びアライメントセンサ並びにアライメント装置
Spagnolo et al. Digital speckle correlation for on-line real-time measurement
Pieralli Statistical estimation of point spread function applied to scanning near-field optical microscopy
US20190101489A1 (en) Method and Apparatus for Simultaneously Measuring 3Dimensional Structures and Spectral Content of Said Structures
Diwan et al. A new approach for measurement of wire diameter by optical diffraction
Alam et al. Real time surface measurement technique in a wide range of wavelengths spectrum
KR100198527B1 (ko) 규칙적 미세패턴의 결함 검사장치
Montgomery et al. Three-dimensional nanoprofiling of semiconductor surfaces
Moreland et al. Real-Time High Accuracy Measurements Utilizing Line-Scan Image Sensors
Kalms et al. Inverse projected fringe technique
JP2017181323A (ja) 走査型白色干渉顕微鏡を用いた三次元形状計測方法
SU766225A1 (ru) Способ измерени шероховатости поверхности

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties